CN203923450U - A kind of straight pull type single crystal furnace is with getting the brilliant device of brilliant fortune - Google Patents

A kind of straight pull type single crystal furnace is with getting the brilliant device of brilliant fortune Download PDF

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Publication number
CN203923450U
CN203923450U CN201420202347.XU CN201420202347U CN203923450U CN 203923450 U CN203923450 U CN 203923450U CN 201420202347 U CN201420202347 U CN 201420202347U CN 203923450 U CN203923450 U CN 203923450U
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China
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subelement
unit
fastening
runner
brilliant
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CN201420202347.XU
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Chinese (zh)
Inventor
王保胜
翟胜涛
孙喜良
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TBEA Xinjiang Sunoasis Co Ltd
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TBEA Xinjiang Sunoasis Co Ltd
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Abstract

The utility model provides a kind of straight pull type single crystal furnace with getting the brilliant device of brilliant fortune, comprising: fixed cell, rotary unit, translation unit and lifting unit, and described fixed cell can be fixed from the crystal bar of straight pull type single crystal furnace output; Described rotary unit is connected with fixed cell, and described fixed cell can tilt; Described translation unit is connected with rotary unit, can move horizontally described rotary unit and fixed cell; Described lifting unit is connected with translation unit, can VTOL (vertical take off and landing) described in translation unit, rotary unit and fixed cell.Straight pull type single crystal furnace described in the utility model can reduce and gets the brilliant time with getting the brilliant device of brilliant fortune, can reduce again operator's labour intensity.

Description

A kind of straight pull type single crystal furnace is with getting the brilliant device of brilliant fortune
Technical field
The utility model relates to silicon single crystal preparing technical field, is specifically related to a kind of crystalline substance of getting for straight pull type single crystal furnace and transports brilliant device.
Background technology
Silicon single crystal is the single crystal of silicon, it has substantially complete lattice structure, because silicon single crystal has different character (anisotropy) in different directions, it is a kind of good semiconductor material, and silicon single crystal has metalloid physical properties and weak electroconductibility, its specific conductivity increases with the rising of temperature, has significant semi-conductivity, is therefore widely used in the manufacture of semiconducter device, solar cell etc.
At present, the main method of preparing silicon single crystal is vertical pulling method, and corresponding production unit is straight pull type single crystal furnace.Innovation along with technology, the for example improvement of thermal field, the design of the application of high nation quartz crucible and rationally proportioning raw materials etc., single stove charging capacity of single crystal growing furnace continues to increase, cause the weight of single silicon single crystal rod (being designated hereinafter simply as crystal bar) increasing, length is more and more longer, be difficult to from single crystal growing furnace, to take out smoothly.The conventional crystal method of getting is, after crystal bar is completely cooling, by many people, to be coordinated crystal bar to tilt to take out.Because existing getting after crystal method need to wait crystal bar completely cooling could be taken out, thus the production cycle expended, and, thisly manually get the labour intensity that crystal type has not only strengthened operator, also there is certain potential safety hazard.
Therefore, in the brilliant process of getting of silicon single crystal rod, how to reduce and get the brilliant time to shorten the production cycle, and the labour intensity that how to reduce operator, problem demanding prompt solution in industry become.
Utility model content
Technical problem to be solved in the utility model is for existing above-mentioned defect in prior art, provides a kind of can minimizing to get the brilliant time, can reduce again the straight pull type single crystal furnace of operator's labour intensity and transport brilliant device with getting crystalline substance.
Solve the technical scheme that the utility model technical problem adopts:
Described straight pull type single crystal furnace comprises fixed cell, rotary unit, translation unit and lifting unit with getting the brilliant device of brilliant fortune,
Described fixed cell is the crystal bar of straight pull type single crystal furnace output fixedly;
Described rotary unit is connected with fixed cell, and described fixed cell can tilt;
Described translation unit is connected with rotary unit, can move horizontally described rotary unit and fixed cell;
Described lifting unit is connected with translation unit, can VTOL (vertical take off and landing) described in translation unit, rotary unit and fixed cell.
Preferably, described fixed cell comprises accommodating subelement and the first fastening subelement,
Described accommodating subelement can accommodating described crystal bar;
Described the first fastening subelement is removably connected with the edge of accommodating subelement, described crystal bar can be clamped in accommodating subelement.
Preferably, one end of described the first fastening subelement and the edge of accommodating subelement are connected through the hinge, and the other end is free end, so that described the first fastening subelement can free-open-close;
And/or described the first fastening subelement is at least two.
