CN204007044U - Air knife adjusting device and air knife type plate cleaning equipment - Google Patents

Air knife adjusting device and air knife type plate cleaning equipment Download PDF

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Publication number
CN204007044U
CN204007044U CN201420444403.0U CN201420444403U CN204007044U CN 204007044 U CN204007044 U CN 204007044U CN 201420444403 U CN201420444403 U CN 201420444403U CN 204007044 U CN204007044 U CN 204007044U
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air knife
clamp
adjusting device
horizontal base
side plate
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Expired - Fee Related
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CN201420444403.0U
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Chinese (zh)
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熊丹
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Individual
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Individual
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Abstract

The utility model provides a kind of air knife adjusting device that position between air knife in Organic Light Emitting Diode production technology and flat board is regulated and air knife type plate cleaning equipment, wherein air knife adjusting device comprises horizontal base, biside plate, two adjustment screw and the air knife clamp being fixedly connected with air knife, side plate is arranged on and on horizontal base, forms the sliding cavity that air feed cutter clamp slides up and down, between side plate, be also fixed with top board, air knife clamp arranges in pairs and is dissolved in sliding cavity along glide direction, air knife clamp be positioned at top board under and be slidably connected with side plate, air knife clamp along continuous straight runs near horizontal base place protrudes out holder, one adjustment screw is rotating through top board and top and top board conflict along glide direction, bottom is stretching in the air knife clamp away from horizontal base place of screw-threaded engagement, another adjustment screw is passing holder and conflicting with horizontal base of screw-threaded engagement.The utility model can precisely regulate and have advantages of simple in structure, easy and simple to handle and cost is low position between air knife and flat board.

Description

Air knife adjusting device and air knife type plate cleaning equipment
Technical field
The utility model relates to a kind of adjusting device, relates in particular in a kind of Organic Light Emitting Diode for cleaning air knife adjusting device, the air knife type plate cleaning equipment that between dull and stereotyped air knife and flat board, position regulates.
Background technology
(English full name is OLED: Organic Light-Emitting Diode, Chinese is: Organic Light Emitting Diode) frivolous owing to possessing (plate thickness is generally less than 2 millimeters), the characteristics such as power saving (operating voltage is generally between 3 volts to 10 volts), therefore on the display screen of digital product, be widely applied, and there is larger market potential, in the world the application of OLED is all focused on flat-panel monitor at present, because OLED be unique in application can and the TFT-LCD technology of mentioning in the same breath, and be in current all Display Techniques, unique large scale of making, high brightness, the Display Technique of the soft screen of high-resolution, can make the thickness the same with paper.Therefore, the Display Technique of OLED is the developing direction of Display Technique in the future.
The basic structure of organic light emitting diode device is: in the confined space forming at dull and stereotyped (as glass substrate) and encapsulation cover plate, organic light-emitting units is set, organic light-emitting units comprises each layer of anode, organic luminous layer and negative electrode etc., and anode is drawn by lead-in wire in position, non-light-emitting area with negative electrode and is connected with driving chip.And in the manufacture process of above-mentioned Organic Light Emitting Diode, dull and stereotyped cleannes directly have influence on yields and the life-span of organic light emitting diode device, therefore, cleaning clean to flat board is a requisite procedure in Organic Light Emitting Diode manufacture process with the impurity such as aqueous vapor, dust granules of removing planar surface.Wherein, the particulate adhering on planar surface comes from environmental factor mostly, the chip being produced as personnel, board operation or in air floating dust etc., mainly contain several as follows and particulate adheres to the origin cause of formation of planar surface: the particulate in (1) environment is deposited on planar surface because of the weight of itself; (2) between the molecule of fine particles and the film molecule of planar surface, there is van der Waals' force; (3) electrostatic attraction producing between planar surface and the particulate with electric charge.Therefore, in the production process of Organic Light Emitting Diode, conventionally to reduce plate exposure around the time in environment to reduce the dull and stereotyped chance being adhered to by particulate, and utilize various clean method of cleaning that particulate is removed, and clean method of cleaning has and utilizes the wet-cleaning that ultrasonic washs and utilize ejection pure air to blow this two large class of dry cleaning of substrate surface steam particulate off.Wherein, because wet-cleaned easily produces aqueous vapor at planar surface, cause etching area to be completely removed and form residual phenomena, having ejection pure air to blow the dry type of substrate surface steam particulate off great clearly therefore also need to coordinate after wet-cleaned, the step of specifically flat board being cleaned is as follows:
(1) prewet: make planar surface form hydrophily and can be evenly distributed on dull and stereotyped surface to reach cleaning agent.(2) spray chemical liquid, shake and shake up: spray chemical liquid, utilize ultrasonic oscillation, hyperacoustic phonon energy pierces through one deck microbubble of microparticle surfaces, particulate is soaked in chemical liquid, and chemical liquid diffuses to border interface formation dissolution, could be chemically reacted afterwards, and shake up, chemical liquid can completely is coated on planar surface.(3) rinse and shake: chemical liquid being rinsed well, and utilized ultrasonic energy, effectively shorten the boundary layer of planar surface, reduce resistance, and reach the object of removing particulate.(4) dry up: utilize Koln to reach effect principle, make the clean air of air knife ejection high pressure, the moisture removal that planar surface is adhered to, avoids washmarking to produce, therefore, the utilization of air knife occupies very important position at flat board aspect clean.
