CN203963505U - Special gas automatic supplier - Google Patents
Special gas automatic supplier Download PDFInfo
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- CN203963505U CN203963505U CN201420429088.4U CN201420429088U CN203963505U CN 203963505 U CN203963505 U CN 203963505U CN 201420429088 U CN201420429088 U CN 201420429088U CN 203963505 U CN203963505 U CN 203963505U
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- solenoid valve
- pipeline
- pressure
- pressure switch
- steel cylinder
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Abstract
The utility model discloses a kind of special gas automatic supplier, belong to bottled gas air feeder, the helium that existing market provides can cause gas supply discontinuity, affect manufacturing efficiency when changing gas cylinder, the utility model is by being set up in parallel two pipelines, and control with circuit, diverter switch by circuit realizes and when the gas in steel cylinder is finished, automatically switches to another steel cylinder, and the pipeline that is finished the steel cylinder place of gas closes and can change steel cylinder, for producing the required special gases such as helium, provide continual supply; Convenient, safety, carries out gas supply reliably, while meeting production requirement at the end of gas pressure, automatically switches, and changes gas cylinder convenient.
Description
Technical field
The utility model belongs to bottled gas air feeder, specifically a kind of special gas automatic supplier of uninterrupted air feed.
Background technique
In fiber manufacturing, relate to the use of special gas (as helium), the essential uninterrupted supply of helium in production, but the helium that market provides is generally 200 barometric pressure, 16 bottles, be the collection dress lattice of a group, after being finished, with empty set dress lattice, change full collection dress lattice, replacing can cause gas supply to interrupt, and affects manufacturing efficiency.
Model utility content
The technical assignment of the technical problems to be solved in the utility model and proposition is to overcome the defect that the helium that existing market provides can cause gas supply discontinuity, affect manufacturing efficiency when changing gas cylinder, and the also safe and reliable special gas automatic supplier of realizing the automatic switchover of gas of a kind of uninterrupted air feed is provided.
For achieving the above object, special gas automatic supplier of the present utility model, comprises the first pipeline through same air outlet air feed, the second pipeline and for controlling the circuit of described the first pipeline, the second pipeline, it is characterized in that:
The first described pipeline comprises through tracheae and is connected to U5 solenoid valve, the U11 solenoid valve between U1 steel cylinder and described air outlet, opens, closes during power-off when described U5 solenoid valve, the energising of U11 solenoid valve;
The second described pipeline comprises through tracheae and is connected to U16 solenoid valve, the U23 solenoid valve between U2 steel cylinder and described air outlet, opens, closes during power-off when described U16 solenoid valve, the energising of U23 solenoid valve;
Described circuit comprises U9 pressure switch, U20 pressure switch, Q1 triode, Q2 triode, diverter switch;
Described U9 pressure switch is connected on the pipeline between described U5 solenoid valve and U11 solenoid valve, closed during the pressure disconnect during pressure that the pressure of described the first pipeline is set lower than described U9 pressure switch, the pressure of described the first pipeline set higher than described U9 pressure switch;
Described U20 pressure switch is connected on the pipeline between described U16 solenoid valve and U23 solenoid valve, and the pressure of described the second pipeline disconnects during lower than the setting pressure of described U20 pressure switch, the pressure of described the second pipeline is closed during higher than the setting pressure of described U20 pressure switch;
The described Q2 triode conducting of diverter switch order described in when described U9 pressure switch closure, U20 pressure switch disconnects; Described U9 pressure switch disconnects, described diverter switch is allocated to the Q2 triode cut-off described in side season, described U9 pressure switch disconnects, described diverter switch is allocated to opposite side and the described Q2 triode cut-off in closed season of described U20 pressure switch, and described U9 pressure switch disconnects, described diverter switch is allocated to opposite side and described U20 pressure switch disconnects described Q2 triode conducting in season;
The described Q1 triode conducting in closed season of described U20 pressure switch, described U20 pressure switch disconnects described Q1 triode cut-off in season;
Described Q2 triode connects a relay, and the transposition by described relay is to described U5 solenoid valve and the energising simultaneously of U11 solenoid valve or the power-off simultaneously of power-off, described U16 solenoid valve and U23 solenoid valve or energising.