Preferably, described accommodating subelement adopts the brilliant frame of half arc;
And/or described the first fastening subelement adopts half arc binding clip.
Preferably, described half arc binding clip adopts thickening iron plate to make, and the thickness range of described thickening iron plate is 3mm~4mm;
And/or the outside surface of described half arc binding clip is evenly enclosed with high temperature material;
And/or the side that described half arc binding clip contacts with crystal bar is provided with high-temperature resistant rubber.
Preferably, described rotary unit comprises the first runner, rotating shaft and connexon unit,
Described the first runner is set with and is fixed in rotating shaft, one end of described rotating shaft is connected with accommodating subelement and vertical setting, the other end of described rotating shaft is connected with connexon unit and can freely rotates with respect to connexon unit, and described connexon unit is also connected with translation unit.
Preferably, described connexon unit comprises sleeve and bearing, and described bearing housing is contained on the other end of described rotating shaft, and described sleeve set is on bearing, and the inner ring of described bearing and rotating shaft shrink-fit, the outer ring of described bearing and sleeve shrink-fit.
Preferably, described gyrator unit also comprises the bayonet lock being arranged on the first runner, and is sleeved on the gear draw-in groove on described connexon unit, and described bayonet lock and gear draw-in groove can engage to lock the first runner, and it cannot be rotated.
Preferably, described fixed cell also comprises the second fastening subelement, its one end is removably connected with the outer ring of the first runner, and its other end is removably connected with the first fastening subelement, for guaranteeing the constant distance between described the first runner and the first fastening subelement.
Preferably, described the second fastening subelement comprises boomer and be installed on the tough wireline that adds on boomer, and the outer ring of one end of described boomer and the first runner is bolted, and the other end is connected by hook pawl with the first fastening subelement; The described diameter that adds tough wireline is 6mm;
And/or described the second fastening subelement is identical and corresponding one by one with the quantity of the first fastening subelement.
Preferably, described translation unit comprises casing, the second runner, leading screw and square frame, and described leading screw comprises screw rod and nut,
Described casing is fixed on lifting unit;
Described leading screw and square frame are arranged on box house, and described the second runner is arranged on casing outside, and described leading screw is horizontally disposed with;
Casing is stretched out in one end of described screw rod, described the second runner is set with and is fixed on one end that screw rod stretches out casing, described side's frame is set with and is fixed on described nut, and can be when the second driven by rotating wheel screw rod rotation, with nut, at box house, the length direction along described screw rod moves, described side's frame is also connected with described rotary unit in the direction vertical with described screw rod, so that described rotary unit and fixed cell can be along the length direction translations of described screw rod.
Preferably, described translation unit also comprises slide rail and the roller being used in conjunction with slide rail,
Described slide rail is arranged on box house and be arranged in parallel with described screw rod, and on the described roller side of being fixed on frame, described side's frame can slide by roller on slide rail.
Preferably, described slide rail adopts four, is separately positioned on the both sides of casing inner top and the both sides of bottom, and every slide rail all be arranged in parallel with described screw rod;
Described roller adopts eight, and every four rolling is respectively vertically on the two sides parallel with described screw rod of the side's of being fixed on frame, and every four rolling is vertically fixed on respectively the position at four angles of a described side.
Beneficial effect:
Straight pull type single crystal furnace described in the utility model is with getting the brilliant device of brilliant fortune by the synergy of fixed cell, rotary unit, translation unit and lifting unit, can realize straight pull type single crystal furnace output crystal bar quick taking-up and transport in time, and need not wait for complete cooling the getting again afterwards of crystal bar, therefore device described in the utility model can be realized quick taking-up long, overheated crystal bar, reduce the waiting time and got the brilliant time, thereby shortened the production cycle.In addition, adopt device described in the utility model to get and brilliant manually get brilliant mode with existing employing and compare, greatly reduced operator's labour intensity, reduced potential safety hazard, also improved working efficiency.
Straight pull type single crystal furnace described in the utility model is simple, easy to operate with getting the brilliant apparatus structure of brilliant fortune.
Accompanying drawing explanation
Fig. 1 is the structural representation of getting the brilliant device of brilliant fortune for straight pull type single crystal furnace described in the utility model embodiment 2.
In figure: the brilliant frame of 1-half arc; 2-the first half arc binding clips; 3-the second half arc binding clips; 4-the first runner; 5-rotating shaft; 6-sleeve; 7-bayonet lock; 8-gear draw-in groove; 9-the first boomer; 10-the second boomer; 11-casing; 12-the second runner; 13-screw rod; 14-side's frame; 15-lift car.
Embodiment
For making those skilled in the art understand better the technical solution of the utility model, below in conjunction with drawings and Examples, the utility model is described in further detail.
Embodiment 1:
The present embodiment provides a kind of straight pull type single crystal furnace with getting the brilliant device of brilliant fortune, comprise fixed cell, rotary unit, translation unit and lifting unit, said units synergy can tilt to take out rapidly by crystal bar from straight pull type single crystal furnace, and is transported to appointed place.It should be noted that, during existing straight pull type single crystal furnace output crystal bar, the outbound course of crystal bar is perpendicular to the ground.
Particularly, the described fixed cell crystal bar that fixedly straight pull type single crystal furnace is exported.
In the present embodiment, described fixed cell can adopt existing any one fixedly device or structure of crystal bar, repeats no more.
Preferably, described fixed cell comprises accommodating subelement and the first fastening subelement, and described accommodating subelement can accommodating described crystal bar; Described the first fastening subelement is removably connected with the edge of accommodating subelement, described crystal bar can be clamped in accommodating subelement, and can Reusability.Described the first fastening subelement is preferably at least two, better crystal bar is limited in accommodating subelement, prevents that it from getting the brilliant process of brilliant fortune, vibration occurring.Certainly, consider production cost, adopt a first fastening subelement to be also fine.
Further, one end of described the first fastening subelement is connected by hinge (hinge) with the edge of accommodating subelement, the other end is free end, so that described the first fastening subelement can free-open-close, thereby the first fastening subelement is dismantled more easily.
Wherein, described accommodating subelement adopts the brilliant frame of existing half arc, described the first fastening subelement adopts existing half arc binding clip, and the radian of the brilliant frame of described half arc and half arc binding clip all needs to process according to the diameter of crystal bar, to guarantee the tightness to crystal bar clamping.Certainly, described accommodating subelement and the first fastening subelement can also adopt other can device accommodating and fixedly crystal bar or structure.In order further to guarantee tightness and the security to crystal bar clamping, described half arc binding clip can adopt metallic substance to make, and preferably adopts thickening iron plate to make, and the thickness range of described thickening iron plate is 3mm~4mm.And when half arc binding clip adopts metallic substance to make, for preventing that crystal bar from directly contacting with metal the quality that affects crystal bar outside surface, preferably the outside surface of described half arc binding clip is evenly enclosed with high temperature material (for example heat-resisting asbestos), and the side setting that more preferably described half arc binding clip contacts with crystal bar (apply or paste) has high-temperature resistant rubber.
Described rotary unit is connected with the accommodating subelement in fixed cell, and the described fixed cell that can tilt also can tilt and be clamped in the crystal bar in accommodating subelement by the first fastening subelement.
In the present embodiment, described rotary unit can adopt existing any one can make device or the structure of described fixed cell rotation (inclination), repeats no more.
Preferably, described rotary unit comprises the first runner, rotating shaft and connexon unit, described the first runner is set with and is fixed in rotating shaft, one end of described rotating shaft is connected with accommodating subelement and vertical setting, the other end of described rotating shaft is connected with connexon unit and can freely rotates with respect to connexon unit, and described connexon unit is also connected with translation unit.Visible, after crystal bar fixes, in the time of need to tilting crystal bar, only need to rotate the first runner and can realize rotating freely of crystal bar.
Wherein, described connexon unit comprises sleeve and bearing, described bearing housing is contained on the other end of described rotating shaft, be sleeved on one end away from accommodating subelement of rotating shaft, described sleeve set is on bearing, and the inner ring of described bearing and rotating shaft shrink-fit, the outer ring of described bearing and sleeve shrink-fit, thereby rotating shaft can be rotated with respect to sleeve, and therefore, when the first driven by rotating wheel rotating shaft is rotated, sleeve can't rotate with rotating shaft.Certainly, described connexon unit can also adopt other can make rotating shaft freely rotate relative to it device or parts.
When rotary unit makes crystal bar tilt to correct position (for example, when crystal bar tilts to level attitude), the angle of inclination of crystal bar need to be fixed, therefore, preferably, described gyrator unit also comprises the bayonet lock being arranged on the first runner, with the gear draw-in groove being sleeved on the sleeve of described connexon unit, described bayonet lock and gear draw-in groove can engage to lock the first runner, and it cannot be rotated, thus the fixing angle of inclination of crystal bar.In order to realize bayonet lock, engage better with gear draw-in groove, gear draw-in groove is sleeved on position on the sleeve of connexon unit close to the first runner.
In order further to prevent that crystal bar from getting the brilliant process of brilliant fortune, vibration occurring, guarantee the balance of crystal bar in the brilliant process of fortune, preferably, described fixed cell also comprises the second fastening subelement, its one end is removably connected with the outer ring of the first runner, its the other end is removably connected with the first fastening subelement, to guarantee the constant distance between described the first runner and the first fastening subelement.Because described the second fastening subelement is removably connected with the first fastening subelement, therefore the second fastening subelement is preferably identical with the quantity of the first fastening subelement, and corresponding one by one.
Wherein, described the second fastening subelement comprises boomer and be installed on the tough wireline that adds on boomer, and the outer ring of one end of described boomer and the first runner is bolted, and the other end is connected by hook pawl with the first fastening subelement; The described diameter that adds tough wireline is preferably 6mm, ruptures when preventing work, guarantees the security of operation.Described boomer can adopt existing 1 ton of function boomer.Visible, boomer can rotate jointly with the first runner, and both convenient working, can prevent again that being wound around from appearring in wireline.Certainly, described the second fastening subelement can also adopt other can guarantee device or the structure of constant distance between the first runner and the first fastening subelement.
Described translation unit is connected with rotary unit, can move horizontally described rotary unit and fixed cell.
In the present embodiment, described translation unit can adopt existing device or structure that any one can make described fixed cell move horizontally together with rotary unit, repeats no more.
Preferably, described translation unit comprises casing, the second runner, leading screw and square frame, and described leading screw comprises screw rod and nut,
Described casing is fixed on lifting unit, for example, be screwed on lifting unit;
Described leading screw and square frame are arranged on box house, and described the second runner is arranged on casing outside, and described leading screw is horizontally disposed with;
Casing is stretched out in one end of described screw rod, described the second runner is set with and is fixed on one end that screw rod stretches out casing, described side's frame is set with and is fixed on described nut, and can be when the second driven by rotating wheel screw rod rotation, with nut, at box house, the length direction along described screw rod moves, described side's frame is also connected with the sleeve of described rotary unit in the direction vertical with described screw rod, so that described rotary unit and fixed cell can be along the length direction translations of described screw rod.It should be noted that, for the sleeve of saving material and frame driven rotary unit, the side of the being convenient to length direction along screw rod moves, described casing parallel with screw rod and be provided with opening near the side of rotary unit.
For the ease of square frame, at box house, move, preferred described translation unit also comprises slide rail and the roller being used in conjunction with slide rail, described slide rail is arranged on box house and be arranged in parallel with described screw rod, and on the described roller side of being fixed on frame, described side's frame can slide by roller on slide rail.Further, described slide rail adopts four, is separately positioned on the both sides of casing inner top and the both sides of bottom, and every slide rail all be arranged in parallel with described screw rod; Described roller adopts eight, and every four rolling is respectively vertically on the two sides parallel with described screw rod of the side's of being fixed on frame, and every four rolling is vertically fixed on respectively the position at four angles of a described side.
Described lifting unit is connected with translation unit, can VTOL (vertical take off and landing) described in translation unit, rotary unit and fixed cell.
In the present embodiment, described lifting unit can adopt existing any one can make device or the structure of described fixed cell, rotary unit and translation unit one lifting, for example, adopt existing electric lift truck, thus energy free lifting crystal bar, and be convenient to transporting of crystal bar, repeat no more here.
Embodiment 2:
As shown in Figure 1, the present embodiment provides a kind of straight pull type single crystal furnace with getting the brilliant device of brilliant fortune, comprises the brilliant frame 1 of half arc, the first half arc binding clips 2, the second half arc binding clips 3, the first runner 4, rotating shaft 5, sleeve 6, bearing (not shown), bayonet lock 7, gear draw-in groove 8, the first boomer 9, the second boomer 10, casing 11, the second runner 12, screw rod 13, nut (not shown), square frame 14, slide rail (not shown), roller (not shown) and lift car 15.
Crystal bar that can accommodating straight pull type single crystal furnace output in the brilliant frame 1 of half arc, the first half arc binding clips 2 and the second half arc binding clips 3 are arranged on the brilliant frame 1 of half arc equably, and one end is all attached via a hinge to the edge of the brilliant frame 1 of half arc, the other end is free end, to realize free-open-close, and crystal bar can be clamped in the brilliant frame 1 of half arc, the first runner 4 is set with and is fixed in rotating shaft 5, one end of rotating shaft 5 is connected and vertical setting with the brilliant frame 1 of half arc, the other end is connected by bearing with one end of sleeve 6, and the inner ring of bearing and rotating shaft 5 shrink-fit, the outer ring of bearing and sleeve 6 shrink-fit, on the other end side of the being fixed on frame 14 of sleeve 6, bayonet lock 7 is arranged on the first runner 4, gear draw-in groove 8 is sleeved on sleeve 6, after bayonet lock 7 and 8 engagings of gear draw-in groove, can lock the first runner 4, and it cannot be rotated, one end of the first boomer 9 and the second boomer 10 is bolted respectively the relative position place on the outer ring of the first runner 4, and the other end is connected to corresponding the first half arc binding clips 2 and the second half arc binding clips 3 by hooking pawl respectively, casing 11 is screwed on lift car 15, screw rod 13, nut and square frame 14 are arranged on casing 11 inside, the second runner 12 is arranged on casing 11 outsides, screw rod 13 is horizontally disposed with and casing 11 is stretched out in one end, the second runner 12 is set with and is fixed on one end that screw rod 13 stretches out casing 11, side's frame 14 is set with and is fixed on nut, slide rail adopts four, be separately positioned on the both sides of casing 11 inner tops and the both sides of bottom also, every slide rail all be arranged in parallel with screw rod 13, roller adopts eight, every four rolling is respectively vertically on the two sides parallel with screw rod 13 of the side's of being fixed on frame 14, and every four rolling is vertically fixed on respectively the position at four angles of a described side, side's frame 14 can be by roller length direction horizontal slip along screw rod 13 on slide rail, lift car 15 can drive above-mentioned all parts VTOL (vertical take off and landing).
Below with reference to Fig. 1, describe the principle of work of getting the brilliant device of brilliant fortune for described straight pull type single crystal furnace in detail:
The crystal bar of exporting when straight pull type single crystal furnace drop to after the certain distance of ground, make the brilliant frame 1 of half arc keep vertical state, crystal bar is placed in the brilliant frame 1 of half arc, then by the first half arc binding clips 2 and the second half arc binding clips 3, crystal bar is clamped in the brilliant frame 1 of half arc, again the first boomer 9 is caught on to the first half arc binding clips 2, the second boomer 10 and catches on the second half arc binding clips 3 by hooking pawl by hooking pawl, tighten respectively the first boomer 9 and the second boomer 10, thereby crystal bar is fixed, and cut off seed crystal;
Rotate the first runner 4, crystal bar is tilted, rotate the second runner 12 simultaneously, crystal bar is moved horizontally, control lift car 15 simultaneously and decline, crystal bar is moved down, be also, the crystal bar that tilts on one side, on one side level move down crystal bar, thereby crystal bar is taken out from straight pull type single crystal furnace completely; After crystal bar takes out, rotation the first runner 4, is the level of state crystal bar, now bayonet lock 7 is engaged with gear draw-in groove 8, to lock the first runner 4, thereby makes crystal bar keep horizontality; Finally by rotating the second runner 12 and controlling lift car 15 liftings, make crystal bar be transported to appointed place or next procedure position.
Other structures in the present embodiment and effect are all identical with embodiment 1, repeat no more here.
Be understandable that, above embodiment is only used to principle of the present utility model is described and the illustrative embodiments that adopts, yet the utility model is not limited to this.For those skilled in the art, in the situation that not departing from spirit of the present utility model and essence, can make various modification and improvement, these modification and improvement are also considered as protection domain of the present utility model.

Claims (13)

1. straight pull type single crystal furnace, with getting the brilliant device of brilliant fortune, is characterized in that, comprises fixed cell, rotary unit, translation unit and lifting unit,
Described fixed cell is the crystal bar of straight pull type single crystal furnace output fixedly;
Described rotary unit is connected with fixed cell, and described fixed cell can tilt;
Described translation unit is connected with rotary unit, can move horizontally described rotary unit and fixed cell;
Described lifting unit is connected with translation unit, can VTOL (vertical take off and landing) described in translation unit, rotary unit and fixed cell.