And distance between existing air knife and flat board is all generally not have adjustablely, this makes between air knife and flat board to maintain a preferably distance, thereby has influence on the dull and stereotyped cleanliness factor cleaning, and then has influence on the ordinary life of OLED device.At present, although also occur on market can be to the device that between flat board and air knife, distance regulates, due to factors such as complex structure, operation inconvenience and the manufacturing cost of this device are higher, thereby limited the scope of application of this device.
Therefore, being badly in need of wanting a kind of precisely regulates and has an air knife adjusting device simple in structure, easy to operate and that cost is low position between air knife and flat board.
Utility model content
An object of the present utility model is to provide a kind of position between air knife and flat board is precisely regulated and has an air knife adjusting device simple in structure, easy and simple to handle and that cost is low.
Another object of the present utility model is to provide a kind of position between air knife and flat board is carried out precisely regulating to improve dull and stereotyped cleannes and to have air knife type plate cleaning equipment simple in structure, easy and simple to handle and that cost is low.
For realizing above-mentioned object, the utility model provides a kind of air knife adjusting device, be applicable in Organic Light Emitting Diode production technology regulating with cleaning position between dull and stereotyped air knife and flat board, wherein, the utility model air knife adjusting device comprises horizontal base, biside plate, two adjustment screw and the air knife clamp being fixedly connected with air knife, described side plate is the sliding cavity that on described horizontal base, formation slides up and down for described air knife clamp that is arranged on being parallel to each other, between described side plate, be also fixed with the top board parallel with described horizontal base, described air knife clamp arranges in pairs and is placed in described sliding cavity along glide direction, be placed in described air knife clamp in described sliding cavity be positioned at described top board under and be slidably connected with described side plate, described air knife clamp along continuous straight runs near described horizontal base place protrudes out holder, described in one, adjustment screw is rotating through described top board and top and the conflict of described top board along glide direction, bottom is stretching in the described air knife clamp away from described horizontal base place of screw-threaded engagement, described in another, adjustment screw is conflicting through described holder and with described horizontal base of screw-threaded engagement.
Preferably, the utility model air knife adjusting device also comprises air knife angle adjusting piece, described air knife clamp offers the installing hole of installing for described air knife, described air knife clamp also offers the groove that is communicated with and runs through top and/or the bottom of described air knife clamp with described installing hole, described groove is separated described air knife clamp and is become two clamping sections, described air knife angle adjusting piece be successively rotating pass one described in clamping section and groove and with clamping section screw-threaded engagement described in another, described side plate is offered accordingly and is equipped with the adjustment operation groove regulating for described air knife angle adjusting piece.By coordinating of air knife angle adjusting piece and two clamping sections, in the time that dull and stereotyped and cutter wind carry out angular adjustment, rotary wind angle adjusting piece makes two clamping sections unclamp the clamping to air knife, then adjust angle dull and stereotyped and air knife, finally rotary wind angle adjusting piece makes two clamping sections clamp air knife again, realize the angle adjustment between air knife and flat board, thereby air knife adjusting device of the present utility model can be regulated with respect to dull and stereotyped position and angle air knife, create good condition for improving dull and stereotyped cleannes.Particularly, described air knife angle adjusting piece is holding screw, makes the structure of air knife angle adjusting piece simpler and practical.
Preferably, described side plate and described horizontal base are vertical setting, guarantee that air knife clamp can vertically slide, thereby make the slip of air knife clamp on side plate easier.
