CN203906328U - Pull-type molecular pump with rotor surface temperature capable of being measured - Google Patents
Pull-type molecular pump with rotor surface temperature capable of being measured Download PDFInfo
- Publication number
- CN203906328U CN203906328U CN201420295813.3U CN201420295813U CN203906328U CN 203906328 U CN203906328 U CN 203906328U CN 201420295813 U CN201420295813 U CN 201420295813U CN 203906328 U CN203906328 U CN 203906328U
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- molecular pump
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- temperature measuring
- groove
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Abstract
The utility model discloses a pull-type molecular pump with the rotor surface temperature capable of being measured. The pull-type molecular pump comprises a shell. A rotor is arranged in the shell. A first level molecular pump body is arranged in the shell and is in interference fitting with a third level molecular pump body. The third level molecular pump body is connected with an end face flange. A second level molecular pump body is installed in an assembling groove of the third level molecular pump body. A temperature measuring wire of an infrared probe sequentially passes through a wire duct of the third level molecular pump body and a wire duct of the end face flange and is connected with an end face temperature measuring device. The measurement end of a radial temperature measuring device penetrates through the outer wall, close to the first level molecular pump body, of the shell. According to the pull-type molecular pump, by means of a detachable structure of the second level molecular pump body and a detachable structure of the third level molecular pump body, the end face temperature measuring device can be adjusted and installed under the circumstance of ensuring normal operation of the molecular pump, and the radial temperature measuring device has the axial selection space of the large range; when the temperature is measured, the rotor can be in a static state or in a rotating state, and therefore operation is convenient.
Description
Technical field
The utility model belongs to a kind of towed molecular pump, is specifically related to a kind of towed molecular pump of surveying rotor surface temperature.
Background technique
Molecular drag pump is to rely on the rotor of gas molecule and high-speed motion collide and obtain momentum, thereby gas molecule is driven and delivers to delivery side of pump.The situation of change of towed molecular pump rotor surface temperature can reflect real-time working state and the relevant performance of this device intuitively, and therefore the real-time monitoring of temperature tool in the development process of this device is of great significance.When rotor is when with high rotating speed, especially ultrahigh rotating speed rotates, can there is deformation in rotor self, but the temperature real-time measurement of rotor surface is very difficult, and the structure of molecular pump self also comparatively compactness cannot arbitrarily install temperature measuring equipment additional, therefore, how the temperature on Real-Time Monitoring molecular pump rotor surface is a difficult problem in this field.
Summary of the invention
The utility model is that the temperature that solves towed molecular pump rotor surface cannot this problem of Real-Time Monitoring propose, and its objective is a kind of towed molecular pump of surveying rotor surface temperature is provided.
The technical solution of the utility model is: a kind of towed molecular pump of surveying rotor surface temperature, comprise cylindrical housing, portion is provided with cylindrical rotor in the enclosure, in described enclosure, rotor periphery, and be provided with first order molecular pump with rotor coaxial, the third level molecular pump being connected with the interference of first order molecular pump, third level molecular pump is connected with end face flange, second level molecular pump is fixed in the fitting recess of third level molecular pump, first order molecular pump is cylindrical shape, form spiral air-conducting groove at circular inner wall, second level molecular pump is disc, form multiple second level cell wall B sections that are uniformly distributed along the circumference and the second level groove B section of bleeding in its lower end surface, and distribute alternately, third level molecular pump is thick walled cylinder shape, the fitting recess that forms ring in its underpart, form therebetween central through bore, the inwall of central through bore forms spiral air-conducting groove, forms multiple second level being uniformly distributed along the circumference bleed groove A section and second level cell wall A section distribute alternately in its lower end surface, infrared probe is arranged in third level infrared probe hole, its temperature measuring wire is connected with the end face temperature measuring equipment being fixed in end face flange by third level molecular pump wire casing, end face flange wire casing successively, end face temperature measuring equipment is fixed in temperature measuring equipment mounting hole, and radially the measuring end of temperature measuring equipment is through the outer wall of shell, close first order molecular pump.
Described second level groove A section and the second level groove B section of bleeding of bleeding is continuous radial camber line, and aligned with each other, and second level cell wall A section and second level cell wall B section are continuous radial camber line, and aligned with each other.
Described spiral air-conducting slot cross-section is " U " type and is dextrorotation state, and the described second level the bleed grooved of groove B section of groove A section, the second level of bleeding is the rectangle, and aligned with each other of Trapezoidal.
The dismantled and assembled structure of the second level of the present utility model molecular pump and third level molecular pump, can ensure the in the situation that of the normal operation of molecular pump, debugging and installation end face temperature measuring equipment, and radially temperature measuring equipment has the large-scale space of axially selecting.When thermometric, rotor both can remain static, also can be in rotary state, easy to operate.
