CN203916437U - A kind of polysilicon reaction castoff processing system - Google Patents
A kind of polysilicon reaction castoff processing system Download PDFInfo
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- CN203916437U CN203916437U CN201420275504.XU CN201420275504U CN203916437U CN 203916437 U CN203916437 U CN 203916437U CN 201420275504 U CN201420275504 U CN 201420275504U CN 203916437 U CN203916437 U CN 203916437U
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Abstract
The utility model provides a kind of polysilicon reaction castoff processing system, this system comprises: discarded object conveyance conduit, gas transmission pipeline, one-level scrubbing tower, waste liquid recovery apparatus and alkali lye feedway, by discarded object conveyance conduit is connected with one-level scrubbing tower with gas transmission pipeline, by the pressure of inert gas, the polysilicon reaction discarded object remaining in discarded object conveyance conduit can be entered to one-level scrubbing tower, and utilize alkali lye feedway to carry alkali lye to one-level scrubbing tower, wash and drench polysilicon reaction discarded object, can effectively absorb chlorosilane and hydrogen chloride in polysilicon reaction discarded object, wash the waste liquid generating after drenching and enter waste liquid recovery apparatus, more environmental protection, safer, in addition, also can reduce the extent of corrosion to process units surface, reduce investment of production cost.
Description
Technical field
The utility model relates to production of polysilicon vent gas treatment technical field, and polysilicon used while particularly relating to a kind of service equipment, pipeline reacts castoff processing system.
Background technology
In polysilicon production process, generally all can there be waste gas, waste liquid, waste residue the like waste to produce, polycrystalline silicon production system can be connected with corresponding castoff processing system, along with the carrying out of polysilicon reduction reaction, polysilicon reaction discarded object can be reclaimed by castoff processing system, process.
In the time of plant maintenance, dismounting, in order to ensure personnel's safety, polysilicon reaction discarded object residual in the equipment such as valve, instrument, pipeline need to be drained, normally in pipeline, pass into inert gas, utilize and purge joint, step by step the residue in equipment or pipeline is purged clean.The operating process that remains in the polysilicon reaction discarded object in equipment due to processing is completely different from the operating process that the polysilicon in processing production process reacts discarded object, therefore, cannot utilize existing castoff processing system processing to remain in the polysilicon reaction discarded object in equipment.
Conventionally, in the time of plant maintenance, dismounting, for example, when detachable maintaining, replacing pipeline, instrument, valve, equipment etc. relate to material operation, process the polysilicon reaction discarded object remaining in equipment temporarily, can only pass through release or drainage point with regard to ground-to-air discharge.
In polysilicon reaction discarded object, contain the compositions such as chlorosilane, hydrogen, hydrogen chloride, wherein, chlorosilane and hydrogen chloride have corrosivity, eyes to human body and respiratory mucosa have intense stimulus effect, polysilicon is reacted to discarded object directly to be discharged sky, not only health is existed to security threat, etching apparatus is contaminated environment also.
Therefore, need a kind of polysilicon reaction castoff processing system badly to solve the problems of the technologies described above.
Utility model content
The purpose of this utility model is to provide a kind of polysilicon reaction castoff processing system, when solving service equipment, pipeline, polysilicon reaction waste pollution environment, threatens the problem of health.
For this reason, the utility model adopts following technical scheme:
The utility model provides a kind of polysilicon reaction castoff processing system, comprising: for delivery of the discarded object conveyance conduit of polysilicon reaction discarded object, gas transmission pipeline for delivery of inert gas, one-level scrubbing tower, waste liquid recovery apparatus with for carry the alkali lye feedway of alkali lye to one-level scrubbing tower;
Discarded object conveyance conduit is connected with one-level scrubbing tower with gas transmission pipeline respectively, and the polysilicon reaction discarded object remaining in discarded object conveyance conduit is entered one-level scrubbing tower by the pressure of the inert gas that can carry by gas transmission pipeline;
One-level scrubbing tower is connected with waste liquid recovery apparatus with alkali lye feedway respectively, and the alkali lye that can utilize alkali lye feedway to carry is washed and drenched the polysilicon reaction discarded object that enters one-level scrubbing tower, and enters waste liquid recovery apparatus by washing the waste liquid and the waste residue that generate after pouring.