Preferably, described side plate offers the sliding tray being communicated with described sliding cavity along glide direction, and described air knife clamp protrudes out the sliding part stretching in described sliding tray accordingly.By coordinating of sliding part and sliding tray, for the slip of air knife clamp on side plate provides guiding accurately, and be convenient to air knife clamp and slide on side plate.Particularly, be also articulated with roller in described sliding part, one end of described roller is stretched out described sliding part and is contacted with the inwall of described sliding tray, makes the slip of air knife clamp on side plate more easily with more accurate.
Upper air knife and lower air knife that air knife type plate cleaning equipment of the present utility model comprises air knife adjusting device of the present utility model and is communicated with extraneous gases at high pressure conveyer.Described upper air knife is parallel arranging with lower air knife and forms the transfer passage of carrying for dull and stereotyped, and described air knife adjusting device is arranged at respectively described upper air knife and is fixedly connected with lower air knife with the two ends of lower air knife and with described upper air knife.
Compared with prior art, due to two adjustment screw of the present utility model and two air knife clamps, make two air knife clamps that are fixedly connected with air knife can on side plate, do separate slip, thereby air knife adjusting device of the present utility model can be regulated separately the distance between each air knife and flat board, thus make the utility model air knife adjusting device to control accurately the distance between each air knife and flat board and be improve dull and stereotyped cleaning degree create good condition.Simultaneously, air knife adjusting device of the present utility model only can precisely control distance between air knife and flat board by two air knife clamps and two adjustment screw, thereby the structure that makes air knife adjusting device of the present utility model is simpler, operation is easier and cost is lower.
Brief description of the drawings
Fig. 1 is the structural representation of the utility model air knife adjusting device.
Fig. 2 is the structural representation of the utility model air knife type plate cleaning equipment.
Fig. 3 is the view that the utility model air knife type plate cleaning equipment cleans flat board.
Detailed description of the invention
In order to describe technology contents of the present utility model, structural feature in detail, below in conjunction with embodiment and coordinate accompanying drawing to be described further.
Refer to Fig. 1, air knife adjusting device 100 of the present utility model is for Organic Light Emitting Diode production technology to regulating (seeing Fig. 3) with cleaning position between dull and stereotyped air knife 200 and dull and stereotyped 300, and it comprises horizontal base 10, biside plate 20, two adjustment screw 30 and the air knife clamp 40 being fixedly connected with air knife 200.Described side plate 20 is the sliding cavity 50 that on described horizontal base 10, formation slides up and down for described air knife clamp 40 that is arranged on being parallel to each other, specifically, described side plate 20 is vertical setting with horizontal base 10 and is arranged on horizontal base 10 to guarantee that air knife clamp 40 can vertically slide, thereby make the slip of air knife clamp 40 on side plate 20 easier, and the mode that side plate 20 is arranged on horizontal base 10 is: first with hold-down screw 80 and base plate 90, biside plate 20 is fixed together, then, by hold-down screw 80, the base plate 90 being fixed together and horizontal base 10 are fixed to make side plate 20 again, between base plate 90 and horizontal base 10, there is dismoutability, certainly, also can directly biside plate 20 be welded on horizontal base 10 by welding procedure, therefore can not define for example the mounting means between side plate 20 and horizontal base 10 because of above-mentioned.Simultaneously, between described side plate 20, be also fixed with the top board 60 parallel with described horizontal base 10, the two ends of this top board 60 are fixed together by hold-down screw 80 and biside plate 20, described air knife clamp 40 arranges in pairs and is placed in described sliding cavity 50 along glide direction, be placed in described air knife clamp 40 in described sliding cavity 50 be positioned at described top board 60 under and be slidably connected with described side plate 20, specifically, offer along glide direction (being vertical direction in Fig. 1) sliding tray 22 being communicated with described sliding cavity 50 at side plate 20, and air knife clamp 40 protrudes out the sliding part 45 stretching in sliding tray 22 accordingly to realize being slidably connected between air knife clamp 40 and side plate 20, object is to provide guiding accurately for the slip of air knife clamp 40 on side plate 20, and be convenient to air knife clamp 40 slides on side plate 20, in order to make the