CN203999185U - Pure water pretreatment system - Google Patents
Pure water pretreatment system Download PDFInfo
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- CN203999185U CN203999185U CN201420381068.4U CN201420381068U CN203999185U CN 203999185 U CN203999185 U CN 203999185U CN 201420381068 U CN201420381068 U CN 201420381068U CN 203999185 U CN203999185 U CN 203999185U
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Abstract
The utility model proposes a kind of pure water pretreatment system, the filtering system that comprise waterworks, is connected by filter pipeline with waterworks and the storage system being connected with filtering system by storage pipeline, the water side of filtering system is connected with waterworks by return line, storage pipeline is provided with a pneumavalve, and return line is provided with a broken siphon valve.When storage system is about to reach the liquid level that stops high point, open return line, the source water of making is back to waterworks, avoiding storage system to control pure water pretreatment system stops, when storage system is about to reach the liquid level of operation low spot, open the pneumavalve of storage pipeline, broken rainbow effect by atmospheric pressure and broken siphon valve, the source water of making is back to storage system, thereby can avoid the continuous start and stop of pure water pretreatment system, eliminate the infringement that water hammer causes pure water pretreatment system, guarantee the job stability of pure water pretreatment system.
Description
Technical field
The utility model relates to field of semiconductor manufacture, relates in particular to a kind of pure water pretreatment system.
Background technology
In semicon industry, pure water has very widespread use, and for example, for a lot of important manufacturing process, the processing requirement of simultaneously making pure water is very high, if the problem of technique causes pure water contaminated, will Dui Quan factory impact.
Pure water for example, obtains after normally the water source coming from the outside (tap water, Yangtze River Water etc.) being filtered by a series for the treatment of and purification by pure water pretreatment system.Therefore, to a certain extent, the water quality at water source also directly affects the water quality of making pure water.Owing to being subject to the impact of the salty tide in the Changjiang river, winter, the water quality condition of tap water was poor, cause pretreatment system operating load very heavy, pretreated pure water total organic carbon (TOC) content is very high, and the cycle that pretreatment system consumptive material is changed shortens, the water production rate variation of reverse osmosis membrane in pretreatment system, problem for above-mentioned appearance, need to change the operation scheme of pretreatment system, improve the water quality of pure water, and improve the requirement of technique and the stability of pretreatment system.
Please refer to Fig. 1, Fig. 1 is the structure iron of pure water pretreatment system in prior art, comprises the fluid infusion system 11, Sand Filtration System 30, filtering and heating system (HEX) 42, degassing tower system (DG) 50, prime filter 60, reverse osmosis membrane 70 and the preprocessing barrel groove 80 that connect successively.Wherein fluid infusion system 11 comprises second barrel of groove 10 and first barrel of groove 20, second barrel of groove 10 and first barrel of groove 20 are for providing source water, concrete, second barrel of groove 10 is 10000 tons, can collect and lay in more tap water as total water source, first barrel of groove 20 is 3000 tons, 3000 Dun Shuiwei plant areas of savings provide the water source of pure water, first barrel of groove 20 is responsible for specially to pure water pretreatment system source of supply water, second barrel of groove 10 is for carrying out fluid infusion to it, fluid infusion system 11 mainly carries out tap water according to 10 pairs of first barrel of grooves 20 of second barrel of groove of liquid level change cause of first barrel of groove 20 and supplements.
As shown in Figure 1, water source can be replenished to first barrel of groove 20 by second barrel of groove 10 by two pipelines, one tunnel is through fluid infusion heating system 41, another road is directly replenished to first barrel of groove 20, conventionally, when winter temperature is lower, need the water source that second barrel of groove 10 is replenished to first barrel of groove 20 to preheat processing.In addition,, in the water side of fluid infusion heating system 41, also have a pipeline to be connected with second barrel of groove 10.In the situation that winter temperature is lower, too low in order to prevent second barrel of temperature in groove 10, can adopt the water source in 41 pairs of second barrel of grooves 10 of this pipeline and fluid infusion heating system to carry out circulating-heating processing, keep the temperature in second barrel of groove 10.