As optimization technique means: described U5 solenoid valve, U11 solenoid valve are in parallel with a HL1 tutorial light, described U16 solenoid valve, U23 solenoid valve are in parallel with a HL2 tutorial light.
As optimization technique means: the first described pipeline comprises a U10 solenoid valve, one end of described U10 solenoid valve is connected on the pipeline between described U5 solenoid valve and U11 solenoid valve, the other end emptying, described U10 solenoid valve is in parallel with described U16 solenoid valve, U23 solenoid valve again after connecting with a R8 resistance in described circuit, a C1 electric capacity in parallel on described R8 resistance;
The second described pipeline comprises a U21 solenoid valve, one end of described U21 solenoid valve is connected on the pipeline between described U16 solenoid valve and U23 solenoid valve, the other end emptying, described U21 solenoid valve is in parallel with described U5 solenoid valve, U11 solenoid valve again after connecting with a R9 resistance in described circuit, a C2 electric capacity in parallel on described R9 resistance.
As optimization technique means: the first described pipeline comprises the U4 pressure gauge being connected on described U1 steel cylinder, and the second described pipeline comprises the U15 pressure gauge being connected on described U2 steel cylinder.What is more, the first described pipeline comprises a U3 stop valve, one end of described U3 stop valve and described U4 pressure gauge through same tracheae be connected with described U1 steel cylinder, its other end emptying, the second described pipeline comprises a U14 stop valve, described U14 stop valve one end and described U15 pressure gauge through same tracheae be connected with described U2 steel cylinder, its other end emptying.
As optimization technique means: the first described pipeline comprises the U6 filter being connected in series with described U5 solenoid valve, U9 pressure switch, U11 solenoid valve, and the second described pipeline comprises the U17 filter being connected in series with described U16 solenoid valve, U20 pressure switch, U23 solenoid valve.
As optimization technique means: the first described pipeline comprises the U13 manually operated valve that is positioned at front side, described air outlet, and the second described pipeline comprises the U24 manually operated valve that is positioned at front side, described air outlet.
The beneficial effects of the utility model are: can provide continual supply for producing the required special gases such as helium; Convenient, safety, carries out gas supply reliably, while meeting production requirement at the end of gas pressure, automatically switches, and changes gas cylinder convenient.
Accompanying drawing explanation
Fig. 1 be the gas pressure of circuit diagram of the present utility model in U1 steel cylinder, U2 steel cylinder while being all less than the pressure that U9 pressure switch, U20 pressure switch set diverter switch SW2 be allocated to the schematic diagram of downside;
Fig. 2 be the gas pressure of circuit diagram of the present utility model in U1 steel cylinder, U2 steel cylinder while being all less than the pressure that U9 pressure switch, U20 pressure switch set diverter switch SW2 be allocated to the schematic diagram of upside;
Fig. 3 is piping diagram of the present utility model.
Embodiment
Below in conjunction with Figure of description, the utility model is described further.
Special gas automatic supplier of the present utility model, comprises the first pipeline 01 through same air outlet 03 air feed, the second pipeline 02 and for controlling the circuit of the first pipeline, the second pipeline:
The first pipeline 01 as shown in Figure 3, comprises through tracheae and is connected to U5 solenoid valve U5, the U11 solenoid valve U11 between U1 steel cylinder U1 and air outlet 03, when unlatching during U5 solenoid valve U5, U11 solenoid valve U11 energising, power-off, closes;
The second pipeline 02 as shown in Figure 3, comprises through tracheae and is connected to U16 solenoid valve U16, the U23 solenoid valve U23 between U2 steel cylinder U2 and air outlet 03, when unlatching during U16 solenoid valve U16, U23 solenoid valve U23 energising, power-off, closes;
Circuit as shown in Figure 1, 2, comprises U9 pressure switch U9, U20 pressure switch U20, Q1 triode Q1, Q2 triode Q2, diverter switch SW2;
Referring to Fig. 3, U9 pressure switch U9 is connected on the pipeline between U5 solenoid valve U5 and U11 solenoid valve U11, closed during the pressure disconnect during pressure that the pressure of the first pipeline 01 is set lower than U9 pressure switch U9, the pressure of the first pipeline 01 set higher than U9 pressure switch U9;
