CN204147826U - A kind of ammonia spirit configures feeding mechanism automatically - Google Patents
A kind of ammonia spirit configures feeding mechanism automatically Download PDFInfo
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- CN204147826U CN204147826U CN201420491657.8U CN201420491657U CN204147826U CN 204147826 U CN204147826 U CN 204147826U CN 201420491657 U CN201420491657 U CN 201420491657U CN 204147826 U CN204147826 U CN 204147826U
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Abstract
A kind of ammonia spirit configures feeding mechanism automatically, is applicable to pad cleaning machine and removes monocrystalline silicon buffing sheet surface contaminant.The utility model is formed primarily of original fluid container (1), batch tank (6), measuring pump (12), nitrogen supply (NS) pipeline (19), nitrogen balance pipeline (31), pure water pipeline (20), ammonia spirit supply pipe (27), switch board (30); During configuration ammonia spirit, switch board (30) triggers measuring pump (12) and works and open pure water solenoid supply valve (23), the concentrated ammonia liquor pump (12) that is measured squeezes into batch tank (6) and pure water mixed diluting in proportion from original fluid container (1), and nitrogen passes into original fluid container (1) and batch tank (6), and to produce enough pressure guarantee ammonia spirits be fan-shaped ejection from pad cleaner nozzle.The utility model is installed simple, and occupation of land space is little, easy to operate, Automatic continuous configuration can supply ammonia spirit, significantly reduce labour intensity, significantly improve operating efficiency.
Description
Technical field
The utility model belongs to monocrystalline silicon buffing sheet production technical field, relates generally to a kind of ammonia spirit and automatically configures feeding mechanism.
Background technology
Monocrystalline silicon buffing sheet is widely used semi-conducting material in integrated circuit, and the circuit technology of high integration proposes the requirement of ultra-clean degree to monocrystalline silicon buffing sheet surface.After monocrystalline silicon piece carries out mirror finish processing, monocrystalline silicon buffing sheet surface is subject to the pollution of the materials such as polished bonding sheet wax, polishing fluid, will carry out the cleaning of polished silicon wafer afterwards, removes surface particles, organic pollution.Pad cleaning machine is that one is widely used in removing silicon chip surface particle, organic effective cleaning equipment during monocrystalline silicon buffing sheet is produced.
Pad cleaning machine utilizes the brush of flexible porous to rotate and cleans silicon chip surface, pure water flows to silicon chip surface by the axle center of brush, there is ammonia spirit to be that fan-shaped spray is to silicon chip surface by nozzle simultaneously, use the double action of the mechanical scrub of brush and the Chemical cleaning of ammonia spirit to carry out clean monocrystalline silicon sheet surface, reach the object removing monocrystalline silicon buffing sheet surface contaminant.In cleaning process, ammonia spirit concentration is the critical process key element of pad cleaning machine, the too low meeting of ammonia spirit concentration causes the decline of particle removal efficiency, but when ammonia concn exceeds standard, monocrystalline silicon buffing sheet cleaning rear surface can remain ammonium radical ion, produces the inefficacy of later process processing.
The electron level ammoniacal liquor original liquid concentration of current commercial use is that 29%(is commonly referred to concentrated ammonia liquor), can use after needing to be diluted to 0.10 mol/L in proportion.And general allocation of facility has measuring pump that concentrated ammonia liquor is squeezed into batch tank from original fluid container, open pure water valve, pure water is injected into batch tank simultaneously, after both supply a period of time, close measuring pump and pure water valve simultaneously, concentrated ammonia liquor and pure water in batch tank mixed diluting to finite concentration.But use the impact of equipment water consumption by other pure water, often because pure water pressure fluctuation causes batch tank inflow to change, cause dilute solution concentration out of control; Answer the requirement of production technology in addition, use side needs ammonia spirit to be fan-shaped spray to monocrystalline silicon buffing sheet surface with higher pressure by nozzle, this will maintain higher pressure in batch tank, general control is 20 pounds/square inch, but heightens neutral gas pressure in batch tank, can produce high pressure in batch tank, and original fluid container belongs to normal pressure, cause pressure reduction before and after measuring pump inconsistent, measuring pump work is affected, and supply flow is inaccurate.
Above-mentioned reason causes needs technical staff's frequent titrimetry ammonia spirit concentration afterwards, and armrest moves configuration adjustment, less stable, and often cause equipment downtime or product to do over again, result of use is very undesirable.
Utility model content
In view of problem existing in prior art, the utility model designs and discloses a kind of ammonia spirit and automatically configures feeding mechanism, this device has two tank air pressure balance pipeline and level sensor device, automatic continuously can stablize the ammonia spirit supplying highly diluted precision, high-cleanness, high to pad cleaning machine, easily fluctuate and measuring pump supply precise decreasing to solve pure water pressure, and easily cause concentration out of control, increase degradation problem under additional effort power, security risk, device standby, yield.
For achieving the above object, the concrete technical scheme that the utility model is taked is: a kind of ammonia spirit configures feeding mechanism automatically, is mainly made up of original fluid container, batch tank, nitrogen supply (NS) pipeline, nitrogen balance pipeline, pure water pipeline, ammonia spirit supply line, measuring pump, switch board; Wherein original fluid container is made up of low liquid level sensor, high liquid level sensor, import hand valve, outlet hand valve, has a funnel-shaped opening above original fluid container import hand valve; Batch tank is made up of low liquid level sensor, high liquid level sensor, import hand valve, outlet hand valve; Original fluid container outlet hand valve is connected with batch tank import hand valve by measuring pump.Low liquid level sensor on original fluid container on low liquid level sensor, high liquid level sensor and batch tank, high liquid level sensor are mounted opposite the side at original fluid container and batch tank; Pure water pipeline is connected with batch tank, pure water pipeline is provided with successively pure water Pressure gauge, pure water flowmeter and pure water solenoid supply valve; Nitrogen supply (NS) pipeline is made up of nitrogen pressure table, nitrogen pressure table hand valve, original fluid container nitrogen relief valve, batch tank nitrogen relief valve, nitrogen pressure release main valve, nitrogen pressure relief safety valve, original fluid container nitrogen supply (NS) hand valve, original fluid container nitrogen pressure control valve, batch tank nitrogen supply (NS) hand valve, batch tank nitrogen pressure control valve.Original fluid container and batch tank are connected with nitrogen supply (NS) pipeline, nitrogen balance pipeline is connected with between original fluid container and batch tank, nitrogen relief valve on original fluid container and batch tank is installed in series on nitrogen balance pipeline, nitrogen pressure release main valve is arranged on the top of nitrogen balance pipeline, between two nitrogen relief valves, ammonia spirit supply pipe is connected with batch tank, ammonia spirit supply pipe upper end is provided with filter, discharge hand valve is installed in ammonia spirit supply pipe lower end, control program is had in switch board, switch board is by the low liquid level sensor on holding wire and original fluid container, high liquid level sensor, low liquid level sensor on batch tank, high liquid level sensor, and measuring pump is connected with pure water magnetic valve.
Ammonia spirit described in the utility model automatically configures feeding mechanism and installs simple, easy to operate, and security performance is good, layoutprocedure automation, the solution dilution degree precision of gained is high, reach stabilized product quality, reduce manual labor, the object of increasing work efficiency.
Accompanying drawing explanation
Fig. 1 is automatic configuration feeding mechanism structural representation of the present utility model.
In figure: 1, original fluid container; 2, low liquid level sensor; 3, high liquid level sensor; 4, hand valve is exported; 5, import hand valve; 6, batch tank; 7, low liquid level sensor; 8, high liquid level sensor; 9, import hand valve; 10, hand valve is discharged; 11, hand valve is exported; 12, measuring pump; 13, nitrogen pressure table hand valve; 14, nitrogen pressure table; 15, nitrogen relief valve; 16, nitrogen pressure release main valve; 17, nitrogen pressure control valve; 18, nitrogen supply (NS) hand valve; 19, nitrogen supply (NS) pipeline; 20 pure water pipeline; 21, nitrogen relief valve; 22, nitrogen pressure relief safety valve; 23, pure water solenoid supply valve; 24, nitrogen pressure control valve; 25, nitrogen supply (NS) hand valve; 26, pure water flowmeter; 27, ammonia spirit supply pipe; 28, filter; 29, pure water Pressure gauge; 30, switch board; 31, nitrogen balance pipeline; 32, funnel-shaped opening.
Detailed description of the invention
Embodiment of the present utility model is provided as follows below in conjunction with accompanying drawing:
As shown in Figure 1, a kind of ammonia spirit described in the utility model configures feeding mechanism automatically, is mainly made up of original fluid container 1, batch tank 6, nitrogen supply (NS) pipeline 19, nitrogen balance pipeline 31, pure water pipeline 20, ammonia spirit supply pipe 27, measuring pump 12, switch board 30; Wherein original fluid container 1 is made up of low liquid level sensor 2, high liquid level sensor 3, import hand valve 5, outlet hand valve 4, has a funnel-shaped opening 32, for manually injecting concentrated ammonia liquor to it above the import hand valve 5 of original fluid container 1.Batch tank 6 is made up of low liquid level sensor 7, high liquid level sensor 8, import hand valve 9, outlet hand valve 11.The liner of original fluid container 1 and batch tank 6 tank body processes with the PTFE of resistance to chemical attack.Original fluid container 1 upper outlet hand valve 4 is connected with batch tank 6 upper inlet hand valve 9 by measuring pump 12, and the low liquid level sensor 7 on original fluid container 1 on low liquid level sensor 2, high liquid level sensor 3 and batch tank 6, high liquid level sensor 8 are mounted opposite the side at original fluid container 1 and batch tank 6; Pure water pipeline 20 is connected with batch tank 6, pure water pipeline 20 is provided with successively pure water Pressure gauge 29, pure water flowmeter 26 and pure water solenoid supply valve 23, and concentrated ammonia liquor and pure water are mixed into the ammonia spirit meeting technological requirement concentration in proportion in batch tank 6.Nitrogen supply (NS) pipeline 19 is made up of the nitrogen supply (NS) hand valve 25 of nitrogen pressure table 14, nitrogen pressure table hand valve 13, nitrogen relief valve 15, nitrogen relief valve 21, nitrogen pressure release main valve 16, nitrogen pressure relief safety valve 22, nitrogen supply (NS) hand valve 18, nitrogen pressure control valve 17 and batch tank 6, nitrogen pressure control valve 24.Original fluid container 1 and batch tank 6 are connected to nitrogen supply (NS) pipeline 19, and nitrogen is passed in original fluid container 1 and batch tank 6 respectively by nitrogen pressure control valve (17,24).Be connected with nitrogen balance pipeline 31 between original fluid container 1 and batch tank 6, the nitrogen relief valve (15,21) on original fluid container 1 and batch tank 6 is installed in series on nitrogen balance pipeline 31.Nitrogen pressure release main valve 16 is arranged on above the nitrogen balance pipeline 31 between two nitrogen relief valves (15,21), nitrogen pressure release main valve 16 is in length and closes state, two the nitrogen relief valves (15,21) opened on nitrogen balance pipeline 31 can play the effect of balance original fluid container 1 and batch tank 6 pressure, and before and after realizing ammoniacal liquor measuring pump 12, pressure reduction is consistent.Ammonia spirit supply pipe 27 is connected with batch tank 6, for pad cleaning machine supply ammonia spirit, ammonia spirit supply pipe 27 is equipped with filter 28, in order to protect the cleanliness factor of ammonia spirit.Ammonia spirit supply pipe 27 lower end is provided with discharge hand valve 10, for the sampling analysis to ammonia spirit concentration.Control program is provided with in switch board 30, switch board 30 is by the low liquid level sensor 7 on the low liquid level sensor 2 on holding wire and original fluid container 1, high liquid level sensor 3, batch tank 6, high liquid level sensor 8, and measuring pump 12 is connected with pure water solenoid supply valve 23.
When practical operation uses, be divided into the automatic configuration supply of the interpolation of concentrated ammonia liquor and ammonia spirit.When original fluid container 1 low liquid level sensor 2 lamp goes out, the control system of switch board 30 sends buzzing, illustrates that the concentrated ammonia liquor residue in original fluid container 1 is few, reminds operating personnel to supplement.First close original fluid container outlet hand valve 4 and batch tank 6 nitrogen relief valve 21, open original fluid container 1 nitrogen relief valve 15, then nitrogen pressure release main valve 16 is slowly opened, hear that original fluid container 1 discharges the sound of nitrogen, then nitrogen pressure table hand valve 13 is opened, the pointer observing nitrogen pressure table 14 drops to zero gradually, illustrates in original fluid container 1 do not have pressure.Opened by original fluid container 1 import hand valve 5, slow impouring concentrated ammonia liquor in the funnel-shaped opening 32 above import hand valve 5, the lamp being added into the high liquid level sensor of original fluid container 13 is bright, and the control system of switch board 30 sends buzzing, and operating personnel stop adding.Close original fluid container 1 import hand valve 5, close nitrogen pressure release main valve 16, then open batch tank 6 nitrogen relief valve 21, wait for that nitrogen pressure table 14 raises gradually, original fluid container 1 nitrogen pressure control valve 17 can be regulated, make pointer be stabilized in 20 pounds/square inch.Then close nitrogen pressure table hand valve 13, open original fluid container 1 and export hand valve 4, the process that concentrated ammonia liquor adds terminates.
Go out when pad cleaning machine uses point to consume ammonia spirit to low liquid level sensor 7 lamp on batch tank 6, started working by switch board 30 control system triggering pure water solenoid supply valve 23 and measuring pump 12, in batch tank 6, inject pure water and concentrated ammonia liquor simultaneously, the supply flow of pure water can be observed by pure water flowmeter 26, stroke on measuring pump 12 and speed knob can for the supplys of concentrated ammonia liquor in the fine adjustment unit interval, the supply time of concentrated ammonia liquor sets in advance in the program of control system, when setting-up time stops, measuring pump 12 stops the supply of concentrated ammonia liquor; The ammonia spirit mixed when pure water and concentrated ammonia liquor rises to the height of the high liquid level sensor 8 of batch tank 6, triggers pure water solenoid supply valve 23 and closes, then stop the supply of pure water, complete the automatic configuration of ammonia spirit by switch board 30 control system.Need in batch tank 6 to keep certain pressure, if the ammonia spirit of pad cleaner nozzle ejection can not be formed fan-shaped, insufficient pressure in batch tank 6 is described, regulating allocation tank 5 nitrogen pressure control valve 24 to nitrogen pressure table 14 is stabilized in 20 pounds/square inch, when hypertonia, nitrogen pressure relief safety valve 22 can releasing pressure automatically.
When needing ammonia spirit concentration in sample analysis batch tank 6, aim at discharge hand valve 10 with measuring cup and export, then slowly open discharge hand valve 10, after measuring cup Sheng gets suitable ammonia spirit solution, close discharge hand valve 10.
Claims (4)
1. ammonia spirit configures a feeding mechanism automatically, is mainly made up of original fluid container (1), batch tank (6), measuring pump (12), nitrogen supply (NS) pipeline (19), pure water pipeline (20), ammonia spirit supply pipe (27), switch board (30), nitrogen balance pipeline (31); Wherein original fluid container (1) is made up of low liquid level sensor (2), high liquid level sensor (3), outlet hand valve (4), import hand valve (5); Batch tank (6) is made up of low liquid level sensor (7), high liquid level sensor (8), import hand valve (9), outlet hand valve (11); Original fluid container (1) upper outlet hand valve (4) is connected with batch tank (6) upper inlet hand valve (9) by measuring pump (12); The upper low liquid level sensor (2) of original fluid container (1), high liquid level sensor (3) and the low liquid level sensor (7) on batch tank (6), high liquid level sensor (8) are mounted opposite the side at original fluid container (1) and batch tank (6); Pure water pipeline (20) is connected with batch tank (6); Nitrogen supply (NS) pipeline (19) is made up of nitrogen pressure table (14), nitrogen pressure table hand valve (13), nitrogen relief valve (15), nitrogen relief valve (21), nitrogen pressure release main valve (16), nitrogen pressure relief safety valve (22), nitrogen supply (NS) hand valve (18), nitrogen pressure control valve (17), nitrogen supply (NS) hand valve (25), nitrogen pressure control valve (24); Original fluid container (1) and batch tank (6) are connected to nitrogen supply (NS) pipeline (19), connected by nitrogen balance pipeline (31) between original fluid container (1) and batch tank (6), nitrogen relief valve (15) and nitrogen relief valve (21) series connection are contained on nitrogen balance pipeline (31), and nitrogen pressure release main valve (16) is arranged on the top of nitrogen balance pipeline (31) between nitrogen relief valve (15) and nitrogen relief valve (21); Ammonia spirit supply pipe (27) is equipped with filter (28), its lower end is provided with discharge hand valve (10); Switch board (30) is connected with low liquid level sensor (2), high liquid level sensor (3), low liquid level sensor (7), high liquid level sensor (8), measuring pump (12) and pure water solenoid supply valve (23) by holding wire.
2. a kind of ammonia spirit according to claim 1 configures feeding mechanism automatically, it is characterized in that: original fluid container (1) and batch tank (6) liner adopt PTFE to process.
3. a kind of ammonia spirit according to claim 1 configures feeding mechanism automatically, it is characterized in that: pure water pipeline (20) is equipped with pure water Pressure gauge (29), pure water flowmeter (26), pure water solenoid supply valve (23).
4. a kind of ammonia spirit according to claim 1 configures feeding mechanism automatically, it is characterized in that: there is a funnel-shaped opening (32) import hand valve (5) top.
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| CN201420491657.8U CN204147826U (en) | 2014-08-29 | 2014-08-29 | A kind of ammonia spirit configures feeding mechanism automatically |
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| CN201420491657.8U CN204147826U (en) | 2014-08-29 | 2014-08-29 | A kind of ammonia spirit configures feeding mechanism automatically |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104729169A (en) * | 2015-03-20 | 2015-06-24 | 苏州市泰美达电器有限公司 | Continuous liquid adding device used for diffusion absorption refrigeration system |
| CN104801212A (en) * | 2015-04-28 | 2015-07-29 | 西安热工研究院有限公司 | Automatic ammonia-water preparing device and method |
| CN110026125A (en) * | 2019-03-12 | 2019-07-19 | 杭州美康盛德医学检验实验室有限公司 | A kind of more liquid proportioning equipments and method |
| CN111871271A (en) * | 2020-07-31 | 2020-11-03 | 北京泓禾科技有限公司 | Continuous preparation device for flocculating agent |
| CN115318735A (en) * | 2022-08-12 | 2022-11-11 | 常州工学院 | Cleaning device for purifying and recycling crystalline silicon in photovoltaic cell by wet method |
| WO2023284032A1 (en) * | 2021-07-13 | 2023-01-19 | 长鑫存储技术有限公司 | Chemical cleaning fluid configuration system and method |
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2014
- 2014-08-29 CN CN201420491657.8U patent/CN204147826U/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104729169A (en) * | 2015-03-20 | 2015-06-24 | 苏州市泰美达电器有限公司 | Continuous liquid adding device used for diffusion absorption refrigeration system |
| CN104801212A (en) * | 2015-04-28 | 2015-07-29 | 西安热工研究院有限公司 | Automatic ammonia-water preparing device and method |
| CN104801212B (en) * | 2015-04-28 | 2017-02-01 | 西安热工研究院有限公司 | Automatic ammonia-water preparing device and method |
| CN110026125A (en) * | 2019-03-12 | 2019-07-19 | 杭州美康盛德医学检验实验室有限公司 | A kind of more liquid proportioning equipments and method |
| CN111871271A (en) * | 2020-07-31 | 2020-11-03 | 北京泓禾科技有限公司 | Continuous preparation device for flocculating agent |
| WO2023284032A1 (en) * | 2021-07-13 | 2023-01-19 | 长鑫存储技术有限公司 | Chemical cleaning fluid configuration system and method |
| CN115318735A (en) * | 2022-08-12 | 2022-11-11 | 常州工学院 | Cleaning device for purifying and recycling crystalline silicon in photovoltaic cell by wet method |
| CN115318735B (en) * | 2022-08-12 | 2024-05-31 | 常州工学院 | Cleaning device for wet purification and recovery of crystalline silicon in photovoltaic cell |
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Effective date of registration: 20201209 Address after: No.99, Binhe North Road, high tech Industrial Development Zone, Luoyang City, Henan Province Patentee after: Mesk Electronic Materials Co., Ltd Address before: No.99, Binhe North Road, high tech Industrial Development Zone, Luoyang City, Henan Province Patentee before: LUOYANG SINGLE CRYSTAL SILICON GROUP Co.,Ltd. |