Shown in Fig. 1, in prior art, the pretreatment technology flow process of pure water pretreatment system is: the source water of first barrel of groove 20 supply enters Sand Filtration System 30 and carries out suspended substance and oarse-grained filtration, source water more after filtration heating system 42 be heated to 22 about degree, enter again 50 pairs of source water of degassing tower system and carry out the removal of CO32-and HCO3 ion, source water enters to prime filter 60 again and carries out primary filter afterwards, then source water pressurizes through force (forcing) pump 61 again, for example source water pressure is forced into 8kg～10kg left and right, with opisthogenesis water, enter reverse osmosis membrane 70 and carry out desalting treatment, source water after desalination enters preprocessing barrel groove 80 and collects.In order to make source water can flow normally and guarantee the stable of pure water pretreatment system, in each pipeline, all can set as required hand valve 90 and water pump 62.
Above-mentioned pretreatment technology is in treating processes, the operation of system is to be controlled by the liquid level of degassing tower system 50 and preprocessing barrel tank liquor 80 with stopping (start and stop), when liquid level reaches the setting that stops high point, system is out of service, when liquid level drops to the setting of operation low spot, system brings into operation.
When there is pressure in pipeline, if because certain outside cause (as valve is closed suddenly, water pump stop suddenly etc.) changes suddenly the flow velocity of water, can cause alternately changing that pressure sharply raises and reduce, there is water hammer.Due to the frequent start and stop of system meeting in prior art, occur that water hammer is comparatively frequent, very easily system is produced to huge potential impact, especially to reverse osmosis membrane, 70 operations impact, cause reverse osmosis membrane 70 to occur breaking and Seepage, affect life-span and the performance of reverse osmosis membrane 70.In addition water hammer also makes pipeline vibrations more serious, can cause the increase frequency that in pipeline, water pump and frequency transformer break down, and affects water pump and frequency transformer work-ing life, has reduced the stability of pretreatment system.
Utility model content
The purpose of this utility model is to provide a kind of pure water pretreatment system, can reduce start-stop time, improves the stability of pure water pretreatment system and the work-ing life of prolongation pure water pretreatment system.
In order to achieve the above object, the utility model proposes a kind of pure water pretreatment system, comprise: waterworks, filtering system and storage system, described waterworks is connected with described filtering system by filter pipeline, the water side of described filtering system is connected with described storage system by storage pipeline, the water side of described filtering system is also connected with described waterworks by return line, and described storage pipeline is provided with a pneumavalve, and described return line is provided with a broken siphon valve.
Optionally, described broken siphon valve comprises the valve body that is provided with fluid inlet, liquid outlet and pore and the movable part that is arranged at described valve inner, and the size of described movable part is greater than the size of pore, and relative with described pore.
Optionally, on described return line, be also provided with anti-U-shaped curved, described broken siphon valve be located at described anti-U-shaped curved on.
Optionally, on described return line, be also provided with a backflow hand valve.
Optionally, described storage pipeline comprises the first storage pipeline and the second storage pipeline, described the first storage pipeline is provided with one first storage pipeline hand valve, and described the second storage pipeline is provided with two second storage pipeline hand valves, and described pneumavalve is arranged between two second storage pipeline hand valves.
Optionally, described waterworks comprises connected successively fluid infusion system and first barrel of groove, and described first barrel of groove is connected with described filtering system, and described fluid infusion system is connected with described filtering system by emergency line.
Optionally, described fluid infusion system comprises second barrel of groove and fluid infusion heating system, described second barrel of groove is connected with described first barrel of groove with the second replenishing line by the first replenishing line respectively, wherein said fluid infusion heating system is located on the first replenishing line, the water side of described fluid infusion heating system is connected with described second barrel of groove by a reflux pipeline, and described second barrel of groove is connected with described emergency line by described the second replenishing line.
Optionally, described filtering system comprises Sand Filtration System, filtering and heating system, degassing tower system, prime filter and the reverse osmosis membrane connecting successively, the water side that the water side of described reverse osmosis membrane is filtering system.
Optionally, described second barrel of groove is connected with described Sand Filtration System by described emergency line.
Optionally, described prime filter is connected with described reverse osmosis membrane by a force (forcing) pump.
Optionally, described storage system comprises a bucket groove.
Compared with prior art, the beneficial effects of the utility model are mainly reflected in: the water side of filtering system is connected with storage system by storage pipeline, the water side of filtering system is connected with waterworks by return line, when storage system is about to reach the liquid level that stops high point, open return line, the source water of making is back to waterworks, avoiding storage system to control pure water pretreatment system stops, when storage system is about to reach the liquid level of operation low spot, open the pneumavalve of storage pipeline, broken rainbow effect by atmospheric pressure and broken siphon valve, the source water of making is back to storage system, thereby can avoid the continuous start and stop of pure water pretreatment system, eliminate the infringement that water hammer causes pure water pretreatment system, guarantee the job stability of pure water pretreatment system.
