CN204142673U - Activation energy proving installation - Google Patents

Activation energy proving installation Download PDF

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Publication number
CN204142673U
CN204142673U CN201420621073.8U CN201420621073U CN204142673U CN 204142673 U CN204142673 U CN 204142673U CN 201420621073 U CN201420621073 U CN 201420621073U CN 204142673 U CN204142673 U CN 204142673U
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China
Prior art keywords
cavity volume
activation energy
proving installation
vacuum
installation according
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Expired - Fee Related
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CN201420621073.8U
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Chinese (zh)
Inventor
陈庆东
王俊平
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Binzhou University
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Binzhou University
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Abstract

The utility model discloses a kind of activation energy proving installation, the oxygen contamination for solar cell microcrystalline silicon film is tested, and comprising: cavity volume, in order to form gas confined space; Vacuum system, connects described cavity volume, vacuumizing for cavity volume; Test platform, is positioned at described cavity volume, for locating testing sample; Sampling electrode, is positioned at described cavity volume, is furnished with a pair, and coupling is positioned at the select location of testing sample; And attemperating unit, be auxiliaryly assigned in described cavity volume, the temperature for cavity volume controls.The reference of subsequent treatment can be provided for those skilled in the art according to the utility model.

Description

Activation energy proving installation
Technical field
The utility model relates to a kind of activation energy proving installation, and the oxygen contamination for solar cell microcrystalline silicon film is tested.
Background technology
At present, both at home and abroad the research of microcrystalline silicon film solar cell is paid special attention to, mainly concentrate on the United Solar of the U.S., the Kaneka company of Japan, the Julich photovoltaic research institute of Germany, the Utrecht university of Holland, the IMT research institute of Switzerland and Nankai University's optoelectronic thin-film device of China and technical institute.Wherein, activation energy is the important parameter characterizing microcrystalline silicon materials, the activation energy of device quality level microcrystal silicon silicon materials should be greater than 0.5eV, the size of activation energy directly can reflect the order of severity of microcrystalline silicon film oxygen contamination, is the important parameter of the battery efficiency improving microcrystalline silicon film solar cell further.
But current also shortcoming directly measures the measurement mechanism of activation energy, makes this important parameter intuitively must be grasped by those skilled in the art.
Summary of the invention
The purpose of this utility model is to provide a kind of proving installation directly can testing activation energy, thus can provide the reference of subsequent treatment for those skilled in the art.
The technical solution adopted in the utility model is:
A kind of activation energy proving installation, the oxygen contamination for solar cell microcrystalline silicon film is tested, and comprising:
Cavity volume, in order to form gas confined space;
Vacuum system, connects described cavity volume, vacuumizing for cavity volume;
Test platform, is positioned at described cavity volume, for locating testing sample;
Sampling electrode, is positioned at described cavity volume, is furnished with a pair, and coupling is positioned at the select location of testing sample; And
Attemperating unit, is auxiliaryly assigned in described cavity volume, and the temperature for cavity volume controls.
According to said structure of the present utility model, construct vacuum condition and configuration testing platform, sampled by sampling electrode under temperature controlled condition, thus the sampled signal under controlled condition can be obtained, for subsequent treatment provides reference.
Above-mentioned activation energy proving installation, described cavity volume is configured to cylindricality cavity volume, and formed by the bucket wall of a cylindrical structure and each ring flange of being hermetically matched with barrel wall upper and lower side, compact conformation, is beneficial to formation positiver sealing.
Above-mentioned activation energy proving installation, is positioned at a barrel ring flange for wall lower end and is prefabricated with the via hole be connected with external unit for internal unit, be convenient to the installation of functional configuration and utility appliance.
Above-mentioned activation energy proving installation, is positioned at a barrel ring flange for wall upper end and has window, correspondingly, is also furnished with the window lid coordinated with window hermetic seal, for the basic operation such as to pick and place of testing sample.
Above-mentioned activation energy proving installation, for the benefit of layout, described test platform is being positioned at above barrel ring flange of wall lower end by main shore supports;
Correspondingly, described attemperating unit is furnished with heating arrangement and cooling device, and wherein heating arrangement is configured to heating tube and is configured in the inside of test platform, and cooling device is configured to cooling tube and is configured on the downside of test platform.
Above-mentioned activation energy proving installation, in order to control temperature better, described heating arrangement is the heating arrangement based on closed-loop control, thus this heating arrangement comprises the harvester for measuring test platform temperature, the temperature controller inputting connection harvester and output-controlling device, and be positioned at the heating element of output-controlling device subordinate.
Above-mentioned activation energy proving installation, described output-controlling device comprises the bidirectional triode thyristor accessing power supply, and is connected to the rectification circuit of bidirectional triode thyristor subordinate, reduces current oscillation to the impact of test circuit.
Above-mentioned activation energy proving installation, described heating element is electrothermal tube, and described harvester is thermopair.
Above-mentioned activation energy proving installation, described vacuum system comprises:
Vacuum pump;
Vacuum line, for the connection of vacuum pump and described cavity volume;
Air release, is connected to described vacuum line, and the break-make for vacuum line controls;
Vacuum meter, is connected to described vacuum line, for the vacuum measurement of vacuum line.
Above-mentioned activation energy proving installation, described vacuum meter is linked into described vacuum line by a vacuum gauge.