slip of air knife clamp 40 on side plate 20 more easily with more accurate, therefore be also also articulated with roller (not shown) in sliding part 45, one end of this roller is stretched out described sliding part 45 and is contacted with the inwall of described sliding tray 22, certainly, the mode that is slidably connected of air knife clamp 40 and side plate 20 of realizing can also guide rail and the coordinating of slide block, and the cooperation of rack and pinion etc., therefore can not be because of above-mentioned for example air knife clamp 40 of the present utility model and the sliding type of side plate 20 being limited.And protrude out holder 41 near described air knife clamp 40 along continuous straight runs at described horizontal base 10 places.The described adjustment screw 30 on top is the rotating described top board 60 and its top and described top board 60 of passing along glide direction and conflicts, its bottom is stretching in the described air knife clamp 40 away from described horizontal base 10 places of screw-threaded engagement, and the described adjustment screw 30 of bottom is passing described holder 41 and conflicting with described horizontal base 10 of screw-threaded engagement.More specifically, as follows:
The utility model air knife adjusting device 100 also comprises air knife angle adjusting piece 70, described air knife clamp 40 offers the installing hole 42 of installing for described air knife 200, the above-mentioned air knife clamp 40 of mentioning also offers and is communicated with and runs through the above-mentioned top of air knife clamp 40 of mentioning and/or the groove of bottom 43 with described installing hole 42, in the present embodiment, 43 of this grooves run through the top of the above-mentioned air knife clamp 40 of mentioning to reduce the usage quantity of air knife angle adjusting piece 70, described groove 43 is separated 40 one-tenth two clamping sections 44 of the above-mentioned air knife clamp of mentioning, described air knife angle adjusting piece 70 is rotating clamping section 44 through right side and groove 43 clamping section 44 screw-threaded engagement with left side successively, the above-mentioned side plate of mentioning 20 is offered accordingly and is equipped with the adjustment operation groove 21 regulating for described air knife angle adjusting piece 70, particularly, described air knife angle adjusting piece 70 is for holding screw is to make the structure of air knife angle adjusting piece 70 simpler and practical.Wherein, by coordinating of air knife angle adjusting piece 70 and two clamping sections 44, while carrying out angular adjustment dull and stereotyped 300 with cutter wind 200, rotary wind angle adjusting piece 70 makes two clamping sections 44 unclamp the clamping to air knife 200, then adjust the angle of flat board 300 and air knife 200, last rotary wind angle adjusting piece 70 again makes two clampings of clamping section 44 to air knife 200, realize the angle adjustment between air knife 200 and dull and stereotyped 300, thereby air knife adjusting device 100 of the present utility model can be regulated air knife with respect to dull and stereotyped 300 position and angle, create good condition for improving dull and stereotyped 300 cleannes.
Refer to Fig. 2 and Fig. 3, upper air knife 200a and lower air knife 200b that air knife type plate cleaning equipment of the present utility model comprises air knife adjusting device 100 of the present utility model and is communicated with extraneous gases at high pressure conveyer.Described upper air knife 200a is parallel arranging with lower air knife 200b and forms the transfer passage 220 of carrying for dull and stereotyped 300, the left end that described air knife adjusting device 100 is arranged at respectively described upper air knife 200a and lower air knife 200b is fixedly connected with lower air knife 200b with right-hand member and with described upper air knife 200a, specifically, the left end of upper air knife 200a is inserted in by installation shaft 210 in the installing hole 42 of air knife clamp 40 on the top of the air knife adjusting device 100 in left side and is fixing with the air knife clamp 40 on the top of the air knife adjusting device 100 in left side, the right-hand member of upper air knife 200a is inserted in by installation shaft 210 in the installing hole 42 of air knife clamp 40 on the top of the air knife adjusting device 100 on right side and is fixing with the air knife clamp 40 on the top of the air knife adjusting device 100 on right side, and the left end of lower air knife 200b is inserted in by installation shaft 210 in the installing hole 42 of air knife clamp 40 of the bottom of the air knife adjusting device 100 in left side and fixing with the air knife clamp 40 of the bottom of the air knife adjusting device 100 in left side, the right-hand member of lower air knife 200b is inserted in by installation shaft 210 in the installing hole 42 of air knife clamp 40 of the bottom of the air knife adjusting device 100 on right side and is fixing with the air knife clamp 40 of the bottom of the air knife adjusting device 100 on right side.
