CN204163963U - A kind of silicon chip wafer lapping machine novel peristaltic pump - Google Patents
A kind of silicon chip wafer lapping machine novel peristaltic pump Download PDFInfo
- Publication number
- CN204163963U CN204163963U CN201420505647.5U CN201420505647U CN204163963U CN 204163963 U CN204163963 U CN 204163963U CN 201420505647 U CN201420505647 U CN 201420505647U CN 204163963 U CN204163963 U CN 204163963U
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- plate
- pump
- end cap
- base
- depression bar
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Abstract
The utility model provides a kind of silicon chip wafer lapping machine novel peristaltic pump, comprise driver element, base, movable stand, adjustment plate, depression bar, depression bar cap, pump head and pump case, driver element drives pump head running, under making the extruding of pump line roller in pump head, stablize pumping mortar, when using the pump line of different size, can by the adjustment of movable stand, the crush of accurate control pump line, guarantees to realize identical transmission precision in different range of flows.The advantage that the utility model is created is: a pump head can extrude two pump line pumping mortars simultaneously, increase the scope of Flow-rate adjustment, be conducive to meeting the demand of technique to different flow, can run under the comparatively slow-speed of revolution and can reach regulation flow, reduce the degree of wear of pump head and pump line.
Description
Technical field
The invention belongs to peristaltic pump field, especially relates to the novel peristaltic pump used in a kind of silicon chip wafer lapping machine.
Background technique
The effect of wafer lapping machine is the method by grinding, the difference damage produced when removing preorder slicing processes and laser-marking.The effect of peristaltic pump is grinding process pump abrasive sand, and by regulating peristaltic pump motor speed, the flow of adjustment pumping, to meet technological requirement.
The medical peristaltic pump of the many employings of existing wafer lapping machine, and Environmental Conditions, working strength, pumped medium is all different from medical peristaltic pump, particularly in order to reach the flow of regulation, usually makes pump head operate at high speeds, pump head is caused often to damage, electrical machmary maintenance rate increases, and affects manufacturing efficiency, cost of production is increased.
Need badly in actual production at present and a kind ofly under lower rotating speed, just can export the peristaltic pump needing flow, thus the wearing and tearing of minimizing pump head, reach stable using effect, and lower maintenance rate.
Summary of the invention
The problem that the invention will solve be to provide a kind of can the silicon chip wafer lapping machine peristaltic pump of amount of exports flow setting type at the low rotational speed.
For solving the problems of the technologies described above, the technological scheme that the invention adopts is: a kind of silicon chip wafer lapping machine novel peristaltic pump, comprises driver element, base, movable stand, adjustment plate, depression bar, depression bar cap, pump head and pump case;
Described driver element comprises speed-adjustable motor and speed reducer;
Described base comprises base vertical plate, base plate, pipe fixed block and pillar, and described base plate comprises the first base plate, the second base plate; Described base vertical plate is provided with center hole and two elongated holes relative to center hole symmetry; Described first base plate is fixed on base vertical plate side, and described second base plate is fixed on base vertical plate opposite side, and described base plate lower surface is provided with pillar; Described pipe fixed block is fixed on the second sidewall of the bottom plate;
Described adjustment plate is L-type support, comprises long limit support and minor face support, and described long limit support is provided with slotted eye, and one end of described long limit support is connected with one end of minor face support;
Described pump head comprises support plate, end cap and roller, and described end cap comprises the first end cap and the second end cap; One end of described roller is connected with the first end cap, and the other end of described roller is connected with the second end cap, and the center of circle of described first end cap and the second end cap point-blank, and described support plate is connected with the first end cap;
Described pump case bi-side are respectively provided with one groove, and described pump case front and back is respectively provided with one section of circular arc matched with pump head end cap;
The output shaft of described speed-adjustable motor is connected with speed reducer, described speed reducer output shaft is connected with the second end cap of pump head through the center hole in base vertical plate, described driver element is fixed on the first base plate, the support plate of described pump head is fixed on the second base plate, described movable stand is fixed in the base vertical plate of the second base plate side through the elongated hole in base vertical plate, described movable stand is provided with two blocks of adjustment plates, the minor face support-moving frame wherein adjusting plate described in every block connects, described pump case fixes between two blocks of adjustment plates, described depression bar is from top to bottom successively through pump case groove and the slotted eye on the long limit support of adjustment plate, fixed by fastener with the long limit support of adjustment plate bottom described depression bar, depression bar head is connected with depression bar cap.
