CN204101502U - A kind of multi-electrode microsensor for detecting copper metal vapors concentration - Google Patents
A kind of multi-electrode microsensor for detecting copper metal vapors concentration Download PDFInfo
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- CN204101502U CN204101502U CN201420229927.8U CN201420229927U CN204101502U CN 204101502 U CN204101502 U CN 204101502U CN 201420229927 U CN201420229927 U CN 201420229927U CN 204101502 U CN204101502 U CN 204101502U
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- 239000002184 metal Substances 0.000 title claims abstract description 47
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 47
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 16
- 239000010949 copper Substances 0.000 title claims abstract description 16
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 15
- 238000000605 extraction Methods 0.000 claims abstract description 29
- 230000005684 electric field Effects 0.000 claims abstract description 14
- 239000000284 extract Substances 0.000 claims abstract description 11
- 230000001133 acceleration Effects 0.000 claims abstract description 4
- 238000009792 diffusion process Methods 0.000 claims abstract description 4
- 239000007921 spray Substances 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 10
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 6
- 102000011842 Serrate-Jagged Proteins Human genes 0.000 claims description 4
- 108010036039 Serrate-Jagged Proteins Proteins 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 4
- 239000004642 Polyimide Substances 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 42
- 238000000034 method Methods 0.000 description 8
- 238000012544 monitoring process Methods 0.000 description 8
- 238000009413 insulation Methods 0.000 description 7
- 238000002679 ablation Methods 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 6
- 238000000926 separation method Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 239000002041 carbon nanotube Substances 0.000 description 2
- 229910021393 carbon nanotube Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
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Abstract
The utility model discloses a kind of multi-electrode microsensor for detecting copper metal vapors concentration, comprise under it: electric discharge negative electrode, described electric discharge negative electrode comprises metal discharge pin array, described electric discharge plus earth, and described electric discharge negative electrode by producing highfield thus field emitted electron in territory, metal discharge needle tip local cell, realize tested gas molecule ionization between electrode; First insulating supporting, for isolated electric discharge negative electrode and extraction electrode; Extract electrode, described extraction Electrode connection direct supply, extract tested gas by the positive ion stream produced after ionization, collision, diffusion, realize being separated of electronics and positive ion stream; Second insulating supporting, for isolated extraction electrode and passive electrode; Passive electrode, described passive electrode connects direct supply, makes positive ion stream ripple electric field acceleration thus be collected electrode to collect.Sensor disclosed in the utility model can make tested gas generation weak discharge under the condition of normal temperature, atmospheric pressure and low voltage, and on passive electrode, obtain corresponding discharge current, can be used for detecting the indoor copper vapor concentration of breaker arc extinguishing.
Description
Technical field
The utility model relates to circuit breaker electrical endurance detection field, especially, relates to a kind of multi-electrode microsensor for detecting copper metal vapors concentration.
Background technology
In electric system, isolating switch is one of most important equipment in switching electrical, and the reliability of its performance is related to the safe operation of electric system.Practice shows, the electric life of isolating switch is the important parameter of isolating switch life diagnosis.At present, high pressure SF
6the mechanical property of isolating switch, shelf depreciation (insulation characterisitic), SF
6gas characteristics etc. are obtained for further investigation, and have practicable practical technique to supply, but high pressure SF
6the electric life characteristic research of isolating switch only has based on N-I
bthe method that the minorities such as curve, energy accumulation method are roughly estimated.
Existing electric life monitoring method depends on isolating switch dropout current parameter, as cumlative energy method, is the electric current flowed across by accumulation certain hour inner breaker contact and the energy obtained, corresponds to the electric life of isolating switch after this energy being multiplied by coefficient.But the method is not considered to flow through the complex relationship between the electric current at contact two ends and contact of breaker ablation completely, the energy also not considering to flow through contact has how many ablation for contact on earth, and therefore the result of gained is very rough, is difficult to practical application.
Research shows, the principal element affecting electric life is electrical wear, comprises arc-chutes, arc-extinguishing medium, contact three aspect, and what play a decisive role is the electrical wear of contact.With the combustion process of electric arc, contact ablation produces a large amount of metal vapors, simultaneously SF under arcing
6decompose generating strap charged particle, after reacting with impurity, form stable neutral particle, as SOF
2, SO
2f
2deng, long-term existence is in arc-chutes.Therefore, the electric life of the content of metal vapors and the ablation degree of contact and isolating switch is closely related, and SF
6partially decomposed product is also relevant with contact ablation situation, can be used as the characteristic quantity of circuit breaker electrical endurance.
And for various sensor of the prior art, in recent years, along with developing by leaps and bounds of carbon nanotube technology, carbon nano tube sensor is progressively applied to the monitoring of high pressure GIS partial discharge with the advantage of its uniqueness, makes it possess and be applied to high pressure SF
6the possibility of circuit breaker electrical endurance monitoring.But how to obtain a kind of microsensor that accurately can detect copper vapour concentration, thus be applied to isolating switch life-span and the detection of GIS insulation life, remain the technical matters that prior art needs solution badly.
Utility model content
The purpose of this utility model is to propose a kind of novel micron-scale sensor of monitoring copper metal concentration, thus passes through SF
6the electric life of isolating switch is monitored and assessed to isolating switch arcing contact ablation situation.
For reaching this object, the utility model by the following technical solutions:
For detecting a multi-electrode microsensor for copper metal vapors concentration, comprise under it:
Electric discharge negative electrode, described electric discharge negative electrode comprises metal discharge pin array, described electric discharge plus earth, and described electric discharge negative electrode by producing highfield thus field emitted electron in territory, metal discharge needle tip local cell, realizes tested gas molecule ionization between electrode;
First insulating supporting, for isolated electric discharge negative electrode and extraction electrode;
Extract electrode, described extraction Electrode connection direct supply, extract tested gas by the positive ion stream produced after ionization, collision, diffusion, realize being separated of electronics and positive ion stream;
Second insulating supporting, for isolated extraction electrode and passive electrode;
Passive electrode, described passive electrode connects direct supply, makes positive ion stream by electric field acceleration thus be collected electrode to collect.
Preferably, described electric discharge negative electrode comprises the base plate being positioned at bottom, the metallic film substrate in the middle part of described plate inner surface, and at described metallic film suprabasil metal discharge pin array.
Further preferably, described base plate adopts high-boron-silicon glass base plate, and described metallic film substrate is Ti metallic film, and described metal discharge pin array utilizes plasma deposition to prepare.
Preferably, described extraction electrode adopts SiO
2material is as base plate, and two sides adhesion metal film, described passive electrode adopts SiO
2material as base plate, inner side adhesion metal film.Described extraction electrode surface has multiple air hole.
Preferably, the length of the single spray point in described metal discharge pin array is about 100 μm to 1mm, and the distance between each spray point is about 50 μm to 100 μm.Further preferably, the diameter of described spray point is about 1 μm.
Preferably, described extraction electrode uses the direct supply of 100V to 200V, and the DC voltage that described passive electrode uses is lower than the voltage between described extraction electrode and sparking electrode.
Preferably, described first insulating supporting is square frame-shaped, and its border is made into serrate, and described second insulating supporting is multiple rectangular dielectric blocks, is positioned at the edge of described extraction electrode.
Preferably, described first insulating supporting and described second insulating supporting are high-boron-silicon glass material or polyimide.
The utility model can detect and assess the electric life of isolating switch, have and be applicable to gas concentration on-line monitoring, reduce practical operation difficulty, be convenient to install, reduce the starting potential of gas breakdown, effectively can identify different gas, detect gas concentration, can be applicable to the advantage of circuit breaker electrical endurance and the monitoring of GIS insulation life.
Accompanying drawing explanation
Fig. 1 is the spatial structure side view of the miniature micro-meter scale sensor according to specific embodiment of the utility model;
Fig. 2 be the sensor of miniature micro-meter scale sensor of the present utility model and prior art when electrode separation changes, the discharge inception voltage comparison diagram of the copper metal vapors that can obtain;
Fig. 3 is that the miniature micro-meter scale sensor discharge current in the utility model is taken the logarithm and relation between the gas concentration of tested various steam.
The technical characteristic that Reference numeral in figure refers to respectively is:
1, passive electrode; 2, electrode is extracted; 3, the first insulating supporting; 4, metal discharge pin array; 5, base plate; 6, the second insulating supporting; 7, metallic film substrate.
Embodiment
Below in conjunction with drawings and Examples, the utility model is described in further detail.Be understandable that, specific embodiment described herein only for explaining the utility model, but not to restriction of the present utility model.It also should be noted that, for convenience of description, illustrate only the part relevant to the utility model in accompanying drawing but not entire infrastructure.