Please refer to the drawing 1 is to Fig. 3, the utility model air knife adjusting device is described in detail the adjusting of the position between air knife and flat board and angle: first, instantly air knife 200b need toward dull and stereotyped 300 lower surface place near time, now need the adjustment screw 30 of the bottom of the air knife adjusting device 100 that simultaneously regulates left side and right side, the air knife clamp 40 that makes adjustment screw 30 order about the bottom of the air knife adjusting device 100 on left side and right side slides on side plate 20, slide toward the lower surface place near dull and stereotyped 300 thereby order about lower air knife 200b, until obtain desired position, then, the air knife angle adjusting piece 70 of the bottom of the air knife adjusting device 100 on rotation left side and right side, make the air knife clamp 40 of the bottom of the air knife adjusting device 100 on left side and right side unclamp the clamping to lower air knife 200b, the lower air knife 200b of now rotation is with respect to the angle of the lower surface of flat board 300, until obtain after required angle, the air knife angle adjusting piece 70 of the bottom of the air knife adjusting device 100 on rotation left side and right side again, the air knife clamp 40 that orders about the bottom of the air knife adjusting device 100 on left side and right side clamps lower air knife 200b again, thereby complete air knife adjusting device 100 of the present utility model to lower air knife 200b with respect to the position of dull and stereotyped 300 lower surfaces and the Primary regulation of angle, instantly when air knife 200b is misfitted with respect to the physical location of dull and stereotyped 300 lower surfaces and angle and theoretical position and angle, constantly repeat above-mentioned operating process, until lower air knife 200b is matched with respect to the physical location of dull and stereotyped 300 lower surfaces and angle and theoretical position and angle.And position between position and adjusting and lower air knife 200b and dull and stereotyped 300 lower surfaces of angle between upper air knife 200a and dull and stereotyped 300 upper surfaces and the adjusting of angle are that essence is identical, therefore do not repeat them here.When completing after the adjusting of upper air knife 200a and lower air knife 200b, now up air knife 200a and lower air knife 200b place input gases at high pressure, gases at high pressure blow out at a high speed along the direction of arrow b in Fig. 3 and c indication from the narrow slit of 0.05 millimeter of upper air knife 200a and lower air knife 200b, and formation air curtain thin slice, upper and lower surface to the flat board 300 transporting along the direction of arrow a indication in Fig. 3 is cleaned, thereby completes the cleaning of the utility model air knife type plate cleaning equipment to flat board 300.Wherein, for sliding appears in the upper air knife 200a and the lower air knife 200b that prevent from regulating, therefore also by hold-down screw 80, the air knife clamp 40 of the top to air knife adjusting device 100 of the present utility model and bottom is fixed; There is no sequence requirement for the adjusting of above-mentioned upper air knife 200a and the adjusting of lower air knife 200b, they can carry out simultaneously, also can carry out respectively; Meanwhile, the adjustment screw 30 of air knife adjusting device 100 of the present utility model drives the air knife clamp 40 on top and the type of drive of air knife clamp 40 to bottom has some differences: it is the screw-threaded engagement by between the adjustment screw 30 on top and the air knife clamp 40 on top that the air knife clamp 40 that the adjustment screw 30 on top is ordered about top slides on side plate 20; And the adjustment screw 30 of bottom to order about that the air knife clamp 40 of bottom slides on side plate 20 be by the screw-threaded engagement between the adjustment screw 30 of bottom and the air knife clamp 40 of bottom, also by the adjustment screw 30 of bottom and the conflict of horizontal base 10.
Two adjustment screw 30 of the present utility model and two air knife clamps 40, make two air knife clamps 40 that are fixedly connected with air knife 200 can on side plate 20, do separate slip, thereby air knife adjusting device 100 of the present utility model can be regulated separately the distance between each air knife 200 and dull and stereotyped 300, thereby make the utility model air knife adjusting device 100 can control accurately the distance between each air knife 200 and dull and stereotyped 300 and be that the cleaning degree that improves flat board 300 is created good condition.Simultaneously, air knife adjusting device 100 of the present utility model only can precisely control distance between air knife 200 and dull and stereotyped 300 by two air knife clamps 40 and two adjustment screw 30, thus make the structure of air knife adjusting device 100 of the present utility model simpler, operation is easier and cost is lower.
The person of meriting attention, the foundation on the above-mentioned left end of mentioning and right-hand member, top and bottom and left side and right side is taking Fig. 1 as benchmark.
Above disclosed is only preferred embodiments of the present utility model, certainly can not limit with this interest field of the utility model, and the equivalent variations of therefore doing according to the utility model claim, still belongs to the scope that the utility model is contained.

