CN203959395U - A kind of slicing apparatus - Google Patents
A kind of slicing apparatus Download PDFInfo
- Publication number
- CN203959395U CN203959395U CN201420330187.7U CN201420330187U CN203959395U CN 203959395 U CN203959395 U CN 203959395U CN 201420330187 U CN201420330187 U CN 201420330187U CN 203959395 U CN203959395 U CN 203959395U
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- China
- Prior art keywords
- negative pressure
- seal case
- tank
- negative
- aspirating hole
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Abstract
The utility model discloses a kind of slicing apparatus, comprise feed unit, suction unit and negative pressure unit, negative pressure unit comprises negative pressure box, be arranged at least one aspirating hole on negative pressure box, seal case, the air extracting pump and the infusion pump that are connected with seal case, these aspirating holes are communicated to respectively seal case, negative-pressure adsorption hole is connected with negative pressure box, negative pressure box part is positioned at tank, and wherein at least one aspirating hole is arranged in the position near tank water surface top.The design carries out burst in water, and by negative pressure power, lamellar body adsorbed and carry, gas is separated with liquid with infusion pump by a seal case and the air extracting pump that is attached thereto, and isolated water is returned in tank, to keep the water yield in tank to be beneficial to burst, and ensure the space of the taken out negative pressure in seal case, and then the adsorption affinity in raising negative-pressure adsorption hole, while the taken out negative pressure volume in negative pressure box for limit land productivity greatly, improve negative pressure work efficiency, reliable in structure, is suitable for applying.
Description
Technical field
the utility model relates to a kind of silicon chip processing device, particularly relates to a kind of slicing apparatus that carries out under water burst.
Background technology
before being carried out to inserted sheet, silicon chip to first carry out burst to stacking silicon chip, and due to silicon chip lightweight, frangible, and between adjacent silicon chip, there is certain adsorption affinity, so be chosen in and carry out burst in water, when burst, general using negative-pressure adsorption realizes burst and conveying, will cause like this part water in tank to be drawn out of with negative pressure work, can cause water in tank constantly to reduce and is unfavorable for burst, in addition, also can affect the efficiency of negative-pressure adsorption.
Utility model content
for the technical deficiency of above-mentioned existence, the purpose of this utility model is to provide a kind of slicing apparatus, and it returns in tank after water being pumped can being isolated, and ensures burst efficient work, successfully carries out.
for solving the problems of the technologies described above, the utility model adopts following technical scheme:
a kind of slicing apparatus, comprise feed unit, suction unit and negative pressure unit, described feed unit is arranged in a tank, is placed with and comprises that along continuous straight runs stacks the stack of substrates of multiple substrates in described feed unit, and each described substrate edge roughly vertical plane is arranged; Described suction unit comprises load-transfer device, on described load-transfer device, be provided with some negative-pressure adsorption holes that are connected with a negative pressure propulsion source, described conveying is arranged in described tank with part and this part extends to described feed unit, when described stack of substrates is during along direction of feed feeding, the substrate in described stack of substrates can be one by one by the negative-pressure adsorption hole absorption on described load-transfer device and move with load-transfer device; Described negative pressure unit is for providing described negative pressure propulsion source to described negative-pressure adsorption hole, described negative pressure unit comprises and is arranged on the negative pressure box of described load-transfer device inside, air extracting pump and the infusion pump that is arranged at least one aspirating hole on described negative pressure box, seal case, is connected with described seal case, described aspirating hole is communicated to described seal case by body, negative-pressure adsorption hole described in several is all connected with described negative pressure box, and described negative pressure box part is positioned at described tank.
preferably, on described negative pressure box, be provided with the first aspirating hole and the second aspirating hole, the position more than middle part of the negative pressure box described in the first described aspirating hole is positioned at, the second described aspirating hole is arranged in the position of the above and close water surface of the described tank water surface.
preferably, the arrival end of described infusion pump is communicated to described seal case, exit end and is communicated to described tank.
preferably, on described seal case, be provided with high-order level sensor and low level level sensor, described high-order level sensor and the described equal signal of low level level sensor are connected to a control unit, and the control signal of described control unit output is connected to the signal control end of described infusion pump.
preferably, be respectively arranged with multiple dividing plates in the two lateral walls of described seal case, the dividing plate described in these is crisscross arranged separately, between the dividing plate described in these and the inwall of described seal case, forms snakelike gas-liquid separation passage.
the beneficial effects of the utility model are: the design carries out burst in water, and by negative pressure power, lamellar body adsorbed and carry, gas is separated with liquid with infusion pump by a seal case and the air extracting pump that is attached thereto, and isolated water is returned in tank, to keep the water yield in tank to be beneficial to burst, and ensure the space of the taken out negative pressure in seal case, and then the adsorption affinity in raising negative-pressure adsorption hole, while the taken out negative pressure volume in negative pressure box for limit land productivity greatly, improve negative pressure work efficiency, reliable in structure, is suitable for applying.
