CN204156496U - Cable break-make in a kind of equipment running process detects protective device - Google Patents

Cable break-make in a kind of equipment running process detects protective device Download PDF

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Publication number
CN204156496U
CN204156496U CN201420423284.0U CN201420423284U CN204156496U CN 204156496 U CN204156496 U CN 204156496U CN 201420423284 U CN201420423284 U CN 201420423284U CN 204156496 U CN204156496 U CN 204156496U
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signal
loop
detection signal
connector
feedback signal
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CN201420423284.0U
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孔莉菲
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Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Micro Electronics Equipment Co Ltd
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Abstract

The cable break-make that the utility model relates in a kind of equipment running process detects protective device; comprise signal source, detection signal loop and detection signal processing unit; described signal source sends signal to the one end in described detection signal loop; conduction through described detection signal loop is passed to the other end in described loop; described detection signal processing unit receives described transmission signal from the other end in described loop, and described detection signal loop is made up of the connector and connection cable connecting actuator.The utility model utilizes the connector and connection cable composition feedback loop that connect actuator, detects the connection status of connector in real time, saves the time of fault detect; The utility model is simple, does not have extra restriction to the connector specification of feedback loop.

Description

Cable break-make in a kind of equipment running process detects protective device
Technical field
The utility model relates to a kind of equipment fault checkout gear, and the cable break-make particularly related in a kind of equipment running process detects protective device.
Background technology
In Optical Coatings for Photolithography, consider mechanical package and the problem that Site Detection point is set, the motor of mask aligner, transducer, grating scale and board etc. (being referred to as below " actuator ") usually all can being connected reeve row through connector repeatedly, just can obtain the data of actuator at control terminal.In the running of mask aligner, the data that actuator sends cannot be read sometimes, or cannot power normally to actuator.Cause the reason of this phenomenon may be terminal control software generation problem, may be that actuator itself damages, also may be because cable-to-cable connector loose contact, or connector has disconnected etc., and many reasons causes.The processing method running into problems at present investigates one by one above possibility, check item is the connection of cable plug at first, in view of the mechanical realization of mask aligner is very complicated, and limited space, a lot of connector to slot put very cunning, need to remove some mechanical part, pierce narrow space by tester again to detect, not simultaneously easily, also extremely lose time.If the connection fault that last testing result display is not connector causes Signal transmissions fault and power supply trouble, not only miss the very first time of dealing with problems, and increase the workload of mechanical personnel and electric testing staff.
Simultaneously, represent with regard to current technical documentation investigation, mostly being in the processing mode that machine running process breaks for connector uses buzzer or LED to warn, but without any power-off safeguard procedures, this may cause the personal injury of testing staff in testing process, also may cause due at connector gap, connector contacts other conductive materials and is short-circuited, and equipment is caused to the consequence of damage.Have requirement to the connector plug-in unit specification of detection signal input, flexibility ratio is not high simultaneously.
Therefore; how to provide a kind of and can confirm whether the Signal transmissions fault of equipment in running and power supply trouble are because cable-to-cable connector loose contact or open circuit cause in the very first time, and the cable break-make implementing power-off protection to this circuit when connector disconnects detects protective device is those skilled in the art's technical problems urgently to be resolved hurrily.
Utility model content
The utility model provides the cable break-make in a kind of equipment running process to detect protective device; can confirm whether the Signal transmissions fault of equipment in running and power supply trouble are because cable-to-cable connector loose contact or open circuit cause in the very first time, and when connector disconnects, power-off protection be implemented to this circuit.
For solving the problems of the technologies described above; the utility model provides the cable break-make in a kind of equipment running process to detect protective device; comprise signal source, detection signal loop and detection signal processing unit; described signal source sends signal to the one end in described detection signal loop; conduction through described detection signal loop is passed to the other end in described loop; described detection signal processing unit receives described transmission signal from the other end in described loop, and described detection signal loop is made up of the connector and connection cable connecting actuator.
Preferably, near two pin short circuits untapped in the described connector of actuator, in described cable, untapped two pins in 2 connectors guided respectively into by untapped 2 lines, and the connector of described actuator and the connector of of described cable coordinate to patch and be connected.
Preferably, described detection signal processing unit comprises: the feedback signal reception module connected successively, feedback signal storage module, feedback signal control treatment module and indicator light.
Preferably, the analog signal that described detection signal loop detects to the other end in described detection signal loop, and is converted to digital signal by described feedback signal reception model calling.
Preferably, described digital signal transfers to described feedback signal control treatment module by described feedback signal storage module.
Preferably, described feedback signal control treatment module reads the information in described detection signal loop, and carries out analyzing and processing to this information; Information after process is indicated by described indicator light.
Preferably, actuator corresponding one group of interconnective described feedback signal reception module, described feedback signal storage module, described feedback signal control treatment module and described indicator light.