Accompanying drawing explanation
Fig. 1 is the structure iron of pure water pretreatment system in prior art;
Fig. 2 is the structure iron of pure water pretreatment system in the utility model one embodiment;
Fig. 3-Fig. 4 is the principle of work schematic diagram of broken siphon valve in the utility model one embodiment.
Embodiment
Below in conjunction with schematic diagram, pure water pretreatment system of the present utility model is described in more detail, wherein represented preferred embodiment of the present utility model, should be appreciated that those skilled in the art can revise the utility model described here, and still realize advantageous effects of the present utility model.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as to restriction of the present utility model.
For clear, whole features of practical embodiments are not described.They in the following description, are not described in detail known function and structure, because can make the utility model chaotic due to unnecessary details.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details to realize developer's specific objective, for example, according to the restriction of relevant system or relevant business, by an embodiment, change into another embodiment.In addition, will be understood that this development may be complicated and time-consuming, but be only routine work to those skilled in the art.
In the following passage, with reference to accompanying drawing, with way of example, the utility model is more specifically described.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the object of aid illustration the utility model embodiment lucidly.
Please refer to Fig. 2, in the present embodiment, a kind of pure water pretreatment system has been proposed, comprise: waterworks, filtering system and storage system, waterworks is connected with filtering system by filter pipeline, and the water side A0 of filtering system is connected with storage system by storage pipeline, and the water side A0 of filtering system is also connected with waterworks by return line, storage pipeline is provided with a pneumavalve 842, and return line is provided with a broken siphon valve 820.
When storage system is about to reach the liquid level that stops high point, for fear of storage system, control pure water pretreatment system and stop, now can opening return line, the source water of making is back in waterworks; When storage system is about to reach the liquid level of operation low spot, open the pneumavalve 842 of storage pipeline, broken rainbow effect by atmospheric pressure and broken siphon valve 820, the source water of making is back to storage system, thereby can avoid the continuous start and stop of pure water pretreatment system, eliminate the infringement that water hammer causes pure water pretreatment system, guarantee the job stability of pure water pretreatment system.
Concrete, in the present embodiment, waterworks comprises connected successively fluid infusion system 110 and first barrel of groove 200, fluid infusion system 110 comprises second barrel of groove 100 and fluid infusion heating system 410, the water side A0 of filtering system is connected with second barrel of groove 100 by return line, second barrel of groove 100 is connected with described first barrel of groove 200 with the second replenishing line 112 by the first replenishing line 111 respectively, wherein fluid infusion heating system 410 is located on the first replenishing line 111, because the first replenishing line 111 is provided with fluid infusion heating system 410, therefore the first replenishing line 111 is applicable to carry out fluid infusion winter, when temperature is lower, source water need to be heated to certain temperature, be delivered to again in first barrel of groove 200, when temperature is higher, can directly by the second replenishing line, source water be delivered in first barrel of groove 200.In addition, the water side of fluid infusion heating system 410 is also connected with second barrel of groove 100 by a reflux pipeline 114, when winter temperature is lower, can be by 410 heating of fluid infusion heating system, and the source water after heating is back in second barrel of groove 100, keep the temperature in second barrel of groove 100 can be not too low.
In the present embodiment, first barrel of groove 200 is connected with filtering system, for providing, filter required source water, in addition, second barrel of groove 100 can directly be connected with filtering system by emergency line 113, and certain first barrel of groove 200 breaks down in the time of cannot using, can be no longer through first barrel of groove 200, can directly by second barrel of groove 100, provide source water, so also can reduce the water resource waste of source water and relevant device.
Filtering system also comprises Sand Filtration System 300, filtering and heating system 420, degassing tower system 500, prime filter 600 and the reverse osmosis membrane 700 connecting successively, and the water side of reverse osmosis membrane 700 is the water side A0 of filtering system.Wherein, between prime filter 600 and reverse osmosis membrane 700, by a force (forcing) pump 610, be connected, Sand Filtration System 300, prime filter 600 and reverse osmosis membrane 700 are by a plurality of compositions, for the treatment of the source water of larger flow.
Shown in Fig. 2, in the utility model one embodiment, the workflow of the filtering system of pure water pretreatment system is: source water enters Sand Filtration System 300 and carries out suspended substance and oarse-grained filtration, source water is heated to 22 degree left and right through filtering and heating system 420 again, enter again 500 pairs of source water of degassing tower system and carry out the removal of CO32-and HCO3 ion, source water enters to prime filter 600 again and carries out primary filter afterwards, then source water pressurizes through force (forcing) pump 610 again, for example source water pressure is forced into 8kg～10kg left and right, with opisthogenesis water, enter reverse osmosis membrane 700 and carry out desalting treatment, in entering storage system, collects in the source water after desalination.In the present embodiment, storage system comprises a bucket groove 800.
In preferred embodiment of the present utility model, on return line, be also provided with anti-U-shaped curvedly 810, described broken siphon valve 820 is located on described anti-U-shaped curved 810.Anti-U-shaped curved 810 conventionally in higher horizontal position, and it highly can decide by different needs, in this no limit.Because the hydraulic pressure at the A0 place, water side of filtering system only has 0.8Kg conventionally; it is 8mm water column; and the hydraulic pressure that is back to the backflow end A2 of second barrel of groove 100 is not less than 1.1Kg; therefore need to add anti-U-shaped curved 810 and increase hydraulic pressure; can be back in second barrel of groove 100; in order to make return line more be convenient to control, a backflow hand valve 830 also can be set on return line conventionally.
In the present embodiment, storage pipeline comprises the first storage pipeline and the second storage pipeline, the first storage pipeline is provided with one first storage pipeline hand valve 843, the second storage pipelines and is provided with two second storage pipeline hand valves 841, and pneumavalve 842 is arranged between two second storage pipeline hand valves 841.The first storage pipeline hand valve 843 can be opened when the second storage pipeline breaks down or needs repairing, and does not affect the operation of whole pure water pretreatment system; Because pneumavalve 842 there will be fault in operation after certain hour, now can be by closing that its former and later two 841 pairs of pneumavalves 842 of the second storage pipeline hand valve are safeguarded or the action such as replacing.
While reaching due to the liquid level in bucket groove 800 liquid level that stops high point, can make pure water pretreatment system stop bucket groove 800 to supply water, out of service for fear of pure water pretreatment system, when the liquid level in bucket groove 800 is about to reach the liquid level that stops high point, can close pneumavalve 842, thereby source water is back in second barrel of groove 100 by return line; While reaching the liquid level of operation low spot due to the liquid level in bucket groove 800, can make the pure water pretreatment system stopping bring into operation and bucket groove 800 is supplied water, therefore when bucket groove 800 is about to reach the liquid level of operation low spot, can open pneumavalve 842, source water is flowed in bucket groove 800 by storage pipeline, thereby the repeatedly start and stop of having avoided in prior art the variation by bucket groove 800 interior liquid levels to cause, the infringement that pure water pretreatment system is caused, has improved job stability and the working life of pure water pretreatment system.
When bucket groove 800 is about to reach the liquid level of operation low spot, need to make source water flow into bucket groove 800 when interior by storage pipeline, because Dang Yuanshui is in ceaselessly flowing into second barrel of groove 100, while now reopening pneumavalve 842, because the hydraulic pressure of the water intake end A1 of bucket groove 800 is greater than 1.363Kg, and the suction rainbow effect existing can cause source water can normally not flow in bucket groove 800.Therefore, the broken siphon valve 820 of interpolation can play brokenly the effect of siphon, guarantees that source water normally flows in bucket groove 800.
Please refer to Fig. 3 to Fig. 4, broken siphon valve 820 comprises the movable part 821 that is provided with the valve body of fluid inlet, liquid outlet and pore and is arranged at described valve inner, and the size of movable part 821 is greater than the size of pore, and relative with described pore.When the fluid inlet of source water through broken siphon valve 820 flows into, while being back to second barrel of groove 100 by liquid outlet again, hydraulic pressure is by movable part 821 jack-up in broken siphon valve 820, because the size of movable part 821 is greater than brokenly the size of siphon valve 820 pores, therefore movable part 821 can be blocked pore, and the source water of making is normally back in second barrel of groove 100; When needs source water inflow bucket groove 800 is interior, due to opening of pneumavalve 842, atmospheric pressure can back down movable part 821, and gas is entered from pore, thereby plays brokenly the effect of siphon, and the source water of making normally flows in bucket groove 800.
To sum up, in the pure water pretreatment system providing at the utility model embodiment, the water side of filtering system is connected with storage system by storage pipeline, the water side of filtering system is connected with waterworks by return line, when storage system is about to reach the liquid level that stops high point, open return line, the source water of making is back to waterworks, avoiding storage system to control pure water pretreatment system stops, when storage system is about to reach the liquid level of operation low spot, open the pneumavalve of storage pipeline, broken rainbow effect by atmospheric pressure and broken siphon valve, the source water of making is back to storage system, thereby can avoid the continuous start and stop of pure water pretreatment system, eliminate the infringement that water hammer causes pure water pretreatment system, guarantee the job stability of pure water pretreatment system.