Further, described system also comprises secondary scrubbing tower and water pipeline, and the top of secondary scrubbing tower is provided with exhaust outlet, and water pipeline is connected with secondary scrubbing tower;
Secondary scrubbing tower is connected by residue discarded object conveyance conduit with one-level scrubbing tower, and be connected with waste liquid recovery apparatus, can be by the water in water pipeline, wash and drench the residue discarded object that residue discarded object conveyance conduit is carried, and enter waste liquid recovery apparatus by washing the waste liquid and the waste residue that generate after the described residue discarded object of pouring, and by emptying from exhaust outlet the waste gas that cannot wash pouring in described inert gas and residue discarded object, described residue discarded object is in one-level scrubbing tower, to fail all to be washed to drench and remaining polysilicon reaction discarded object;
The position that the position that water pipeline is connected with secondary scrubbing tower is connected with secondary scrubbing tower higher than residue discarded object conveyance conduit, the position that the position of exhaust outlet is connected with secondary scrubbing tower higher than water pipeline.
Preferably, the pressure in described water pipeline is 0.4-0.6MPa.
Preferably, in one-level scrubbing tower, the position that alkali lye feedway is connected with one-level scrubbing tower is provided with multiple for spraying the first shower nozzle of alkali lye, and wherein, each the first shower nozzle is connected with alkali lye feedway respectively towards different direction settings and each the first shower nozzle;
In secondary scrubbing tower, the position that water pipeline is connected with secondary scrubbing tower is provided with multiple the second shower nozzles for spraying water, and wherein, each the second shower nozzle is connected with water pipeline respectively towards different direction settings and each the second shower nozzle.
Preferably, described waste liquid recovery apparatus is arranged on the first platform, and described one-level scrubbing tower, secondary scrubbing tower and alkali lye feedway are arranged on the second platform, and the first platform is positioned at the below of the second platform.
Preferably, described the first platform is platform movably.
Preferably, described waste liquid recovery apparatus comprises the waste liquid receiving slit and the gradient baffle plate that store liquid, and the sidewall of waste liquid receiving slit is provided with opening;
The bottom of one-level scrubbing tower is provided with the first waste liquid outlet, the bottom of secondary scrubbing tower is provided with the second waste liquid outlet, gradient baffle plate is arranged at the below of the first waste liquid outlet and the second waste liquid outlet, and be connected with the opening on the sidewall of waste liquid receiving slit, the both sides of gradient baffle plate are provided with side weir, can form confined space with the second platform;
In waste liquid receiving slit, the liquid level of liquid is higher than the opening on the sidewall of the first waste liquid outlet, the second waste liquid outlet and waste liquid receiving slit.
Further, described waste liquid recovery apparatus also comprises slag stock pump, and slag stock pump is connected with waste liquid receiving slit, can export the waste liquid in waste liquid receiving slit to liquid waste treating apparatus.
Further, described waste liquid recovery apparatus also comprises basket filter; Basket filter comprises: pull bar, hook and for filtering the filter basket of waste residue;
Pull bar is connected with hook with filter basket respectively, and filter basket is arranged at the bottom of waste liquid receiving slit near the position of opening, and is positioned at below the liquid level of described liquid, more than hook is positioned at the liquid level of described liquid.
Preferably, described alkali lye feedway comprises: lye pump and for storing the alkali lye storage tank of alkali lye, lye pump is connected with one-level scrubbing tower with alkali lye storage tank respectively, the alkali lye in alkali lye fluid reservoir can be delivered to one-level scrubbing tower.
Polysilicon reaction castoff processing system of the present utility model, by discarded object conveyance conduit is connected with one-level scrubbing tower with gas transmission pipeline, by the pressure of inert gas, the polysilicon reaction discarded object remaining in discarded object conveyance conduit can be entered to one-level scrubbing tower, and utilize alkali lye feedway to carry alkali lye to one-level scrubbing tower, wash and drench polysilicon reaction discarded object, can effectively absorb chlorosilane and hydrogen chloride in polysilicon reaction discarded object, wash the waste liquid generating after drenching and enter waste liquid recovery apparatus, more environmental protection, safer, in addition, also can reduce the extent of corrosion to process units surface, reduce investment of production cost.
Brief description of the drawings
The polysilicon that Fig. 1 provides for the utility model embodiment reacts the structural representation of castoff processing system.
Marginal data:
1, discarded object conveyance conduit 2, gas transmission pipeline 3, one-level scrubbing tower
4, secondary scrubbing tower 5, water pipeline 6, residue discarded object conveyance conduit
7, the first platform 8, the second platform 9, waste liquid receiving slit
10, gradient baffle plate 11, slag stock pump 12, basket filter
13, lye pump 14, alkali lye storage tank 31, the first waste liquid outlet
41, exhaust outlet 42, the second waste liquid outlet 91, opening
92, liquid level 121, pull bar 122, hook
123, filter basket
Detailed description of the invention
For making those skilled in the art understand better the technical solution of the utility model, below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.
Describe the structure of the utility model polysilicon reaction castoff processing system in detail below in conjunction with Fig. 1.This system comprises: discarded object conveyance conduit 1, gas transmission pipeline 2, one-level scrubbing tower 3, waste liquid recovery apparatus and alkali lye feedway, and alkali lye feedway is for carrying alkali lye to one-level scrubbing tower 3, and gas transmission pipeline 2 is for delivery of inert gas.Discarded object conveyance conduit 1 is for carrying polysilicon reaction discarded object to one-level scrubbing tower 3, its entrance point is normally connected with the exhaust pipe of polycrystalline silicon producing device.Polysilicon reaction discarded object can comprise: the compositions such as chlorosilane, hydrogen chloride, hydrogen, under different reaction process conditions, the state difference of chlorosilane, can be gaseous state or liquid state conventionally.
Discarded object conveyance conduit 1 is connected with one-level scrubbing tower 3 with gas transmission pipeline 2 respectively, can, by the pressure of the inert gas carried by gas transmission pipeline 2, the polysilicon reaction discarded object remaining in discarded object conveyance conduit 1 be entered in one-level scrubbing tower 3.
Preferably, inert gas can be selected lower-cost nitrogen, and the pressure of nitrogen can be 0.4-0.8MPa.
One-level scrubbing tower 3 is connected with waste liquid recovery apparatus with alkali lye feedway respectively, the alkali lye that can utilize alkali lye feedway to carry, wash and drench the polysilicon reaction discarded object that enters this device (being one-level scrubbing tower 3), and enter waste liquid recovery apparatus by washing the waste liquid and the waste residue that generate after pouring.
Preferably, alkali lye can be sodium hydroxide solution, and concentration can be 5-15%.
The chlorosilane reaction that sodium hydroxide solution can react with polysilicon in discarded object generates sodium metasilicate, sodium metasilicate and silicon oxide compound, and the hcl reaction reacting with polysilicon in discarded object generates sodium chloride.Sodium chloride water soluble, sodium metasilicate, sodium metasilicate, silicon oxide compound sediment are water insoluble, the waste liquid generating after drip washing refers to the mixed solution that comprises sodium chloride, a small amount of metso, and the waste residue generating after drip washing refers to sodium metasilicate, sodium metasilicate, silicon oxide compound sediment.
Can find out by foregoing description, by the pressure of inert gas, the polysilicon reaction discarded object remaining in discarded object conveyance conduit can be entered to one-level scrubbing tower, and utilize alkali lye feedway to carry alkali lye to one-level scrubbing tower, wash and drench polysilicon reaction discarded object, can effectively absorb poisonous and hazardous chlorosilane and hydrogen chloride, generate waste liquid and the waste residue of nontoxic pollution-free, and utilize waste liquid recovery apparatus Recycling of waste liquid and waste residue, more convenient, more environmental protection, safer.
Further, in order to ensure to process the effect of polysilicon reaction discarded object, after polysilicon discarded object is carried out to alkali cleaning, can also continue remaining polysilicon reaction discarded object to wash.
Preferably, this polysilicon reaction castoff processing system can also comprise: secondary scrubbing tower 4 and water pipeline 5, and the top of secondary scrubbing tower 4 is provided with exhaust outlet 41, and described water pipeline 5 is connected with secondary scrubbing tower 4.
Secondary scrubbing tower 4 is connected by residue discarded object conveyance conduit 6 with one-level scrubbing tower 3, and be connected with waste liquid recovery apparatus, can be by the water in water pipeline 5, wash and drench the residue discarded object of carrying from residue discarded object conveyance conduit 6, and enter waste liquid recovery apparatus by washing the waste liquid and the waste residue that generate after drenching, and it is emptying from exhaust outlet 41 to wash the waste gas of pouring.The residue discarded object that is transported to secondary scrubbing tower 4 from residue discarded object conveyance conduit 6 is included in fails to be washed completely polysilicon reaction discarded object and the nitrogen of pouring one-level eluting column 3, the polysilicon reaction discarded object of failing to be washed completely pouring in one-level eluting column 3 comprises: chlorosilane, hydrogen chloride and hydrogen.
Due to hydrogen chloride water soluble, chlorosilane reacts and can generate silicon oxide compound with water, therefore, in secondary scrubbing tower 4, the waste liquid producing after washing is drenched is hydrochloric acid solution, and the waste residue of generation is silicon oxide compound, and above-mentioned waste liquid and waste residue can enter waste liquid recovery apparatus.
Water in water pipeline 5 can be plant water, and preferred, the water pressure in water pipeline 5 is 0.4-0.6MPa.
The position that the position that water pipeline 5 is connected with secondary scrubbing tower 4 is connected with secondary scrubbing tower 4 higher than residue discarded object conveyance conduit 6, make water can with the residue discarded object complete reaction of carrying from residue discarded object conveyance conduit 6, ensure fully to wash pouring.
The waste gas that cannot wash pouring comprises: hydrogen and nitrogen, and owing to having a certain amount of waste gas in two-step washing tower 4 internal stops, make the slight pressure of two-step washing tower 4 inside higher than normal pressure, prevent from that air from playing a reversed role to enter two-step washing tower 4 inside.
The position that the position of exhaust outlet 41 is connected with secondary scrubbing tower 4 higher than water pipeline 5, preferred, exhaust outlet 41 can be arranged at the top of secondary scrubbing tower, and the waste gas of being convenient to wash pouring is emptying from exhaust outlet 41.
Preferably, in one-level scrubbing tower 3, the position that alkali lye feedway is connected with one-level scrubbing tower 3 is provided with multiple for spraying first shower nozzle (figure does not illustrate) of alkali lye, wherein, each the first shower nozzle is connected with alkali lye feedway respectively towards different direction settings and each the first shower nozzle one-level scrubbing tower 3 is interior, to polysilicon reaction discarded object is carried out to sufficient alkali cleaning.
In secondary scrubbing tower 4, the position that water pipeline 5 is connected with secondary scrubbing tower 4 is provided with multiple the second shower nozzles (figure does not illustrate) for spraying water, wherein, each the second shower nozzle is connected with water pipeline respectively towards different direction settings and each the second shower nozzle secondary scrubbing tower 4 is interior, to residue discarded object is washed fully.
Preferably, the quantity of the first shower nozzle and the second shower nozzle can be 4-8.
Waste liquid recovery apparatus can be arranged on the first platform 7, one-level scrubbing tower 3, secondary scrubbing tower 4 and alkali lye feedway are arranged on the second platform 8, and the bottom of one-level scrubbing tower 3, secondary scrubbing tower 4 is positioned at the below of the second platform 8, the first platform 7 is positioned at the below of the second platform 8, and the recovery of waste liquid and waste residue, higher than the position of the first platform 7, is convenient in the position of the bottom of one-level scrubbing tower 3, secondary scrubbing tower 4.
The polysilicon reaction castoff processing system providing due to the utility model is mainly used in the scene that valve, instrument, pipeline are safeguarded, i.e. interim situation about processing, therefore, the first platform 7 can be designed to movably platform, the further recycling of for convenience detach and discarded object.Movably platform can adopt the existing mode such as pulley, slide rail to realize, and does not repeat them here.
Below in conjunction with Fig. 1, waste liquid recovery apparatus is elaborated.As shown in Figure 1, waste liquid recovery apparatus comprises: store waste liquid receiving slit 9 and the gradient baffle plate 10 of liquid, the sidewall of waste liquid receiving slit 9 is provided with opening 91.
The bottom of one-level scrubbing tower 3 is provided with the first waste liquid outlet 31, and the waste liquid generating after alkali cleaning in one-level scrubbing tower 3 and waste residue are discharged by the first waste liquid outlet 31; The bottom of secondary scrubbing tower 4 is provided with the second waste liquid outlet 42, and the waste liquid and the waste residue that in secondary scrubbing tower 4, after washing, generate are discharged by the second waste liquid outlet 42; Gradient baffle plate 10 is arranged at the below of the first waste liquid outlet 31 and the second waste liquid outlet 42, and be connected with the opening 91 on the sidewall of waste liquid receiving slit 9, the both sides of gradient baffle plate 10 are provided with side weir (not illustrating in figure), can form confined space with the second platform, in order to prevent waste liquid outflow, and isolated with extraneous air.
As shown in Figure 1, the second platform 8 can be divided into two parts of separation, waste liquid receiving slit 9 below between two parts of the second platform 8, the opening on the top of waste liquid receiving slit 9 and air communication.Liquid level 92 height of the liquid in waste liquid receiving slit 9 are higher than the height of the opening 91 on the sidewall of the first waste liquid outlet 31, the second waste liquid outlet 42 and waste liquid receiving slit 9, thereby play the effect of fluid-tight, ensure that the gas reacting in discarded object without the polysilicon of washing pouring in one-level scrubbing tower 3 and secondary scrubbing tower 4 can not be disposed in air via waste liquid receiving slit 9.
Angle between gradient baffle plate 10 and horizontal plane can be 10-30 °, preferred, is 5-20 °.
Preferably, waste liquid recovery apparatus can also comprise slag stock pump 11, and slag stock pump 11 is connected with waste liquid receiving slit 9, the waste liquid in waste liquid receiving slit 9 can be exported to liquid waste treating apparatus (not illustrating in figure).
Preferably, waste liquid recovery apparatus can also comprise basket filter 12, and basket filter 12 can comprise: pull bar 121, hook 122 and filter basket 123.Pull bar 121 122 is connected with hook with filter basket 123 respectively, and filter basket 123 is arranged at the bottom of waste liquid receiving slit 9, is positioned at the side near opening 91, and below liquid level in waste liquid receiving slit 9 interior liquid, link up with 122 be positioned at the liquid level of described liquid more than.Preferably, interval one fixed gap between the sidewall of filter basket 123 and the sidewall of waste liquid receiving slit 9, is convenient to slag stock pump 11 and extracts the waste liquid in waste liquid receiving slit 9.
Basket filter 12 filters waste residue (for example silicon oxide compound in waste liquid) by filter basket 123, utilize hook 122, basket filter 12 can be taken out from waste liquid receiving slit 9, be deposited in the waste residue in filter basket 123, such as sodium metasilicate, sodium metasilicate, silicon oxide compound can be pulled out, thereby separate with waste liquid.Isolating the waste liquid of waste residue can take away via slag stock pump 11, to be further processed.
As shown in Figure 1, alkali lye feedway can comprise: lye pump 13 and alkali lye storage tank 14, lye pump 13 is connected with one-level scrubbing tower 3 with alkali lye storage tank 14 respectively, the outlet that is alkali lye storage tank 14 is connected with the import of lye pump 13, the outlet of lye pump 13 is connected with one-level scrubbing tower 3, and lye pump 13 can be delivered to one-level scrubbing tower 3 by the alkali lye in alkali lye fluid reservoir 14.Alkali lye storage tank 14 can be used to preparation or storage sodium hydroxide solution.
By adopting alkali cleaning and washing two-stage to absorb polysilicon reaction discarded object, the pollutant such as chlorosilane, hydrogen chloride can be disposed completely, be conducive to environmental protection.In waste liquid receiving slit, basket filter is set, can easily and safely solid-state waste residue (silicon oxide compound) be salvaged, thereby waste liquid is recycled more again.The first platform adopts mobile platform, uses more convenient.
Be understandable that, above embodiment is only used to principle of the present utility model is described and the illustrative embodiments that adopts, but the utility model is not limited to this.For those skilled in the art, in the situation that not departing from spirit of the present utility model and essence, can make various modification and improvement, these modification and improvement are also considered as protection domain of the present utility model.
Claims (10)
1. a polysilicon reaction castoff processing system, it is characterized in that, comprising: for delivery of the discarded object conveyance conduit of polysilicon reaction discarded object, gas transmission pipeline for delivery of inert gas, one-level scrubbing tower, waste liquid recovery apparatus with for carry the alkali lye feedway of alkali lye to one-level scrubbing tower;
Discarded object conveyance conduit is connected with one-level scrubbing tower with gas transmission pipeline respectively, and the polysilicon reaction discarded object remaining in discarded object conveyance conduit is entered one-level scrubbing tower by the pressure of the inert gas that can carry by gas transmission pipeline;
One-level scrubbing tower is connected with waste liquid recovery apparatus with alkali lye feedway respectively, and the alkali lye that can utilize alkali lye feedway to carry is washed and drenched the polysilicon reaction discarded object that enters one-level scrubbing tower, and enters waste liquid recovery apparatus by washing the waste liquid and the waste residue that generate after pouring.
2. the system as claimed in claim 1, is characterized in that, described system also comprises secondary scrubbing tower and water pipeline, and the top of secondary scrubbing tower is provided with exhaust outlet, and water pipeline is connected with secondary scrubbing tower;
Secondary scrubbing tower is connected by residue discarded object conveyance conduit with one-level scrubbing tower, and be connected with waste liquid recovery apparatus, can be by the water in water pipeline, wash and drench the residue discarded object that residue discarded object conveyance conduit is carried, and enter waste liquid recovery apparatus by washing the waste liquid and the waste residue that generate after the described residue discarded object of pouring, and by emptying from exhaust outlet the waste gas that cannot wash pouring in described inert gas and residue discarded object, described residue discarded object is in one-level scrubbing tower, to fail all to be washed to drench and remaining polysilicon reaction discarded object;
The position that the position that water pipeline is connected with secondary scrubbing tower is connected with secondary scrubbing tower higher than residue discarded object conveyance conduit, the position that the position of exhaust outlet is connected with secondary scrubbing tower higher than water pipeline.
3. system as claimed in claim 2, is characterized in that, the pressure in described water pipeline is 0.4-0.6MPa.
4. system as claimed in claim 2, it is characterized in that, in one-level scrubbing tower, the position that alkali lye feedway is connected with one-level scrubbing tower is provided with multiple for spraying the first shower nozzle of alkali lye, wherein, each the first shower nozzle is connected with alkali lye feedway respectively towards different direction settings and each the first shower nozzle;
In secondary scrubbing tower, the position that water pipeline is connected with secondary scrubbing tower is provided with multiple the second shower nozzles for spraying water, and wherein, each the second shower nozzle is connected with water pipeline respectively towards different direction settings and each the second shower nozzle.
5. system as claimed in claim 2, is characterized in that, described waste liquid recovery apparatus is arranged on the first platform, and described one-level scrubbing tower, secondary scrubbing tower and alkali lye feedway are arranged on the second platform, and the first platform is positioned at the below of the second platform.
6. system as claimed in claim 5, is characterized in that, described the first platform is platform movably.
7. system as claimed in claim 5, is characterized in that, described waste liquid recovery apparatus comprises the waste liquid receiving slit and the gradient baffle plate that store liquid, and the sidewall of waste liquid receiving slit is provided with opening;
The bottom of one-level scrubbing tower is provided with the first waste liquid outlet, the bottom of secondary scrubbing tower is provided with the second waste liquid outlet, gradient baffle plate is arranged at the below of the first waste liquid outlet and the second waste liquid outlet, and be connected with the opening on the sidewall of waste liquid receiving slit, the both sides of gradient baffle plate are provided with side weir, can form confined space with the second platform;
In waste liquid receiving slit, the liquid level of liquid is higher than the opening on the sidewall of the first waste liquid outlet, the second waste liquid outlet and waste liquid receiving slit.
8. system as claimed in claim 7, is characterized in that, described waste liquid recovery apparatus also comprises slag stock pump, and slag stock pump is connected with waste liquid receiving slit, can export the waste liquid in waste liquid receiving slit to liquid waste treating apparatus.
9. system as claimed in claim 7, is characterized in that, described waste liquid recovery apparatus also comprises basket filter; Basket filter comprises: pull bar, hook and for filtering the filter basket of waste residue;
Pull bar is connected with hook with filter basket respectively, and filter basket is arranged at the bottom of waste liquid receiving slit near the position of opening, and is positioned at below the liquid level of described liquid, more than hook is positioned at the liquid level of described liquid.
10. the system as described in claim 1-9 any one, it is characterized in that, described alkali lye feedway comprises: lye pump and for storing the alkali lye storage tank of alkali lye, lye pump is connected with one-level scrubbing tower with alkali lye storage tank respectively, the alkali lye in alkali lye fluid reservoir can be delivered to one-level scrubbing tower.
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| CN201420275504.XU CN203916437U (en) | 2014-05-27 | 2014-05-27 | A kind of polysilicon reaction castoff processing system |
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| CN201420275504.XU CN203916437U (en) | 2014-05-27 | 2014-05-27 | A kind of polysilicon reaction castoff processing system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105439108A (en) * | 2016-01-06 | 2016-03-30 | 昆明理工大学 | Method and device for resource recycling of silicon core corrosion waste liquor |
| CN105771580A (en) * | 2016-04-28 | 2016-07-20 | 亚洲硅业（青海）有限公司 | Laboratory exhaust gas and waste liquor recycling device |
-
2014
- 2014-05-27 CN CN201420275504.XU patent/CN203916437U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105439108A (en) * | 2016-01-06 | 2016-03-30 | 昆明理工大学 | Method and device for resource recycling of silicon core corrosion waste liquor |
| CN105771580A (en) * | 2016-04-28 | 2016-07-20 | 亚洲硅业（青海）有限公司 | Laboratory exhaust gas and waste liquor recycling device |
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