Brief description of the drawings
Fig. 1 is plan view of the present utility model;
Fig. 2 is plan view of the present utility model;
Fig. 3 is end face flange of the present utility model and molecular pumps at different levels mounting point schematic diagram;
Fig. 4 is that A when rotor, second level molecular pump and shell are not installed in Fig. 1 is to view;
Fig. 5 be while rotor not being installed in Fig. 1 along B-B line view;
Fig. 6 is the plan view of third level molecular pump of the present utility model;
Fig. 7 is third level molecular pump worm's eye view of the present utility model;
Fig. 8 is third level molecular pump plan view of the present utility model;
Fig. 9 is the worm's eye view of the second level of the present utility model molecular pump;
Figure 10 is the plan view of the second level of the present utility model molecular pump;
Figure 11 is along C-C line view in Fig. 3,6;
Figure 12 is along D-D line view in Fig. 7,9.
Wherein:
1 first order molecular pump 2 third level molecular pumps
3 end face flange 4 end face temperature measuring equipments
5 temperature measuring equipment 6 locating flanges radially
7 second level molecular pump 8 rotors
9 shell 10 end face flange screws
11 locating flange screw 12 second level molecular pump screws
13 second molecular pump tapped hole 14 locating flange tapped holes
15 third level infrared probe hole 16 third level molecular pump fixed holes
17 cell wall A section 18 second level, the second level groove A section of bleeding
19 third level molecular pump wire casing 20 second level molecular pump fixed holes
21 cell wall B section 22 second level, the second level groove B section of bleeding
23 infrared probe hole, the second level 24 second level molecular pump base for supporting
25 end face flange wire casing 26 end face flange tapped holes
27 temperature measuring equipment mounting hole 28 fitting recess
29 infrared probe 30 spiral air-conducting grooves
Annular flange flange on 31 center holes 32
33 times annular flange flange 34 temperature measuring wires.
Embodiment
Below, with reference to drawings and Examples, the utility model is elaborated:
As shown in Fig. 1 ~ 12, a kind of towed molecular pump of surveying rotor surface temperature, comprise cylindrical housing 9, be provided with cylindrical rotor 8 in shell 9 inside, in shell 9 inside, rotor 8 peripheries and be coaxially arranged with first order molecular pump 1 with rotor 8, the third level molecular pump 2 being connected with 1 interference of first order molecular pump, third level molecular pump 2 is connected with end face flange 3 by end face flange screw 10, and second level molecular pump 7 is fixed in the fitting recess 28 of third level molecular pump 2 by second level molecular pump screw 12.
First order molecular pump 1 is cylindrical shape, forms spiral air-conducting groove 30 at circular inner wall, and spiral air-conducting groove 30 cross sections are " U " type and are dextrorotation state.Second level molecular pump 3 is disc, form infrared probe hole, the second level 23 in one side, form bleed groove B section 22 distributing alternately of multiple second level cell wall B sections 21 that are uniformly distributed along the circumference and the second level in its lower end surface, be circumferentially formed three uniform second level molecular pumps in its lower end surface and support 24.Third level molecular pump 2 is thick walled cylinder shape, form third level infrared probe hole 15 in one side, form the fitting recess 28 of ring in the bottom of third level molecular pump 2, in the middle of third level molecular pump 2, form central through bore 31, the inwall of central through bore 31 forms spiral air-conducting groove 30, spiral air-conducting groove 30 cross sections are " U " type, form annular flange flange 32 in the upper-end surface of third level molecular pump 2, lower annular flange flange 33 is formed at its outer wall bottom, its lower end surface forms bleed groove A section 18 and second level cell wall A section 17 of multiple second level being uniformly distributed along the circumference and distributes alternately, the second level the bleed grooved of groove B section 22 of groove A section 18 and the second level of bleeding is the rectangle of Trapezoidal.
The second level groove A section 18 of bleeding, bleed groove B section 22 and second level cell wall A section 17, second level cell wall B section 21 of the second level is continuous radial camber line, and aligned with each other, and the second level of the present utility model groove A section 18, the second level groove B section 22 of bleeding of bleeding is eight.
Described second level molecular pump fixed hole 20 is circumferentially evenly equipped with 3, is counter sink along second level molecular pump 3.
End face flange screw 10 passes third level molecular pump fixed hole 16, is screwed in the end face flange tapped hole 26 of end face flange 3, third level molecular pump portion 2 is fixed on to the lower end of end face flange 3.
