CN203976906U - A kind of vertical vacuum film coating apparatus - Google Patents
A kind of vertical vacuum film coating apparatus Download PDFInfo
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- CN203976906U CN203976906U CN201420358294.0U CN201420358294U CN203976906U CN 203976906 U CN203976906 U CN 203976906U CN 201420358294 U CN201420358294 U CN 201420358294U CN 203976906 U CN203976906 U CN 203976906U
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- chamber
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- sheet
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Abstract
The utility model discloses a kind of vertical vacuum film coating apparatus, comprise successively connect enter sheet pre-vacuum chamber, enter sheet surge chamber, coating chamber, slice surge chamber and slice pre-vacuum chamber, describedly enter the two ends of sheet pre-vacuum chamber and the two ends of slice pre-vacuum chamber are equipped with the first vacuum gas lock, also comprise twin valve and first unit of bleeding, describedly enter between sheet surge chamber and coating chamber to be provided with the second vacuum gas lock, between described coating chamber and slice surge chamber, be provided with the 3rd vacuum gas lock, the first inlet mouth of described twin valve with enter sheet surge chamber and be connected, the second inlet mouth of described twin valve is connected with slice surge chamber, the air outlet of described twin valve and first unit of bleeding is connected.The utility model has improved production efficiency, and good stability; And reduced device fabrication cost, also saved the consumption of electric weight simultaneously, thereby reduced production costs, the installation and maintenance of equipment is convenient simultaneously.
Description
Technical field
The utility model relates to vacuum coating film equipment, is specifically related to a kind of vertical vacuum film coating apparatus.
Background technology
Vertical vacuum film coating apparatus is requisite equipment in glass production.Vertical vacuum film coating apparatus comprise successively connect enter sheet pre-vacuum chamber, enter sheet surge chamber, coating chamber, slice surge chamber and slice pre-vacuum chamber, describedly enter the two ends of sheet pre-vacuum chamber and the two ends of slice pre-vacuum chamber are equipped with vacuum gas lock, enter sheet pre-vacuum chamber simultaneously, enter sheet surge chamber, coating chamber, slice surge chamber and slice pre-vacuum chamber be all connected with the unit of bleeding.The work Production Flow Chart of vertical vacuum film coating apparatus is: first workpiece to be coated enters into sheet pre-vacuum chamber, reach after certain condition, first workpiece to be coated enters into sheet surge chamber, second workpiece to be coated enters into sheet pre-vacuum chamber simultaneously, by the time first workpiece to be coated enters coating chamber and completes plated film and arrive after slice surge chamber, second workpiece to be coated just can enter into sheet surge chamber, the 3rd workpiece to be coated enters into sheet pre-vacuum chamber, simultaneously first film-coating workpiece leave slice surge chamber and enter slice pre-vacuum chamber, last first film-coating workpiece leave slice pre-vacuum chamber, complete the work period of a plated film.Though current vertical continuous vacuum coating machine can carry out glass production, also has following defect: 1, production efficiency is low, stability is not strong; 2, current consumption is large, has increased production cost; 3, complex structure, installation and maintenance is all inconvenient.
Utility model content
The purpose of this utility model is the deficiency existing in order to overcome above prior art, provides a kind of simple and reasonable for structure, the vertical vacuum film coating apparatus that production efficiency is high, current consumption is little.
The purpose of this utility model realizes by following technical scheme: this vertical vacuum film coating apparatus, comprise successively connect enter sheet pre-vacuum chamber, enter sheet surge chamber, coating chamber, slice surge chamber and slice pre-vacuum chamber, describedly enter the two ends of sheet pre-vacuum chamber and the two ends of slice pre-vacuum chamber are equipped with the first vacuum gas lock, also comprise twin valve and first unit of bleeding, describedly enter between sheet surge chamber and coating chamber to be provided with the second vacuum gas lock, between described coating chamber and slice surge chamber, be provided with the 3rd vacuum gas lock, describedly enter sheet surge chamber and slice surge chamber and all by twin valve and first unit of bleeding, be connected.
Preferably, described twin valve comprise the valve body that takes the shape of the letter U, the first cylinder, the second cylinder, the first valve plate, the second valve plate with first connection section that unit is connected of bleeding, middle part in described valve body is provided with dividing plate, described dividing plate is divided into left valve chamber and right valve chamber by the valve pocket of valve body, described left valve chamber with enter sheet surge chamber and be communicated with, described right valve chamber is communicated with slice surge chamber; Described left valve chamber is provided with the first valve port communicating with connection section, and described the first valve plate covers the first valve port, and described the first valve plate is fixedly connected with the piston rod of the first cylinder; Described right valve chamber is provided with the second valve port communicating with connection section, described the second valve plate covers the second valve port, and described the second valve plate is fixedly connected with the piston rod of the second cylinder, described the first cylinder and the second cylinder be all installed on valve body above, the upper end of described connection section be connected in valve body below.
Preferably, being provided with above multiple and strengthening gussets of described valve body, described in multiple stopping-off piece be uniformly distributed in valve body above.
Preferably, described the first vacuum gas lock, the second vacuum gas lock are identical with the structure of the 3rd vacuum gas lock.
Preferably, the both sides inwall of described coating chamber is equipped with a plurality of plated film magnetic targets, and a plurality of described plated film magnetic target is uniformly distributed in every side inwall.
Preferably, the quantity of the plated film magnetic target of the both sides inwall of described coating chamber is 5.
Preferably, described in, enter sheet pre-vacuum chamber and slice pre-vacuum chamber and be all connected with second unit of bleeding.
Preferably, describedly enter in sheet pre-vacuum chamber to be provided with transfer mechanism, described transfer mechanism comprises driving pulley, main drive shaft, driven pulley, driven shaft, conveying belt, height-adjustable the first mount pad and height-adjustable the second mount pad, described driving pulley is installed on the first mount pad by main drive shaft, described driven pulley is installed on the second mount pad by driven shaft, and described the first mount pad and the second mount pad are individually fixed in into the two ends of sheet pre-vacuum chamber; The two ends of described conveying belt are connected with driven pulley with driving pulley respectively.
Preferably, described the first mount pad comprises 2 height-adjustable the first support units, 2 described the first support units lay respectively at the both sides of driving pulley, and described driving pulley is installed on the middle part of main drive shaft, and the two ends of described main drive shaft are installed on respectively 2 the first support units;
Described the first support unit comprises clutch shaft bearing seat, the first adjustable plate and 2 the first governor levers, described clutch shaft bearing seat is fixed on the middle of the first adjustable plate above, the lower end of described the first governor lever is fixed on into the inner bottom surface of sheet pre-vacuum chamber, and 2 the first governor lever lays respectively at the both sides of main drive shaft, the two ends of described the first adjustable plate are socketed on respectively 2 the first governor levers, every the first governor lever is provided with 2 the first setting nuts, and 2 described the first setting nuts clamp the first adjustable plate;
Described the second mount pad comprises 2 height-adjustable the second support units, 2 described the second support units lay respectively at the both sides of driven pulley, described driven pulley is installed on the middle part of driven shaft, and the two ends of described driven shaft are installed on respectively 2 the second support units;
Described the second support unit comprises the second bearing support, the second adjustable plate and 2 the second governor levers, described the second bearing support is fixed on the middle of the second adjustable plate above, the lower end of described the second governor lever is fixed on into the inner bottom surface of sheet pre-vacuum chamber, and 2 the second governor lever lays respectively at the both sides of driven shaft, the two ends of described the second adjustable plate are socketed on respectively 2 the second governor levers, every the second governor lever is provided with 2 the second setting nuts, and 2 described the second setting nuts clamp the second adjustable plate.
Preferably, described vertical vacuum film coating apparatus, also comprises supporting plate, and the both sides of described supporting plate are individually fixed in into sheet pre-vacuum chamber, and the feeding portion that heads on above conveying belt of described supporting plate below.
The utility model has advantages of as follows with respect to prior art: this vertical vacuum film coating apparatus has increased the first vacuum gas lock and the second vacuum gas lock etc., compare with traditional vertical vacuum film coating apparatus, within the identical work period, production capacity has improved 25%, improved production efficiency, and good stability; This vertical vacuum film coating apparatus is in the situation that increasing the first vacuum gas lock and the second vacuum gas lock, entering sheet surge chamber and slice surge chamber is all connected by twin valve and first unit of bleeding, this reduces the unit of bleeding of use, reduced device fabrication cost, also saved the consumption of electric weight simultaneously, thereby reduce production costs, the installation and maintenance of equipment is convenient simultaneously; Twin valve arrangement in this vertical vacuum film coating apparatus is simple, and installation and maintenance is all very convenient; The sheet pre-vacuum chamber that enters in this vertical vacuum film coating apparatus has adopted the simple transfer mechanism of structure, simple mounting means, thus the compressible volume that enters sheet pre-vacuum chamber has shortened the time vacuumizing greatly, has further improved production efficiency.