Referring to Fig. 3, U20 pressure switch U20 is connected on the pipeline between U16 solenoid valve U16 and U23 solenoid valve U23, and the pressure of the second pipeline 02 disconnects during lower than the setting pressure of U20 pressure switch U20, the pressure of the second pipeline 02 is closed during higher than the setting pressure of U20 pressure switch U20;
Referring to Fig. 1,2, when U9 pressure switch U9 closure, U20 pressure switch U20 disconnect, no matter diverter switch SW2 is allocated to upside or downside, all makes Q2 triode Q2 conducting; U9 pressure switch U9 disconnects, diverter switch SW2 is allocated to the seasonal Q2 triode Q2 cut-off of a side (diagram upside), U9 pressure switch U9 disconnects, diverter switch SW2 is allocated to opposite side (diagram downside) and the closed seasonal Q2 triode Q2 cut-off of U20 pressure switch U20, and U9 pressure switch U9 disconnects, diverter switch SW2 is allocated to opposite side (diagram downside) and U20 pressure switch U20 disconnects seasonal Q2 triode Q2 conducting;
Referring to Fig. 1,2, the closed seasonal Q1 triode Q1 conducting of U20 pressure switch U20, U20 pressure switch U20 disconnects seasonal Q1 triode Q1 cut-off;
Referring to Fig. 1,2, Q2 triode Q2 connects a relay K 1, and the transposition by relay K 1 is to U5 solenoid valve U5 and U11 solenoid valve U11 energising simultaneously or power-off, U16 solenoid valve U16 and U23 solenoid valve U23 power-off simultaneously or energising.
In view of special gas automatic supplier of the present utility model, when the gas pressure in U1 steel cylinder U1 is less than pressure, the gas pressure in U2 steel cylinder U2 that U9 pressure switch U9 sets and is less than the pressure that U20 pressure switch U20 sets, in Fig. 1, Fig. 2, U9 pressure switch U9, U20 pressure switch U20 are in off state.After energising, if diverter switch SW2 is allocated to downside (referring to Fig. 1), triode Q1 cut-off, triode Q2 conducting, relay K 1 action, the left position of relay K 1 is connected, and the U5 solenoid valve U5 of the first pipeline 01, U11 solenoid valve U11 open, U16 solenoid valve U16, the U23 solenoid valve U23 of the second pipeline 02 close, and can change U2 steel cylinder U2; If diverter switch SW2 is allocated to upside (referring to Fig. 2), Q1 triode Q1 cut-off, Q2 triode Q2 cut-off, relay K 1 resets to the right, the right position of relay K 1 is connected, U5 solenoid valve U5, the U11 solenoid valve U11 of the first pipeline 01 close, and the U16 solenoid valve U16 of the second pipeline 02, U23 solenoid valve U23 open, and can change U1 steel cylinder U1.
At U1 steel cylinder U1, U2 steel cylinder U2, be under the prerequisite of empty bottle, when U1 steel cylinder U1 changes after full gas cylinder, diverter switch SW2 is allocated to downside, Q1 triode Q1 cut-off, Q2 triode Q2 conducting, relay K 1 action, the left position of relay K 1 is connected, and the U5 solenoid valve U5 of the first pipeline 01, U11 solenoid valve U11 open, and the pressure of the first pipeline 01 is higher than the setting pressure of U9 pressure switch U9, U9 pressure switch U9 is closed, U1 steel cylinder U1 air feed; U16 solenoid valve U16, the U23 solenoid valve U23 of the second pipeline 02 close, and in U1 steel cylinder U1, gas needed to change U2 steel cylinder U2 before finishing.For the gas in U1 steel cylinder U1 can automatically switch to U2 steel cylinder U2 by U2 steel cylinder U2 air feed after being finished, diverter switch SW2 must be allocated to upside.
After gas in U1 steel cylinder U1 is finished, the pressure of the first pipeline 01 is lower than the setting pressure of U9 pressure switch U9, U9 pressure switch U9 disconnects, Q2 triode Q2 cut-off, relay K 1 resets to the right, the right position of relay K 1 is connected, the U5 solenoid valve U5 of the first pipeline 01, U11 solenoid valve U11 closes, can change U1 steel cylinder U1, the U16 solenoid valve U16 of the second pipeline 02, U23 solenoid valve U23 opens, the U2 steel cylinder U2 air feed being come up by replacing, the pressure of the second pipeline 02 is higher than the setting pressure of U20 pressure switch U20, U20 pressure switch U20 is closed, Q1 triode Q1 conducting.Same, for the gas in U2 steel cylinder U2 can automatically switch to U1 steel cylinder U1 by U1 steel cylinder U1 air feed after being finished, diverter switch SW2 must be allocated to downside.
After gas in U2 steel cylinder U2 is finished, the pressure of the second pipeline 02 is lower than the setting pressure of U20 pressure switch U20, U20 pressure switch U20 disconnects, Q1 triode Q1 cut-off, Q2 triode Q2 conducting, relay K 1 action, the left position of relay K 1 is connected, the U5 solenoid valve U5 of the first pipeline 01, U11 solenoid valve U11 open, the U1 steel cylinder U1 air feed being come up by replacing.
At U1 steel cylinder U1, U2 steel cylinder U2, be under the prerequisite of empty bottle, when U2 steel cylinder U2 changes after full gas cylinder, diverter switch SW2 is allocated to upside, Q2 triode Q2 cut-off, relay K 1 resets to the right, the right position of relay K 1 is connected, U5 solenoid valve U5, the U11 solenoid valve U11 of the first pipeline 01 close, the U16 solenoid valve U16 of the second pipeline 02, U23 solenoid valve U23 open, U2 steel cylinder U2 air feed, the pressure of the second pipeline 02 is higher than the setting pressure of U20 pressure switch U20, and U20 pressure switch U20 is closed, Q1 triode Q1 conducting; In U2 steel cylinder U2, gas needed to change U1 steel cylinder U1 before finishing.For the gas in U2 steel cylinder U2 can automatically switch to U1 steel cylinder U1 by U1 steel cylinder U1 air feed after being finished, diverter switch SW2 must be allocated to downside.
Can replace as mentioned above replacing U1 steel cylinder, U2 steel cylinder, and can automatically switch.
In order to indicate operation, U5 solenoid valve U5, U11 solenoid valve U11 are in parallel with a HL1 tutorial light HL1, and U16 solenoid valve U16, U23 solenoid valve U23 are in parallel with a HL2 tutorial light HL2.Thereby HL1 tutorial light HL1 lights to indicate and shows that the first pipeline is at air feed when U5 solenoid valve U5, U11 solenoid valve U11 open, when U16 solenoid valve U16, U23 solenoid valve U23 open, HL2 tutorial light HL2 lights indication the second pipeline at air feed.
Consider the time delay of pneumatic valve action, pressurized gas recoil while switching for fear of steel cylinder in another steel cylinder, as U1 steel cylinder U1 is finished while switching to U2 steel cylinder U2, gas backwash to the first pipeline 01 of U2 steel cylinder U2, cause the pressure of the first pipeline 01 to be greater than the setting pressure of U9 pressure switch U9, U9 pressure switch U9 can not disconnect, again allow U5 solenoid valve U5, U11 solenoid valve U11 opens, gas pours in down a chimney, or U2 steel cylinder U2 is finished while switching to U1 steel cylinder U1, gas backwash to the second pipeline 02 of U1 steel cylinder U1, cause the pressure of the second pipeline 02 to be greater than the setting pressure of U20 pressure switch U20, U20 pressure switch U20 can not disconnect, again allow U16 solenoid valve U16, U23 solenoid valve U23 opens, gas pours in down a chimney, the first pipeline 01 comprises a U10 solenoid valve U10, one end of U10 solenoid valve U10 is connected on the pipeline between U5 solenoid valve U5 and U11 solenoid valve U11, the other end emptying, U10 solenoid valve U10 after connecting with a R8 resistance R 8 in circuit again with U16 solenoid valve U16, U23 solenoid valve U23 is in parallel, a C1 capacitor C 1 in parallel in R8 resistance R 8, the second pipeline 02 comprises a U21 solenoid valve U21, one end of U21 solenoid valve U21 is connected on the pipeline between U16 solenoid valve U16 and U23 solenoid valve U23, the other end emptying, after U21 solenoid valve U21 connects with a R9 resistance R 9 in circuit, U11 is in parallel with U5 solenoid valve U5, U11 solenoid valve again, a C2 capacitor C 2 in parallel in R9 resistance R 9.
