CN203910827U - Ultraviolet photosensitive sensor based on zinc oxide - Google Patents

Ultraviolet photosensitive sensor based on zinc oxide Download PDF

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Publication number
CN203910827U
CN203910827U CN201420350976.7U CN201420350976U CN203910827U CN 203910827 U CN203910827 U CN 203910827U CN 201420350976 U CN201420350976 U CN 201420350976U CN 203910827 U CN203910827 U CN 203910827U
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zinc oxide
ultraviolet light
dependent sensor
light dependent
interdigital electrode
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叶柏盈
王雪
王洪吉
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Nano New Energy Tangshan Co Ltd
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Nano New Energy Tangshan Co Ltd
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Abstract

The utility model provides a ultraviolet photosensitive sensor based on zinc oxide. The ultraviolet photosensitive sensor comprises a substrate, an interdigital electrode, a viscosity conductive fiber film and a zinc oxide film laminated in order. Two groups of electrodes of the interdigital electrode are not conductive, to form a signal output terminal of the ultraviolet photosensitive sensor. The viscosity conductive fiber film is arranged on one side surface of the interdigital electrode used for adhering the zinc oxide film. The zinc oxide film is arranged on one side surface of the viscosity conductive fiber film, used for sensing the ultraviolet light. The ultraviolet photosensitive sensor provided by the utility model is stable in performance, and meanwhile preparation technology of the ultraviolet photosensitive sensor is simplified. The ultraviolet photosensitive sensor has the characteristics of high sensitivity, short response time and simple preparation technology.

Description

Ultraviolet light dependent sensor based on zinc oxide
Technical field
The utility model relates to sensor field, especially relates to a kind of ultraviolet light dependent sensor based on zinc oxide.
Background technology
Zinc oxide nanowire, as semi-conducting material, can be applied to ultraviolet light dependent sensor, and when UV-irradiation is on zinc oxide nanowire, the resistance of zinc oxide nanowire changes, and then its output current is changed.Existing ultraviolet light dependent sensor is for improving the sensitivity of transducer, pay attention to improve the preparation method of zinc oxide nanowire more, application number 201010508591.5 discloses a kind of semiconductor ultraviolet detection sensor and preparation method thereof, its utilization is prepared semiconductor ultraviolet detector in comb teeth shape electrode one side by vapour deposition process or liquid chemical method growing nano zinc oxide, application number 200910061566.4 discloses a kind of Zinc oxide nano-ultraviolet light sensor and preparation method thereof, its Zinc oxide nano-rod array that utilizes hydro thermal method to prepare horizontal growth forms ultraviolet light dependent sensor.The method of conventional growth of zinc oxide nano line, for example hydrothermal growth process and vapour deposition process all need certain growth conditions, requirements such as temperature, equipment, first utilize electrostatic spinning to prepare Seed Layer recycling Seed Layer growth of zinc oxide nano line, first need the Zinc oxide film that electrostatic spinning is obtained to carry out high-temperature calcination, it is had relatively high expectations to equipment, and has limited the use of base material.There is complicated process of preparation in the preparation process of above-mentioned ultraviolet light dependent sensor, equipment requirement is high, and the consistency of its product is poor, the shortcoming of inapplicable large-scale production.
Utility model content
For addressing the above problem, the utility model provides a kind of ultraviolet light dependent sensor based on zinc oxide and preparation method thereof, by viscosity conductive fiber film is set on interdigital electrode surface, simplified the preparation technology of ultraviolet light dependent sensor, it is high that prepared ultraviolet light dependent sensor has responsiveness, and response is short with turnaround time, and light/dark current ratio is high, preparation technology is simple, the feature can be mass-produced.
The utility model adopts method of electrostatic spinning first on interdigital electrode one side surface, to prepare viscosity conductive fiber film, this viscosity conductive fiber film is comprised of the polymer fiber doped with electric conducting material, this viscosity conductive fiber film is on the one hand as adhesion layer, on the one hand as conductive layer; Again Zinc oxide nanoparticle and/or doped zinc oxide nano particle and/or heterostructure Zinc oxide nanoparticle are coated on to viscosity conductive fiber film one side and form Zinc oxide film.
Owing to adopting, in interdigital electrode one side, viscosity conductive fiber film is set, this viscosity wire tunica fibrosa has certain adhesiveness, so can directly synthetic or commercial zinc oxide be coated on to viscosity conductive fiber film surface, omitted the processing step that needs chemically grown zinc oxide and high-temperature calcination, and process equipment is required simply, to be applicable to suitability for industrialized production.In this viscosity conductive fiber film doped with the electric conducting material of certain content, so viscosity conductive fiber film is having the adhering conductivity that possesses concurrently simultaneously, and make the resistance of viscosity conductive fiber film and the resistance of Zinc oxide film have a balance by certain material mixture ratio, this conductivity makes viscosity conductive fiber film and Zinc oxide film consist of the photo resistance of ultraviolet light dependent sensor, after making ultraviolet lighting be mapped on Zinc oxide film, the resistance value of photo resistance changes, electric current in interior circuit is changed, by two pairs of electrodes of interdigital electrode, export.So adjust the proportioning of electric conducting material, make this viscosity conductive fiber film conductivity moderate, electric conducting material content is very few, and photoelectric current and the dark current value of prepared ultraviolet light dependent sensor are all too small, are not suitable for monitoring analysis; Electric conducting material content is excessive, and the light dark current ratio of prepared ultraviolet light dependent sensor is too small, and responsiveness is too low, and therefore, for making ultraviolet light dependent sensor have suitable current value and responsiveness, the content of electric conducting material should be moderate.
The utility model ultraviolet light dependent sensor, have highly sensitive, the response time is short, the advantage that preparation technology is simple, be easy to suitability for industrialized production.
