CN203941887U - Wafer chuck rack - Google Patents
Wafer chuck rack Download PDFInfo
- Publication number
- CN203941887U CN203941887U CN201420221718.9U CN201420221718U CN203941887U CN 203941887 U CN203941887 U CN 203941887U CN 201420221718 U CN201420221718 U CN 201420221718U CN 203941887 U CN203941887 U CN 203941887U
- Authority
- CN
- China
- Prior art keywords
- side shield
- base plate
- underframe
- wafer chuck
- rack
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a kind of wafer chuck rack, comprise underframe, the base plate being obliquely installed, with the side shield of the both sides of the described perpendicular setting of base plate, the V-shaped setting of described side shield of both sides, described base plate and described underframe are hinged, between described side shield and described underframe, be provided with along the flexible expansion bracket of above-below direction, by base plate and underframe are hinged, then can pass through the angle of inclination of the length adjustment rack of adjusting expansion bracket, easy to use.
Description
Technical field
The utility model relates to a kind of wafer chuck rack.
Background technology
Silicon chip is cleaning, in the machining process such as oven dry, need to be clamped by wafer chuck, then can multi-disc process, yet need to it, assist by rack when packing silicon chip into wafer chuck, rack is all to tilt to be fixedly installed on operating platform at present, be that its angle of inclination is non-adjustable, inconvenient operation then.
Utility model content
The purpose of this utility model is to overcome the defect existing in prior art, and a kind of wafer chuck rack easy to adjust is provided.
For achieving the above object, the technical solution of the utility model has been to provide a kind of wafer chuck rack, comprise underframe, the base plate being obliquely installed, with the side shield of the both sides of the described perpendicular setting of base plate, the V-shaped setting of described side shield of both sides, described base plate and described underframe are hinged, and between described side shield and described underframe, are provided with along the flexible expansion bracket of above-below direction.
As preferably, the inner side of the described side shield of both sides has backing plate.
As preferably, the upside of described side shield is fixedly installed operating handle.
As preferably, described operating handle is U-shaped.
Advantage of the present utility model and beneficial effect are: by base plate and underframe are hinged, then can pass through the angle of inclination of the length adjustment rack of adjusting expansion bracket, and easy to use.
Accompanying drawing explanation
Fig. 1 is schematic diagram of the present utility model.
Wherein: 1, underframe; 2, base plate; 3, side shield; 4, expansion bracket; 5, backing plate; 6, operating handle.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is further described.Following examples are only for the technical solution of the utility model is more clearly described, and can not limit protection range of the present utility model with this.
As shown in Figure 1, a kind of wafer chuck rack, the base plate 2 that comprise underframe 1, is obliquely installed, with the side shield 3 of the both sides of described base plate 2 perpendicular settings, the V-shaped setting of described side shield 3 of both sides, described base plate 2 is hinged with described underframe 1, between described side shield 3 and described underframe 1, be provided with along the flexible expansion bracket 4 of above-below direction, the inner side of the described side shield 3 of both sides has backing plate 5, the upside of described side shield 3 is fixedly installed operating handle 6, and described operating handle 6 is U-shaped.
The above is only preferred implementation of the present utility model; should be understood that; for those skilled in the art; do not departing under the prerequisite of the utility model know-why; can also make some improvements and modifications, these improvements and modifications also should be considered as protection range of the present utility model.
Claims (4)
1. a wafer chuck rack, it is characterized in that: comprise underframe, the base plate being obliquely installed, with the side shield of the both sides of the described perpendicular setting of base plate, the V-shaped setting of described side shield of both sides, described base plate and described underframe are hinged, and between described side shield and described underframe, are provided with along the flexible expansion bracket of above-below direction.
2. wafer chuck rack as claimed in claim 1, is characterized in that: the inner side of the described side shield of both sides has backing plate.
3. wafer chuck rack as claimed in claim 1, is characterized in that: the upside of described side shield is fixedly installed operating handle.
4. wafer chuck rack as claimed in claim 3, is characterized in that: described operating handle is U-shaped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420221718.9U CN203941887U (en) | 2014-04-30 | 2014-04-30 | Wafer chuck rack |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420221718.9U CN203941887U (en) | 2014-04-30 | 2014-04-30 | Wafer chuck rack |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203941887U true CN203941887U (en) | 2014-11-12 |
Family
ID=51861184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420221718.9U Expired - Fee Related CN203941887U (en) | 2014-04-30 | 2014-04-30 | Wafer chuck rack |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203941887U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109333487A (en) * | 2018-11-28 | 2019-02-15 | 江苏晶成光学有限公司 | A kind of monocrystalline silicon piece products storage frame |
-
2014
- 2014-04-30 CN CN201420221718.9U patent/CN203941887U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109333487A (en) * | 2018-11-28 | 2019-02-15 | 江苏晶成光学有限公司 | A kind of monocrystalline silicon piece products storage frame |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141112 Termination date: 20150430 |
|
| EXPY | Termination of patent right or utility model |