Above are only preferred embodiment of the present utility model, the utility model is not played to any restriction.Any person of ordinary skill in the field; within not departing from the scope of the technical solution of the utility model; the technical scheme that the utility model is disclosed and technology contents are made any type of changes such as replacement or modification that are equal to; all belong to the content that does not depart from the technical solution of the utility model, within still belonging to protection domain of the present utility model.
Claims (11)
1. a pure water pretreatment system, it is characterized in that, comprise: waterworks, filtering system and storage system, described waterworks is connected with described filtering system by filter pipeline, the water side of described filtering system is connected with described storage system by storage pipeline, the water side of described filtering system is also connected with described waterworks by return line, and described storage pipeline is provided with a pneumavalve, and described return line is provided with a broken siphon valve.
2. pure water pretreatment system as claimed in claim 1, it is characterized in that, described broken siphon valve comprises the valve body that is provided with fluid inlet, liquid outlet and pore and the movable part that is arranged at described valve inner, and the size of described movable part is greater than the size of pore, and relative with described pore.
3. pure water pretreatment system as claimed in claim 1, is characterized in that, on described return line, be also provided with anti-U-shaped curved, described broken siphon valve be located at described anti-U-shaped curved on.
4. pure water pretreatment system as claimed in claim 1, is characterized in that, is also provided with a backflow hand valve on described return line.
5. pure water pretreatment system as claimed in claim 1, it is characterized in that, described storage pipeline comprises the first storage pipeline and the second storage pipeline, described the first storage pipeline is provided with one first storage pipeline hand valve, described the second storage pipeline is provided with two second storage pipeline hand valves, and described pneumavalve is arranged between two second storage pipeline hand valves.
6. pure water pretreatment system as claimed in claim 1, it is characterized in that, described waterworks comprises connected successively fluid infusion system and first barrel of groove, and described first barrel of groove is connected with described filtering system, and described fluid infusion system is connected with described filtering system by emergency line.
7. pure water pretreatment system as claimed in claim 6, it is characterized in that, described fluid infusion system comprises second barrel of groove and fluid infusion heating system, described second barrel of groove is connected with described first barrel of groove with the second replenishing line by the first replenishing line respectively, wherein said fluid infusion heating system is located on the first replenishing line, the water side of described fluid infusion heating system is connected with described second barrel of groove by a reflux pipeline, and described second barrel of groove is connected with described emergency line by described the second replenishing line.
8. pure water pretreatment system as claimed in claim 7, it is characterized in that, described filtering system comprises Sand Filtration System, filtering and heating system, degassing tower system, prime filter and the reverse osmosis membrane connecting successively, the water side that the water side of described reverse osmosis membrane is filtering system.
9. pure water pretreatment system as claimed in claim 8, is characterized in that, described second barrel of groove is connected with described Sand Filtration System by described emergency line.
10. pure water pretreatment system as claimed in claim 8, is characterized in that, described prime filter is connected with described reverse osmosis membrane by a force (forcing) pump.
11. pure water pretreatment systems as claimed in claim 1, is characterized in that, described storage system comprises a bucket groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420381068.4U CN203999185U (en) | 2014-07-10 | 2014-07-10 | Pure water pretreatment system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420381068.4U CN203999185U (en) | 2014-07-10 | 2014-07-10 | Pure water pretreatment system |
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| Publication Number | Publication Date |
|---|---|
| CN203999185U true CN203999185U (en) | 2014-12-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201420381068.4U Expired - Fee Related CN203999185U (en) | 2014-07-10 | 2014-07-10 | Pure water pretreatment system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107224876A (en) * | 2017-07-26 | 2017-10-03 | 金科水务工程(北京)有限公司 | A kind of reverse osmosis membrane main frame breaks siphon concentrated water discharge device |
-
2014
- 2014-07-10 CN CN201420381068.4U patent/CN203999185U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107224876A (en) * | 2017-07-26 | 2017-10-03 | 金科水务工程(北京)有限公司 | A kind of reverse osmosis membrane main frame breaks siphon concentrated water discharge device |
| CN107224876B (en) * | 2017-07-26 | 2023-05-12 | 金科环境股份有限公司 | Broken siphon dense water discharging equipment of reverse osmosis membrane host computer |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141210 Termination date: 20190710 |