In order to solve the problems of the technologies described above, the first technical scheme that the utility model adopts is: a kind of ultraviolet light dependent sensor based on zinc oxide, comprises the substrate, interdigital electrode, viscosity conductive fiber film, the Zinc oxide film that are cascading;
Wherein, the two arrays of electrodes not conducting mutually of described interdigital electrode, as the signal output part of described ultraviolet light dependent sensor;
Described viscosity conductive fiber film is arranged on a side surface of described interdigital electrode, for adhering to described Zinc oxide film;
Described Zinc oxide film is arranged on described viscosity conductive fiber film one side surface, for sensing ultraviolet light.
Wherein, described Zinc oxide film consists of Zinc oxide nanoparticle and/or doped zinc oxide nano particle and/or heterostructure Zinc oxide nanoparticle.
Described doped zinc oxide nano particle consists of the silver oxide that adulterates in Zinc oxide nanoparticle, aluminium oxide, cerium oxide, cupric oxide.
In described Zinc oxide film, Zinc oxide nanoparticle particle diameter is 10nm-50 μ m.
The thickness of described Zinc oxide film is 10nm-700 μ m.
The aforesaid ultraviolet light dependent sensor based on zinc oxide, described interdigital electrode is formed by deposition or coating electrode material on substrate.
The aforesaid ultraviolet light dependent sensor based on zinc oxide, described viscosity conductive fiber film consists of the polymer fiber doped with electric conducting material.
Wherein, described polymer is any in Kynoar, polymethyl methacrylate, nylon; Described electric conducting material is any in polyaniline, conductive carbon powder, carbon nano-tube, Graphene.
The material of described substrate is any in glass, silicon, acrylic, PETG, polyimides, polyvinyl chloride, polypropylene, polyethylene.
In order to solve the problems of the technologies described above, the second technical scheme that the utility model adopts is: a kind of preparation method of the ultraviolet light dependent sensor based on zinc oxide, and the method comprises:
(1) prepare interdigital electrode
On substrate, by deposition or coating electrode material, form the two arrays of electrodes of interdigital electrode shape.
(2) configuration viscosity conductive fiber film electrostatic spinning liquid
Polymer is joined in the first solvent, mix, prepare polymer latex liquid solution; Electric conducting material is joined in polymer latex liquid solution, mix and prepare electrostatic spinning liquid;
(3) electrostatic spinning
Step (2) gained electrostatic spinning liquid is carried out to electrostatic spinning on a side surface of two arrays of electrodes that forms interdigital electrode, on a side surface of interdigital electrode, obtain viscosity conductive fiber film;
(4) configuration zinc oxide suspension
Zinc oxide nanoparticle and/or doped zinc oxide nano particle and/or heterostructure Zinc oxide nanoparticle are joined in the second solvent, mix and prepare zinc oxide suspension;
(5) coating Zinc oxide film
The method that above-mentioned zinc oxide suspension is coated with by rotary coating, silk screen printing or knifing is coated on above-mentioned viscosity conductive fiber film surface, prepares Zinc oxide film;
(6) dry processing
The above-mentioned Zinc oxide film preparing, viscosity conductive fiber film are dried to processing together with interdigital electrode and substrate, prepare ultraviolet light dependent sensor.
Wherein, in step (2), in described electrostatic spinning liquid, the content of electric conducting material is 0.1wt%-15wt%.
Wherein, in step (2), in described polymer latex liquid solution, the content of polymer is 5wt%-12wt%.
Wherein, in step (2), described polymer is any in Kynoar, polymethyl methacrylate, nylon; Described electric conducting material is any in polyaniline, conductive carbon powder, carbon nano-tube, Graphene; Described the first solvent is any one or several in dimethyl formamide, ethanol, acetone, isopropyl alcohol.
Wherein, in step (3), the condition of work of electrostatic spinning is as follows: voltage is 8kV-25kV, and receiving range is 8cm-20cm, driving velocity 0.1ml/hr-1ml/hr.
Wherein, in step (4), described the second solvent is ethanol, dimethyl formamide, isopropyl alcohol or mixed solvent; Described Zinc oxide nanoparticle and/or doped zinc oxide nano particle and/or the content of heterostructure Zinc oxide nanoparticle in zinc oxide suspension are 3wt%-25wt%; Described mixed solvent comprises poly(ethylene oxide) and ethanol or poly(ethylene oxide) and dimethyl formamide or poly(ethylene oxide) and isopropyl alcohol, and wherein, the mass ratio of poly(ethylene oxide) and ethanol, dimethyl formamide, isopropyl alcohol is 1%-15%.
Wherein, in step (4), the particle diameter of described Zinc oxide nanoparticle and/or doped zinc oxide nano particle and/or heterostructure Zinc oxide nanoparticle is 10nm-50 μ m.
Wherein, in step (5), the thickness of described Zinc oxide film is 10nm-700 μ m; Described rotary coating speed is 500rpm-2000rpm, and the coating time is 10s-2min.
Wherein, in step (6), baking temperature is 100~200 ℃, and be 15min~1h drying time.
The preparation method of the aforementioned ultraviolet light dependent sensor based on zinc oxide, further comprises step (7), and the ultraviolet light dependent sensor that above-mentioned steps (1)~(6) are prepared encapsulates.
The ultraviolet light dependent sensor of the utility model based on zinc oxide, because applying, Zinc oxide film is arranged on viscosity conductive fiber film, the technique that does not need extra developing zinc oxide, so possess the simple feature of preparation technology, the coating processes favorable repeatability of simultaneous oxidation zinc film, the selection of nano granular of zinc oxide is flexible simultaneously, can make the light sensor of different responsivenesses, so the utility model ultraviolet light dependent sensor is to have preparation technology simple, under the prerequisite can be mass, also there is the feature highly sensitive, the response time is fast.
Accompanying drawing explanation
Fig. 1 is the utility model ultraviolet light dependent sensor structural representation.
Fig. 2 is interdigital electrode schematic diagram.
Fig. 3 is that the first embodiment electrostatic spinning is prepared viscosity conductive fiber film schematic diagram.
Fig. 4 is that the first embodiment rotary coating is prepared Zinc oxide film schematic diagram on viscosity conductive fiber film.
Fig. 5 is Zinc oxide film concrete set-up mode on viscosity conductive fiber film.
Fig. 6 be the utility model ultraviolet light dependent sensor after heating, add after packaging part, place corresponding electric current-time variation diagram after 3 days.
Fig. 7 is the utility model ultraviolet light dependent sensor electric current-time variation diagram under different ultraviolet ray intensities.
Fig. 8 is the photocurrent variations producing under different UV-irradiation at the utility model ultraviolet light dependent sensor.
Fig. 9 is the electric current output and its responsiveness variation diagram of the utility model ultraviolet light dependent sensor under different ultraviolet ray intensities irradiate.
Figure 10 is electric current-time plot under the ultraviolet light dependent sensor UV-irradiation of the utility model embodiment tetra-preparation;
Figure 11 is the ultraviolet light dependent sensor of the utility model embodiment tetra-preparations and the electric current-time diagram comparison diagram of the ultraviolet light dependent sensor of embodiment bis-preparations under UV-irradiation;
Figure 12 is ultraviolet light dependent sensor electric current-time variation diagram comparison diagram under UV-irradiation that the utility model conducting polyaniline amine content ultraviolet light dependent sensor that is 0.1wt% and conducting polyaniline amine content are 5wt%;
Figure 13 is ultraviolet light dependent sensor electric current-time variation diagram comparison diagram under UV-irradiation that the utility model conducting polyaniline amine content ultraviolet light dependent sensor that is 15wt% and conducting polyaniline amine content are 5wt%;
Embodiment
For fully understanding object, feature and the effect of the utility model, by following concrete execution mode, the utility model is elaborated.
Elaborate the first embodiment of the present utility model below.
A ultraviolet light dependent sensor based on zinc oxide, comprises and draws together substrate, interdigital electrode, viscosity conductive fiber film, the Zinc oxide film being cascading.
Fig. 1 is the structural representation of the utility model ultraviolet light dependent sensor.As shown in Figure 1, the utility model ultraviolet light dependent sensor comprises: substrate 1, interdigital electrode 2, viscosity conductive fiber film 3, Zinc oxide film 4.
Wherein, substrate 1 material is any in glass, silicon, acrylic, PETG, polyimides, polyvinyl chloride, polypropylene, polyethylene, because the utility model ultraviolet light dependent sensor does not need developing zinc oxide, therefore the growing environments such as the high temperature in preparation process, solution have been avoided, so wider general to substrate material selection, select flexible substrates can extensively improve the range of application of ultraviolet light dependent sensor.
Interdigital electrode 2 is comprised of the electrode of two groups of not conductings, and two arrays of electrodes forms the signal output part of the utility model ultraviolet light dependent sensor.Viscosity conductive fiber film 3 is arranged on interdigital electrode 2 one side surfaces, across between two arrays of electrodes, for adhere to described Zinc oxide film and make described interdigital electrode and described Zinc oxide film between form ohmic contact; Zinc oxide film 4 is arranged on described viscosity conductive fiber film 3 one side surfaces, for sensing ultraviolet light.In above-mentioned ultraviolet light dependent sensor, viscosity conductive fiber film 3 and Zinc oxide film 4 compose in parallel the photo resistance of ultraviolet light dependent sensor of the prior art.
Fig. 2 is interdigital electrode schematic diagram, and the utility model interdigital electrode adopts conventional method of the prior art to make.Concrete, on substrate, deposition or coating electrode material form the two arrays of electrodes of interdigital electrode shape.The utility model interdigital electrode thickness is about 100nm-8 μ m.The utility model does not have particular provisions to interdigital electrode substrate used thereof, conventional base material all can be applicable to the utility model, such as glass, silicon, acrylic etc., especially the utility model base material can be selected flexible material, for example PETG, polyimides, polyvinyl chloride, polypropylene, polyethylene.The utility model does not have particular provisions to electrode material yet, and such as gold, silver, copper, aluminium, titanium etc. all can be applicable to the utility model.The coating that the utility model adopts or deposition process are also conventional in prior art, for example magnetron sputtering, electron beam or hot evaporation, silk screen printing or rotary coating.
The utility model adopts the method for electrostatic spinning to prepare viscosity conductive fiber film 3 in interdigital electrode one side, as shown in Figure 3, is that the first embodiment electrostatic spinning is prepared viscosity conductive fiber film schematic diagram.In Fig. 3, viscosity conductive fiber film 3 consists of the polymer fiber 31 of conductive doped material, is arranged on interdigital electrode 2 one side surfaces.Because containing polymer in viscosity conductive fiber film 3, as PVDF, PMMA, PA etc., so viscosity conductive fiber film possesses certain adhesiveness, can effectively by being coated in its surperficial nano zine oxide, stick to its surface, meanwhile, in viscosity conductive fiber film, also contain the electric conducting material of certain proportioning, for example, polyaniline, conductive carbon powder, carbon nano-tube, Graphene etc. make viscosity conductive fiber film 3 possess certain electric conductivity simultaneously, can form a photo resistance with Zinc oxide film 4.
Concrete preparation method is as follows for viscosity conductive fiber film 3:
(1) configuration viscosity conductive fiber film electrostatic spinning liquid
Polymer is joined in the first solvent, mix, prepare polymer latex liquid solution, wherein in polymer latex liquid solution, the content of polymer is 5wt%-12wt%; Electric conducting material is joined in above-mentioned polymer latex liquid solution, mix, prepare electrostatic spinning liquid, wherein in electrostatic spinning liquid, the content of electric conducting material is 0.1wt%-15wt%; Described polymer is any in Kynoar (PVDF), polymethyl methacrylate (PMMA), nylon (PA); Described electric conducting material is any in polyaniline, conductive carbon powder, carbon nano-tube, Graphene; Described the first solvent is one or more of dimethyl formamide, acetone, acetone, isopropyl alcohol.
Wherein, above-mentioned mixed method is conventional mixed method, mechanical agitation for example, magnetic agitation, the methods such as ultrasonic wave dispersion.
(2) electrostatic spinning
Step (1) gained electrostatic spinning liquid is joined in electrostatic spinning apparatus, on a side surface of two arrays of electrodes that forms interdigital electrode, carry out electrostatic spinning, on a side surface of interdigital electrode, obtain viscosity conductive fiber film.
The utility model electrostatic spinning apparatus used is conventional commercially available electrostatic spinning apparatus.Concrete, the liquid dispensing apparatus that step (1) gained electrostatic spinning liquid is joined to electrostatic spinning apparatus is for example in injection needle, and syringe needle is metal, as stainless steel, syringe needle is connect to high voltage source, receiving terminal ground connection.Then at voltage, be 8kV-25kV, receiving range is under 8cm-20cm condition, with micro pump with driving velocity 0.1ml/hr-1ml/hr, electrostatic spinning liquid is expelled to by injection apparatus on a side surface of interdigital electrode and carries out electrostatic spinning, on a side surface of interdigital electrode, obtain viscosity conductive fiber film 3.
At method of electrostatic spinning, prepare in viscosity conductive fiber film 3 processes, use polymer latex liquid solution as electrostatic spinning liquid, can guarantee carrying out smoothly of electrostatic spinning on the one hand, on the other hand, can guarantee the adhesiveness of viscosity conductive fiber film, so the proportioning of polymer has a certain impact to ultraviolet light dependent sensor performance.In polymer latex liquid solution, add electric conducting material, can guarantee the conductivity of viscosity conductive fiber film, reduce the internal resistance of viscosity conductive fiber film.Electric conducting material content is very few, and photoelectric current and the dark current value of prepared ultraviolet light dependent sensor are all too small, are not suitable for monitoring analysis; Electric conducting material content is excessive, and the light dark current ratio of prepared ultraviolet light dependent sensor is too small, and responsiveness is too low, and therefore, suitable electric conducting material proportioning has important impact to the performance of ultraviolet light dependent sensor.
Zinc oxide film adopts the method applying to prepare the side surface at viscosity conductive fiber film, and described painting method comprises rotary coating, silk screen printing, knifing coating process.Be illustrated in figure 4 the first embodiment rotary coating and prepare Zinc oxide film schematic diagram on viscosity conductive fiber film.Its concrete preparation method is as follows:
(3) configuration zinc oxide suspension
Zinc oxide nanoparticle and/or doped zinc oxide nano particle and/or heterostructure Zinc oxide nanoparticle are joined in the second solvent, mix and prepare zinc oxide suspension, wherein the second solvent is ethanol, dimethyl formamide, isopropyl alcohol or mixed solvent, and described Zinc oxide nanoparticle and/or doped zinc oxide nano particle and/or the content of heterostructure Zinc oxide nanoparticle in zinc oxide suspension are 3wt%-25wt%.Mixed solvent comprises poly(ethylene oxide) and ethanol, poly(ethylene oxide) and dimethyl formamide, poly(ethylene oxide) and isopropyl alcohol, wherein, the mass ratio of poly(ethylene oxide) and ethanol, dimethyl formamide, isopropyl alcohol is 1%-15%, in solvent, add poly(ethylene oxide) can increase the viscosity of zinc oxide suspension, be beneficial to coating.;
In the utility model, Zinc oxide nanoparticle and/or doped zinc oxide nano particle and/or heterostructure Zinc oxide nanoparticle are commercial zinc oxide or synthesize in advance the Zinc oxide nanoparticle of preparation.Wherein, doped zinc oxide nano particle is doped with silver oxide, aluminium oxide, cerium oxide, cupric oxide etc. in Zinc oxide nanoparticle.Heterostructure zinc oxide is TiO 2-ZnO, SnO 2-ZnO.
The particle diameter of above-mentioned Zinc oxide nanoparticle and/or doped zinc oxide nano particle and/or heterostructure Zinc oxide nanoparticle is 10nm-50 μ m, has higher specific area.
(4) coating Zinc oxide film
Above-mentioned zinc oxide suspension is applied and above-mentioned viscosity conductive fiber film surface, prepare Zinc oxide film, wherein, described painting method comprises rotary coating, silk screen printing, knifing coating process;
Zinc oxide film thickness prepared in the utility model, for for 10nm-700 μ m, is preferably mono-layer oxidized zinc film.Take rotary coating as example, adopt 500rpm-2000rpm rotary speed to apply 10s-2min at viscosity conductive fiber film one side surface, prepare the Zinc oxide film of even thickness.
As shown in Figure 5, for Zinc oxide film 4 concrete set-up mode on viscosity conductive fiber film 3, than methods such as chemically growns at interdigital electrode surface direct growth zinc oxide, coating arranges the ambiguity that zinc oxide has overcome above-mentioned growing method, Zinc oxide nanoparticle and/or doped zinc oxide nano particle and/or heterostructure Zinc oxide nanoparticle 41 are uniformly distributed at polymer fiber 31 1 side surfaces doped with electric conducting material, can improve the sensitivity of ultraviolet light dependent sensor, simplify preparation technology simultaneously, realize batch production.
After the preparation process of above-mentioned (1)~(4), ultraviolet light dependent sensor of the present utility model also can further comprise,
(5) dry processing
The above-mentioned Zinc oxide film that is cascading preparing, viscosity conductive fiber film are dried to processing together with interdigital electrode and substrate, prepare ultraviolet light dependent sensor.Wherein, baking temperature is 100~200 ℃, and be 15min~1h drying time.
Above-mentioned dry processing intent is to remove to prepare the solvent adulterating in Zinc oxide film process, for example, and ethanol etc.
After above-mentioned preparation technology, ultraviolet light dependent sensor of the present utility model can be realized the ultraviolet function of sensing, for improving the stability of the utility model ultraviolet light dependent sensor, and minimizing ultraviolet light dependent sensor is in use subject to the wearing and tearing of external environment, the ultraviolet light dependent sensor preparation method of the utility model based on zinc oxide further comprises step (6), and the ultraviolet light dependent sensor that above-mentioned steps (1)~(5) are prepared encapsulates.Described encapsulating material is conventional encapsulating material, preferably clear material.
The utility model ultraviolet light dependent sensor is under the irradiation of ultraviolet light, and its resistance can decline thereupon.As shown in subordinate list one, by commercial ultraviolet light detector from device as under different solar light irradiations, the strength increase of ultraviolet light is corresponding is that the resistance of device reduces, thereby the output current of ultraviolet light dependent sensor is changed, after external detection instrument detects, can realize detection ultraviolet ray intensity.
Ultraviolet light dependent sensor resistance variations under the different UV-irradiation of table 1
Below by specific embodiment, set forth the enforcement of method of the present utility model, one skilled in the art will appreciate that this should not be understood to the restriction to the utility model claim scope.
Embodiment mono-
The present embodiment gained ultraviolet light dependent sensor is of a size of 0.5cm * 0.5cm, and Zinc oxide film thickness is 200 μ m.
(1) preparation of interdigital electrode
Take goldleaf as target, deposit interdigital electrode with magnetron sputtering method on sheet glass, thickness of electrode is about 2 μ m.
(2) configuration viscosity conductive fiber film electrostatic spinning liquid
The PVDF of 0.15g (molecular weight 1.1M) is dissolved in DMF/acetone (acetone) mixed solvent of 0.85g/0.5g, mechanical agitation prepares polymer latex liquid solution;
The conductive polyaniline of 0.165g is dispersed in above-mentioned polymer latex liquid solution, and mechanical agitation prepares viscosity conductive fiber film electrostatic spinning liquid, and wherein, in electrostatic spinning liquid, conductive polyaniline content is 10wt%;
(3) electrostatic spinning
Step (2) gained electrostatic spinning liquid is joined in injection needle, and syringe needle (stainless steel) connects high-voltage power supply, receiving terminal ground connection.Then at voltage, be 12kV, receiving range is under 10cm condition, with micro pump, with driving velocity 0.1ml/hr, electrostatic spinning liquid is expelled in interdigital electrode and carries out electrostatic spinning 1 minute, obtains viscosity conductive fiber film in interdigital electrode.
(4) configuration zinc oxide suspension
In the PEO that commercial ZnO nano particle 0.125g joins at 0.25g/1g (molecular weight 100,000)/alcohol mixed solvent, zinc oxide particle diameter is 5 μ m, mixes and prepares zinc oxide suspension;
With the method for rotary coating by ZnO suspension with 500rpm, within 30 seconds, be uniformly coated on viscosity conductive fiber film/interdigital electrode/sheet glass, prepare Zinc oxide film.
(5) dry processing
Zinc oxide film/viscosity conductive fiber film/interdigital electrode/sheet glass obtained above is placed on heating plate, with the temperature of 150 ℃, dry 30 minutes, to evaporate ethanolic solution.
Behind above-mentioned steps (1)~(5), prepare ultraviolet light dependent sensor of the present utility model.
With wire, connect interdigital electrode, device is measured with electrochemical workstation (CHI660E, Shanghai occasion China instrument) to the electric current of above-mentioned ultraviolet light dependent sensor--the time changes, and test result as shown in Figure 6.
Fig. 6 is that the ultraviolet light dependent sensor of embodiment mono-preparation is at 700 μ W/cm 2ultraviolet ray intensity and 70 μ W/cm 2electric current-time variation diagram under ultraviolet ray intensity.As shown in the figure, at 700 μ W/cm 2under UV-irradiation, device is 2 for the corresponding recovery rate of ultraviolet light, and dark current is about 7 * 10 -9ampere, photoelectric current is 8.1 * 10 -7ampere, can obtain thus, and the ratio of photoelectric current and dark current is~115.At 70 μ W/cm 2under UV-irradiation, device is 2 for the corresponding recovery rate of ultraviolet light, and dark current is about 7 * 10 -9ampere, photoelectric current is 2 * 10 -7ampere, can obtain thus, and the ratio of photoelectric current and dark current is~29.
If Fig. 7 is that the ultraviolet light dependent sensor of the embodiment mono-preparation output current under different ultraviolet ray intensities changes, ultraviolet ray intensity is less than 200 μ W/cm 2time, output current is roughly directly proportional to the ultraviolet ray intensity of irradiation, and fast response time.When exposure intensity is greater than 200 μ W/cm 2time, the trend of electric current output slows down.Above-mentioned data declaration the utility model ultraviolet light dependent sensor has good sensitivity to ultraviolet light.
Embodiment bis-
The present embodiment gained ultraviolet light dependent sensor is of a size of 0.5cm * 0.5cm, and Zinc oxide film thickness is 200 μ m-500 μ m.
(1) preparation of interdigital electrode
Take goldleaf as target, deposit interdigital electrode with magnetron sputtering on sheet glass, thickness of electrode is about 2 μ m.
(2) configuration viscosity conductive fiber film electrostatic spinning liquid
The PVDF of 0.15g (molecular weight 1.1M) is dissolved in DMF/acetone (acetone) mixed solvent of 0.85g/0.5g, mechanical agitation prepares polymer latex liquid solution;
The conductive graphene of 0.16g is disperseed in above-mentioned polymer latex liquid solution, and mechanical agitation prepares viscosity conductive fiber film electrostatic spinning liquid, and wherein, in electrostatic spinning liquid, conductive graphene content is 10wt%;
(3) electrostatic spinning
Step (2) gained electrostatic spinning liquid is joined in injection needle, and syringe needle (stainless steel) connects high-voltage power supply, receiving terminal ground connection.Then at voltage, be 12kV, receiving range is under 15cm condition, with micro pump, with driving velocity 0.1ml/hr, electrostatic spinning liquid is expelled in interdigital electrode and carries out electrostatic spinning 1min, obtains viscous fiber conducting film in interdigital electrode.
(4) configuration zinc oxide suspension
Commercial TiO 2-ZnO nano particle 0.125g joins in the ethanolic solution of 2g, and zinc oxide particle diameter is 5 μ m, mixes and prepares zinc oxide suspension;
With the method for rotary coating by ZnO suspension with 1000rpm, within 30 seconds, be uniformly coated on viscosity conductive fiber film/interdigital electrode/sheet glass, prepare Zinc oxide film.
(5) dry processing
Zinc oxide film/viscosity conductive fiber film/interdigital electrode/sheet glass obtained above is placed on heating plate, with the temperature of 120 ℃, dry 30 minutes, to evaporate ethanolic solution.
With wire, connect interdigital electrode, electric current-time that device is measured to above-mentioned ultraviolet light dependent sensor with electrochemical workstation (CHI660E, Shanghai occasion China instrument) changes.
Analysis device is at 780 μ W/cm 2uV-irradiation under response time and turnaround time, with formula one and two, do data fitting respectively, resulting τ g and τ d be respectively 1.1 seconds with 0.73 second.And the device output photoelectric stream of area 0.5cm*0.5cm is 2.07*10 -5ampere, photoelectric current/dark current (~3*10 -8be ampere)~690.
I = I u + ( I u - I o ) e - t / τ d Formula one
I = I o + ( I u - I o ) ( 1 - e - t / τ g ) Formula two
Wherein I, Io, Iu, τ d, τ g, t represent respectively electric current, dark current, maximum photoelectric current, turnaround time constant, reaction time constant and the time of measuring.
Be illustrated in figure 8 the ultraviolet light dependent sensor of embodiment bis-, electric current output and its responsiveness (AW) under different ultraviolet ray intensities irradiate.The trend that electric current increases slows down with the increase of ultraviolet ray intensity.
Embodiment tri-
The present embodiment gained ultraviolet light dependent sensor is of a size of 0.5cm * 0.5cm, and Zinc oxide film thickness is 300 μ m.
Embodiment tri-is with the difference of embodiment bis-, and the preparation method of ultraviolet light dependent sensor also further comprises:
(6) encapsulation process
The ultraviolet light dependent sensor device that embodiment bis-is obtained carries out packaging protection, and encapsulating material is glass, PET, silica gel etc., and what the present embodiment was used is glass.With wire, connect interdigital electrode, by device with electrochemical workstation (CHI660E, Shanghai occasion China instrument) measure above-mentioned ultraviolet light dependent sensor electric current--the time changes, and after the present embodiment ultraviolet light dependent sensor is encapsulated, does not affect the performance of light sensor.As Fig. 9, it is the electric current-time variation diagram of ultraviolet light dependent sensor under three kinds of different conditions, wherein, Line 1 is illustrated in through the dry ultraviolet light dependent sensor electric current-time variation diagram removed after solvent of processing of step (5), No. 2 lines are for adopting the ultraviolet light dependent sensor electric current-time variation diagram after sheet glass encapsulates, and No. 3 lines are for placing 3 days ultraviolet light dependent sensor electric current-time variation diagrams of test afterwards under the rear room temperature of encapsulation.By above-mentioned curve chart, can be found out, the ultraviolet light dependent sensor that three kinds of preparation technologies obtain is very consistent to the response of identical ultraviolet light, that is,, after ultraviolet light light sensor is encapsulated, can not affect the responsiveness of transducer to ultraviolet light, simultaneously, after standing 3 days, ultraviolet light dependent sensor can reach identical responsiveness equally, and device has good stability, meanwhile, can avoid again the wearing and tearing of transducer in the external world is used.
Embodiment tetra-
(1) preparation of interdigital electrode
Take goldleaf as target, deposit interdigital electrode with magnetron sputtering on sheet glass, thickness of electrode is about 2 μ m.
(2) configuration zinc oxide suspension
In the PEO that commercial ZnO nano particle 0.13g joins at 0.25g/1g (molecular weight 100,000)/alcohol mixed solvent, zinc oxide particle diameter is 5 microns, mixes and prepares zinc oxide suspension;
With the method for rotary coating by ZnO suspension with 1000rpm, within 30 seconds, be uniformly coated on interdigital electrode/sheet glass, prepare Zinc oxide film.
(3) dry processing
Zinc oxide film/interdigital electrode/sheet glass obtained above is placed on heating plate, with the temperature of 150 ℃, dry 30 minutes, to evaporate ethanolic solution.
If Figure 10 is electric current-time plot under the ultraviolet light dependent sensor UV-irradiation of embodiment tetra-preparation; Figure 11 is the ultraviolet light dependent sensor of embodiment tetra-preparations and the electric current-time diagram of the ultraviolet light dependent sensor of embodiment bis-preparations under UV-irradiation, wherein, No. 2 lines are the ultraviolet light dependent sensor of the embodiment bis-preparations electric current-time diagram under UV-irradiation, and Line 1 is the ultraviolet light dependent sensor of the embodiment tetra-preparations electric current-time diagram under UV-irradiation; From Figure 10 and Figure 11, the response device time that the prepared ultraviolet light dependent sensor of conductive fiber film is not set is embodiment tetra-preparations is short, but current value is too small, is unfavorable for that later data processes, and affects the sensitivity of ultraviolet light dependent sensor.
Embodiment five
The present embodiment gained ultraviolet light dependent sensor is of a size of 0.5cm * 0.5cm, and Zinc oxide film thickness is 400 μ m.
(1) preparation of interdigital electrode
Take goldleaf as target, deposit interdigital electrode with magnetron sputtering on sheet glass, thickness of electrode is about 3 μ m.
(2) configuration tunica fibrosa electrostatic spinning liquid
The PVDF of 0.15g (molecular weight 1.1M) is dissolved in DMF/acetone (acetone) mixed solvent of 0.85g/0.5g, mechanical agitation prepares tunica fibrosa electrostatic spinning liquid;
(3) electrostatic spinning
Step (2) gained electrostatic spinning liquid is joined in injection needle, and syringe needle (stainless steel) connects high-voltage power supply, receiving terminal ground connection.Then at voltage, be 12kV, receiving range is under 15cm condition, with micro pump, with driving velocity 0.1ml/hr, electrostatic spinning liquid is expelled in interdigital electrode and carries out electrostatic spinning 1 minute, obtains polymer fiber film in interdigital electrode.
(4) configuration zinc oxide suspension
In the PEO that commercial ZnO nano particle 0.2g joins at 0.25g/1g (molecular weight 100,000)/alcohol mixed solvent, zinc oxide particle diameter is 10 μ m, mixes and prepares zinc oxide suspension;
With the method for rotary coating by ZnO suspension with 1000rpm, within 30 seconds, be uniformly coated on viscous fiber film/interdigital electrode/sheet glass, prepare Zinc oxide film.
(5) dry processing
Zinc oxide film/viscous fiber film/interdigital electrode/sheet glass obtained above is placed on heating plate, with the temperature of 150 ℃, dry 30 minutes, to evaporate ethanolic solution.
The ultraviolet light dependent sensor of being prepared by above-mentioned steps, its sensitivity is not high because the internal resistance of viscous fiber film is too high, cannot measure its output current.
Embodiment six
The present embodiment gained ultraviolet light dependent sensor is of a size of 0.5cm * 0.5cm, and Zinc oxide film thickness is 200 μ m.
(1) preparation of interdigital electrode
Take goldleaf as target, deposit interdigital electrode with magnetron sputtering on sheet glass, thickness of electrode is about 2 μ m.
(2) configuration viscosity conductive fiber film electrostatic spinning liquid
The PVDF of 0.15g (molecular weight 1.1M) is dissolved in DMF/acetone (acetone) mixed solvent of 0.85g/0.5g, mechanical agitation prepares polymer latex liquid solution;
The conductive polyaniline of 0.0015g is dispersed in above-mentioned polymer latex liquid solution, and mechanical agitation prepares viscosity conductive fiber film electrostatic spinning liquid, and wherein, in electrostatic spinning liquid, conductive polyaniline content is 0.1wt%;
(3) electrostatic spinning
Step (2) gained electrostatic spinning liquid is joined in injection needle, and syringe needle (stainless steel) connects high-voltage power supply, receiving terminal ground connection.Then at voltage, be 12kV, receiving range is under 10cm condition, with micro pump, with driving velocity 0.1ml/hr, electrostatic spinning liquid is expelled in interdigital electrode and carries out electrostatic spinning 1 minute, obtains viscosity conductive fiber film in interdigital electrode.
(4) configuration zinc oxide suspension
In the PEO that commercial ZnO nano particle 0.125g joins at 0.25g/1g (molecular weight 100,000)/alcohol mixed solvent, zinc oxide particle diameter is 5 μ m, mixes and prepares zinc oxide suspension;
With the method for rotary coating by ZnO suspension with 500rpm, within 30 seconds, be uniformly coated on viscosity conductive fiber film/interdigital electrode/sheet glass, prepare Zinc oxide film.
(5) dry processing
Zinc oxide film/viscosity conductive fiber film/interdigital electrode/sheet glass obtained above is placed on heating plate, with the temperature of 150 ℃, dry 30 minutes, to evaporate ethanolic solution.
Behind above-mentioned steps (1)~(5), prepare ultraviolet light dependent sensor of the present utility model.
With wire, connect interdigital electrode, device is measured with electrochemical workstation (CHI660E, Shanghai occasion China instrument) to the electric current of above-mentioned ultraviolet light dependent sensor--the time changes, and test result as shown in figure 12.
Figure 12 is that conducting polyaniline amine content is the ultraviolet light dependent sensor of 0.1% (the ultraviolet light dependent sensors of embodiment six preparations) and ultraviolet light dependent sensor electric current-time variation diagram under UV-irradiation that conducting polyaniline amine content is 5%, wherein Line 1 is the ultraviolet light dependent sensor of embodiment six preparations, No. 2 lines are that conducting polyaniline amine content is 5% ultraviolet light dependent sensor, Figure 12 can obtain, the response time is short for the ultraviolet light dependent sensor (conducting polyaniline amine content 0.1%) of embodiment six preparations, but electric current is too small.
Embodiment seven
The present embodiment gained ultraviolet light dependent sensor is of a size of 0.5cm * 0.5cm, and Zinc oxide film thickness is 200 μ m.
(1) preparation of interdigital electrode
Take goldleaf as target, deposit interdigital electrode with magnetron sputtering on sheet glass, thickness of electrode is about 2 μ m.
(2) configuration viscosity conductive fiber film electrostatic spinning liquid
The PVDF of 0.15g (molecular weight 1.1M) is dissolved in DMF/acetone (acetone) mixed solvent of 0.85g/0.5g, mechanical agitation prepares polymer latex liquid solution;
The conductive polyaniline of 0.265g is dispersed in above-mentioned polymer latex liquid solution, and mechanical agitation prepares viscosity conductive fiber film electrostatic spinning liquid, and wherein, in electrostatic spinning liquid, conductive polyaniline content is about 15wt%;
(3) electrostatic spinning
Step (2) gained electrostatic spinning liquid is joined in injection needle, and syringe needle (stainless steel) connects high-voltage power supply, receiving terminal ground connection.Then at voltage, be 12kV, receiving range is under 10cm condition, with micro pump, with driving velocity 0.1ml/hr, electrostatic spinning liquid is expelled in interdigital electrode and carries out electrostatic spinning 1 minute, obtains viscosity conductive fiber film in interdigital electrode.