Claims (7)

1. an air knife adjusting device, be applicable in Organic Light Emitting Diode production technology regulating with cleaning position between dull and stereotyped air knife and flat board, it is characterized in that, described air knife adjusting device comprises horizontal base, biside plate, two adjustment screw and the air knife clamp being fixedly connected with air knife, described side plate is the sliding cavity that on described horizontal base, formation slides up and down for described air knife clamp that is arranged on being parallel to each other, between described side plate, be also fixed with the top board parallel with described horizontal base, described air knife clamp arranges in pairs and is placed in described sliding cavity along glide direction, be placed in described air knife clamp in described sliding cavity be positioned at described top board under and be slidably connected with described side plate, described air knife clamp along continuous straight runs near described horizontal base place protrudes out holder, described in one, adjustment screw is rotating through described top board and top and the conflict of described top board along glide direction, bottom is stretching in the described air knife clamp away from described horizontal base place of screw-threaded engagement, described in another, adjustment screw is conflicting through described holder and with described horizontal base of screw-threaded engagement.
2. air knife adjusting device according to claim 1, it is characterized in that, also comprise air knife angle adjusting piece, described air knife clamp offers the installing hole of installing for described air knife, described air knife clamp also offers the groove that is communicated with and runs through top and/or the bottom of described air knife clamp with described installing hole, described groove is separated described air knife clamp and is become two clamping sections, described air knife angle adjusting piece be successively rotating pass one described in clamping section and groove and with clamping section screw-threaded engagement described in another, described side plate is offered accordingly and is equipped with the adjustment operation groove regulating for described air knife angle adjusting piece.
3. air knife adjusting device according to claim 2, is characterized in that, described air knife angle adjusting piece is holding screw.
4. air knife adjusting device according to claim 1, is characterized in that, described side plate and described horizontal base are vertical setting.
5. air knife adjusting device according to claim 1, is characterized in that, described side plate offers the sliding tray being communicated with described sliding cavity along glide direction, and described air knife clamp protrudes out the sliding part stretching in described sliding tray accordingly.
6. air knife adjusting device according to claim 5, is characterized in that, is also articulated with roller in described sliding part, and one end of described roller is stretched out described sliding part and contacted with the inwall of described sliding tray.
7. an air knife type plate cleaning equipment, comprise the upper air knife and the lower air knife that are communicated with extraneous gases at high pressure conveyer, described upper air knife is parallel arranging with lower air knife and forms the transfer passage of carrying for dull and stereotyped, it is characterized in that, also comprise the air knife adjusting device as described in claim 1 to 6 any one, described air knife adjusting device is arranged at respectively described upper air knife and is fixedly connected with lower air knife with the two ends of lower air knife and with described upper air knife.
CN201420444403.0U 2014-08-07 2014-08-07 Air knife adjusting device and air knife type plate cleaning equipment Expired - Fee Related CN204007044U (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104266475A (en) * 2014-08-07 2015-01-07 熊丹 Air knife adjusting device, air knife type flat plate cleaning equipment and air knife adjusting method
CN105066664A (en) * 2015-09-14 2015-11-18 武汉华星光电技术有限公司 Cleaning machine and air drying device thereof
CN106702133A (en) * 2017-03-28 2017-05-24 艾伯纳工业炉(太仓)有限公司 Air knife device for air cushion furnace and air cushion furnace
CN106839744A (en) * 2016-12-20 2017-06-13 武汉华星光电技术有限公司 A kind of device for cleaning glass substrate
CN111103709A (en) * 2019-12-24 2020-05-05 彩虹(合肥)液晶玻璃有限公司 Air inlet mounting structure of air knife breather pipe
CN112985043A (en) * 2019-12-17 2021-06-18 亚智科技股份有限公司 Air knife structure and mechanism thereof

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104266475A (en) * 2014-08-07 2015-01-07 熊丹 Air knife adjusting device, air knife type flat plate cleaning equipment and air knife adjusting method
CN105066664A (en) * 2015-09-14 2015-11-18 武汉华星光电技术有限公司 Cleaning machine and air drying device thereof
CN106839744A (en) * 2016-12-20 2017-06-13 武汉华星光电技术有限公司 A kind of device for cleaning glass substrate
CN106702133A (en) * 2017-03-28 2017-05-24 艾伯纳工业炉(太仓)有限公司 Air knife device for air cushion furnace and air cushion furnace
CN112985043A (en) * 2019-12-17 2021-06-18 亚智科技股份有限公司 Air knife structure and mechanism thereof
CN111103709A (en) * 2019-12-24 2020-05-05 彩虹(合肥)液晶玻璃有限公司 Air inlet mounting structure of air knife breather pipe

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