Accompanying drawing explanation
Fig. 1 is the structure principle chart according to a kind of activation energy proving installation of the present utility model.
Fig. 2 is a kind of structural representation of upper flange plate.
Fig. 3 is a kind of vacuum system schematic diagram.
Fig. 4 thermal-control circuit schematic diagram.
In figure: 1. barrel wall, 2. cavity volume, 3. upper flange plate, 4. overhanging bar, 5. window lid, 6. electrode, 7. jury strut, 8. substrate, 9. main pillar, 10. cooling tube, 11. heating tubes, 12. cooling water pipes, 13. exhaust tubes, 14. wire pipe boxes, 15. cooling water pipes.
16. is suitable for reading, 17. caulking grooves.
18. air releases, 19. glass tubes.
Embodiment
Principle of the present utility model, technological means and technique effect is set forth in the mode of specific embodiment below in conjunction with Figure of description.
Find after deliberation, what activation energy reflected is the Changing Pattern of dark conductance along with temperature, and in order to prevent impurity, particularly oxygen is to the pollution of silicon fiml simultaneously, so require certain vacuum tightness, but vacuum level requirements is not high, generally can reach 10 -1handkerchief, so can vacuumize with mechanical pump, in addition owing to measuring activation energy, temperature needs to be raised to 200 DEG C from room temperature, requires that proving installation can heat, and can lower the temperature.This proving installation adopts heating tube, as electric heater for heating, and cooling water temperature.
Because the dark conductance of the microcrystalline silicon film of intrinsic is very little, reach M-G, the data acquisition system (DAS) precision prescribed of proving installation is very high, the data acquisition system (DAS) of this device adopts Keithley company of the U.S. to produce advanced 6517A high resistance test instrumentation, the test voltage of this instrument arbitrarily can change between 0-400V, measuring current changes from 20pA-200 mA, and test resistance is maximum can reach 200T.
Activation energy proving installation shown in Fig. 1 is the schematic diagram of proving installation, outside is an airtight vacuum device made by stainless steel, bucket wall 1 namely shown in figure, coordinate upper flange plate 3 and lower flange (lateral member parallel with upper flange plate shown in middle part in figure, do not identify) measure sample be placed on the copper coin in obturator, be denoted as substrate 8 in figure, the copper coin capacity of heat transmission is strong.
The structure of vacuum chamber cavity volume is in other words necessary adopts cylindrical structure, can also adopt square chest or hemisphere cavity configuration, select according to concrete configuration.
And then measuring electrode 6 also adopts the copper sheet and test sample contacts with satisfactory electrical conductivity, and form electrode copper sheet and be clipped on the jury strut 7 of teflon material, electrode 6 does not contact with substrate 8, forms electrical isolation.
Heating element can directly adopt finished product electrothermal tube, also the heating tube as being wound around electric furnace heating wire can be adopted, be configured in and be positioned at substrate 8 both sides in the horizontal direction, be equipped with cooling device again, make this cooling device be positioned at below copper coin, be configured to cooling tube 10, adopt water cooling, be set up at cloth, cooling tube 10 can be configured to U-shaped structure, and coil form also can be adopted to be arranged in below substrate 8 for cooling.
Thus, the attemperating unit of heating and cooling two part formation can be formed according to said structure, to carry out temperature control.
Whole copper substrate 8 is placed on the main pillar 9 of teflon material, forms hanging structure, is conducive to the configuration of attemperating unit, nature, because needs vacuumize, can not form convection current in cavity volume, the heating and cooling of main employing contact, namely based on the heating of heat exchange pattern.
In certain embodiments, adopt the mode as radiation heating, as being configured in the device based on radiation heating on the upside of substrate 8, controllability is also relatively good.
Adopt the jury strut 7 of teflon and the reason of main pillar 9: one is to insulate, and two is in order to heat insulation.Ring flange below test platform is prefabricated with the outlet connecting vacuum tube, wire outlet and cooling water pipe respectively, as illustrated in the drawing cooling water pipe 12,15, exhaust tube 13, for spreading out of the wire pipe box 14 of wire.
About vacuum system, vacuum tightness required is as previously mentioned also not bery high, can adopt mechanical pump, by the connection of mechanical pump by necessary pipeline cavity volume, and the type mechanical pump that mechanical pump adopts Chengdu south photoproduction to produce, end vacuum 6.7 × 10 -2pa, the vacuum requirement due to proving installation is not very high, and this mechanical pump can meet the demands completely, and vacuum barrier gas filling valve is housed above mechanical pump, prevents mechanical pump oil return.A T-valve is equipped with in one end of vacuum barrier gas filling valve, and one end of T-valve installs on vacuum tube, and the other end installs to vacuum gauge, and vacuum gauge connects vacuum meter.Vacuum pipe is connected with the exhaust tube of test platform.
About the connection of vacuum system, there is clearly connection identifier in accompanying drawing 3, do not repeated them here.
In addition, in order to obtain stable vacuum tightness, a vacuum tank can be set in the prime of cavity volume, in order to produce stable vacuum tightness.
See computer heating control again, it is heated by Microprocessor S3C44B0X, also the temperature controller of finished product can be adopted, micro-processor control device is by bidirectional triode thyristor and heating line (main circuit, power circuit in other words) be connected, the first half of Fig. 4, two two-way controllable silicons are found in the upper right corner of Fig. 4.
In order to prevent alternating current on the impact of measuring current, AC rectification is become direct current, the full bridge rectifier formed in figure, so just can reduce the impact of current oscillation on measuring current, the full-bridge that commutating circuit is made up of 4 diodes and inductance, electric capacity form, and carry out filtering after rectification by inductance (full bridge rectifier subordinate, rectification circuit left side inductor symbol in figure) and electric capacity, AC rectification is become direct current, makes wiring board with Protel99 software PCB plate-making.One end of temperature control instrument is connected to thermopair (in Fig. 4 underside circuits) collecting temperature on test platform, and the other end is connected on computer, by the lifting of conputer controlled temperature by such as RS232 chip.

Claims (10)

1. an activation energy proving installation, the oxygen contamination for solar cell microcrystalline silicon film is tested, and it is characterized in that, comprising:
Cavity volume (2), in order to form gas confined space;
Vacuum system, connects described cavity volume, vacuumizing for cavity volume;
Test platform, is positioned at described cavity volume (2), for locating testing sample;
Sampling electrode, is positioned at described cavity volume, is furnished with a pair, and coupling is positioned at the select location of testing sample; And
Attemperating unit, is auxiliaryly assigned in described cavity volume (2), and the temperature for cavity volume (2) controls.
2. activation energy proving installation according to claim 1, is characterized in that, described cavity volume (2) is configured to cylindricality cavity volume, is formed by the bucket wall (1) of a cylindrical structure and each ring flange of being hermetically matched with a barrel wall (1) upper and lower side.
3. activation energy proving installation according to claim 2, is characterized in that, the ring flange being positioned at a barrel wall (1) lower end is prefabricated with the via hole be connected with external unit for internal unit.
4. the activation energy proving installation according to Claims 2 or 3, is characterized in that, the ring flange being positioned at a barrel wall (1) upper end has window, correspondingly, is also furnished with the window lid (5) coordinated with window hermetic seal.
5. activation energy proving installation according to claim 2, is characterized in that, described test platform is supported on the top of the ring flange being positioned at a barrel wall (1) lower end by main pillar (9);
Correspondingly, described attemperating unit is furnished with heating arrangement and cooling device, and wherein heating arrangement is configured to heating tube (11) and is configured in the inside of test platform, and cooling device is configured to cooling tube (10) and is configured on the downside of test platform.
6. activation energy proving installation according to claim 5, it is characterized in that, described heating arrangement is the heating arrangement based on closed-loop control, thus this heating arrangement comprises the harvester for measuring test platform temperature, the temperature controller inputting connection harvester and output-controlling device, and be positioned at the heating element of output-controlling device subordinate.
7. activation energy proving installation according to claim 6, is characterized in that, described output-controlling device comprises the bidirectional triode thyristor accessing power supply, and is connected to the rectification circuit of bidirectional triode thyristor subordinate.
8. the activation energy proving installation according to claim 6 or 7, is characterized in that, described heating element is electrothermal tube, and described harvester is thermopair.
9. activation energy proving installation according to claim 1, is characterized in that, described vacuum system comprises:
Vacuum pump;
Vacuum line, for the connection of vacuum pump and described cavity volume (2);
Air release (18), is connected to described vacuum line, and the break-make for vacuum line controls;
Vacuum meter, is connected to described vacuum line, for the vacuum measurement of vacuum line.
10. activation energy proving installation according to claim 9, is characterized in that, described vacuum meter is linked into described vacuum line by a vacuum gauge.
CN201420621073.8U 2014-10-27 2014-10-27 Activation energy proving installation Expired - Fee Related CN204142673U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420621073.8U CN204142673U (en) 2014-10-27 2014-10-27 Activation energy proving installation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420621073.8U CN204142673U (en) 2014-10-27 2014-10-27 Activation energy proving installation

Publications (1)

Publication Number Publication Date
CN204142673U true CN204142673U (en) 2015-02-04

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Application Number Title Priority Date Filing Date
CN201420621073.8U Expired - Fee Related CN204142673U (en) 2014-10-27 2014-10-27 Activation energy proving installation

Country Status (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107478798A (en) * 2017-06-30 2017-12-15 浙江大学 A kind of method for measuring block metallic glass structures relaxation activation energy

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107478798A (en) * 2017-06-30 2017-12-15 浙江大学 A kind of method for measuring block metallic glass structures relaxation activation energy
CN107478798B (en) * 2017-06-30 2020-06-16 浙江大学 Method for measuring relaxation activation energy of bulk metal glass structure

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150204

Termination date: 20151027

EXPY Termination of patent right or utility model