Brief description of the drawings
accompanying drawing 1 is feed unit in slicing apparatus of the present utility model and the structural representation of suction unit;
the structural representation that accompanying drawing 2 is slicing apparatus of the present utility model.
in accompanying drawing: 10, feed unit; 101, tank; 102, stack of substrates; 20, suction unit; 201, load-transfer device; 30, negative pressure unit; 301, negative pressure box; 3011, the first aspirating hole; 3012, the second aspirating hole; 302, seal case; 3021, high-order level sensor; 3022, low level level sensor; 303, air extracting pump; 304, infusion pump; 40, control unit.
Detailed description of the invention
below in conjunction with embodiment shown in the drawings, the utility model is described in detail below:
as shown in accompanying drawing 1 and accompanying drawing 2, a kind of slicing apparatus, comprise feed unit 10, suction unit 20 and negative pressure unit 30, feed unit 10 is arranged in a tank 101, wherein, in feed unit 10, be placed with and comprise that along continuous straight runs stacks the stack of substrates 102 of multiple substrates, each substrate edge roughly vertical plane is arranged, suction unit 20 comprises load-transfer device 201, on load-transfer device 201, be provided with some negative-pressure adsorption holes that are connected with negative pressure propulsion source, load-transfer device 201 has part to be arranged in tank 101 and this part extends to feed unit 10, when stack of substrates 102 is during along direction of feed feeding, the substrate in stack of substrates 102 can be transferred one by one with the negative-pressure adsorption hole absorption on 201 and move with load-transfer device 201, negative pressure unit 30 is for providing above-mentioned volume negative pressure propulsion source to negative-pressure adsorption hole, negative pressure unit 30 comprises the negative pressure box 301 that is arranged on load-transfer device 201 inside, be arranged on the first aspirating hole 3011 and the second aspirating hole 3012 on negative pressure box 301, a seal case 302, the air extracting pump 303 being connected with seal case 302 and infusion pump 304, the first aspirating hole 3011 and the second aspirating hole 3012 are communicated to seal case 302 by body, several negative-pressure adsorption holes are all connected with negative pressure box 301, negative pressure box 301 parts are positioned at tank 101, the position more than middle part of the negative pressure box 301 described in the first aspirating hole 3011 is positioned at, the second aspirating hole 3012 is arranged in the position of the above and close water surface of tank 101 waters surface, owing to being sucked and producing negative pressure in negative pressure box 301, at this moment, the water that is drawn into negative pressure box 301 from negative-pressure adsorption hole can be mingled in gas, but these aqueous vapors are positioned at around the position of the second aspirating hole 3012 mostly, so under the effect of air extracting pump 303 and infusion pump 304, these aqueous vapors can be from the second aspirating hole 3012 along in body suction seal case 302, in the two lateral walls of seal case 302, be respectively arranged with multiple dividing plates, these dividing plates are crisscross arranged separately, between these dividing plates and the inwall of seal case 302, form snakelike gas-liquid separation passage, certainly, above-described embodiment has just provided the mode that comprises two aspirating holes, also can select only to offer an aspirating hole, and this aspirating hole is positioned at slightly near the position more than water surface of tank 101, ensures that the gas with water can be sucked, or in order to obtain better adsorption effect, the quantity that can set up aspirating hole, but to ensure that wherein at least one aspirating hole is the position that is arranged in the above and close water surface of tank 101 waters surface.
more specifically, the arrival end of infusion pump 304 is communicated to seal case 302, exit end and is communicated to tank 101, on seal case 302, be provided with high-order level sensor 3021 and low level level sensor 3022, high-order level sensor 3021 and the equal signal of low level level sensor 3022 are connected to a control unit 40, and the control signal that control unit 40 is exported is connected to the signal control end of infusion pump 304.
certainly according to the gentle characteristic of water, air extracting pump 303 is connected to the tip position of seal case 302, and infusion pump 304 is connected to the bottom position of seal case 302.
along with the carrying out of burst work in tank 101, the corresponding negative-pressure adsorption hole being arranged on the part load-transfer device 201 of tank 101 can cause the water of tank 101 to enter negative pressure box 301, due to the effect of negative pressure suction, gas-vapor mix, and being positioned at majority is positioned near the second aspirating hole 3012, under the effect of air extracting pump 303 and infusion pump 304, aqueous vapor enters in seal case 302 from the second aspirating hole 3012 along body, in seal case 302 due under each spacer function, gas rises to the top of seal case 302 and is taken away by air extracting pump 303 along snakelike gas-liquid separation passage, the bottom that liquid is stayed seal case 302 accumulates, in the time that accumulated water volume attains to a high place level sensor 3021, its output signal is delivered to control unit 40, control unit 40 is controlled infusion pump 304 and is opened and water is extracted out and is recycled in tank 101, along with the carrying out of drawing water, in the time that water surface elevation is down to the position of low level level sensor 3022, output signal is delivered to control unit 40 by it, control unit 40 is controlled infusion pump 304 and is closed and quit work, until the water surface reopens while again rising to the position of high-order level sensor 3021, circulate according to this, ensure burst and carry efficient, carry out in an orderly manner.
above-mentioned stack of substrates 102 is that silicon rod or silicon ingot obtain through coming unstuck after cutting, and these substrates parallel ground along continuous straight runs and arrange, and every substrate roughly distributes along vertical plane, and side is towards the load-transfer device 201 with negative-pressure adsorption hole.
the design carries out burst in water, and by negative pressure power, lamellar body adsorbed and carry, gas is separated with liquid with infusion pump 304 by a seal case 302 and the air extracting pump 303 that is attached thereto, and isolated water is returned in tank 101, to keep the water yield in tank 101, be beneficial to the water yield of burst, while the taken out negative pressure volume in negative pressure box 301 for limit land productivity greatly, improve negative pressure work efficiency, reliable in structure, is suitable for applying.
above-described embodiment is only explanation technical conceive of the present utility model and feature, and its object is to allow person skilled in the art can understand content of the present utility model and implement according to this, can not limit protection domain of the present utility model with this.All equivalences of doing according to the utility model spirit change or modify, within all should being encompassed in protection domain of the present utility model.
Claims (5)
1. a slicing apparatus, is characterized in that: this device comprises:
Feed unit, it is arranged in a tank, is placed with and comprises that along continuous straight runs stacks the stack of substrates of multiple substrates in described feed unit, and each described substrate edge roughly vertical plane is arranged;
Suction unit, it comprises load-transfer device, on described load-transfer device, be provided with some negative-pressure adsorption holes that are connected with a negative pressure propulsion source, described conveying is arranged in described tank with part and this part extends to described feed unit, when described stack of substrates is during along direction of feed feeding, the substrate in described stack of substrates can be one by one by the negative-pressure adsorption hole absorption on described load-transfer device and move with load-transfer device;
Negative pressure unit, it provides described negative pressure propulsion source for the negative-pressure adsorption hole to described, described negative pressure unit comprises and is arranged on the negative pressure box of described load-transfer device inside, air extracting pump and the infusion pump that is arranged at least one aspirating hole on described negative pressure box, seal case, is connected with described seal case, described aspirating hole is communicated to described seal case by body, negative-pressure adsorption hole described in several is all connected with described negative pressure box, and described negative pressure box part is positioned at described tank.
2. a kind of slicing apparatus according to claim 1, it is characterized in that: on described negative pressure box, be provided with the first aspirating hole and the second aspirating hole, the position more than middle part of the negative pressure box described in the first described aspirating hole is positioned at, the second described aspirating hole is arranged in the position of the above and close water surface of the described tank water surface.
3. a kind of slicing apparatus according to claim 1, is characterized in that: the arrival end of described infusion pump is communicated to described seal case, exit end and is communicated to described tank.
4. a kind of slicing apparatus according to claim 1, it is characterized in that: on described seal case, be provided with high-order level sensor and low level level sensor, described high-order level sensor and the described equal signal of low level level sensor are connected to a control unit, and the control signal of described control unit output is connected to the signal control end of described infusion pump.
5. a kind of slicing apparatus according to claim 1, it is characterized in that: in the two lateral walls of described seal case, be respectively arranged with multiple dividing plates, dividing plate described in these is crisscross arranged separately, between the dividing plate described in these and the inwall of described seal case, forms snakelike gas-liquid separation passage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420330187.7U CN203959395U (en) | 2014-06-19 | 2014-06-19 | A kind of slicing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420330187.7U CN203959395U (en) | 2014-06-19 | 2014-06-19 | A kind of slicing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203959395U true CN203959395U (en) | 2014-11-26 |
Family
ID=51920006
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420330187.7U Withdrawn - After Issue CN203959395U (en) | 2014-06-19 | 2014-06-19 | A kind of slicing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203959395U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104016154A (en) * | 2014-06-19 | 2014-09-03 | 张家港市超声电气有限公司 | Silicon wafer separating device |
-
2014
- 2014-06-19 CN CN201420330187.7U patent/CN203959395U/en not_active Withdrawn - After Issue
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104016154A (en) * | 2014-06-19 | 2014-09-03 | 张家港市超声电气有限公司 | Silicon wafer separating device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20141126 Effective date of abandoning: 20160706 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |