CN204107908U - A kind of cleaning device for glazing machine for crystal plate - Google Patents
A kind of cleaning device for glazing machine for crystal plate Download PDFInfo
- Publication number
- CN204107908U CN204107908U CN201420567922.6U CN201420567922U CN204107908U CN 204107908 U CN204107908 U CN 204107908U CN 201420567922 U CN201420567922 U CN 201420567922U CN 204107908 U CN204107908 U CN 204107908U
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- Prior art keywords
- shower
- inlet pipe
- water inlet
- cleaning device
- installing plate
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model discloses a kind of shower can swing thus the cleaning device for glazing machine for crystal plate on polishing machine can be installed at, comprise: mount pad, in mount pad, activity is equipped with water inlet pipe, the top of water inlet pipe is provided with union elbow, the other end of union elbow is provided with shower by telescopic adjustment sealing mechanism, make shower can be flexible and water-tight in union elbow, and, shower is provided with some spray heads; Described mount pad comprises: horizontally disposed installing plate and be provided with at least one piece on the installing plate bottom surface riser vertically arranged, one piece of riser is wherein provided with reducing motor, the output shaft of reducing motor is provided with driving gear, described water inlet pipe activity is located in installing plate, water inlet pipe is provided with the driven gear matched with driving gear.This cleaning device is particularly useful for being installed on glazing machine for crystal plate.
Description
Technical field
The utility model relates to a kind of cleaning device machine, refers more particularly to a kind of cleaning device for glazing machine for crystal plate.
Background technology
In semicon industry, usually to carry out polishing to wafer.At present, after polishing is carried out to wafer, need to be transplanted on special cleaning equipment and clean.Fact proved, because wafer is in polishing process, a lot of fine particle can be adhered in its surface, and these fine particles oxidation reaction can occur in the process being transferred to cleaning machine from polishing machine, the quality of plane of crystal is reduced greatly, thus has influence on the final yield rate of wafer.
Utility model content
Technical problem to be solved in the utility model is: provide a kind of shower to swing thus can be installed at the cleaning device for glazing machine for crystal plate on polishing machine.
For solving the problems of the technologies described above, the technical scheme that the utility model adopts is: a kind of cleaning device for glazing machine for crystal plate, comprise: mount pad, the water inlet pipe vertically arranged and the shower arranged in the horizontal direction, the roof of shower is equipped with the spray head that several are equidistantly arranged, water inlet pipe activity is located in mount pad, the top of water inlet pipe is connected with one end of shower by union elbow, plug is provided with in the port of the other end of shower, connected mode between described union elbow and shower is: shower is circumferentially provided with at least one pair of positioning seat, positioning seat is being provided with near union elbow side the backstay paralleled with shower, backstay is provided with locking screw, union elbow is provided with in the one end near shower the locating flange matched with securing rod, the inwall of locating flange offers annular seal groove, sealing ring is provided with in annular seal groove, shower is located in locating flange and union elbow, locating flange is also provided with the positioning through hole matched with backstay, backstay is located in corresponding positioning through hole, and be respectively arranged with setscrew nut in the both sides of locating flange, described mount pad comprises: horizontally disposed installing plate and be arranged at least one piece on the installing plate bottom surface riser vertically arranged, one piece of riser is wherein provided with reducing motor, the output shaft of reducing motor is provided with driving gear, described water inlet pipe activity is located in installing plate, water inlet pipe is provided with the driven gear matched with driving gear.
As a kind of preferred version, described in the cleaning device of glazing machine for crystal plate, described spray head is arranged on shower by shower valve.
As a kind of preferred version, described in the cleaning device of glazing machine for crystal plate, described shower valve adopts magnetic valve.
As a kind of preferred version, described in the cleaning device of glazing machine for crystal plate, described water inlet pipe and the mounting structure of installing plate comprise: be located in the bearing block in installing plate, be disposed with from bottom to top in described bearing block and the bearing of water inlet pipe interference fit and the spacer with water inlet pipe matched in clearance, spacer and be respectively arranged with sealing ring between water inlet pipe and bearing block.
As a kind of preferred version, described in the cleaning device of glazing machine for crystal plate, described riser has four pieces at least, and all risers and installing plate surround the casing under shed.
The beneficial effects of the utility model are: because the shower in the utility model can stretch in union elbow, thus spray head can be adjusted according to the position at wafer place during polishing, and, shower can also rotate around water inlet pipe, so just can carry out scan-type cleaning to numerous wafer, substantially increase the effect of cleaning; In addition, owing to being also provided with shower valve, no spray head can be turned off during use, to reach water-saving object, reduce use cost; In addition, because installing plate and all risers surround the casing under shed, thus protect the parts being placed in this casing well, make it avoid trickle.
Accompanying drawing explanation
Fig. 1 is the structural representation of cleaning device described in the utility model.
Reference numeral in figure: 1, plug, 2, union elbow, 21, locating flange, 3, shower, 31, positioning seat, 32, backstay, 321, locking screw, 4, spray head, 5, shower valve, 6, water inlet pipe, 7, spacer, 8, bearing block, 9, installing plate, 91, riser, 93, angle seat, 10, reducing motor, 11, driving gear, 12, driven gear, 13, bearing, 16, the first cushion pad, the 17, second cushion pad, 18, setscrew nut.
Detailed description of the invention
Below in conjunction with accompanying drawing, describe the specific embodiments of a kind of cleaning device for glazing machine for crystal plate described in the utility model in detail:
As shown in Figure 1, a kind of cleaning device for glazing machine for crystal plate, comprise: by installing plate 9 be arranged on the box-type mount pad under shed and the water inlet pipe 6 vertically arranged and the shower 3 arranged in the horizontal direction that four pieces of risers 91 on installing plate 9 bottom surface form, the roof of shower 3 is equipped with the shower valve 5 that several are equidistantly arranged, each shower valve 5 is connected with a spray head 4, described water inlet pipe 6 activity is located in installing plate 9, concrete set-up mode is: be equipped with bearing block 8 in installing plate 9, the bearing 13 with water inlet pipe 6 interference fit is disposed with from bottom to top in bearing block 8, and with the spacer 7 of water inlet pipe 6 matched in clearance, the inwall of spacer 7 is embedded with the sealing ring of twice for sealing with water inlet pipe 6, the inwall of bearing block 8 is embedded with the sealing ring together for sealing with spacer 7, the top of described water inlet pipe 6 is connected with one end of shower 3 by union elbow 2, plug 1 is provided with in the port of the other end of shower 3, connected mode between described union elbow 2 and shower 3 is: shower 3 is circumferentially evenly provided with a pair positioning seat 31, positioning seat 31 is provided with in the side near union elbow 2 backstay 32 paralleled with shower 3, backstay 32 is provided with locking screw 321, described union elbow 2 is provided with in the one end near shower 3 locating flange 21 matched with securing rod 32, the inwall of locating flange 21 offers annular seal groove, sealing ring is provided with in annular seal groove, shower 3 is located in locating flange 2 and union elbow 2, locating flange 21 is also provided with the positioning through hole matched with backstay 32, backstay 32 is located in corresponding positioning through hole, and be respectively arranged with setscrew nut 18 in the both sides of locating flange 21, in described box-type mount pad, one piece of riser 91 on right side is provided with reducing motor 10 by angle seat 93, the output shaft of reducing motor 10 is provided with driving gear 11, water inlet pipe 6 is provided with the driven gear 12 matched with driving gear 11, in order to reduce vibrations when reducing motor 10 rotates, between the riser of angle seat 93 and reducing motor 10, being provided with the first cushion pad 16, between the transverse slat of angle seat 93 and reducing motor 10, being provided with the second cushion pad 17.
When practical application, described shower valve 5 can adopt magnetic valve; And box mount pad is fixed on polishing machine.