Accompanying drawing explanation
Fig. 1 is the structural representation of vertical vacuum film coating apparatus of the present utility model.
Fig. 2 is the vertical view of twin valve of the present utility model.
Fig. 3 is the sectional view of A-A direction in Fig. 2.
Fig. 4 is the schematic diagram entering in sheet pre-vacuum chamber of the present utility model.
Fig. 5 is the sectional view of B-B direction in Fig. 4.
Fig. 6 is the sectional view of C-C direction in Fig. 4.
Embodiment
Below in conjunction with drawings and Examples, the utility model is described in further detail.
Vertical vacuum film coating apparatus as shown in Figure 1, comprise successively connect enter sheet pre-vacuum chamber 1, enter sheet surge chamber 2, coating chamber 3, slice surge chamber 4 and slice pre-vacuum chamber 5, describedly enter the two ends of sheet pre-vacuum chamber 1 and the two ends of slice pre-vacuum chamber 5 are equipped with the first vacuum gas lock 6, also comprise twin valve 7 and first unit 8 of bleeding, describedly enter between sheet surge chamber 2 and coating chamber 3 to be provided with the second vacuum gas lock 9, between described coating chamber 3 and slice surge chamber 4, be provided with the 3rd vacuum gas lock 10, describedly enter sheet surge chamber 2 and slice surge chamber 4 and all by twin valve 7 and first unit 8 of bleeding, be connected.
Described twin valve 7 comprise the valve body 71 that takes the shape of the letter U, the first cylinder 72, the second cylinder 73, the first valve plate 74, the second valve plate 75 with first connection section 76 that unit 8 is connected of bleeding, middle part in described valve body 71 is provided with dividing plate 77, described dividing plate 77 is divided into left valve chamber 711 and right valve chamber 712 by the valve pocket of valve body 71, described left valve chamber 711 with enter sheet surge chamber 2 and be communicated with, described right valve chamber 712 is communicated with slice surge chamber 4; Described left valve chamber 711 is provided with the first valve port 7111 communicating with connection section 76, and described the first valve plate 74 covers the first valve port 7111, and described the first valve plate 74 is fixedly connected with the piston rod of the first cylinder 72; Described right valve chamber 712 is provided with the second valve port 7121 communicating with connection section 76, described the second valve plate 75 covers the second valve port 7121, and described the second valve plate 75 is fixedly connected with the piston rod of the second cylinder 73, described the first cylinder 72 and the second cylinder 73 be all installed on valve body 71 above, the upper end of described connection section 76 be connected in valve body 71 below.
Being provided with above multiple and strengthening gussets 78 of described valve body 71, described in multiple stopping-off piece 78 be uniformly distributed in valve body 71 above.
Described the first vacuum gas lock 6, the second vacuum gas lock 9 are identical with the structure of the 3rd vacuum gas lock 10.
The both sides inwall of described coating chamber 3 is equipped with a plurality of plated film magnetic targets 11, and a plurality of described plated film magnetic target 11 is uniformly distributed in every side inwall.
The quantity of the plated film magnetic target 11 of the both sides inwall of described coating chamber 3 is 5.
Describedly enter sheet pre-vacuum chamber 2 and slice pre-vacuum chamber 5 and be all connected with second unit 12 of bleeding.
Describedly enter in sheet pre-vacuum chamber 2 to be provided with transfer mechanism 13, described transfer mechanism 13 comprises driving pulley 131, main drive shaft 132, driven pulley 133, driven shaft 134, conveying belt 135, height-adjustable the first mount pad 136 and height-adjustable the second mount pad 137, described driving pulley 131 is installed on the first mount pad 136 by main drive shaft 132, described driven pulley 133 is installed on the second mount pad 137 by driven shaft 134, and described the first mount pad 136 and the second mount pad 137 are individually fixed in into the two ends of sheet pre-vacuum chamber 2; The two ends of described conveying belt 135 are connected with driven pulley 133 with driving pulley 131 respectively.Described the first mount pad 136 is fixed on into the discharge end of sheet pre-vacuum chamber 2, and described the second mount pad 137 is fixed on into the feed end of sheet pre-vacuum chamber 2.
Described the first mount pad 136 comprises 2 height-adjustable the first support units, 2 described the first support units lay respectively at the both sides of driving pulley 131, described driving pulley 131 is installed on the middle part of main drive shaft 132, and the two ends of described main drive shaft 132 are installed on respectively 2 the first support units.
Described the first support unit comprises clutch shaft bearing seat 1361, the first adjustable plate 1362 and 2 the first governor levers 1363, described clutch shaft bearing seat 1361 is fixed on the middle of the first adjustable plate 1362 above, the lower end of described the first governor lever 1363 is fixed on into the inner bottom surface of sheet pre-vacuum chamber 1, and 2 the first governor lever 1363 lays respectively at the both sides of main drive shaft 132, the two ends of described the first adjustable plate 1362 are socketed on respectively 2 the first governor levers 1363, every the first governor lever 1363 is provided with 2 the first setting nuts 1364, 2 described first setting nut 1364 clamping the first adjustable plates 1362.
Described the second mount pad 137 comprises 2 height-adjustable the second support units, 2 described the second support units lay respectively at the both sides of driven pulley 133, described driven pulley 133 is installed on the middle part of driven shaft 134, and the two ends of described driven shaft 134 are installed on respectively 2 the second support units.
Described the second support unit comprises the second bearing support 1371, the second adjustable plate 1372 and 2 the second governor levers 1373, described the second bearing support 1371 is fixed on the middle of the second adjustable plate 1372 above, the lower end of described the second governor lever 1373 is fixed on into the inner bottom surface of sheet pre-vacuum chamber 1, and 2 the second governor lever 1373 lays respectively at the both sides of driven shaft 134, the two ends of described the second adjustable plate 1372 are socketed on respectively 2 the second governor levers 1373, every the second governor lever 1373 is provided with 2 the second setting nuts 1374, 2 described second setting nut 1374 clamping the second adjustable plates 1372.
Overall clutch shaft bearing seat 1361 is identical with the structure of the second bearing support 1371, mainly bearing and underframe, consists of, and can directly in market, buy.
Described vertical vacuum film coating apparatus, also comprises supporting plate, and the both sides of described supporting plate are individually fixed in into sheet pre-vacuum chamber, and the feeding portion that heads on above conveying belt of described supporting plate below.
Above-mentioned embodiment is preferred embodiment of the present utility model; can not limit the utility model; other any change that does not deviate from the technical solution of the utility model and make or other equivalent substitute mode, within being included in protection domain of the present utility model.
Claims (10)
1. a vertical vacuum film coating apparatus, comprise successively connect enter sheet pre-vacuum chamber, enter sheet surge chamber, coating chamber, slice surge chamber and slice pre-vacuum chamber, describedly enter the two ends of sheet pre-vacuum chamber and the two ends of slice pre-vacuum chamber are equipped with the first vacuum gas lock, it is characterized in that: also comprise twin valve and first unit of bleeding, describedly enter between sheet surge chamber and coating chamber to be provided with the second vacuum gas lock, between described coating chamber and slice surge chamber, be provided with the 3rd vacuum gas lock, described in enter sheet surge chamber and slice surge chamber and all by twin valve and first unit of bleeding, be connected.
2. vertical vacuum film coating apparatus according to claim 1, it is characterized in that: described twin valve comprise the valve body that takes the shape of the letter U, the first cylinder, the second cylinder, the first valve plate, the second valve plate with first connection section that unit is connected of bleeding, middle part in described valve body is provided with dividing plate, described dividing plate is divided into left valve chamber and right valve chamber by the valve pocket of valve body, described left valve chamber with enter sheet surge chamber and be communicated with, described right valve chamber is communicated with slice surge chamber; Described left valve chamber is provided with the first valve port communicating with connection section, and described the first valve plate covers the first valve port, and described the first valve plate is fixedly connected with the piston rod of the first cylinder; Described right valve chamber is provided with the second valve port communicating with connection section, described the second valve plate covers the second valve port, and described the second valve plate is fixedly connected with the piston rod of the second cylinder, described the first cylinder and the second cylinder be all installed on valve body above, the upper end of described connection section be connected in valve body below.
3. vertical vacuum film coating apparatus according to claim 2, is characterized in that: being provided with multiple above and strengthening gussets of described valve body, described in multiple stopping-off piece be uniformly distributed in valve body above.
4. vertical vacuum film coating apparatus according to claim 1, is characterized in that: described the first vacuum gas lock, the second vacuum gas lock are identical with the structure of the 3rd vacuum gas lock.
5. vertical vacuum film coating apparatus according to claim 1, is characterized in that: the both sides inwall of described coating chamber is equipped with a plurality of plated film magnetic targets, and a plurality of described plated film magnetic target is uniformly distributed in every side inwall.
6. vertical vacuum film coating apparatus according to claim 5, is characterized in that: the quantity of the plated film magnetic target of the both sides inwall of described coating chamber is 5.
7. vertical vacuum film coating apparatus according to claim 1, is characterized in that: described in enter sheet pre-vacuum chamber and slice pre-vacuum chamber and be all connected with second unit of bleeding.
8. according to the vertical vacuum film coating apparatus described in any one in claim 1 to 7, it is characterized in that: described in enter in sheet pre-vacuum chamber to be provided with transfer mechanism, described transfer mechanism comprises driving pulley, main drive shaft, driven pulley, driven shaft, conveying belt, height-adjustable the first mount pad and height-adjustable the second mount pad, described driving pulley is installed on the first mount pad by main drive shaft, described driven pulley is installed on the second mount pad by driven shaft, and described the first mount pad and the second mount pad are individually fixed in into the two ends of sheet pre-vacuum chamber; The two ends of described conveying belt are connected with driven pulley with driving pulley respectively.
9. vertical vacuum film coating apparatus according to claim 8, it is characterized in that: described the first mount pad comprises 2 height-adjustable the first support units, 2 described the first support units lay respectively at the both sides of driving pulley, described driving pulley is installed on the middle part of main drive shaft, and the two ends of described main drive shaft are installed on respectively 2 the first support units;
Described the first support unit comprises clutch shaft bearing seat, the first adjustable plate and 2 the first governor levers, described clutch shaft bearing seat is fixed on the middle of the first adjustable plate above, the lower end of described the first governor lever is fixed on into the inner bottom surface of sheet pre-vacuum chamber, and 2 the first governor lever lays respectively at the both sides of main drive shaft, the two ends of described the first adjustable plate are socketed on respectively 2 the first governor levers, every the first governor lever is provided with 2 the first setting nuts, and 2 described the first setting nuts clamp the first adjustable plate;
Described the second mount pad comprises 2 height-adjustable the second support units, 2 described the second support units lay respectively at the both sides of driven pulley, described driven pulley is installed on the middle part of driven shaft, and the two ends of described driven shaft are installed on respectively 2 the second support units;
Described the second support unit comprises the second bearing support, the second adjustable plate and 2 the second governor levers, described the second bearing support is fixed on the middle of the second adjustable plate above, the lower end of described the second governor lever is fixed on into the inner bottom surface of sheet pre-vacuum chamber, and 2 the second governor lever lays respectively at the both sides of driven shaft, the two ends of described the second adjustable plate are socketed on respectively 2 the second governor levers, every the second governor lever is provided with 2 the second setting nuts, and 2 described the second setting nuts clamp the second adjustable plate.
10. vertical vacuum film coating apparatus according to claim 8, is characterized in that: also comprise supporting plate, the both sides of described supporting plate are individually fixed in into sheet pre-vacuum chamber, and the feeding portion that heads on above conveying belt of described supporting plate below.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420358294.0U CN203976906U (en) | 2014-06-30 | 2014-06-30 | A kind of vertical vacuum film coating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420358294.0U CN203976906U (en) | 2014-06-30 | 2014-06-30 | A kind of vertical vacuum film coating apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203976906U true CN203976906U (en) | 2014-12-03 |
Family
ID=51974369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420358294.0U Expired - Fee Related CN203976906U (en) | 2014-06-30 | 2014-06-30 | A kind of vertical vacuum film coating apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203976906U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105316635A (en) * | 2015-11-16 | 2016-02-10 | 肇庆市大力真空设备有限公司 | Multifunctional magnetron-sputtering automatic coating production line and coating method thereof |
| CN110629172A (en) * | 2019-10-17 | 2019-12-31 | 黄海山 | Vacuum coating machine for processing metallized film of capacitor |
-
2014
- 2014-06-30 CN CN201420358294.0U patent/CN203976906U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105316635A (en) * | 2015-11-16 | 2016-02-10 | 肇庆市大力真空设备有限公司 | Multifunctional magnetron-sputtering automatic coating production line and coating method thereof |
| CN105316635B (en) * | 2015-11-16 | 2018-01-30 | 肇庆市大力真空设备有限公司 | A kind of multifunctional magnetic control sputtering automatic film coating production line and its film plating process |
| CN110629172A (en) * | 2019-10-17 | 2019-12-31 | 黄海山 | Vacuum coating machine for processing metallized film of capacitor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141203 |