Preferably, described pump head is provided with three rollers, and roller is uniformly distributed on the concentric circle of end cap place plane around the center of circle of end cap.
Preferably, depression bar head and the connection of depression bar cap are for being threaded.
Preferably, described pipe fixed block is provided with two pieces, and two pieces of described pipe fixed blocks are separately fixed on two sidewalls that the second base plate parallels, and every block pipe fixed block is provided with at least one pore.
The advantage that the invention has and good effect are: first, and the invention can run under the comparatively slow-speed of revolution can reach regulation flow, reduces the degree of wear of pump head and pump line; Secondly, brand-new Design of Mechanical Structure, can connect two peristaltic tubes, be conducive to mortar being uniformly distributed on mill, pump case is for the optimal design of its internal surface circular arc simultaneously, can make pump line under the extruding of pump head, stable pumping mortar, when using the pump line of different size, by the adjustment of movable stand, the crush of accurate control pump line, guarantees within the scope of different flow, realize identical transmission precision; The design of wide roller, makes a pump head can extrude two pump line pumping mortars simultaneously, increases the scope of Flow-rate adjustment, be conducive to meeting the demand of technique to different flow.
Accompanying drawing explanation
Fig. 1 is the invention general assembly drawing;
Fig. 2 is the invention general assembly decomposition view;
Fig. 3 is pump head structure schematic diagram;
Fig. 4 is pump shell structure schematic diagram;
Fig. 5 is part understructure schematic diagram;
In figure: 1-speed-adjustable motor, 2-speed reducer, 3-base, 31-base vertical plate, 311 center holes, 312-elongated hole, 32-first base plate, 33-second base plate, 34-pipe fixed block, 35-pillar, 4-movable stand, 5-adjusts plate, 51-long limit support, 52-minor face support, 6-depression bar, 7-depression bar cap, 8-pump head, 81-support plate, 82-first end cap, 83-second end cap, 84-roller, 9-pump case, 91-groove.
Embodiment
Elaborate below in conjunction with the specific embodiment of accompanying drawing to the invention.
As shown in Figure 1 and Figure 2, a kind of silicon chip wafer lapping machine novel peristaltic pump, comprises driver element, base 3, movable stand 4, adjustment plate 5, depression bar 6, depression bar cap 7, pump head 8 and pump case 9; Described driver element comprises speed-adjustable motor 1 and speed reducer 2; Described base 3 comprises base vertical plate 31, base plate, pipe fixed block 34 and pillar 35, and described base plate comprises the first base plate 32, second base plate 33; Described base vertical plate 31 is provided with center hole 311 and two elongated holes 312 relative to center hole 311 symmetry; Described first base plate 32 is fixed on base vertical plate 31 side, and described second base plate 33 is fixed on base vertical plate 31 opposite side, and described base plate lower surface is provided with pillar 35; Described pipe fixed block 34 is fixed on the second base plate 33 sidewall; Two pieces of described pipe fixed blocks 34 are separately fixed on two sidewalls that the second base plate 33 is parallel to each other, and every block pipe fixed block 34 is provided with at least one pore, can be two pores specifically; Described adjustment plate 5 is L-type support, comprises long limit support 51 and minor face support 52, and described long limit support 51 is provided with slotted eye, and one end of described long limit support 51 is connected with one end of minor face support 52;
As shown in Figure 3, described pump head 8 comprises support plate 81, end cap and roller 84, and described end cap comprises the first end cap 82 and the second end cap 83; One end of described roller 84 is connected with the first end cap 82, and the other end of described roller 84 is connected with the second end cap 83, and the center of circle of described first end cap 82 and the second end cap 83 point-blank, and described support plate 81 is connected with the first end cap 82.Described pump head 8 can be provided with three rollers 84, and roller 84 is uniformly distributed on the concentric circle of end cap place plane around the center of circle of end cap.
As shown in Figure IV, described pump case 9 bi-side are respectively provided with one groove 91, and described pump case 9 front and back is respectively provided with one section of circular arc matched with pump head 8 end cap.
The output shaft of described speed-adjustable motor 1 is connected with speed reducer 2, described speed reducer 2 output shaft is connected with the second end cap 83 of pump head 8 through the center hole 311 in base vertical plate 31, described driver element is fixed on the first base plate 32, the support plate 81 of described pump head 8 is fixed on the second base plate 33, described movable stand 4 is fixed in the base vertical plate 31 of the second base plate 33 side through the elongated hole 312 in base vertical plate 5, described movable stand 4 is provided with two blocks of adjustment plates 5, minor face support 52 movable stand 4 wherein adjusting plate 5 described in every block connects, described movable stand 4 is connected by Type of Welding with adjustment plate 5, described pump case 9 fixes between two blocks of adjustment plates 5, described depression bar 6 is from top to bottom successively through pump case 9 groove 91 and the slotted eye on the long limit support 51 of adjustment plate 5, fixed by fastener with the long limit support 51 of adjustment plate 5 bottom described depression bar 6, depression bar 6 head is threaded with depression bar cap 7.
Specific works principle is as follows: drive pump head 8 pairs of pump lines to hocket by speed-adjustable motor 1 and speed reducer 2 and extrude and discharge pumping fluid, controlling uninterrupted by speed regulator speed governing.
Specific works process is as follows: be first arranged on by pump line on pipe fixed block 34, starting driver element drives pump head 8 to operate, under making the extruding of pump line roller 84 in pump head 8, stablize pumping mortar, when using the pump line of different size, by the adjustment of movable stand 4, accurately can control the crush of pump line, guarantee to realize identical transmission precision in different range of flows.In this programme, movable stand 4 can move up and down along the elongated hole in base vertical plate 31, pump case 9 fix two adjustment plates 5 between and adjustment plate 5 be fixed on movable stand 4, fixed by depression bar 6 and depression bar cap 7 again, pump case 9 is integrated with movable stand 4 one-tenth, can moves with movable stand 4.Pipe fixed block 34 is provided with two pump line holes, and roller 84 adopts the design of wide roller simultaneously, can connect two pump lines simultaneously, be conducive to mortar being uniformly distributed on mill.Pump case 9 can adopt PPS material, has very strong wear resistance and superior mechanical property, the designed arc-shaped appearance of its front and rear surfaces, can make pump line under the extruding of pump head 8, stablize pumping mortar.
Above an embodiment of the invention has been described in detail, but described content being only the preferred embodiment of the invention, the practical range for limiting the invention can not being considered to.All equalization changes done according to the invention application range with improve, within the patent covering scope that still all should belong to the invention.
Claims (4)
1. a silicon chip wafer lapping machine novel peristaltic pump, is characterized in that: comprise driver element, base, movable stand, adjustment plate, depression bar, depression bar cap, pump head and pump case;
Described driver element comprises speed-adjustable motor and speed reducer;
Described base comprises base vertical plate, base plate, pipe fixed block and pillar, and described base plate comprises the first base plate, the second base plate; Described base vertical plate is provided with center hole and two elongated holes relative to center hole symmetry; Described first base plate is fixed on base vertical plate side, and described second base plate is fixed on base vertical plate opposite side, and described base plate lower surface is provided with pillar; Described pipe fixed block is fixed on the second sidewall of the bottom plate;
Described adjustment plate is L-type support, comprises long limit support and minor face support, and described long limit support is provided with slotted eye, and one end of described long limit support is connected with one end of minor face support;
Described pump head comprises support plate, end cap and roller, and described end cap comprises the first end cap and the second end cap; One end of described roller is connected with the first end cap, and the other end of described roller is connected with the second end cap, and the center of circle of described first end cap and the second end cap point-blank, and described support plate is connected with the first end cap;
Described pump case bi-side are respectively provided with one groove, and described pump case front and back is respectively provided with one section of circular arc matched with pump head end cap;
The output shaft of described speed-adjustable motor is connected with speed reducer, described speed reducer output shaft is connected with the second end cap of pump head through the center hole in base vertical plate, described driver element is fixed on the first base plate, the support plate of described pump head is fixed on the second base plate, described movable stand is fixed in the base vertical plate of the second base plate side through the elongated hole in base vertical plate, described movable stand is provided with two blocks of adjustment plates, the minor face support-moving frame wherein adjusting plate described in every block connects, described pump case fixes between two blocks of adjustment plates, described depression bar is from top to bottom successively through pump case groove and the slotted eye on the long limit support of adjustment plate, fixed by fastener with the long limit support of adjustment plate bottom described depression bar, depression bar head is connected with depression bar cap.