During actual use, by corresponding shower valve 5, no spray head 4 can be turned off on the one hand, the position of spray head 4 can be adjusted according to the position at wafer place during polishing on the other hand.After polishing process terminates, start reducing motor 10, by controlling its rotating, shower 3 being swung back and forth around water inlet pipe 6, the wafer after polishing is cleaned in time.
In sum, be only preferred embodiment of the present utility model, not be used for limit the utility model implement scope, all equalizations done according to shape, structure, feature and the spirit described in the utility model right change and modify, and all should be included in right of the present utility model.
Claims (5)
1. the cleaning device for glazing machine for crystal plate, comprise: mount pad, the water inlet pipe vertically arranged and the shower arranged in the horizontal direction, the roof of shower is equipped with the spray head that several are equidistantly arranged, water inlet pipe activity is located in mount pad, the top of water inlet pipe is connected with one end of shower by union elbow, plug is provided with in the port of the other end of shower, it is characterized in that, connected mode between described union elbow and shower is: shower is circumferentially provided with at least one pair of positioning seat, positioning seat is being provided with near union elbow side the backstay paralleled with shower, backstay is provided with locking screw, union elbow is provided with in the one end near shower the locating flange matched with securing rod, the inwall of locating flange offers annular seal groove, sealing ring is provided with in annular seal groove, shower is located in locating flange and union elbow, locating flange is also provided with the positioning through hole matched with backstay, backstay is located in corresponding positioning through hole, and be respectively arranged with setscrew nut in the both sides of locating flange, described mount pad comprises: horizontally disposed installing plate and be arranged at least one piece on the installing plate bottom surface riser vertically arranged, one piece of riser is wherein provided with reducing motor, the output shaft of reducing motor is provided with driving gear, described water inlet pipe activity is located in installing plate, water inlet pipe is provided with the driven gear matched with driving gear.
2. the cleaning device for glazing machine for crystal plate according to claim 1, is characterized in that, described spray head is arranged on shower by shower valve.
3. the cleaning device for glazing machine for crystal plate according to claim 2, is characterized in that, described shower valve adopts magnetic valve.
4. the cleaning device for glazing machine for crystal plate according to claim 1, it is characterized in that, described water inlet pipe and the mounting structure of installing plate comprise: be located in the bearing block in installing plate, be disposed with from bottom to top in described bearing block and the bearing of water inlet pipe interference fit and the spacer with water inlet pipe matched in clearance, spacer and be respectively arranged with sealing ring between water inlet pipe and bearing block.
5. according to the cleaning device for glazing machine for crystal plate one of Claims 1-4 Suo Shu, it is characterized in that, described riser has four pieces at least, and all risers and installing plate surround the casing under shed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420567922.6U CN204107908U (en) | 2014-09-29 | 2014-09-29 | A kind of cleaning device for glazing machine for crystal plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420567922.6U CN204107908U (en) | 2014-09-29 | 2014-09-29 | A kind of cleaning device for glazing machine for crystal plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204107908U true CN204107908U (en) | 2015-01-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420567922.6U Active CN204107908U (en) | 2014-09-29 | 2014-09-29 | A kind of cleaning device for glazing machine for crystal plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204107908U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107042213A (en) * | 2017-03-16 | 2017-08-15 | 广东美的制冷设备有限公司 | Hydrojet component, cleaning device and air conditioner |
| CN107638979A (en) * | 2017-10-20 | 2018-01-30 | 江苏欧倍力洗碗设备制造有限公司 | A kind of spray assemblies |
-
2014
- 2014-09-29 CN CN201420567922.6U patent/CN204107908U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107042213A (en) * | 2017-03-16 | 2017-08-15 | 广东美的制冷设备有限公司 | Hydrojet component, cleaning device and air conditioner |
| CN107638979A (en) * | 2017-10-20 | 2018-01-30 | 江苏欧倍力洗碗设备制造有限公司 | A kind of spray assemblies |
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|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |