CN204088289U - 铝质压环 - Google Patents

铝质压环 Download PDF

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Publication number
CN204088289U
CN204088289U CN201420597620.3U CN201420597620U CN204088289U CN 204088289 U CN204088289 U CN 204088289U CN 201420597620 U CN201420597620 U CN 201420597620U CN 204088289 U CN204088289 U CN 204088289U
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aluminium
aluminium ring
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沈笑
廖海涛
缪海兵
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Wuxi Yiwen Microelectronics Technology Co ltd
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Advanced Materials Technology and Engineering Inc
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Abstract

本实用新型提供了一种铝质压环，其包括铝环主体，铝环主体的正、反面互相平行，所述铝环主体内圈向下形变形成一圈凹陷部，凹陷部正面的形状为一个圆环，所述圆环内圆有一段为直线，该段直线位于圆环内圆65度弧范围内；所述铝环主体向外具有六个延伸部，每个延伸部上具有一个螺孔。所述六个延伸部围绕铝环主体一周分布，夹角分别为60度、60度、60度、60度、65度和55度，所述圆环内圆的一段直线位于夹角65度的两个延伸部与铝环主体圆心连线的夹角内。其优点是：当晶片在腔体反应时将晶片压住，防止晶片滑动，提高生产效率。采用这种结构节省材料，节约生产成本。

Description

铝质压环
技术领域
本实用新型涉及一种铝质压环，用于半导体制造业中晶片的固定。
背景技术
铝质压环用于压住晶片固定晶片位置。晶片在腔体中反应有时会发生滑动，当反应完后由于滑动，会导致无法将晶片传送出来。用铝质压环将晶片压住，当反应完成后就可以顺利的将晶片传送出来。
发明内容
本实用新型的目的是提供一种铝质压环，能够配合特定腔体，将晶片在反应过程中压住固定。
按照本实用新型提供的技术方案，所述的铝质压环包括铝环主体，铝环主体的正、反面互相平行，所述铝环主体内圈向下形变形成一圈凹陷部，凹陷部正面的形状为一个圆环，所述圆环内圆有一段为直线，该段直线位于圆环内圆65度弧范围内；所述铝环主体向外具有六个延伸部，每个延伸部上具有一个螺孔。
所述六个延伸部围绕铝环主体一周分布，夹角分别为60度、60度、60度、60度、65度和55度，所述圆环内圆的一段直线位于夹角65度的两个延伸部与铝环主体圆心连线的夹角内。
本实用新型的优点是：当晶片在腔体反应时将晶片压住，防止晶片滑动，提高生产效率。采用这种结构节省材料，节约生产成本。
附图说明
图1是本实用新型的主视图。
图2是本实用新型的剖视图。
具体实施方式
下面结合附图和实施例对本实用新型作进一步说明。
如图1，2所示，本实用新型包括铝环主体1，铝环主体1的正、反面互相平行，所述铝环主体1内圈向下形变形成一圈凹陷部2，凹陷部2正面的形状为一个圆环，即为铝质压环的平边。所述圆环内圆有一段为直线，该段直线位于圆环内圆65度弧范围内。铝环主体1的厚度为3.2mm，铝质压环的整体厚度为6.3mm。
如图1所示，所述铝环主体1向外具有六个延伸部3，每个延伸部3上具有一个螺孔4。所述六个延伸部3围绕铝环主体1一周分布，夹角分别为60度、60度、60度、60度、65度和55度，所述圆环内圆的一段直线位于夹角65度的两个延伸部3与铝环主体1圆心连线的夹角内。
该铝质压环通过螺孔4固定在反应腔体的陶瓷环上，然后晶片的平边与铝质压环的平边相重叠后将晶片压住。当晶片在腔体反应时防止晶片滑动，这样晶片完成反应后就可以顺利的从腔体里传送出来。

Claims (2)

1.铝质压环，包括铝环主体（1），铝环主体（1）的正、反面互相平行，其特征是：所述铝环主体（1）内圈向下形变形成一圈凹陷部（2），凹陷部（2）正面的形状为一个圆环，所述圆环内圆有一段为直线，该段直线位于圆环内圆65度弧范围内；所述铝环主体（1）向外具有六个延伸部（3），每个延伸部（3）上具有一个螺孔（4）。
2.如权利要求1所述铝质压环，其特征是，所述六个延伸部（3）围绕铝环主体（1）一周分布，夹角分别为60度、60度、60度、60度、65度和55度，所述圆环内圆的一段直线位于夹角65度的两个延伸部（3）与铝环主体（1）圆心连线的夹角内。
CN201420597620.3U 2014-10-15 2014-10-15 铝质压环 Active CN204088289U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420597620.3U CN204088289U (zh) 2014-10-15 2014-10-15 铝质压环

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CN201420597620.3U CN204088289U (zh) 2014-10-15 2014-10-15 铝质压环

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CN204088289U true CN204088289U (zh) 2015-01-07

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CN (1) CN204088289U (zh)

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