2. a kind of silicon chip wafer lapping machine novel peristaltic pump according to claim 1, is characterized in that: described pump head is provided with three rollers, and roller is uniformly distributed on the concentric circle of end cap place plane around the center of circle of end cap.
3. a kind of silicon chip wafer lapping machine novel peristaltic pump according to claim 1, is characterized in that: the connection of described depression bar head and depression bar cap is for being threaded.
4. a kind of silicon chip wafer lapping machine novel peristaltic pump according to claim 1, it is characterized in that: described pipe fixed block is provided with two pieces, two pieces of described pipe fixed blocks are separately fixed on two sidewalls that the second base plate parallels, and every block pipe fixed block is provided with at least one pore.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420505647.5U CN204163963U (en) | 2014-09-03 | 2014-09-03 | A kind of silicon chip wafer lapping machine novel peristaltic pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420505647.5U CN204163963U (en) | 2014-09-03 | 2014-09-03 | A kind of silicon chip wafer lapping machine novel peristaltic pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204163963U true CN204163963U (en) | 2015-02-18 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420505647.5U Expired - Fee Related CN204163963U (en) | 2014-09-03 | 2014-09-03 | A kind of silicon chip wafer lapping machine novel peristaltic pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204163963U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104772705A (en) * | 2015-03-27 | 2015-07-15 | 苏州赫瑞特电子专用设备科技有限公司 | Mechanical peristaltic pump mechanism for liquid supply of double-sided polishing machine |
| CN110410301A (en) * | 2019-08-01 | 2019-11-05 | 上海佳谐精密模具有限公司 | A kind of peristaltic pump |
| CN110714905A (en) * | 2019-10-28 | 2020-01-21 | 张文波 | Manual variable peristaltic pump |
-
2014
- 2014-09-03 CN CN201420505647.5U patent/CN204163963U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104772705A (en) * | 2015-03-27 | 2015-07-15 | 苏州赫瑞特电子专用设备科技有限公司 | Mechanical peristaltic pump mechanism for liquid supply of double-sided polishing machine |
| CN110410301A (en) * | 2019-08-01 | 2019-11-05 | 上海佳谐精密模具有限公司 | A kind of peristaltic pump |
| CN110714905A (en) * | 2019-10-28 | 2020-01-21 | 张文波 | Manual variable peristaltic pump |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170113 Address after: 300384 the Binhai New Area of Tianjin Huayuan Industrial Zone (outer ring) Haitai Branch Street No. 3 Patentee after: Tianjin ring Energy Technology Co., Ltd. Address before: 300384 in Tianjin Binhai high tech Zone Huayuan Industrial Zone (outer ring) Haitai Road No. 12 Patentee before: Tianjin Zhonghuan Semiconductor Joint-Stock Co., Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 300384 Tianjin Binhai high tech Zone Huayuan Industrial Area (outside the ring) Hainai Hua Ke Street 3 Patentee after: Tianjin huanou international Amperex Technology Limited Address before: 300384 Tianjin Binhai high tech Zone Huayuan Industrial Area (outside the ring) Hainai Hua Ke Street 3 Patentee before: Tianjin ring Energy Technology Co., Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150218 Termination date: 20200903 |