2. device according to claim 1, is characterized in that,
Described fixed cell comprises accommodating subelement and the first fastening subelement,
Described accommodating subelement can accommodating described crystal bar;
Described the first fastening subelement is removably connected with the edge of accommodating subelement, described crystal bar can be clamped in accommodating subelement.
3. device according to claim 2, is characterized in that,
One end of described the first fastening subelement and the edge of accommodating subelement are connected through the hinge, and the other end is free end, so that described the first fastening subelement can free-open-close;
And/or described the first fastening subelement is at least two.
4. according to the device described in claim 2 or 3, it is characterized in that,
Described accommodating subelement adopts the brilliant frame of half arc;
And/or described the first fastening subelement adopts half arc binding clip.
5. device according to claim 4, is characterized in that,
Described half arc binding clip adopts thickening iron plate to make, and the thickness range of described thickening iron plate is 3mm~4mm;
And/or the outside surface of described half arc binding clip is evenly enclosed with high temperature material;
And/or the side that described half arc binding clip contacts with crystal bar is provided with high-temperature resistant rubber.
6. device according to claim 2, is characterized in that,
Described rotary unit comprises the first runner, rotating shaft and connexon unit,
Described the first runner is set with and is fixed in rotating shaft, one end of described rotating shaft is connected with accommodating subelement and vertical setting, the other end of described rotating shaft is connected with connexon unit and can freely rotates with respect to connexon unit, and described connexon unit is also connected with translation unit.
7. device according to claim 6, is characterized in that,
Described connexon unit comprises sleeve and bearing, and described bearing housing is contained on the other end of described rotating shaft, and described sleeve set is on bearing, and the inner ring of described bearing and rotating shaft shrink-fit, the outer ring of described bearing and sleeve shrink-fit.
8. device according to claim 6, is characterized in that,
Described gyrator unit also comprises the bayonet lock being arranged on the first runner, and is sleeved on the gear draw-in groove on described connexon unit, and described bayonet lock and gear draw-in groove can engage to lock the first runner, and it cannot be rotated.
9. device according to claim 6, is characterized in that,
Described fixed cell also comprises the second fastening subelement, and its one end is removably connected with the outer ring of the first runner, and its other end is removably connected with the first fastening subelement, for guaranteeing the constant distance between described the first runner and the first fastening subelement.
10. device according to claim 9, is characterized in that,
Described the second fastening subelement comprises boomer and be installed on the tough wireline that adds on boomer, and the outer ring of one end of described boomer and the first runner is bolted, and the other end is connected by hook pawl with the first fastening subelement; The described diameter that adds tough wireline is 6mm;
And/or described the second fastening subelement is identical and corresponding one by one with the quantity of the first fastening subelement.
11. devices according to claim 1, is characterized in that,
Described translation unit comprises casing, the second runner, leading screw and square frame, and described leading screw comprises screw rod and nut,
Described casing is fixed on lifting unit;
Described leading screw and square frame are arranged on box house, and described the second runner is arranged on casing outside, and described leading screw is horizontally disposed with;
Casing is stretched out in one end of described screw rod, described the second runner is set with and is fixed on one end that screw rod stretches out casing, described side's frame is set with and is fixed on described nut, and can be when the second driven by rotating wheel screw rod rotation, with nut, at box house, the length direction along described screw rod moves, described side's frame is also connected with described rotary unit in the direction vertical with described screw rod, so that described rotary unit and fixed cell can be along the length direction translations of described screw rod.
12. devices according to claim 11, is characterized in that,
Described translation unit also comprises slide rail and the roller being used in conjunction with slide rail,
Described slide rail is arranged on box house and be arranged in parallel with described screw rod, and on the described roller side of being fixed on frame, described side's frame can slide by roller on slide rail.
13. devices according to claim 12, is characterized in that,
Described slide rail adopts four, is separately positioned on the both sides of casing inner top and the both sides of bottom, and every slide rail all be arranged in parallel with described screw rod;
Described roller adopts eight, and every four rolling is respectively vertically on the two sides parallel with described screw rod of the side's of being fixed on frame, and every four rolling is vertically fixed on respectively the position at four angles of a described side.
CN201420202347.XU 2014-04-23 2014-04-23 A kind of straight pull type single crystal furnace is with getting the brilliant device of brilliant fortune Expired - Fee Related CN203923450U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105035983A (en) * 2015-07-31 2015-11-11 河北宁通电子材料有限公司 Lifting device for single crystals

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105035983A (en) * 2015-07-31 2015-11-11 河北宁通电子材料有限公司 Lifting device for single crystals

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