CN203998967U - A kind of removing carbon impurities in silicon carbide micropowder system - Google Patents

A kind of removing carbon impurities in silicon carbide micropowder system Download PDF

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Publication number
CN203998967U
CN203998967U CN201420281118.1U CN201420281118U CN203998967U CN 203998967 U CN203998967 U CN 203998967U CN 201420281118 U CN201420281118 U CN 201420281118U CN 203998967 U CN203998967 U CN 203998967U
Authority
CN
China
Prior art keywords
row
sliding support
alkaline cleaner
silicon carbide
corrosion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201420281118.1U
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Chinese (zh)
Inventor
顾正达
顾双波
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LIANYUNGANG ZHENGDA NEW MATERIAL Co Ltd
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LIANYUNGANG ZHENGDA NEW MATERIAL Co Ltd
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Publication date
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Priority to CN201420281118.1U priority Critical patent/CN203998967U/en
Application granted granted Critical
Publication of CN203998967U publication Critical patent/CN203998967U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model is a kind of removing carbon impurities in silicon carbide micropowder system, comprises the alkaline cleaner that several rows be arranged in parallel, and the caustic treater that every row alkaline cleaner is arranged side by side by several forms, and is provided with impurity elimination mouth and lower water port on the sidewall of corrosion-resistant tank body; The top of every row alkaline cleaner is respectively equipped with row frame, row frame is provided with two slideways that be arranged in parallel and be positioned at caustic treater both sides, 1-3 platform sliding support is housed on slideway, whipping appts is all housed on every sliding support, described whipping appts comprises the agitator motor being contained on sliding support, is connected with the agitator stretching in stirring port on agitator motor downwards.The utility model is in line caustic treater, by driving being set above every row alkaline cleaner, then whipping appts is fixed on the sliding support in driving, because want standing for some time after the slurry in caustic treater stirs, therefore, as long as a line alkaline cleaner has several whipping appts wheels to change jobs, reduced greatly production cost.

Description

A kind of removing carbon impurities in silicon carbide micropowder system
Technical field
The utility model relates to the micro-cleaning of silicon carbide purifies, particularly a kind of removing carbon impurities in silicon carbide micropowder system.
Background technology
Silicon carbide micro-powder is a kind of starting material of processing silicon wafer, and the quality of processing silicon wafer depends on the cutting quality of silicon carbide blade material.And to guarantee cutting quality, first silicon carbide blade material should guarantee certain purity.Existing silicon carbide is that at high temperature direct reaction is synthetic obtains by graphite and quartz raw material, therefore inevitably introduces carbon impurity.In the process of existing removal carbon impurity, slurry being carried out to the system that alkali cleaning removal of impurities obtains silicon carbide slurry, is that a whipping appts is all housed on each tank body, so its complex structure, and plant factor is low, and use cost is high.
Summary of the invention
Technical problem to be solved in the utility model is for the deficiencies in the prior art, and removing carbon impurities in silicon carbide micropowder system a kind of simple in structure, easy to use is provided.
Technical problem to be solved in the utility model is to realize by following technical scheme, the utility model is a kind of removing carbon impurities in silicon carbide micropowder system, be characterized in: comprise the alkaline cleaner that several rows be arranged in parallel, the caustic treater that every row alkaline cleaner is arranged side by side by several forms, described caustic treater comprises corrosion-resistant tank body, the bottom of corrosion-resistant tank body is provided with discharge port, the center, top of corrosion-resistant tank body is provided with stirring port, corrosion-resistant tank body top in stirring port both sides is provided with charging opening and water-in, on the sidewall of corrosion-resistant tank body, be provided with impurity elimination mouth and lower water port, the top of every row alkaline cleaner is respectively equipped with row frame, row frame is provided with two slideways that be arranged in parallel and be positioned at caustic treater both sides, 1-3 platform sliding support is housed on slideway, whipping appts is all housed on every sliding support, described whipping appts comprises the agitator motor being contained on sliding support, is connected with the agitator stretching in stirring port on agitator motor downwards.
Technical problem to be solved in the utility model can also further realize by following technical scheme, and described removing carbon impurities in silicon carbide micropowder system, is characterized in: described agitator motor is fixed on sliding support by leading screw.
Technical problem to be solved in the utility model can also further realize by following technical scheme, described removing carbon impurities in silicon carbide micropowder system, be characterized in: described every row alkaline cleaner is comprised of 12 caustic treaters that are arranged side by side, on its corresponding row frame, 2 sliding supports be housed.
Technical problem to be solved in the utility model can also further realize by following technical scheme, and described removing carbon impurities in silicon carbide micropowder system, is characterized in: between adjacent two row alkaline cleaners, be provided with worktable.
The utility model is in line caustic treater, by driving being set above every row alkaline cleaner, then whipping appts is fixed on the sliding support in driving, because want standing for some time after the slurry in caustic treater stirs, therefore, as long as a line alkaline cleaner has several whipping appts wheels to change jobs.Compared with prior art, it is simple in structure, easy to use, has replaced every mode that caustic treater is all installed a whipping appts, greatly reduces production cost.
Accompanying drawing explanation
Fig. 1 is main TV structure schematic diagram of the present utility model.
Fig. 2 is the right TV structure schematic diagram of Fig. 1.
Embodiment
Referring to accompanying drawing, further describe concrete technical scheme of the present utility model, so that those skilled in the art understands the utility model further, and do not form the restriction to its right.
With reference to accompanying drawing 1 and Fig. 2, a removing carbon impurities in silicon carbide micropowder system, comprises the alkaline cleaner that several rows be arranged in parallel, between adjacent two row alkaline cleaners, is provided with worktable 7, facilitate staff to overhaul, a worktable 7 can operate two row alkaline cleaners simultaneously.Every row alkaline cleaner is comprised of 12 caustic treaters that are arranged side by side 2.Described caustic treater 2 comprises the corrosion-resistant tank body being made of plastics, the bottom of corrosion-resistant tank body is provided with discharge port 9, the bottom of corrosion-resistant tank body is set to taper, discharge port 9 is located at cone bottom, the center, top of corrosion-resistant tank body is provided with stirring port 11, corrosion-resistant tank body top in stirring port 11 both sides is provided with charging opening and water-in, is provided with impurity elimination mouth 6 and lower water port 8 on the sidewall of corrosion-resistant tank body, and upper impurity elimination mouth 6 and lower water port 8 are used for the floating carbon of venting and draining.
The top of every row alkaline cleaner is respectively equipped with row frame, and row frame is provided with the slideway 3 of two caustic treater 2 both sides that be arranged in parallel and be positioned at, and 2 sliding supports 4 are housed on slideway 3, and sliding support 4 is driven on slideway 3 and slided by motor.On every sliding support 4, whipping appts is all housed, described whipping appts comprises by the fixing agitator motor 5 of leading screw 10 and sliding support 4, is connected with the agitator 1 stretching in stirring port 11 on agitator motor 5 downwards.The upper end of leading screw 10 is fixed on sliding support 4 by bearing, and lower end is provided with the turbine being mated, and turbine is connected with motor by belt transmission.By motor, drive leading screw 10 to rotate, agitator motor 5 is moved up and down along screw mandrel 10, thereby facilitate agitator 1 installation and removal.Agitator 1 comprises stir shaft and agitating vane, the stir shaft of agitator 1 is to be fixed on the output shaft of agitator motor 5 by bearing pin, like this after a caustic treater 2 has stirred, can take off agitator 1, by sliding support 4, agitator motor 5 is moved to another caustic treater 2 tops, being loaded on agitator 1 can use.
During use, silicon carbide powder slurry material joins corrosion-resistant tank body from charging opening, mobile sliding support 4, make agitator motor 5 face stirring port 11, agitator 1 is put in corrosion-resistant tank body by stirring port 11, its upper end is contained on agitator motor 5, regulate the height up and down of agitator motor 5, the degree of depth of putting into of determining agitator 1, finally starts agitator motor 5, gets final product work.2 whipping apptss of a line alkaline cleaner can operate 2 caustic treaters 2 simultaneously, and 12 caustic treaters 2 share 2 and just in time can carry out rotation.After a caustic treater 2 has stirred, unload agitator 1, mobile sliding support 4, to another top that adds the caustic treater 2 that honest material need to stir, repeats above-mentioned action and operates.