(4) configuration zinc oxide suspension
In the PEO that commercial ZnO nano particle 0.125g joins at 0.25g/1g (molecular weight 100,000)/alcohol mixed solvent, zinc oxide particle diameter is 5 μ m, mixes and prepares zinc oxide suspension;
With the method for rotary coating by ZnO suspension with 500rpm, within 30 seconds, be uniformly coated on viscosity conductive fiber film/interdigital electrode/sheet glass, prepare Zinc oxide film.
(5) dry processing
Zinc oxide film/viscosity conductive fiber film/interdigital electrode/sheet glass obtained above is placed on heating plate, with the temperature of 150 ℃, dry 30 minutes, to evaporate ethanolic solution.
Behind above-mentioned steps (1)~(5), prepare ultraviolet light dependent sensor of the present utility model.
With wire, connect interdigital electrode, device is measured with electrochemical workstation (CHI660E, Shanghai occasion China instrument) to the electric current of above-mentioned ultraviolet light dependent sensor--the time changes, and test result as shown in figure 13.
Figure 13 is that conducting polyaniline amine content is the ultraviolet light dependent sensor of 15% (the ultraviolet light dependent sensors of embodiment seven preparations) and ultraviolet light dependent sensor electric current-time variation diagram under UV-irradiation that conducting polyaniline amine content is 5%, wherein No. 2 lines are ultraviolet light dependent sensor prepared by embodiment seven, Line 1 is that conducting polyaniline amine content is 5% ultraviolet light dependent sensor, Figure 13 can obtain, ultraviolet light dependent sensor (the conducting polyaniline amine content 15%) current ratio of embodiment seven preparations is larger, but the response time increases.
From Figure 12 and Figure 13, along with the increase of electric conducting material content, ultraviolet light dependent sensor output current increases, but the also corresponding prolongation of its response time, and meanwhile, if electric conducting material is very few, sensor current is too small, is unfavorable for monitoring.
Ultraviolet light dependent sensor prepared by the utility model, by viscous fiber conductive layer being set in interdigital electrode one side, further to apply Zinc oxide film, thereby the preparation technology of the ultraviolet light dependent sensor of simplifying, be beneficial to suitability for industrialized production, simultaneously, by adjusting the content of electric conducting material in viscous fiber film, make zinc oxide UV dependent sensor there is less response turnaround time, there is larger electric current output simultaneously, increase the sensitivity of ultraviolet light dependent sensor, increased the ratio of light/dark current.

Claims (10)

1. the ultraviolet light dependent sensor based on zinc oxide, is characterized in that, comprises the substrate, interdigital electrode, viscosity conductive fiber film, the Zinc oxide film that are cascading;
Wherein, the two arrays of electrodes not conducting mutually of described interdigital electrode, as the signal output part of described ultraviolet light dependent sensor;
Described viscosity conductive fiber film is arranged on a side surface of described interdigital electrode, for adhering to described Zinc oxide film;
Described Zinc oxide film is arranged on described viscosity conductive fiber film one side surface, for sensing ultraviolet light.
2. the ultraviolet light dependent sensor based on zinc oxide according to claim 1, is characterized in that, described Zinc oxide film consists of Zinc oxide nanoparticle and/or doped zinc oxide nano particle and/or heterostructure Zinc oxide nanoparticle.
3. the ultraviolet light dependent sensor based on zinc oxide according to claim 2, is characterized in that, described doped zinc oxide nano particle consists of the silver oxide that adulterates in Zinc oxide nanoparticle, aluminium oxide, cerium oxide, cupric oxide.
4. the ultraviolet light dependent sensor based on zinc oxide according to claim 1, is characterized in that, in described Zinc oxide film, Zinc oxide nanoparticle particle diameter is 10nm-50 μ m.
5. the ultraviolet light dependent sensor based on zinc oxide according to claim 1, is characterized in that, the thickness of described Zinc oxide film is 10nm-700 μ m.
6. the ultraviolet light dependent sensor based on zinc oxide according to claim 1, is characterized in that, described interdigital electrode is formed by deposition or coating electrode material on substrate.
7. the ultraviolet light dependent sensor based on zinc oxide according to claim 1, is characterized in that, described viscosity conductive fiber film consists of the polymer fiber doped with electric conducting material.
8. the ultraviolet light dependent sensor based on zinc oxide according to claim 7, is characterized in that, described polymer is any in Kynoar, polymethyl methacrylate, nylon; Described electric conducting material is any in polyaniline, conductive carbon powder, carbon nano-tube, Graphene.
9. the ultraviolet light dependent sensor based on zinc oxide according to claim 1, it is characterized in that, the material of described substrate is any in glass, silicon, acrylic, PETG, polyimides, polyvinyl chloride, polypropylene, polyethylene.
10. according to the ultraviolet light dependent sensor based on zinc oxide described in claim 1-9 any one, it is characterized in that, comprise transparent encapsulating structure, described transparent encapsulating structure is wrapped in the skin of described ultraviolet light dependent sensor.
CN201420350976.7U 2014-06-27 2014-06-27 Ultraviolet photosensitive sensor based on zinc oxide Expired - Lifetime CN203910827U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104502421A (en) * 2014-12-16 2015-04-08 电子科技大学 Room-temperature P-N-P heterostructure hydrogen sensor and preparation method thereof
CN104779314B (en) * 2014-06-27 2017-02-08 纳米新能源(唐山)有限责任公司 Ultraviolet photosensitive sensor based on zinc oxide and preparation method of ultraviolet photosensitive sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104779314B (en) * 2014-06-27 2017-02-08 纳米新能源(唐山)有限责任公司 Ultraviolet photosensitive sensor based on zinc oxide and preparation method of ultraviolet photosensitive sensor
CN104502421A (en) * 2014-12-16 2015-04-08 电子科技大学 Room-temperature P-N-P heterostructure hydrogen sensor and preparation method thereof

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