Second level molecular pump screw 12 passes second level molecular pump fixed hole 20, is screwed in the second molecular pump tapped hole 13, second level molecular pump 7 is fixed in the fitting recess 28 of third level molecular pump 2.
Infrared probe 29 is inserted in the shoulder hole of locating flange 6, locating flange screw 11 is screwed in locating flange tapped hole 14 by positioning flange hole, infrared probe 29 is arranged in third level infrared probe hole 15, also through infrared probe hole, the second level 23, temperature measuring wire 34 is connected with the end face temperature measuring equipment 4 being fixed in end face flange 3 by third level molecular pump wire casing 19, end face flange wire casing 25 successively, and end face temperature measuring equipment 4 is fixed in temperature measuring equipment mounting hole 27.
Radially the measuring end of temperature measuring equipment 5 is through the outer wall of shell 9, close first order molecular pump 1.
Described end face temperature measuring equipment 4 and radially temperature measuring equipment 5 are same structure temperature measuring set.
The dismantled and assembled structure of the second level of the present utility model molecular pump and third level molecular pump, can ensure the in the situation that of the normal operation of molecular pump, debugging and installation end face temperature measuring equipment, and radially temperature measuring equipment has the large-scale space of axially selecting.When thermometric, rotor both can remain static, also can be in rotary state, easy to operate.
Claims (3)
1. can survey the towed molecular pump of rotor surface temperature for one kind, comprise cylindrical housing (9), be provided with cylindrical rotor (8) in shell (9) inside, it is characterized in that: in described shell (9) inside, rotor (8) periphery, and be coaxially arranged with first order molecular pump (1) with rotor (8), the third level molecular pump (2) being connected with first order molecular pump (1) interference, third level molecular pump (2) is connected with end face flange (3), second level molecular pump (7) is fixed in the fitting recess (28) of third level molecular pump (2), first order molecular pump (1) is cylindrical shape, form spiral air-conducting groove (30) at circular inner wall, second level molecular pump (7) is disc, form multiple second level cell wall B sections (21) that are uniformly distributed along the circumference and the second level groove B section (22) of bleeding in its lower end surface, and distribute alternately, third level molecular pump (2) is thick walled cylinder shape, the fitting recess (28) that forms ring in its underpart, form therebetween central through bore (31), the inwall of central through bore (31) forms spiral air-conducting groove (30), forms multiple second level being uniformly distributed along the circumference bleed groove A section (18) and second level cell wall A section (17) distribute alternately in its lower end surface, infrared probe (29) is arranged in third level infrared probe hole (15), its temperature measuring wire is connected by third level molecular pump wire casing (19), end face flange wire casing (25) and the end face temperature measuring equipment (4) that is fixed in end face flange (3) successively, end face temperature measuring equipment (4) is fixed in temperature measuring equipment mounting hole (27), and radially the measuring end of temperature measuring equipment (5) is through the outer wall of shell (9), close first order molecular pump (1).
2. a kind of towed molecular pump of surveying rotor surface temperature according to claim 1, it is characterized in that: described second level groove A section (18) and the second level groove B section (22) of bleeding of bleeding is continuous radial camber line, and aligned with each other, second level cell wall A section (17) and second level cell wall B section (21) are continuous radial camber line, also aligned with each other.
3. a kind of towed molecular pump of surveying rotor surface temperature according to claim 1, it is characterized in that: described spiral air-conducting groove (30) cross section is " U " type and is dextrorotation state, the described second level the bleed grooved of groove B section (22) of groove A section (18), the second level of bleeding is the rectangle, and aligned with each other of Trapezoidal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420295813.3U CN203906328U (en) | 2014-06-05 | 2014-06-05 | Pull-type molecular pump with rotor surface temperature capable of being measured |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420295813.3U CN203906328U (en) | 2014-06-05 | 2014-06-05 | Pull-type molecular pump with rotor surface temperature capable of being measured |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203906328U true CN203906328U (en) | 2014-10-29 |
Family
ID=51780611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420295813.3U Withdrawn - After Issue CN203906328U (en) | 2014-06-05 | 2014-06-05 | Pull-type molecular pump with rotor surface temperature capable of being measured |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203906328U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104612984A (en) * | 2015-01-26 | 2015-05-13 | 核工业理化工程研究院 | Rotor end surface temperature measuring device for traction type molecular pumps |
-
2014
- 2014-06-05 CN CN201420295813.3U patent/CN203906328U/en not_active Withdrawn - After Issue
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104612984A (en) * | 2015-01-26 | 2015-05-13 | 核工业理化工程研究院 | Rotor end surface temperature measuring device for traction type molecular pumps |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20141029 Effective date of abandoning: 20160120 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |