CN204085464U - A kind of surface profile measurement worktable in place - Google Patents

A kind of surface profile measurement worktable in place Download PDF

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Publication number
CN204085464U
CN204085464U CN201420481477.1U CN201420481477U CN204085464U CN 204085464 U CN204085464 U CN 204085464U CN 201420481477 U CN201420481477 U CN 201420481477U CN 204085464 U CN204085464 U CN 204085464U
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China
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mentioned
axis
frame body
upper frame
screw mandrel
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崔长彩
陈俊英
陈伟鹏
李兵
余卿
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Huaqiao University
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Huaqiao University
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Abstract

The utility model discloses a kind of surface profile measurement worktable in place, comprise support and microscope, support comprises lower shoe and upper frame body, upper frame body is the opening-like hollow frame in its upper end, upper frame body is can the mode of fore-and-aft direction translation gliding of lower shoe be erected at above the upper surface of lower shoe, the front side of lower shoe or rear side are provided with the X-axis translation driving device controlling to slide before and after upper frame body, added being provided with of the upper end end face of upper frame body can along the placement platform of upper frame body left and right translation, and in upper frame body, be provided with the Y-axis translation driving device controlling placement platform and move left and right, placement platform erects and is provided with installation column, column is installed and is provided with mounting blocks moving up and down, microscope is arranged on above-mentioned mounting blocks, Z axis lifting drive column being provided with and controlling mounting blocks and move up and down is installed.The beneficial effects of the utility model: it is measured under can realizing in place and line, applied widely, and has simple, reasonable, the compact feature of one-piece construction.

Description

A kind of surface profile measurement worktable in place
Technical field
The utility model relates to a kind of testing platform, particularly one surface profile measurement worktable in place.
Background technology
Accurate Shape measure is a very important ring in modern science and technology, by detecting the physical dimension of determinand or the precision of surface topography to control product quality.Detection mode now for Shape measure is comparatively various, wherein utilize the measuring technique of optical touchless detection mode, the accurate topographic data in determinand surface can be obtained in a non-destroying manner, be widely used in various industry, particularly detection determinand in place.
The existing of paramount importance position of Shap feature detection system in place is displacement work table, its can carry out displacement adjustment have operating surface for direct or indirect clamping or place the generalized operations platform of determinand.Traditional displacement work table great majority adopt two superimposed formula structure, namely the component distribution that moves axially of the parts that move axially of X-axis and Y-axis is two-layer up and down, the double-decker of this upper and lower superposing type makes the overall volume of worktable larger, complex structure, thus cause displacement work table cannot accomplish real-time on-position measure because of restriction spatially when making on-position measure, measured object can only be disassembled be placed on displacement work table and detect, make troubles to detection.
In view of above-mentioned reason, the above-mentioned defect of the present inventor to testing platform is furtherd investigate, and this case produces thus.
Utility model content
It is simple, compact that the purpose of this utility model is to provide a kind of structure, and volume is little, applied widely, and can apply to the surface profile measurement worktable in place of situ real-time measurement.
The technical solution of the utility model is such: a kind of surface profile measurement worktable in place, comprise support and microscope, above-mentioned support comprises lower shoe and upper frame body, above-mentioned upper frame body is the opening-like hollow frame in its upper end, above-mentioned upper frame body can be erected at above the upper surface of above-mentioned lower shoe along the mode of the fore-and-aft direction translation gliding of lower shoe, the front side of above-mentioned lower shoe or rear side are provided with the X-axis translation driving device controlling to slide before and after upper frame body, added being provided with of the upper end end face of above-mentioned upper frame body can along the placement platform of upper frame body left and right translation, and in above-mentioned upper frame body, be provided with the Y-axis translation driving device controlling placement platform and move left and right, above-mentioned placement platform erects and is provided with installation column, above-mentioned installation column is provided with mounting blocks moving up and down, above-mentioned microscope is arranged on above-mentioned mounting blocks, above-mentioned installation column is provided with the Z axis lifting drive controlling mounting blocks and move up and down.
The upper surface left and right sides of above-mentioned lower shoe is convexly equipped with the X-axis guide rail that the fore-and-aft direction along lower shoe extends respectively, the upper surface of above-mentioned X-axis guide rail is convexly equipped with the X-axis slide rail that the length direction along X-axis guide rail extends, left and right two lateral wall of above-mentioned upper frame body is provided with one arm and above-mentioned upper frame body is fixed, another arm is in the L-type mounting blocks above above-mentioned X-axis slide rail, and another arm of above-mentioned L-type mounting blocks is installed with is erected on X-axis slide rail and the X-axis guide runner slided along X-axis slide rail.
Above-mentioned X-axis translation driving device comprises X-axis stepper motor, X-axis screw mandrel and X-axis slide block, the front side wall of above-mentioned lower shoe extends and is provided with installation flange, above-mentioned X-axis stepper motor is fixedly mounted on above-mentioned installation flange, and the output shaft of above-mentioned X-axis stepper motor is arranged backwards, above-mentioned X-axis screw mandrel keeps flat setting, and extend along the fore-and-aft direction of above-mentioned lower shoe, the upper surface of above-mentioned installation flange is fixed with screw rodb base, the front end activity of above-mentioned X-axis screw mandrel is through before above-mentioned screw rodb base, rear two ends, and the forward end of above-mentioned X-axis screw mandrel is connected by the output shaft of motor coupler with above-mentioned X-axis stepper motor, end, the rear end spiral shell dress locking of above-mentioned X-axis screw mandrel is on the leading flank of above-mentioned upper frame body, above-mentioned X-axis slide block set is loaded on outside above-mentioned X-axis screw mandrel, and above-mentioned X-axis slide block and above-mentioned X-axis wire rod thread are connected, above-mentioned X-axis slide block is fixedly connected with the front side wall of above-mentioned upper frame body.
Above-mentioned X-axis slide block comprises front side board, left plate and right plate, the front end of above-mentioned left plate and the front end of above-mentioned right plate are connected with the arranged on left and right sides of above-mentioned front side board is one-body molded respectively, and the rear end of above-mentioned left plate is fixedly connected with the front side wall of above-mentioned upper frame body respectively with the rear end of above-mentioned right plate.
Above-mentioned Y-axis translation driving device comprises y-axis stepper motor, Y-axis screw mandrel and Y-axis slide block, above-mentioned y-axis stepper motor is fixedly mounted on the inner bottom surface of above-mentioned upper frame body, the output shaft of above-mentioned y-axis stepper motor is towards a left side or towards right setting, above-mentioned Y-axis screw mandrel keeps flat setting, and extend along the left and right directions of above-mentioned upper frame body, the first end end of above-mentioned Y-axis screw mandrel is connected by the output terminal of motor coupler with above-mentioned y-axis stepper motor, second end end spiral shell dress locking of above-mentioned Y-axis screw mandrel is on the left side wall or right side wall of above-mentioned upper frame body, above-mentioned Y-axis slide block set is loaded on outside above-mentioned Y-axis screw mandrel, and above-mentioned Y-axis slide block and above-mentioned Y-axis wire rod thread are connected.
The upper surface of above-mentioned upper frame body front and rear sides is locked the Y-axis slide rail that the intrinsic left and right directions along above-mentioned upper frame body extends, above-mentioned Y-axis slide rail is arranged with the Y-axis guide runner slided along above-mentioned Y-axis slide rail, two above-mentioned Y-axis guide runners and above-mentioned Y-axis slide block all lock and connect with above-mentioned placement platform.
Above-mentioned installation column locking is on above-mentioned placement platform, above-mentioned Z axis lifting drive comprises Z axis stepper motor and Z axis screw mandrel, above-mentioned Z axis screw mandrel is erect and is arranged, and extend along the above-below direction of above-mentioned installation column, and above-mentioned Z axis screw mandrel is in left side wall or the right side wall place of above-mentioned installation column, above-mentioned mounting blocks is provided with the Z axis slide block be sheathed on outside above-mentioned Z axis screw mandrel, and above-mentioned Z axis slide block and above-mentioned Z axis wire rod thread are connected, above-mentioned Z axis stepper motor is arranged on above-mentioned installation column, and be in the below of above-mentioned Z axis screw mandrel, the output shaft of above-mentioned Z axis stepper motor is connected with the lower end of above-mentioned Z axis screw mandrel, the end, upper end of above-mentioned Z axis screw mandrel is flexibly connected with above-mentioned installation column.
The end face of above-mentioned installation column is installed with reel, unsettled on the right side wall of above-mentioned installation column or left side wall have balancing weight, the weight of above-mentioned balancing weight and above-mentioned mounting blocks and be arranged on microscopical weight on mounting blocks and match, the top of above-mentioned balancing weight is provided with lifting rope, the first end of above-mentioned lifting rope is fixedly connected with above-mentioned balancing weight, second end end of above-mentioned lifting rope is walked around above-mentioned reel and is extended downward above-mentioned mounting blocks place, and is fixedly connected with above-mentioned Z axis slide block.
Above-mentioned mounting blocks is provided with grating scale.
After adopting such scheme, the beneficial effects of the utility model: its X-axis translation driving device is in outside upper frame body, Y-axis translation driving device is in inside upper frame body, the motion of the X-axis of placement platform and Y-axis motion is made to belong to copline motion, can greatly shorten whole height space, small volume, the worktable being suitable for being arranged on object under test carries out on-position measure, the scope of application is wider, and it is simple to have one-piece construction, rationally, compact feature, simultaneously, microscope is arranged on mounting blocks, mounting blocks moves up and down on installation column, like this, spacing during detection between adjustable microscope and determinand, microscope is made to move to the position of the most high-resolution imaging of determinand pattern, thus the image making microscope gather is comparatively clear, and then make the detection degree of accuracy of Shap feature detection system higher.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model;
Fig. 2 is another structural representation of the present utility model (omission microscope);
Fig. 3 is partial structurtes schematic diagram of the present utility model.
Wherein:
Microscope 1 camera lens 11
Lower shoe 2 X-axis guide rail 21
Flange 22 installed by X-axis slide rail 211
Screw rodb base 221 upper frame body 3
L-type mounting blocks 31 X-axis guide runner 311
Y-axis slide rail 32 Y-axis guide runner 33
Screw rodb base 34 X-axis stepper motor 41
X-axis screw mandrel 42 X-axis slide block 43
Motor coupler 44 placement platform 5
Y-axis stepper motor 61 Y-axis screw mandrel 62
Y-axis slide block 63 motor coupler 64
Column 7 mounting blocks 71 is installed
Z axis slide block 711 installs projection 72
Reel 73 balancing weight 74
Lifting rope 75 Z axis stepper motor 81
Z axis screw mandrel 82 raster count device 9
Embodiment
One of the present utility model surface profile measurement worktable in place, as Figure 1-3, comprise support and microscope 1, support comprises lower shoe 2 and upper frame body 3, this lower shoe 2 is square plate, this upper frame body 3 is the opening-like hollow square framework in its upper end, upper frame body 3 can be erected at above the upper surface of lower shoe 2 along the mode of the fore-and-aft direction translation gliding of lower shoe 2, namely the upper surface left and right sides of lower shoe 2 is convexly equipped with the X-axis guide rail 21 that the fore-and-aft direction along lower shoe 2 extends respectively, the upper surface of X-axis guide rail 21 is convexly equipped with the X-axis slide rail 211 that the length direction along X-axis guide rail 21 extends, left and right two lateral wall of upper frame body 3 is provided with one arm and upper frame body 3 is fixed, another arm is in the L-type mounting blocks 31 above X-axis slide rail 211, and another arm of L-type mounting blocks 31 is installed with is erected on X-axis slide rail 211 and the X-axis guide runner 311 slided along X-axis slide rail 211, upper frame body 3 being slidably installed on lower shoe 2 can be realized with coordinating of X-axis guide runner 311 by X-axis slide rail 211.
The front side of this lower shoe 2 is provided with the X-axis translation driving device controlling to slide before and after upper frame body 3, X-axis translation driving device comprises X-axis stepper motor 41, X-axis screw mandrel 42 and X-axis slide block 43, the front side wall of lower shoe 2 extends be provided with and flange 22 is installed, this installs flange 22 can form type structure with lower shoe 2, X-axis stepper motor 41 is fixedly mounted on to be installed on flange 22, and the output shaft of X-axis stepper motor 41 is arranged backwards, X-axis screw mandrel 42 keeps flat setting, and extend along the fore-and-aft direction of lower shoe 2, the upper surface installing flange 22 is fixed with screw rodb base 221, the front end activity of X-axis screw mandrel 42 is through before screw rodb base 221, rear two ends, and the forward end of X-axis screw mandrel 42 is connected with the output shaft of X-axis stepper motor 41 by motor coupler 44, end, the rear end activity of X-axis screw mandrel 42 is stretched in the front side wall of upper frame body 3, this screw rodb base 221 can play rotating supporting role to X-axis screw mandrel 42, this X-axis slide block 43 is set in outside X-axis screw mandrel 42, and X-axis slide block 43 is connected with X-axis screw mandrel 42 threaded engagement, this X-axis slide block 43 comprises front side board, left plate and right plate, the front end of left plate and the front end of right plate respectively with the left side of front side board, the one-body molded connection in right both sides, the rear end of left plate is fixedly connected with the front side wall of upper frame body 3 respectively with the rear end of right plate, front side board offers the through hole passed for X-axis screw mandrel 42, the internal thread be screwed with the external thread of X-axis screw mandrel 42 is installed in this through hole, the spiral shell dress of X-axis slide block 43 on X-axis screw mandrel 42 can be realized by the cooperation of internal and external threads.During the work of X-axis translation driving device, start X-axis stepper motor 41, X-axis stepper motor 41 drives X-axis screw mandrel 42 to rotate, X-axis screw mandrel 42 rotation is irremovable, X-axis slide block 43 spiral shell is contained in outside X-axis screw mandrel 42, like this, the rotation of X-axis screw mandrel 42 can make X-axis slide block 43 make slide anteroposterior along X-axis screw mandrel 42, and the slide anteroposterior of X-axis slide block 43 can drive upper frame body 3 slide anteroposterior.
Added being provided with of the upper end end face of this upper frame body 3 can along the placement platform 5 of upper frame body about 3 translation, this placement platform 5 is covered on the upper end port of upper frame body 3, before this upper frame body 3, the upper surface of rear both sides is locked the Y-axis slide rail 32 that the intrinsic left and right directions along upper frame body 3 extends, Y-axis slide rail 32 is arranged with the Y-axis guide runner 33 slided along Y-axis slide rail 32, Y-axis guide runner 33 and the placement platform 5 of both sides lock and connect, placement platform 5 being slidably installed on upper frame body 3 can be realized by Y-axis slide rail 32 and Y-axis guide runner 33, the Y-axis translation driving device controlling placement platform 5 and move left and right is provided with in this upper frame body 3, this Y-axis translation driving device comprises y-axis stepper motor 61, Y-axis screw mandrel 62 and Y-axis slide block 63, y-axis stepper motor 61 is fixedly mounted on the inner bottom surface of upper frame body 3, and the output shaft of y-axis stepper motor 61 is towards right setting, Y-axis screw mandrel 62 keeps flat setting, and extend along the left and right directions of upper frame body 3, the inner bottom surface of upper frame body 3 is installed with screw rodb base 34, the output of screw rodb base 34 to y-axis stepper motor is passed in the first end end activity of Y-axis screw mandrel 62, and be connected with the output terminal of y-axis stepper motor 61 by motor coupler 64, accommodating in the movable right side wall stretching into upper frame body 3 in second end end of Y-axis screw mandrel 62, Y-axis slide block 63 is set in outside Y-axis screw mandrel 62, this placement platform 5 locks and connects with Y-axis slide block 63, and Y-axis slide block 63 offers the installation through hole passed for Y-axis screw mandrel 62, this installs hole wall of through hole and to get on the bus the internal thread being provided with and being screwed with Y-axis screw mandrel 62, Y-axis slide block 63 can be realized by the cooperation of this internal and external threads to be connected with Y-axis screw mandrel 62 threaded engagement.During the work of Y-axis translation driving device, start y-axis stepper motor 61, y-axis stepper motor 61 drives Y-axis screw mandrel 62 to rotate, and the rotation of Y-axis screw mandrel 62 can make Y-axis slide block 63 slide along the axial direction of Y-axis screw mandrel 62, and the slip of Y-axis slide block 63 can make placement platform 5 do left and right translation.
On this placement platform 5, perpendicular being provided with installs column 7, installing column 7 locks on placement platform 5, column 7 is installed and is provided with mounting blocks 71 moving up and down, microscope 1 is arranged on mounting blocks 71, Z axis lifting drive column 7 being provided with and controlling mounting blocks 71 and move up and down is installed, Z axis lifting drive comprises Z axis stepper motor 81 and Z axis screw mandrel 82, Z axis screw mandrel 82 is erect and is arranged, and extend along the above-below direction installing column 7, and Z axis screw mandrel 82 is in the right side wall place of installing column 7, mounting blocks 71 is provided with the Z axis slide block 711 be sheathed on outside Z axis screw mandrel 82, and Z axis slide block 711 is connected with Z axis screw mandrel 82 threaded engagement, Z axis slide block 711 offers the installation through hole passed for Z axis screw mandrel 82, this installs hole wall of through hole and to get on the bus the internal thread being provided with and being screwed with the external thread of Z axis screw mandrel 82, this Z axis stepper motor 81 is arranged on to be installed on column 7, and be in the below of Z axis screw mandrel 82, the output shaft of Z axis stepper motor 81 is connected with the lower end of Z axis screw mandrel 82, the end, upper end of Z axis screw mandrel 82 is flexibly connected with installation column 7, the right side wall upper end of namely installing column 7 is convexly equipped with installs projection 72, the end, upper end of Z axis screw mandrel 82 snaps in tightly installs in projection 72.During the work of Z axis lifting drive, start Z axis stepper motor 81, Z axis stepper motor 81 drives Z axis screw mandrel 82 to rotate, and the rotation of Z axis screw mandrel 82 makes Z axis slide block 711 slide up and down along Z axis screw mandrel 82, and the slip of Z axis slide block 711 makes microscope 1 can do oscilaltion campaign.
In the utility model, the rear side that this mounting blocks 71 is in microscope 1 is provided with raster count device 9.
One of the present utility model surface profile measurement worktable in place, when detection in place uses, is positioned on corresponding platen, and is fixed.Such as carry out detection in place at grinder wheel, concrete operations are: be first fixed on Grinder bench face by lower shoe 2, and the connection making microscope 1 corresponding to PC with raster count device, startup X-axis translation driving device after wiring completes, upper frame body 3 translation, microscope 1 together translation on column 7 is installed, X-axis translation driving device is closed when microscope 1 is in immediately below emery wheel, and the camera lens 11 of microscope 1 is arranged upward, then, start Z axis lifting drive, mounting blocks 71 lift adjustment, the lifting of mounting blocks 71 can spacing between corresponding adjustment microscope 1 and emery wheel, microscope 1 is made to carry out auto-focusing, after the monitoring picture that person to be detected observes on PC reaches certain picture rich in detail, close Z axis lifting drive, finally, detection in place is done to the axis of emery wheel, and input corresponding instruction at PC control inerface, upper frame body 3 is moved as Y direction, thus make microscope 1 complete grinding wheel spindle to the data acquisition of straight line and image acquisition, and repeat this action, sequence image f (the x simultaneously collected, y, n), wherein n represents image sequence number, be sent in PC, PC adopts and focuses on the Focus field emission array that superimposed algorithm (SML operator) obtains each point, the each point Focus field emission array obtained occur n value corresponding to maximal value namely for this reason height and position time blur-free imaging, after obtaining this position n, n value is taken advantage of the traveled distance of upper frame body when microscope adjacent twice image acquisition, thus the degree of depth of diverse location in acquisition image, like this, the detection in place of emery wheel can be completed, this kind is known based on assembling the wheel face three-dimensionalreconstruction mode of synthesizing, no longer specifically tire out at this and state, after detection completes, lower shoe 2 is disassembled from Grinder bench face.If during without the need to detection in place, testing platform can be matched with other fine motion two-dimensional stage, believe that platform is positioned on placement platform 5 by fine motion two, the camera lens 11 of microscope 1 is arranged down, detects under can realizing line.
The beneficial effects of the utility model are as follows:
One, X-axis translation driving device is in outside upper frame body 3, Y-axis translation driving device is in inside upper ledge 3 body, the motion of the X-axis of placement platform 5 and Y-axis motion is made to belong to copline motion, can greatly shorten whole height space, small volume, the worktable being suitable for being arranged on object under test carries out on-position measure, and the scope of application is wider.
Two, can realize detecting under detection in place and line, trackability is strong, uses dirigibility large, and has simple, reasonable, the compact feature of one-piece construction.
Three, adopt the fit system of screw mandrel and motor to realize the motion of X, Y, Z axis, motion is comparatively steady, and meanwhile, the raster count device that moves through of X, Y, Z axis counts, and can obtain the high-precision location of efficient stable.
Spacing when four, detecting between adjustable microscope and determinand, make microscope move to the position of the most high-resolution imaging of determinand pattern, thus the image that microscope is gathered is comparatively clear, and then makes the detection degree of accuracy of Shap feature detection system higher.
In the utility model, the end face of this installation column 7 is installed with reel 73, unsettled on the left side wall of installation column 7 have balancing weight 74, weight and the mounting blocks 71 of balancing weight 74 match with the weight being arranged on microscope 1 on mounting blocks 71, the top of balancing weight 74 is provided with lifting rope 75, the first end of lifting rope 75 is fixedly connected with balancing weight 74, and the second end end of lifting rope 75 is walked around reel 73 and extended downward Z axis slide block 711 place, and is fixedly connected with Z axis slide block 711; Like this, played the carrying balance on mounting blocks 71 by this balancing weight 74, the fine motion produced because of moment unbalance when very big program avoiding the motion of testing platform or slide up and down and affect the measurement accuracy of microscope 1, ensure that the measuring accuracy of microscope 1.
Above-described embodiment and graphic and non-limiting product form of the present utility model and style, any person of an ordinary skill in the technical field, to its suitable change done or modification, all should be considered as not departing from patent category of the present utility model.

Claims (9)

1. a surface profile measurement worktable in place, comprise support and microscope, it is characterized in that: above-mentioned support comprises lower shoe and upper frame body, above-mentioned upper frame body is the opening-like hollow frame in its upper end, above-mentioned upper frame body is being erected at above the upper surface of above-mentioned lower shoe along the mode of the fore-and-aft direction translation gliding of lower shoe, the front side of above-mentioned lower shoe or rear side are provided with the X-axis translation driving device controlling to slide before and after upper frame body, added being provided with of the upper end end face of above-mentioned upper frame body can along the placement platform of upper frame body left and right translation, and in above-mentioned upper frame body, be provided with the Y-axis translation driving device controlling placement platform and move left and right, above-mentioned placement platform erects and is provided with installation column, above-mentioned installation column is provided with mounting blocks moving up and down, above-mentioned microscope is arranged on above-mentioned mounting blocks, above-mentioned installation column is provided with the Z axis lifting drive controlling mounting blocks and move up and down.
2. one according to claim 1 surface profile measurement worktable in place, it is characterized in that: the upper surface left and right sides of above-mentioned lower shoe is convexly equipped with the X-axis guide rail that the fore-and-aft direction along lower shoe extends respectively, the upper surface of above-mentioned X-axis guide rail is convexly equipped with the X-axis slide rail that the length direction along X-axis guide rail extends, left and right two lateral wall of above-mentioned upper frame body is provided with one arm and above-mentioned upper frame body is fixed, another arm is in the L-type mounting blocks above above-mentioned X-axis slide rail, and another arm of above-mentioned L-type mounting blocks is installed with is erected on X-axis slide rail and the X-axis guide runner slided along X-axis slide rail.
3. one according to claim 1 surface profile measurement worktable in place, it is characterized in that: above-mentioned X-axis translation driving device comprises X-axis stepper motor, X-axis screw mandrel and X-axis slide block, the front side wall of above-mentioned lower shoe extends and is provided with installation flange, above-mentioned X-axis stepper motor is fixedly mounted on above-mentioned installation flange, and the output shaft of above-mentioned X-axis stepper motor is arranged backwards, above-mentioned X-axis screw mandrel keeps flat setting, and extend along the fore-and-aft direction of above-mentioned lower shoe, the upper surface of above-mentioned installation flange is fixed with screw rodb base, the front end activity of above-mentioned X-axis screw mandrel is through before above-mentioned screw rodb base, rear two ends, and the forward end of above-mentioned X-axis screw mandrel is connected by the output shaft of motor coupler with above-mentioned X-axis stepper motor, end, the rear end spiral shell dress locking of above-mentioned X-axis screw mandrel is on the leading flank of above-mentioned upper frame body, above-mentioned X-axis slide block set is loaded on outside above-mentioned X-axis screw mandrel, and above-mentioned X-axis slide block and above-mentioned X-axis wire rod thread are connected, above-mentioned X-axis slide block is fixedly connected with the front side wall of above-mentioned upper frame body.
4. one according to claim 3 surface profile measurement worktable in place, it is characterized in that: above-mentioned X-axis slide block comprises front side board, left plate and right plate, the front end of above-mentioned left plate and the front end of above-mentioned right plate are connected with the arranged on left and right sides of above-mentioned front side board is one-body molded respectively, and the rear end of above-mentioned left plate is fixedly connected with the front side wall of above-mentioned upper frame body respectively with the rear end of above-mentioned right plate.
5. one according to claim 1 surface profile measurement worktable in place, it is characterized in that: above-mentioned Y-axis translation driving device comprises y-axis stepper motor, Y-axis screw mandrel and Y-axis slide block, above-mentioned y-axis stepper motor is fixedly mounted on the inner bottom surface of above-mentioned upper frame body, the output shaft of above-mentioned y-axis stepper motor is towards a left side or towards right setting, above-mentioned Y-axis screw mandrel keeps flat setting, and extend along the left and right directions of above-mentioned upper frame body, the first end end of above-mentioned Y-axis screw mandrel is connected by the output terminal of motor coupler with above-mentioned y-axis stepper motor, second end end spiral shell dress locking of above-mentioned Y-axis screw mandrel is on the left side wall or right side wall of above-mentioned upper frame body, above-mentioned Y-axis slide block set is loaded on outside above-mentioned Y-axis screw mandrel, and above-mentioned Y-axis slide block and above-mentioned Y-axis wire rod thread are connected.
6. one according to claim 5 surface profile measurement worktable in place, it is characterized in that: the upper surface of above-mentioned upper frame body front and rear sides is locked the Y-axis slide rail that the intrinsic left and right directions along above-mentioned upper frame body extends, above-mentioned Y-axis slide rail is arranged with the Y-axis guide runner slided along above-mentioned Y-axis slide rail, two above-mentioned Y-axis guide runners and above-mentioned Y-axis slide block all lock and connect with above-mentioned placement platform.
7. one according to claim 1 surface profile measurement worktable in place, it is characterized in that: above-mentioned installation column locking is on above-mentioned placement platform, above-mentioned Z axis lifting drive comprises Z axis stepper motor and Z axis screw mandrel, above-mentioned Z axis screw mandrel is erect and is arranged, and extend along the above-below direction of above-mentioned installation column, and above-mentioned Z axis screw mandrel is in left side wall or the right side wall place of above-mentioned installation column, above-mentioned mounting blocks is provided with the Z axis slide block be sheathed on outside above-mentioned Z axis screw mandrel, and above-mentioned Z axis slide block and above-mentioned Z axis wire rod thread are connected, above-mentioned Z axis stepper motor is arranged on above-mentioned installation column, and be in the below of above-mentioned Z axis screw mandrel, the output shaft of above-mentioned Z axis stepper motor is connected with the lower end of above-mentioned Z axis screw mandrel, the end, upper end of above-mentioned Z axis screw mandrel is flexibly connected with above-mentioned installation column.
8. one according to claim 7 surface profile measurement worktable in place, it is characterized in that: the end face of above-mentioned installation column is installed with reel, unsettled on the right side wall of above-mentioned installation column or left side wall have balancing weight, the weight of above-mentioned balancing weight and above-mentioned mounting blocks and be arranged on microscopical weight on mounting blocks and match, the top of above-mentioned balancing weight is provided with lifting rope, the first end of above-mentioned lifting rope is fixedly connected with above-mentioned balancing weight, second end end of above-mentioned lifting rope is walked around above-mentioned reel and is extended downward above-mentioned mounting blocks place, and be fixedly connected with above-mentioned Z axis slide block.
9. one according to claim 1 surface profile measurement worktable in place, is characterized in that: above-mentioned mounting blocks is provided with grating scale.
CN201420481477.1U 2014-08-25 2014-08-25 A kind of surface profile measurement worktable in place Withdrawn - After Issue CN204085464U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104197856A (en) * 2014-08-25 2014-12-10 华侨大学 In-place surface topography detection workbench
CN106124171A (en) * 2016-06-16 2016-11-16 中国科学院上海光学精密机械研究所 Three-dimensional platform for the detection of optical elements of large caliber optical property
CN110281211A (en) * 2019-06-19 2019-09-27 武汉纺织大学 A kind of microscope multidimensional automatic displacement platform positioning device based on capacitive grating scale

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104197856A (en) * 2014-08-25 2014-12-10 华侨大学 In-place surface topography detection workbench
CN106124171A (en) * 2016-06-16 2016-11-16 中国科学院上海光学精密机械研究所 Three-dimensional platform for the detection of optical elements of large caliber optical property
CN106124171B (en) * 2016-06-16 2018-05-08 中国科学院上海光学精密机械研究所 Three-dimensional platform for the detection of optical elements of large caliber optical property
CN110281211A (en) * 2019-06-19 2019-09-27 武汉纺织大学 A kind of microscope multidimensional automatic displacement platform positioning device based on capacitive grating scale

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