Preferably, described detection signal processing unit also comprises: feedback signal human-machine operation module and actuator power supply signal control module, the input of described feedback signal human-machine operation module is connected to described feedback signal control treatment module, the output of described feedback signal human-machine operation module is connected to described actuator power supply signal control module and signal source, and the output of described actuator power supply signal control module is connected to the feeder ear of described actuator.
Preferably, the information in detection signal loop that described feedback signal control treatment module reads is divided into three kinds: read continuous print high level signal, then the connector of actuation means is connected firmly; Read the low and high level signal of checker, then the connector bad connection of actuation means; Read continuous print low level signal, then there is open circuit in the connector of actuation means.
Compared with prior art, the utility model has the following advantages:
1. can there are data and cannot to read and cannot under actuator electric power thus supplied in the utility model in actuator running, and the very first time is determined or whether the reason of getting rid of initiating failure is cable-to-cable connector connection fault.Thus accelerate the investigation speed of problem, increase work efficiency, reduce unnecessary workload;
2. utilize the connector connecting actuator and connection cable to form detection signal loop, connector just can be found immediately once loose contact, so improve the efficiency of pinpointing the problems, the vacant pin utilance of connector is maximized;
3. the utility model is simple, does not have extra restriction to the connector specification of feedback loop;
4. the utility model is detecting under the connector generation open circuit conditions that cable connects, and can implement power-off protection, well prevent the property loss that personal injury and device damage are brought to open circuit place.
Accompanying drawing explanation
Fig. 1 is the structured flowchart of the cable break-make detection protective device in the equipment running process of the utility model one embodiment;
Fig. 2 is the schematic diagram that the cable break-make in the equipment running process of the utility model one embodiment detects connector pin composition detection signal loop in protective device;
Fig. 3 is the block diagram of detection signal processing unit in the cable break-make detection protective device in the equipment running process of the utility model one embodiment.
In figure: 10-signal source, 20-detection signal loop, 30-detection signal processing unit, 31-feedback signal reception module, 32-feedback signal storage module, 33-feedback signal control treatment module, 34-indicator light, 35-feedback signal human-machine operation module, 36-actuator power supply signal control module, 40-actuator, 41-cable, 42-connector.
Embodiment
For enabling above-mentioned purpose of the present utility model, feature and advantage more clear understandable, below in conjunction with accompanying drawing, embodiment of the present utility model is described in detail.It should be noted that, the utility model accompanying drawing all adopts the form of simplification and all uses non-ratio accurately, only in order to object that is convenient, aid illustration the utility model embodiment lucidly.
Please refer to Fig. 1 to Fig. 3, cable break-make in the equipment running process that the utility model provides detects protective device, comprise: signal source 10, detection signal loop 20 and detection signal processing unit 30, described signal source 10 sends signal to described detection signal loop 20, conduction through described detection signal loop 20 is passed to described detection signal processing unit 30, that is, when the signal source 10 that described detection signal processing unit 30 receives is sent to Information abnormity, illustrate that described detection signal loop 20 is in abnormality, guarantee that whether reason that operating personnel can determine or get rid of initiating failure the very first time is that the connector 42 of cable 41 connects fault and causes.Thus accelerate the investigation speed of problem, increase work efficiency, reduce unnecessary workload.The loop of detection signal described in the utility model 20 by connect actuator 40 connector 42 (generally for outermost edges two pin a and b) and connection cable form, please emphasis with reference to figure 2, wherein pin a and pin b is generally two pins of this connector 42 outermost edges, together with wire corresponding in cable 41, in order to communications signals source 10 and detection signal processing unit 30; Between pin c to pin d, all pins (comprising pin c and pin d) of (as shown in Figure 2) are in order to the power supply of actuator 40 itself and Signal transmissions.Like this, if connector 42 is once loosen, that disengage at first is exactly generally pin a and b of outermost edges, so improve the efficiency of pinpointing the problems, the utilance of the vacant pin of connector 42 is maximized.
Preferably, asking emphasis with reference to figure 1, near two pin short circuits untapped in the connector 42 of actuator 40, is two pin a and the b short circuit of outermost edges in the present embodiment.Particularly, in described cable 41, untapped two pins of 2 connectors 42 li guided respectively into by untapped 2 lines, the connector of described actuator 40 coordinates to patch with the connector of of described cable 41 and is connected, the connected mode in described detection signal loop 20 is: be connected with pin a by the pin a in the connector 42 at each root cable 41 two ends in the control loop of actuator 40, pin b is connected with pin b.Closest in the connector 42 of actuator 40, need its pin a and pin b to couple together, finally form loop.
Preferably, please emphasis with reference to figure 3, described detection signal processing unit 30 comprises: the feedback signal reception module 31 connected successively, feedback signal storage module 32, feedback signal control treatment module 33 and indicator light 34, described feedback signal reception module 31 is connected to the other end in described detection signal loop 20, and the analog signal that described detection signal loop 20 detects is converted to digital signal; Described digital signal transfers to described feedback signal control treatment module 33 by described feedback signal storage module 32; Described feedback signal control treatment module 33 reads the information in described detection signal loop 20, and carries out analyzing and processing to this information; Information after process is indicated by described indicator light 34.The course of work that whole cable break-make detects protective device is as follows:
Signal source 10 provides signal source for whole piece detection signal loop 20, the real data obtained after being sent by feedback signal reception module 31 Received signal strength source 10, and convert thereof into can be fed signal storage module 32 receive and the information type stored, in advance program composition is carried out to described feedback signal control treatment module 33, make program in feedback signal control treatment module 33 to the data analysis process in feedback signal storage module 32, draw the connection status in detection signal loop 20, and be finally sent in indicator light 34 and show;