Claims (4)

1. a removing carbon impurities in silicon carbide micropowder system, it is characterized in that: comprise the alkaline cleaner that several rows be arranged in parallel, the caustic treater that every row alkaline cleaner is arranged side by side by several forms, described caustic treater comprises corrosion-resistant tank body, the bottom of corrosion-resistant tank body is provided with discharge port, the center, top of corrosion-resistant tank body is provided with stirring port, at the corrosion-resistant tank body top of stirring port both sides, is provided with charging opening and water-in, is provided with impurity elimination mouth and lower water port on the sidewall of corrosion-resistant tank body; The top of every row alkaline cleaner is respectively equipped with row frame, row frame is provided with two slideways that be arranged in parallel and be positioned at caustic treater both sides, 1-3 platform sliding support is housed on slideway, whipping appts is all housed on every sliding support, described whipping appts comprises the agitator motor being contained on sliding support, is connected with the agitator stretching in stirring port on agitator motor downwards.
2. removing carbon impurities in silicon carbide micropowder system according to claim 1, is characterized in that: described agitator motor is fixed on sliding support by leading screw.
3. removing carbon impurities in silicon carbide micropowder system according to claim 1, is characterized in that: described every row alkaline cleaner is comprised of 12 caustic treaters that are arranged side by side, and on its corresponding row frame, 2 sliding supports is housed.
4. removing carbon impurities in silicon carbide micropowder system according to claim 1, is characterized in that: between adjacent two row alkaline cleaners, be provided with worktable.
CN201420281118.1U 2014-05-29 2014-05-29 A kind of removing carbon impurities in silicon carbide micropowder system Expired - Fee Related CN203998967U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420281118.1U CN203998967U (en) 2014-05-29 2014-05-29 A kind of removing carbon impurities in silicon carbide micropowder system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420281118.1U CN203998967U (en) 2014-05-29 2014-05-29 A kind of removing carbon impurities in silicon carbide micropowder system

Publications (1)

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CN203998967U true CN203998967U (en) 2014-12-10

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CN201420281118.1U Expired - Fee Related CN203998967U (en) 2014-05-29 2014-05-29 A kind of removing carbon impurities in silicon carbide micropowder system

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105565320A (en) * 2016-03-21 2016-05-11 平顶山市国邦新材料有限公司 Silicon carbide purification system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105565320A (en) * 2016-03-21 2016-05-11 平顶山市国邦新材料有限公司 Silicon carbide purification system

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20141210

Termination date: 20150529

EXPY Termination of patent right or utility model