Thereby when closing, allow the U10 solenoid valve U10 short time (as 1 second) open once at U5 solenoid valve U5, U11 solenoid valve U11, the gas emptying between U5 solenoid valve U5, U11 solenoid valve U11, or when closing, allow the U21 solenoid valve U21 short time (as 1 second) open once at U16 solenoid valve U16, U23 solenoid valve U23, the gas emptying between U16 solenoid valve U16, U23 solenoid valve U23, the smooth-going transition while guaranteeing to switch.
In order to understand pressure, the surplus of gas in steel cylinder, the first pipeline 01 comprises the U4 pressure gauge U4 being connected on U1 steel cylinder U1, and the second pipeline 02 comprises the U15 pressure gauge U15 being connected on U2 steel cylinder U2.The first pipeline 01 comprises a U3 stop valve U3, one end of U3 stop valve U3 and U4 pressure gauge U4 through same tracheae be connected with U1 steel cylinder U1, its other end emptying, the second pipeline 02 comprises a U14 stop valve U14, U14 stop valve U14 one end and U15 pressure gauge U15 through same tracheae be connected with U2 steel cylinder U2, its other end emptying.This stop valve both can be to pressure gauge pressurize.
For fear of impurity, enter reaction link, the first pipeline 01 comprises the U6 filter U6 being connected in series with U5 solenoid valve U5, U9 pressure switch U9, U11 solenoid valve U11, and the second pipeline 02 comprises the U17 filter U17 being connected in series with U16 solenoid valve U16, U20 pressure switch U20, U23 solenoid valve U23.
In order to make pipeline have mobility, manual-lock pipeline if desired, the first pipeline 01 comprises the U13 manually operated valve U13 that is positioned at 03 front side, air outlet, and the second pipeline 02 comprises the U24 manually operated valve U24 that is positioned at front side, air outlet.During normal air feed, U13 manually operated valve U13, U24 manually operated valve U24 open.
Claims (7)
1. special gas automatic supplier, comprises the first pipeline (01) through same air outlet (03) air feed, the second pipeline (02) and for controlling the circuit of described the first pipeline, the second pipeline, it is characterized in that:
Described the first pipeline (01) comprises through tracheae and is connected to U5 solenoid valve (U5), the U11 solenoid valve (U11) between U1 steel cylinder (U1) and described air outlet (03), opens, closes during power-off when described U5 solenoid valve (U5), U11 solenoid valve (U11) energising;
Described the second pipeline (02) comprises through tracheae and is connected to U16 solenoid valve (U16), the U23 solenoid valve (U23) between U2 steel cylinder (U2) and described air outlet (03), opens, closes during power-off when described U16 solenoid valve (U16), U23 solenoid valve (U23) energising;
Described circuit comprises U9 pressure switch (U9), U20 pressure switch (U20), Q1 triode (Q1), Q2 triode (Q2), diverter switch (SW2);
Described U9 pressure switch (U9) is connected on the pipeline between described U5 solenoid valve (U5) and U11 solenoid valve (U11), closed during the pressure disconnect during pressure that the pressure of described the first pipeline (01) is set lower than described U9 pressure switch (U9), the pressure of described the first pipeline (01) set higher than described U9 pressure switch (U9);
Described U20 pressure switch (U20) is connected on the pipeline between described U16 solenoid valve (U16) and U23 solenoid valve (U23), and the pressure of described the second pipeline (02) disconnects during lower than the setting pressure of described U20 pressure switch (U20), the pressure of described the second pipeline (02) is closed during higher than the setting pressure of described U20 pressure switch (U20);
Described Q2 triode (Q2) conducting of diverter switch (SW2) order described in when described U9 pressure switch (U9) closure, U20 pressure switch (U20) disconnects; Described U9 pressure switch (U9) disconnects, described diverter switch (SW2) is allocated to Q2 triode (Q2) cut-off described in side season, described U9 pressure switch (U9) disconnects, described diverter switch (SW2) is allocated to opposite side and described U20 pressure switch (U20) described Q2 triode (Q2) cut-off in closed season, and described U9 pressure switch (U9) disconnects, described diverter switch (SW2) is allocated to opposite side and described U20 pressure switch (U20) disconnects described Q2 triode (Q2) conducting in season;
Described Q1 triode (Q1) conducting in closed season of described U20 pressure switch (U20), described U20 pressure switch (U20) disconnects described Q1 triode (Q1) cut-off in season;
Described Q2 triode (Q2) connects a relay (K1), and the transposition by described relay (K1) is to described U5 solenoid valve (U5) and U11 solenoid valve (U11) energising simultaneously or power-off, described U16 solenoid valve (U16) and U23 solenoid valve (U23) while power-off or energising.
2. special gas automatic supplier according to claim 1, it is characterized in that: described U5 solenoid valve (U5), U11 solenoid valve (U11) are in parallel with a HL1 tutorial light (HL1), described U16 solenoid valve (U16), U23 solenoid valve (U23) are in parallel with a HL2 tutorial light (HL2).
3. special gas automatic supplier according to claim 1, is characterized in that:
Described the first pipeline (01) comprises a U10 solenoid valve (U10), one end of described U10 solenoid valve (U10) is connected on the pipeline between described U5 solenoid valve (U5) and U11 solenoid valve (U11), the other end emptying, after connecting with a R8 resistance (R8) in described circuit, (U23) is in parallel with described U16 solenoid valve (U16), U23 solenoid valve again for described U10 solenoid valve (U10), the upper C1 electric capacity (C1) in parallel of described R8 resistance (R8);
Described the second pipeline (02) comprises a U21 solenoid valve (U21), one end of described U21 solenoid valve (U21) is connected on the pipeline between described U16 solenoid valve (U16) and U23 solenoid valve (U23), the other end emptying, after connecting with a R9 resistance (R9) in described circuit, (U11) is in parallel with described U5 solenoid valve (U5), U11 solenoid valve again for described U21 solenoid valve (U21), the upper C2 electric capacity (C2) in parallel of described R9 resistance (R9).
4. special gas automatic supplier according to claim 1, it is characterized in that: described the first pipeline (01) comprises the U4 pressure gauge (U4) being connected on described U1 steel cylinder (U1), described the second pipeline (02) comprises the U15 pressure gauge (U15) being connected on described U2 steel cylinder (U2).
5. special gas automatic supplier according to claim 4, it is characterized in that: described the first pipeline (01) comprises a U3 stop valve (U3), one end of described U3 stop valve (U3) and described U4 pressure gauge (U4) through same tracheae be connected with described U1 steel cylinder (U1), its other end emptying, described the second pipeline (02) comprises a U14 stop valve (U14), described U14 stop valve (U14) one end and described U15 pressure gauge (U15) through same tracheae be connected with described U2 steel cylinder (U2), its other end emptying.
6. special gas automatic supplier according to claim 1, it is characterized in that: described the first pipeline (01) comprises the U6 filter (U6) being connected in series with described U5 solenoid valve (U5), U9 pressure switch (U9), U11 solenoid valve (U11), described the second pipeline (02) comprises the U17 filter (U17) being connected in series with described U16 solenoid valve (U16), U20 pressure switch (U20), U23 solenoid valve (U23).
7. special gas automatic supplier according to claim 1, it is characterized in that: described the first pipeline (01) comprises the U13 manually operated valve (U13) that is positioned at front side, described air outlet (03), described the second pipeline (02) comprises the U24 manually operated valve (U24) that is positioned at front side, described air outlet (03).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420429088.4U CN203963505U (en) | 2014-07-31 | 2014-07-31 | Special gas automatic supplier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420429088.4U CN203963505U (en) | 2014-07-31 | 2014-07-31 | Special gas automatic supplier |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203963505U true CN203963505U (en) | 2014-11-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201420429088.4U Active CN203963505U (en) | 2014-07-31 | 2014-07-31 | Special gas automatic supplier |
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| CN (1) | CN203963505U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI719319B (en) * | 2017-06-15 | 2021-02-21 | 美商慧盛材料美國責任有限公司 | Gas supply system |
-
2014
- 2014-07-31 CN CN201420429088.4U patent/CN203963505U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI719319B (en) * | 2017-06-15 | 2021-02-21 | 美商慧盛材料美國責任有限公司 | Gas supply system |
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