CN203923444U - Graphite paper washer suppressor - Google Patents
Graphite paper washer suppressor Download PDFInfo
- Publication number
- CN203923444U CN203923444U CN201420271233.0U CN201420271233U CN203923444U CN 203923444 U CN203923444 U CN 203923444U CN 201420271233 U CN201420271233 U CN 201420271233U CN 203923444 U CN203923444 U CN 203923444U
- Authority
- CN
- China
- Prior art keywords
- pressing element
- indent
- guidepost
- graphite paper
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of graphite paper washer suppressor, relate to czochralski crystal growing furnace utility appliance technical field, the graphite paper washer of using for suppressing czochralski crystal growing furnace, can substitute traditional mode of making by hand.It comprises base, column, working arm, outer pressing element and interior pressing element, column is fixedly connected with base, working arm and column are hinged, base is provided with right cylindrical indent, outer pressing element central authorities are provided with right cylindrical through hole, interior pressing element is provided with right cylindrical pressure head, while lifting, pressure head is positioned at outside indent, when interior pressing element is depressed, pressure head is pressed in indent, through hole equates with the bottom surface radius of indent, base is provided with at least two guideposts, outer pressing element is provided with and the corresponding pilot hole of guidepost, guidepost make through hole and indent coaxial, outer pressing element and pressure head can only move upward at the axle of indent, working arm is provided with the contact head of the internal pressing element application of force.The compacting of this device is convenient, and effect is remarkable, very practical.
Description
Technical field
The utility model relates to czochralski crystal growing furnace utility appliance technical field.
Background technology
Czochralski crystal growing furnace is the equipment that often use in semiconductor production field, it comprises body of heater, crucible, graphite heater, guide shell, and the parts such as crystal lifting device, wherein thereby graphite heater is connected with electrode column to crucible heating, heating current is up to 2000 peaces, therefore very likely because the reasons such as loose contact cause spark phenomenon, to equipment, cause damage.For fear of sparking, through being everlasting, between electrode column and well heater device pin, put into graphite paper washer, and guarantee degree of tightness appropriateness.In conventional art, normally mode is scribed graphite paper washer by hand, and do like this and not only waste time but also affect quality, if graphite paper washer edge leaves burr, more can cause sparking to occur.
Utility model content
The technical problems to be solved in the utility model is for above-mentioned the deficiencies in the prior art, a kind of graphite paper washer suppressor is provided, it realizes the making of graphite paper washer by a mechanical means, thereby substitute traditional mode of making by hand, the graphite paper washer of producing meets the requirements, steady quality, and making processes is very efficient and convenient.
For solving the problems of the technologies described above, technical solution adopted in the utility model is: a kind of graphite paper washer suppressor, it comprises base, column, working arm, outer pressing element and interior pressing element, its central post is fixedly connected with base, working arm and column are hinged, base is provided with the right cylindrical indent for the moulding of graphite paper washer, outer pressing element central authorities are provided with right cylindrical through hole, interior pressing element is provided with right cylindrical pressure head, when interior pressing element lifts, pressure head front end is positioned at outside indent, when interior pressing element is all depressed, pressure head is pressed in indent, through hole equates with the bottom surface radius of indent, base is provided with at least two guideposts, outer pressing element is provided with and the corresponding pilot hole of guidepost, guidepost penetrates in pilot hole, guidepost make through hole and indent coaxial, outer pressing element and pressure head can only move upward at the axle of indent, working arm is provided with the contact head of the internal pressing element application of force, during karbate impervious graphite paper washer, outer pressing element is used for fixedly graphite paper washer starting material, interior pressing element is through outer pressing element and in indent, extrude circular graphite paper washer.
As preferably, guidepost is provided with the return spring for outer pressing element is lifted.
As preferably, between interior pressing element and outer pressing element, be provided with transmitting spring, interior pressing element passes to outer pressing element by transmitting spring by pressure, and while pressing down, outer pressing element contacts base before pressure head enters indent.
As preferably, base is provided with presents a theatrical performance as the last item on a programme, and the central authorities of presenting a theatrical performance as the last item on a programme are indent, present a theatrical performance as the last item on a programme and coordinate jointly graphite paper washer starting material are fixed with outer pressing element.
As preferably, guidepost is fixed with thread connecting mode and base.
As preferably, guidepost has two and be positioned at indent both sides, the bottom line of these two guideposts and the axes intersect of indent.
The beneficial effect that adopts technique scheme to produce is: the utility model can be suppressed czochralski crystal growing furnace graphite paper washer, substitute traditional mode of making by hand, the graphite paper washer steady quality suppressing, meet the requirements, its pressing process simple and fast, can save manpower, save time, very easy to use.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model;
Fig. 2 is sectional view of the present utility model.
In figure: 1, working arm; 2, transmitting spring; 3, interior pressing element; 4, column; 5, indent; 6, base; 7, return spring; 8, outer pressing element; 9, guidepost; 10, pilot hole; 11, present a theatrical performance as the last item on a programme; 12, pressure head.
Embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.
As Fig. 1, shown in 2, a kind of graphite paper washer suppressor, it comprises the base 6 of steel, column 4, working arm 1, outer pressing element 8 and interior pressing element 3, its central post 4 is fixedly connected with base 6, working arm 1 is hinged with column 4, base 6 is provided with circle and presents a theatrical performance as the last item on a programme 11, 11 central authorities of presenting a theatrical performance as the last item on a programme have the right cylindrical indent 5 for the moulding of graphite paper washer, outer pressing element 8 central authorities are provided with right cylindrical through hole, interior pressing element 3 is provided with right cylindrical pressure head 12, when interior pressing element 3 lifts, pressure head 12 is positioned at outside indent 5, when interior pressing element 3 is all depressed, pressure head 12 is pressed in indent 5, through hole equates with the bottom surface radius of indent 5, base 6 is provided with two guideposts 9, guidepost 9 is fixing with thread connecting mode and base 6, guidepost 9 is positioned at indent 5 both sides, and the axes intersect of its bottom line and indent 5, outer pressing element 8 is provided with and the corresponding pilot hole 10 of guidepost 9, guidepost 9 penetrates in pilot hole 10, guidepost 9 make through hole and indent 5 coaxial, outer pressing element 8 and pressure head 12 can only move upward at the axle of indent 5, on guidepost 9, be also provided with the return spring 7 for outer pressing element 8 is lifted, working arm 1 is provided with the contact head of internal pressing element 3 application of forces, between interior pressing element 3 and outer pressing element 8, be provided with transmitting spring 2, outer pressing element 8 is provided with the groove that holds transmitting spring 2, interior pressing element 3 is provided with for the pressure arm to transmitting spring 2 application of forces, interior pressing element 3 passes to outer pressing element 8 by transmitting spring 2 by pressure, suitably select length and the coefficient of stiffness of transmitting spring 2 and return spring 7, while making to press down, outer pressing element 8 enters the front contact base 6 of indent 5 at pressure head 12.
During karbate impervious graphite paper washer, first graphite paper washer starting material are placed on and present a theatrical performance as the last item on a programme on 11, starting material cover indent 5 and in indent 5 peripheries, stay material more as far as possible, then press down working arm 1, effect by transmitting spring 2 will make outer pressing element 8 first be depressed and fix starting material, continue to press down and will make the pressure head 12 of interior pressing element 3 be pressed into indent 5, and extrude a circular graphite paper washer, after having suppressed, decontrol working arm 1, return spring 7 and transmitting spring 2 lift outer pressing element 8 and interior pressing element 3, thereby can suppress next time.
The utility model is for suppressing the graphite paper washer that czochralski crystal growing furnace is used, and it can substitute traditional mode of making by hand, and the graphite paper washer steady quality suppressing, meet the requirements, its pressing process simple and fast, can save manpower, save time, very easy to use.
Claims (6)
1. a graphite paper washer suppressor, it is characterized in that: it comprises base (6), column (4), working arm (1), outer pressing element (8) and interior pressing element (3), described column (4) is fixedly connected with described base (6), described working arm (1) is hinged with described column (4), described base (6) is provided with right cylindrical indent (5), described outer pressing element (8) central authorities are provided with right cylindrical through hole, described interior pressing element (3) is provided with right cylindrical pressure head (12), described in when described interior pressing element (3) lifts, pressure head (12) front end is positioned at outside described indent (5), described in when described interior pressing element (3) is all depressed, pressure head (12) is pressed in described indent (5), described through hole equates with the bottom surface radius of described indent (5), described base (6) is provided with at least two guideposts (9), described outer pressing element (8) is provided with and the corresponding pilot hole (10) of described guidepost (9), described guidepost (9) penetrates described pilot hole (10), described guidepost (9) make described through hole and described indent (5) coaxial, described outer pressing element (8) and described pressure head (12) can only move upward at the axle of described indent (5), described working arm (1) is provided with the contact head to described interior pressing element (3) application of force.
2. graphite paper washer suppressor according to claim 1, is characterized in that described guidepost (9) is provided with the return spring (7) for described outer pressing element (8) is lifted.
3. graphite paper washer suppressor according to claim 1, it is characterized in that being provided with transmitting spring (2) between described interior pressing element (3) and described outer pressing element (8), described interior pressing element (3) passes to described outer pressing element (8) by described transmitting spring (2) by pressure, while pressing down described in outer pressing element (8) at described pressure head (12), enter the described base of the front contact of described indent (5) (6).
4. graphite paper washer suppressor according to claim 1, is characterized in that described base (6) is provided with present a theatrical performance as the last item on a programme (11), described in (11) central authorities of presenting a theatrical performance as the last item on a programme be described indent (5).
5. graphite paper washer suppressor according to claim 1, is characterized in that described guidepost (9) is fixing with thread connecting mode and described base (6).
6. graphite paper washer suppressor according to claim 1, is characterized in that described guidepost (9) is two, and described guidepost (9) is positioned at indent (5) both sides, and the axes intersect of the bottom line of described guidepost (9) and described indent (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420271233.0U CN203923444U (en) | 2014-05-26 | 2014-05-26 | Graphite paper washer suppressor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420271233.0U CN203923444U (en) | 2014-05-26 | 2014-05-26 | Graphite paper washer suppressor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203923444U true CN203923444U (en) | 2014-11-05 |
Family
ID=51819299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420271233.0U Expired - Fee Related CN203923444U (en) | 2014-05-26 | 2014-05-26 | Graphite paper washer suppressor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203923444U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107626799A (en) * | 2017-08-28 | 2018-01-26 | 西安理工大学 | A kind of drawing method of array pit pressure setting and array pit |
| CN111688257A (en) * | 2020-05-07 | 2020-09-22 | 无锡宝亿沣密封材料有限公司 | Molding process and device of graphite packing ring |
-
2014
- 2014-05-26 CN CN201420271233.0U patent/CN203923444U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107626799A (en) * | 2017-08-28 | 2018-01-26 | 西安理工大学 | A kind of drawing method of array pit pressure setting and array pit |
| CN111688257A (en) * | 2020-05-07 | 2020-09-22 | 无锡宝亿沣密封材料有限公司 | Molding process and device of graphite packing ring |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141105 Termination date: 20170526 |