See Fig. 1, disclosing a kind of multi-electrode microsensor for detecting copper metal vapors concentration according to the utility model specific embodiment, comprising under it:
Electric discharge negative electrode, described electric discharge negative electrode comprises metal discharge pin array 4, described electric discharge plus earth, by producing highfield thus field emitted electron in territory, metal discharge needle tip local cell, realizes tested gas molecule ionization between electrode;
First insulating supporting 3, for isolated electric discharge negative electrode and extraction electrode 2;
Extract electrode 2, described extraction Electrode connection direct supply, extract tested gas by the positive ion stream produced after ionization, collision, diffusion, realize being separated of electronics and positive ion stream;
Second insulating supporting 6, for isolated extraction electrode 2 and passive electrode 1, preferably;
Passive electrode 1, described passive electrode connects direct supply, makes positive ion stream by electric field acceleration thus be collected electrode to collect.
Therefore, first the utility model adopts metal discharge pin array, solves the problem that gas breakdown needs high voltage, achieves to produce high electric field at the lower voltage and make tested gas breakdown; Secondly adopt metal discharge pin array due to the utility model and extract electrode structure, the life-span of sensor increases substantially; Again, the utility model adopts passive electrode to absorb positive ion stream, the tested gas concentration of reaction that the discharge current that it flows through can be sensitive.So, there is weak discharge, passive electrode upper reaches overdischarge electric current in tested gas, can be used for detecting tested gas concentration between sparking electrode and extraction electrode.
Preferably, described electric discharge negative electrode comprises the base plate 5 being positioned at bottom, the metallic film substrate 7 in the middle part of base plate 5 inside surface, and the metal discharge pin array 4 in described metallic film substrate 7.
Further preferably, described base plate adopts high-boron-silicon glass base plate, and metallic film substrate 7 is Ti metallic film, utilizes plasma deposition to prepare described metal discharge pin array 4.Adopt high-boron-silicon glass base plate, its high-temperature stability can be improved; Adopt Ti metallic film as substrate grown metal discharge pin array, contribute to combine closely substrate and metal discharge pin array, and there is sufficient intensity, enough little contact resistance, ensure that most of spray point can not depart from process.Plasma deposition is utilized to prepare metal discharge pin array, the metal discharge needle set obtained can be made to have enough density and spray point spacing to be greater than pin long, the spray point ensuring sufficient amount participates in ionization and Flied emission process, and reduces the electric field shielding effect between spray point.
Further preferably, the DC voltage of described passive electrode use is lower than the voltage between described extraction electrode and sparking electrode.Therefore, it is possible to accelerate previously described positive ion to flow to passive electrode motion.
In order to realize good measurement effect, described extraction electrode 2 adopts positive direct supply, such as, uses the direct supply of 100V to 200V.In practical application, different tested gas has different firing potential, extracts the DC voltage range of choice of electrode use at 100V-200V.
Preferably, described extraction electrode 2 adopts SiO
2material as base plate, two sides adhesion metal film.Like this, be 100-200V owing to extracting institute's making alive on electrode, so the direction of an electric field extracted between electrode and electric discharge negative electrode points to electric discharge negative electrode; And the voltage that passive electrode applies is lower than the voltage extracted between electrode and electric discharge negative electrode, so the direction of an electric field extracted between electrode and passive electrode points to passive electrode; So the direction of an electric field extracting electrode both sides is contrary, further utilize the reversed electric field extracting electrode both sides, realize being separated of electronics and ion current.
Further preferably, on described extraction electrode 2 surface, there is multiple air hole, be preferably, 3 to 4 elliptical vent hole, this makes it possible to extract positive ion stream and can not spray point be destroyed.In actual applications, positive ion stream as previously described can be overcome the weak electric field extracted near electrode 2 and be entered the region of extracting between electrode 2 and passive electrode 1 by the air hole of described extraction electrode, avoid bombarding spray point, thus improve the serviceable life of described novel sensor.
Preferably, described passive electrode adopts SiO
2material as base plate, inner side adhesion metal film.Preferably, base plate inner metal film adopts Al or Cu material.
Preferably, the length of the single spray point in described metal discharge pin array 4 is about 100 μm to 1mm, and the distance between each spray point is about 50 μm to 100 μm.Therefore, volume this feature little can be utilized, avoid repeated disassembled and assembled, ensure that tested gas is not contaminated thus improve measuring accuracy, thus be convenient to described sensor to be installed on the indoor or GIS cavity inner wall of breaker arc extinguishing.
Further, see Fig. 2, be the sensor of miniature micro-meter scale sensor of the present utility model and prior art when electrode separation changes, the discharge inception voltage comparison diagram of the copper metal vapors that can obtain.Electrode separation is controlled in more among a small circle, the starting potential of tested gas discharge can be reduced.
Further preferably, described spray point diameter is about 1 μm.Therefore, utilize most advanced and sophisticated this feature of deep camber of spray point, compared with producing very high Nonlinear Electric Field in zonule near most advanced and sophisticated, thus medium breakdown phenomenon occurring in ionized gas around, making to produce faint discharge current under relatively low voltage.
Therefore, novel micro-meter scale sensor disclosed in the utility model can measure copper metallic vapour, and SF
6main decomposition products when there is electric discharge is (as SOF
2, SO
2f
2deng) as main discharge gas.These tested gases are key components of reaction circuit breaker electrical endurance or GIS insulation life, and the concentration accurately measuring these gases can well react circuit breaker electrical endurance or GIS insulation life.
Not only in this, and novel micro-meter scale sensor disclosed in the utility model can also be used for environment measurement, and now, tested gas can be CO, NH
3, O
3, C
2h
2, SO
2deng harmful gas.In another embodiment, be difference and measurement multiple gases, select multiple sensor composition sensor array with different spacing, described sensor array can detect, for distinguishing gaseous species the multiple gases of mixing simultaneously.
Meanwhile, described first insulating supporting 3 is square frame-shaped, and its border is made into serrate, and preferably adopts high-boron-silicon glass to carry out isolating and supporting as insulating material.The border of the first insulating supporting 3 is made into serrate, is the homogeneity for ensureing tested distribution of gas inside and outside described novel sensor, and strengthens supporting role.Adopt high-boron-silicon glass isolation have the described electric discharge negative electrode of different potentials and extract electrode, there is the properties such as high strength, abrasion performance, high temperature resistant, anticorrosion and electric insulation.
Described second insulating supporting 6 is multiple rectangular dielectric blocks, is positioned at the edge of described extraction electrode 2, also adopts high-boron-silicon glass to carry out isolating and supporting as insulating material.
Meanwhile, described first insulating supporting and described second insulating supporting all can adopt polyimide material to replace high-boron-silicon glass.
In novel micro-meter scale sensor of the present utility model, the discharge current of described sensor is nA level.Different tested gas has different discharge current response pattern.The miniature micro-meter scale sensor discharge current that Fig. 3 shows in the utility model is taken the logarithm and tested copper metal vapors, SOF
2, SO
2f
2, O
2, SF
6etc. the relation between gas concentration, as seen from the figure, in actual applications, along with the increase of gas concentration, the logarithm of discharge current and gas concentration are proportionate linear relationship.The discharge current of gas with various has obvious difference, and namely the utility model has different sensitivity to different types of gas.Tested gas concentration can be detected accordingly, and identify gas componant.
In sum, novel micro-meter scale sensor described in the utility model has the following advantages:
(1) the utility model proposes a kind of brand-new multiple electrode structure micro-meter scale sensor, this sensor construction is field emitted electron by metal discharge pin array generation high field intensity, the discharging condition of gas is met under less impressed voltage, just can produce a large amount of positive ion stream and electronics in the electrode gap of segmentation, and owing to extracting the engraved structure of electrode and neighbouring weak electric field, realize being separated of positive ion stream and electronics, thus the novel micro-meter scale sensor described in improving, be applicable to gas concentration on-line monitoring;
(2) adopt metal discharge pin as sparking electrode, the very high Nonlinear Electric Field utilizing it to be formed at most advanced and sophisticated near zone, makes the breakdown condition reaching tested gas at the lower voltage, reduces practical operation difficulty;
(3) adopt micron scale structures, be beneficial to the utility model and be arranged on arc-extinguishing chamber of circuit breaker and GIS cavity inner wall, and micro-meter scale electrode separation can reduce the starting potential of gas breakdown further;
(4) tested gas is copper metal vapors and SF
6main decomposition products when there is electric discharge is (as SOF
2, SO
2f
2deng), the utility model effectively can identify gas, detect gas concentration, can be applicable to circuit breaker electrical endurance and the monitoring of GIS insulation life.
Above content is in conjunction with concrete preferred implementation further detailed description of the utility model; can not assert that embodiment of the present utility model is only limitted to this; for the utility model person of an ordinary skill in the technical field; without departing from the concept of the premise utility; some simple deduction or replace can also be made, all should be considered as belonging to the utility model by submitted to claims determination protection domain.
Claims (9)
1., for detecting a multi-electrode microsensor for copper metal vapors concentration, comprise under it:
Electric discharge negative electrode, described electric discharge negative electrode comprises metal discharge pin array, described electric discharge plus earth, and described electric discharge negative electrode by producing highfield thus field emitted electron in territory, metal discharge needle tip local cell, realizes tested gas molecule ionization between electrode;
First insulating supporting, for isolated electric discharge negative electrode and extraction electrode;
Extract electrode, described extraction Electrode connection direct supply, extract tested gas by the positive ion stream produced after ionization, collision, diffusion, realize being separated of electronics and positive ion stream;
Second insulating supporting, for isolated extraction electrode and passive electrode;
Passive electrode, described passive electrode connects direct supply, makes positive ion stream by electric field acceleration thus be collected electrode to collect.
2. multi-electrode microsensor according to claim 1, is characterized in that:
Described electric discharge negative electrode comprises the base plate being positioned at bottom, the metallic film substrate in the middle part of described plate inner surface, and at described metallic film suprabasil metal discharge pin array.
3. multi-electrode microsensor according to claim 2, is characterized in that:
Described base plate adopts high-boron-silicon glass base plate, and described metallic film substrate is Ti metallic film, and described metal discharge pin array utilizes plasma deposition to prepare.
4. multi-electrode microsensor according to claim 1, is characterized in that:
Described extraction electrode adopts SiO
2material is as base plate, and two sides adhesion metal film, described passive electrode adopts SiO
2material as base plate, inner side adhesion metal film.
5. multi-electrode microsensor according to claim 4, is characterized in that:
Described extraction electrode surface has multiple air hole.
6., according to the arbitrary described multi-electrode microsensor of claim 1-5, it is characterized in that:
The length of the single spray point in described metal discharge pin array is about 100 μm to 1mm, and the distance between each spray point is about 50 μm to 100 μm.
7. multi-electrode microsensor according to claim 6, is characterized in that:
Described extraction electrode uses the direct supply of 100V to 200V, and the DC voltage that described passive electrode uses is lower than the voltage between described extraction electrode and sparking electrode.
8. multi-electrode microsensor according to claim 6, is characterized in that:
Described first insulating supporting is square frame-shaped, and its border is made into serrate, and described second insulating supporting is multiple rectangular dielectric blocks, is positioned at the edge of described extraction electrode.
9. multi-electrode microsensor according to claim 8, is characterized in that:
Described first insulating supporting and described second insulating supporting are high-boron-silicon glass material or polyimide.
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| CN201420229927.8U CN204101502U (en) | 2014-05-07 | 2014-05-07 | A kind of multi-electrode microsensor for detecting copper metal vapors concentration |
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| CN201420229927.8U CN204101502U (en) | 2014-05-07 | 2014-05-07 | A kind of multi-electrode microsensor for detecting copper metal vapors concentration |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104062350A (en) * | 2014-05-07 | 2014-09-24 | 西安交通大学 | Multi-electrode microsensor for detecting copper metal vapor concentration |
| CN106986302A (en) * | 2017-02-24 | 2017-07-28 | 西安交通大学 | A kind of micron order semiconductor transducer and preparation method thereof |
| CN108548864A (en) * | 2018-03-20 | 2018-09-18 | 上海交通大学 | Plasma gas sensor and its manufacturing method |
| CN110031513A (en) * | 2019-03-28 | 2019-07-19 | 西安理工大学 | For detecting the microsensor of Cu vapor content in environment-friendly type switchgear |
-
2014
- 2014-05-07 CN CN201420229927.8U patent/CN204101502U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104062350A (en) * | 2014-05-07 | 2014-09-24 | 西安交通大学 | Multi-electrode microsensor for detecting copper metal vapor concentration |
| CN104062350B (en) * | 2014-05-07 | 2017-04-19 | 西安交通大学 | Multi-electrode microsensor for detecting copper metal vapor concentration |
| CN106986302A (en) * | 2017-02-24 | 2017-07-28 | 西安交通大学 | A kind of micron order semiconductor transducer and preparation method thereof |
| CN108548864A (en) * | 2018-03-20 | 2018-09-18 | 上海交通大学 | Plasma gas sensor and its manufacturing method |
| CN110031513A (en) * | 2019-03-28 | 2019-07-19 | 西安理工大学 | For detecting the microsensor of Cu vapor content in environment-friendly type switchgear |
| CN110031513B (en) * | 2019-03-28 | 2022-01-07 | 西安理工大学 | Miniature sensor for detecting Cu vapor content in environment-friendly switch equipment |
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