The major function of described feedback signal reception module 31 be in order to by the actual signal data detected by A/D translation interface, analog signal is converted to can be fed signal storage module 32 receive and storable digital signal;
Described feedback signal storage module 32 as the register of digital signal, and to the continual information providing live signal of feedback signal control treatment module 33;
The digital information in feedback signal storage module 32 is read in the effect of described feedback signal control treatment module 33, these digital informations is carried out analyzing and processing, and result is sent to indicator light 34.
Preferably, please continue to refer to Fig. 3, the corresponding one group of interconnective described feedback signal reception module 31 of actuator 40, described feedback signal storage module 32, described feedback signal control treatment module 33 and a described indicator light 34, that is, each actuator 40 needs corresponding one group of detection signal, and show separately, such circuit is comparatively simple, is also convenient to personal observations, if share same detection signal, data are complicated, and stability is low.
Preferably, please continue to refer to Fig. 3, described detection signal processing unit 30 also comprises: feedback signal human-machine operation module 35 and actuator power supply signal control module 36, the input of described feedback signal human-machine operation module 35 is connected to described feedback signal control treatment module 33, the output of described feedback signal human-machine operation module 35 is connected to described actuator power supply signal control module 36 and signal source 10, and the output of described actuator power supply signal control module 36 is connected to the feeder ear of described actuator 40.Abnormal when detecting that the connection line of certain actuator 40 occurs; operating personnel are arranged by described feedback signal human-machine operation module 35; the signal source 10 of the connection line and correspondence that control this actuator 40 by described actuator power supply signal control module 36 is cut off; implement power-off protection, well prevent the property loss that personal injury and device damage are brought.
Preferably, the information in the detection signal loop 20 that described feedback signal control treatment module 33 reads is divided into three kinds: read continuous print high level signal, then the connector 42 of actuation means 40 is connected firmly; Read the low and high level signal of checker, then connector 42 bad connection of actuation means 40; Read continuous print low level signal, then there is open circuit in the connector 42 of actuation means 40.Particularly, the information in feedback signal storage module 32 is read in the interface that feedback signal control treatment module 33 is connected with feedback signal storage module 32, the data of 3 kinds of situations can be obtained: the first situation in a scan period, continuous print high level signal is read, i.e. digital signal " 1 " in a scan period; The second situation, reads the low and high level signal alternately occurred in a scan period, i.e. the digital signal " 1 " of alternately outlet and " 0 "; The third situation, reads continuous print low level signal in a scan period, i.e. digital signal " 0 ".When reading the first situation, represent that detection signal connects normal, i.e. connector 42 in the control loop of actuator 40 is connected firmly, and whole piece circuit Signal transmissions is smooth and easy; When reading the second situation, representing detection signal bad connection, i.e. there is the phenomenon of loose contact in the connector 42 in the control loop of actuator 40; When reading the third situation, representing that detection signal interrupts, i.e. there is breaking phenomena in the connector 42 in the control loop of actuator 40.Obtained comparative result can be fed back to feedback signal human-machine operation module 35 and indicator light 34 by feedback signal control treatment module 33, preferably, described indicator light 34 can adopt bi-colour LED, when result is the first situation, represent that the loop of cable 41 connects normal, green indicating lamp Chang Liang, feedback signal human-machine operation module 35 is not done and is reacted; When result is the second situation, represent that in the loop of cable 41, connector 42 comes in contact bad, green indicating lamp glimmers, feedback signal human-machine operation module 35 can the prompting of display " connector bad connection " on operation interface personnel, and provides the application whether to the loop power-off of this cable 41; When result is the third, represent that in the loop of cable 41, open circuit occurs connector 42, green indicating lamp goes out, red led Chang Liang, feedback signal human-machine operation module 35 can the prompting of display on operation interface " connector connect disconnect " personnel, and provides the application whether loop of this cable 41 being carried out to power-off.After controllers is made and is carried out the operational order of power-off to the loop of cable 41 in feedback signal human-machine operation module 35, can cut off to the power supply of actuator 40, data in feedback signal storage module 32 are emptied by the signal source 10 also corresponding cut-out of this cable 41 correspondence simultaneously.After problem investigation terminates, again recover the supply of power supply to actuator 40 and signal source 10, restart the monitoring to this circuit.
In sum; cable break-make in a kind of equipment running process that the utility model provides detects protective device; this equipment comprises signal source 10, detection signal loop 20 and detection signal processing unit 30; described signal source 10 sends signal to the one end in described detection signal loop 20; conduction through described detection signal loop 20 is passed to the other end in described loop; described detection signal processing unit 30 receives described transmission signal from the other end in described loop, and described detection signal loop 20 is made up of the connector 42 and connection cable connecting actuator 40.The utility model utilizes two pin a and b and the connection cable composition feedback loop of the outermost edges of the connector 42 connecting actuator 40, detects the connection status of connector 42 in real time, saves the time of fault detect; The utility model is simple, does not have extra restriction to connector 42 specification of feedback loop.
Obviously, those skilled in the art can carry out various change and modification to utility model and not depart from spirit and scope of the present utility model.Like this, if these amendments of the present utility model and modification belong within the scope of the utility model claim and equivalent technologies thereof, then the utility model is also intended to comprise these change and modification.

Claims (9)

1. the cable break-make in an equipment running process detects protective device; it is characterized in that; comprise signal source, detection signal loop and detection signal processing unit; described signal source sends signal to the one end in described detection signal loop; conduction through described detection signal loop is passed to the other end in described loop; described detection signal processing unit receives described transmission signal from the other end in described loop, and described detection signal loop is made up of the connector and connection cable connecting actuator.
2. the cable break-make in equipment running process as claimed in claim 1 detects protective device; it is characterized in that; near two pin short circuits untapped in the described connector of actuator; in described cable, untapped two pins in 2 connectors guided respectively into by untapped 2 lines, and the connector of described actuator and the connector of of described cable coordinate to patch and be connected.
3. the cable break-make in equipment running process as claimed in claim 1 detects protective device; it is characterized in that, described detection signal processing unit comprises: the feedback signal reception module connected successively, feedback signal storage module, feedback signal control treatment module and indicator light.
4. the cable break-make in equipment running process as claimed in claim 3 detects protective device; it is characterized in that; the analog signal that described detection signal loop detects to the other end in described detection signal loop, and is converted to digital signal by described feedback signal reception model calling.
5. the cable break-make in equipment running process as claimed in claim 4 detects protective device, and it is characterized in that, described digital signal transfers to described feedback signal control treatment module by described feedback signal storage module.
6. the cable break-make in equipment running process as claimed in claim 5 detects protective device, and it is characterized in that, described feedback signal control treatment module reads the information in described detection signal loop, and carries out analyzing and processing to this information; Information after process is indicated by described indicator light.
7. the cable break-make in equipment running process as claimed in claim 3 detects protective device; it is characterized in that, actuator corresponding one group of interconnective described feedback signal reception module, described feedback signal storage module, described feedback signal control treatment module and described indicator light.
8. the cable break-make in equipment running process as claimed in claim 3 detects protective device; it is characterized in that; described detection signal processing unit also comprises: feedback signal human-machine operation module and actuator power supply signal control module; the input of described feedback signal human-machine operation module is connected to described feedback signal control treatment module; the output of described feedback signal human-machine operation module is connected to described actuator power supply signal control module and signal source, and the output of described actuator power supply signal control module is connected to the feeder ear of described actuator.
9. the cable break-make in equipment running process as claimed in claim 3 detects protective device, it is characterized in that, the information in the detection signal loop that described feedback signal control treatment module reads is divided into three kinds: read continuous print high level signal, then the connector of actuation means is connected firmly; Read the low and high level signal of checker, then the connector bad connection of actuation means; Read continuous print low level signal, then there is open circuit in the connector of actuation means.
CN201420423284.0U 2014-07-29 2014-07-29 Cable break-make in a kind of equipment running process detects protective device Active CN204156496U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107064713A (en) * 2017-03-22 2017-08-18 南京南瑞继保电气有限公司 A kind of electric line broken string method of discrimination and system
CN109406931A (en) * 2018-11-01 2019-03-01 上海开通数控有限公司 Servo drive system cable detecting device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107064713A (en) * 2017-03-22 2017-08-18 南京南瑞继保电气有限公司 A kind of electric line broken string method of discrimination and system
CN109406931A (en) * 2018-11-01 2019-03-01 上海开通数控有限公司 Servo drive system cable detecting device

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CP01 Change in the name or title of a patent holder

Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai

Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd

Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai

Patentee before: Shanghai Micro Electronics Equipment Co., Ltd.

CP01 Change in the name or title of a patent holder