CN203965799U - Exposure machine vacuum sealing clamp - Google Patents
Exposure machine vacuum sealing clamp Download PDFInfo
- Publication number
- CN203965799U CN203965799U CN201420355409.0U CN201420355409U CN203965799U CN 203965799 U CN203965799 U CN 203965799U CN 201420355409 U CN201420355409 U CN 201420355409U CN 203965799 U CN203965799 U CN 203965799U
- Authority
- CN
- China
- Prior art keywords
- underframe
- upper frame
- exposure machine
- vacuum sealing
- sealing clamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Exposure machine vacuum sealing clamp, relates to exposure machine vacuum sealing clamp technical field.The upper frame that solves existing exposure machine vacuum sealing clamp adopts wheat membrane to exist the film vacuumizing off normal while there is deformation when air-breathing, cause the technical deficiency of quality abnormal, include hinged upper frame and underframe, underframe is provided with glass table top, between upper frame and underframe, be provided with packing washer and air spring, on underframe, be provided with and vacuumize air entry; It is characterized in that: described upper frame is provided with the optical glass corresponding with glass table top on underframe.The utility model changes optical glass into the wheat membrane on upper frame, like this in breathing process, vacuum pump is in the time of the air of taking out in exposure machine vacuum sealing clamp, can there is not deformation in this rigid material of glass, can not impact the film, solve cleverly the problem that vacuumizes the film off normal causing, improved product quality.
Description
Technical field
The utility model relates to exposure machine vacuum sealing clamp technical field.
Background technology
The upper frame of existing exposure machine vacuum sealing clamp is wheat membrane, is clipped in the film between wheat membrane and the glass table top of underframe of upper frame vacuumizing when air-breathing off normal will be because of the generation deformation of this flexible material of wheat membrane time, causes quality abnormal.
Summary of the invention
In sum, the upper frame that the purpose of this utility model is to solve existing exposure machine vacuum sealing clamp adopts wheat membrane to exist the film vacuumizing off normal while there is deformation when air-breathing, causes the technical deficiency of quality abnormal, and proposes exposure machine vacuum sealing clamp.
The technical matters proposing for solving the utility model, the technical scheme adopting is: exposure machine vacuum sealing clamp, include hinged upper frame and underframe, underframe is provided with glass table top, between upper frame and underframe, be provided with packing washer and air spring, on underframe, be provided with and vacuumize air entry; It is characterized in that: described upper frame is provided with the optical glass corresponding with glass table top on underframe.
Described upper frame is by coordinating clamping with optical glass one opposite side.
Between described buckling groove and optical glass, be provided with O-ring seal or fluid sealant.
The beneficial effects of the utility model are: the utility model changes optical glass into the wheat membrane on upper frame, like this in breathing process, vacuum pump is in the time of the air of taking out in exposure machine vacuum sealing clamp, can there is not deformation in this rigid material of glass, can not impact the film, solve cleverly the problem that vacuumizes the film off normal causing, improved product quality.
Brief description of the drawings
Fig. 1 is perspective view of the present utility model.
Embodiment
Below in conjunction with accompanying drawing and the preferred specific embodiment of the utility model, structure of the present utility model is described further.
Shown in Fig. 1, the utility model includes hinged upper frame 1 and underframe 2, and underframe 2 is provided with glass table top 21, and described upper frame 1 is provided with the optical glass 11 corresponding with glass table top 21 on underframe 2; Between upper frame 1 and underframe 2, be provided with packing washer 12 and air spring 23, on underframe 2, be provided with and vacuumize air entry 24.
Claims (3)
1. exposure machine vacuum sealing clamp, includes hinged upper frame and underframe, and underframe is provided with glass table top, is provided with packing washer and air spring between upper frame and underframe, is provided with and vacuumizes air entry on underframe; It is characterized in that: described upper frame is provided with the optical glass corresponding with glass table top on underframe.
2. exposure machine vacuum sealing clamp according to claim 1, is characterized in that: described upper frame is by coordinating clamping with optical glass one opposite side.
3. exposure machine vacuum sealing clamp according to claim 2, is characterized in that: between described buckling groove and optical glass, be provided with O-ring seal or fluid sealant.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420355409.0U CN203965799U (en) | 2014-06-30 | 2014-06-30 | Exposure machine vacuum sealing clamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420355409.0U CN203965799U (en) | 2014-06-30 | 2014-06-30 | Exposure machine vacuum sealing clamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203965799U true CN203965799U (en) | 2014-11-26 |
Family
ID=51926359
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420355409.0U Expired - Fee Related CN203965799U (en) | 2014-06-30 | 2014-06-30 | Exposure machine vacuum sealing clamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203965799U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107908080A (en) * | 2017-12-21 | 2018-04-13 | 昆山乐邦印刷器材设备有限公司 | The vacuum exposure device of exposure machine |
| CN111421487A (en) * | 2020-05-26 | 2020-07-17 | 苏州京浜光电科技股份有限公司 | Special fixture for coating film on ultrathin resin sheet |
-
2014
- 2014-06-30 CN CN201420355409.0U patent/CN203965799U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107908080A (en) * | 2017-12-21 | 2018-04-13 | 昆山乐邦印刷器材设备有限公司 | The vacuum exposure device of exposure machine |
| CN111421487A (en) * | 2020-05-26 | 2020-07-17 | 苏州京浜光电科技股份有限公司 | Special fixture for coating film on ultrathin resin sheet |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141126 Termination date: 20190630 |