CN203893506U - Adsorption equipment - Google Patents
Adsorption equipment Download PDFInfo
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- CN203893506U CN203893506U CN201420343292.4U CN201420343292U CN203893506U CN 203893506 U CN203893506 U CN 203893506U CN 201420343292 U CN201420343292 U CN 201420343292U CN 203893506 U CN203893506 U CN 203893506U
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- groove
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- adsorbs
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A30/00—Adapting or protecting infrastructure or their operation
- Y02A30/27—Relating to heating, ventilation or air conditioning [HVAC] technologies
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/62—Absorption based systems
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- Separation Of Gases By Adsorption (AREA)
Abstract
The utility model relates to adsorption equipment. The adsorption equipment comprises a device platform. The upper surface of the device platform is divided into one or more adsorption regions. Each adsorption region is provided with adsorption grooves in a concave mode. The groove bottom of each adsorption groove is provided with one or more vacuum positions. A vacuum pumping unit is communicated with all the vacuum positions. Each adsorption region comprises p parallel adsorption grooves. The adsorption equipment has the advantages that when a substrate needs to be fixed, the substrate is placed on the device platform and makes contact with the upper surface of the device platform; the vacuum pumping unit vacuumizes the space between the adsorption grooves and the substrate through the vacuum positions, so that the substrate is adsorbed and fixed to the device platform. Compared with the prior art that the substrate is adsorbed and fixed only through the vacuum positions, the adsorption equipment has the advantages that the simple adsorption groove structure is adopted, and the adsorption area is increased, so that the effect of adsorbing and fixing the substrate is improved, and the adsorption grooves are easy to process.
Description
Technical field
The utility model relates to a kind of adsorption plant.
Background technology
The structure of the adsorption plant using in the cooling-water machine on existing market at present, mainly consists of a coil pipe, fin 5, the string bag and absorbent particles; Wherein fin is aluminium flake; Coil pipe is through fin, and and fin be connected, parallel placement between fin and fin, fin below arranges the string bag; Absorbent particles is filled in the gap between fin.During work, when adsorption plant is in adsorption process, refrigerant vapour enters in the adsorbent chamber of cooling-water machine, in a coil pipe of adsorbent bed, pass into cooling water simultaneously, the temperature of propping up coil pipe declines, and through conduction, the temperature on the fin being connected with a coil pipe also declines, now, the absorbent particles adsorption refrigerating agent steam on fin; Be positioned at the outer field absorbent particles of adsorption plant and first carry out the absorption of refrigerant vapour, after outer absorbent particles adsorption refrigerating agent steam, expand and become large, gap smaller between absorbent particles and particle, refrigerant vapour cannot enter adsorption plant inside fast, adsorption plant center particularly, thereby the absorbent particles that causes adsorption plant inside cannot be brought into play suction-operated and absorb refrigerant vapour, waste the energy of adsorption plant inside, can not bring into play to greatest extent the adsorption capacity of adsorbent simultaneously.
When adsorption plant is in desorption process, prop up in coil pipe and pass into hot water, propping up coil temperature rises, through conduction, temperature on the fin being connected with a coil pipe also rises, absorbent particles on fin is heated, the cold-producing medium being adsorbed on absorbent particles is separated sucking-off from absorbent particles, due to the absorbent particles volumetric expansion after adsorption refrigerating agent, the refrigerant vapour that sucking-off is separated from absorbent particles in adsorption plant inside cannot leave adsorption plant fast, must wait the outer field absorbent particles of adsorption plant by after the sucking-off of cold-producing medium solution and absorbent particles volume-diminished, the refrigerant vapour of adsorption plant inside just can leave adsorption plant, cause whole desorption process speed slow, inefficiency.
Utility model content
The technical problems to be solved in the utility model is, overcomes deficiency of the prior art, and a kind of adsorption plant is provided.
For technical solution problem, solution of the present utility model is:
Provide a kind of adsorption plant to comprise apparatus platform, the upper surface of described apparatus platform is divided one or more binding domains; Described in each, binding domain is concaved with adsorption tank, and described in each, the bottom land of adsorption tank is provided with one or more vacuum place; Vacuum unit, described vacuum unit is connected with described each vacuum place; Described in each, binding domain comprises p the adsorption tank being parallel to each other; Wherein, p is greater than 1 natural number; It is characterized in that, described adsorption tank comprises and in level, adsorbs groove and vertical upper absorption groove; Described in each, binding domain comprises in the level that m is parallel to each other and adsorbs groove and n the vertical upper absorption groove being parallel to each other, and adsorbs groove and vertically above adsorb that groove intersects and infall is connected in level, and infall is that m * n is individual; Wherein, m and n are greater than 1 natural number.
In the utility model, in described level, adsorb between groove equidistantly and distribute, between described vertical upper absorption groove, equidistantly distribute, and the infall at edge is positioned at and in described level, adsorbs groove and described vertical upper end of adsorbing groove.
In the utility model, described in each, vacuum place is arranged on the bottom land of infall.
In the utility model, described a plurality of vacuum place is uniformly distributed.
In the utility model, the figure that described a plurality of vacuum place encloses formation is centrosymmetric image and is zhou duicheng tuxing.
In the utility model, described in each, the bottom land of infall is provided with a vacuum place.
In the utility model, the upper surface of described apparatus platform is divided to be had 1 binding domain, described binding domain to comprise in 6 levels that are parallel to each other, to adsorb the vertical upper groove that adsorbs that groove is parallel to each other with 6; Described the 1st, the 3rd, in the 4th and the 6th level, adsorb groove and the 1st, the 3rd, the bottom land of the infall of the 4th upper absorption groove vertical with the 6th is provided with vacuum place; Described the 2nd with in the 5th level, adsorb groove and be provided with vacuum place with the bottom land of the infall of described the 2nd upper absorption groove vertical with the 5th.
In the utility model, the upper surface of described apparatus platform is divided four binding domains, and described four binding domains are pressed array two row * two column distributions; Described in each, binding domain comprises and in 3 levels that are parallel to each other, adsorbs the vertical upper absorption groove that groove is parallel to each other with 3; The bottom land that adsorbs the infall of groove upper absorption groove vertical with the 1st in described the 1st level of the binding domain of the first row first row and the second row secondary series is provided with vacuum place, the bottom land that adsorbs the infall of groove upper absorption groove vertical with the 2nd in described the 2nd level is provided with vacuum place, and the bottom land that adsorbs the infall of groove upper absorption groove vertical with the 3rd in described the 3rd level is provided with vacuum place; The bottom land that adsorbs the infall of groove upper absorption groove vertical with the 3rd in described the 1st level of the binding domain of the first row secondary series and the second row first row is provided with vacuum place, the bottom land that adsorbs the infall of groove upper absorption groove vertical with the 2nd in described the 2nd level is provided with vacuum place, and the bottom land that adsorbs the infall of groove upper absorption groove vertical with the 1st in described the 3rd level is provided with vacuum place.
In the utility model, also comprise vacuum monitoring means, described vacuum monitoring means is corresponding one by one with binding domain, and the adsorption tank of each vacuum monitoring means and corresponding with it binding domain is connected.
Compared with prior art, the beneficial effects of the utility model are:
In needs fixing base, substrate is placed on apparatus platform, substrate contacts with the upper surface of apparatus platform; Start vacuum unit, vacuum unit by each vacuum place to vacuumizing between each adsorption tank and substrate, thereby substrate adsorption is fixed on apparatus platform.Carry out adsorbed stationary phase ratio with the existing vacuum place that only relies on, adsorption plant of the present utility model adopts this simple structure of adsorption tank, increases adsorption area, thereby has improved the effect of absorption fixing base, and meanwhile, the processing of adsorption tank is fairly simple.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of an embodiment of adsorbent equipment of the present utility model;
Fig. 2 is the schematic diagram of another embodiment of adsorbent equipment of the present utility model.
Reference numeral is: 100, apparatus platform, adsorbs groove in 111 levels, 112, vertical upper absorption groove, 113, cross-point, 200, vacuum place.
The specific embodiment
Following embodiment can make the technical staff of this professional skill field more fully understand the utility model, but limits never in any form the utility model.
The specific embodiment that the utility model provides a kind of adsorption plant to comprise apparatus platform 100, the upper surface of described apparatus platform 100 is divided one or more binding domains; Described in each, binding domain is concaved with adsorption tank, and described in each, the bottom land of adsorption tank is provided with one or more vacuum place 200; Vacuum unit, described vacuum unit is connected with described each vacuum place 200; Described in each, binding domain comprises p the adsorption tank being parallel to each other; Wherein, p is greater than 1 natural number; It is characterized in that, described adsorption tank comprises and in level, adsorbs groove 111 and vertical upper absorption groove 112; Described in each, binding domain comprises in the level that m is parallel to each other and adsorbs groove 111 and n the vertical upper absorption groove 112 being parallel to each other, and adsorbs groove 111 and vertically above adsorb that groove 112 intersects and infall is connected in level, and infall is that m * n is individual; Wherein, m and n are greater than 1 natural number.
In described level, adsorb between groove 111 equidistantly and distribute, between described vertical upper absorption groove 112, equidistantly distribute, and the infall at edge is positioned at and in described level, adsorbs groove 111 and described vertical upper end of adsorbing groove 112.
Described in each, vacuum place 200 is arranged on the bottom land of infall, and described a plurality of vacuum place 200 is uniformly distributed.
The figure that described a plurality of vacuum place 200 encloses formation is centrosymmetric image and is zhou duicheng tuxing, and described in each, the bottom land of infall is provided with a vacuum place 200.
The upper surface of described apparatus platform 100 is divided to be had 1 binding domain, described binding domain to comprise in 6 levels that are parallel to each other, to adsorb the vertical upper groove 112 that adsorbs that groove 111 is parallel to each other with 6; Described the 1st, the 3rd, in the 4th and the 6th level, adsorb groove 111 and the 1st, the 3rd, the bottom land of the infall of the 4th upper absorption groove 112 vertical with the 6th is provided with vacuum place 200; Described the 2nd with in the 5th level, adsorb groove 111 and be provided with vacuum place 200 with the bottom land of the infall of described the 2nd upper absorption groove 112 vertical with the 5th.
The upper surface of described apparatus platform 100 is divided four binding domains, and described four binding domains are pressed array two row * two column distributions; Described in each, binding domain comprises and in 3 levels that are parallel to each other, adsorbs the vertical upper absorption groove 112 that groove 111 is parallel to each other with 3; The bottom land that adsorbs the infall of groove 111 upper absorption groove 112 vertical with the 1st in described the 1st level of the binding domain of the first row first row and the second row secondary series is provided with vacuum place 200, the bottom land that adsorbs the infall of groove 111 upper absorption groove 112 vertical with the 2nd in described the 2nd level is provided with vacuum place 200, and the bottom land that adsorbs the infall of groove 111 upper absorption groove 112 vertical with the 3rd in described the 3rd level is provided with vacuum place 200; The bottom land that adsorbs the infall of groove 111 upper absorption groove 112 vertical with the 3rd in described the 1st level of the binding domain of the first row secondary series and the second row first row is provided with vacuum place 200, the bottom land that adsorbs the infall of groove 111 upper absorption groove 112 vertical with the 2nd in described the 2nd level is provided with vacuum place 200, and the bottom land that adsorbs the infall of groove 111 upper absorption groove 112 vertical with the 1st in described the 3rd level is provided with vacuum place 200; Also comprise vacuum monitoring means, described vacuum monitoring means is corresponding one by one with binding domain, and the adsorption tank of each vacuum monitoring means and corresponding with it binding domain is connected.
Like this, the adsorbent equipment of the present embodiment, can not only adsorb fixing base, and can detect substrate and whether have slight crack; Can find in time crackled substrate like this, avoid the device of the debris contamination damage substrate processing of crackled substrate crushing generation.Therefore, actual range of the present utility model not only comprises the disclosed embodiments, is also included under claims and implements or to carry out all equivalents of the present utility model.
Claims (9)
1. an adsorption plant, comprises apparatus platform, and the upper surface of described apparatus platform is divided one or more binding domains; Described in each, binding domain is concaved with adsorption tank, and described in each, the bottom land of adsorption tank is provided with one or more vacuum place; Vacuum unit, described vacuum unit is connected with described each vacuum place; Described in each, binding domain comprises p the adsorption tank being parallel to each other; Wherein, p is greater than 1 natural number; It is characterized in that, described adsorption tank comprises and in level, adsorbs groove and vertical upper absorption groove; Described in each, binding domain comprises in the level that m is parallel to each other and adsorbs groove and n the vertical upper absorption groove being parallel to each other, and adsorbs groove and vertically above adsorb that groove intersects and cross-point is connected in level, and cross-point is that m * n is individual; Wherein, m and n are greater than 1 natural number.
2. adsorption plant according to claim 1, it is characterized in that, in described level, adsorb between groove equidistantly and distribute, between described vertical upper absorption groove, equidistantly distribute, and the cross-point at edge is positioned at and in described level, adsorbs groove and described vertical upper end of adsorbing groove.
3. adsorption plant according to claim 2, is characterized in that, described in each, vacuum place is arranged on the bottom land of cross-point.
4. adsorption plant according to claim 3, is characterized in that, described a plurality of vacuum place is uniformly distributed.
5. adsorption plant according to claim 4, is characterized in that, the figure that described a plurality of vacuum place encloses formation is centrosymmetric image and is zhou duicheng tuxing.
6. adsorption plant according to claim 5, is characterized in that, described in each, the bottom land of cross-point is provided with a vacuum place.
7. adsorption plant according to claim 6, is characterized in that, the upper surface of described apparatus platform is divided to be had 1 binding domain, described binding domain to comprise in 6 levels that are parallel to each other, to adsorb the vertical upper groove that adsorbs that groove is parallel to each other with 6; Described the 1st, the 3rd, in the 4th and the 6th level, adsorb groove and the 1st, the 3rd, the bottom land of the cross-point of the 4th upper absorption groove vertical with the 6th is provided with vacuum place; Described the 2nd with in the 5th level, adsorb groove and be provided with vacuum place with the bottom land of the cross-point of described the 2nd upper absorption groove vertical with the 5th.
8. adsorption plant according to claim 7, is characterized in that, the upper surface of described apparatus platform is divided four binding domains, and described four binding domains are pressed array two row * two column distributions; Described in each, binding domain comprises and in 3 levels that are parallel to each other, adsorbs the vertical upper absorption groove that groove is parallel to each other with 3; The bottom land that adsorbs the cross-point of groove upper absorption groove vertical with the 1st in described the 1st level of the binding domain of the first row first row and the second row secondary series is provided with vacuum place, the bottom land that adsorbs the cross-point of groove upper absorption groove vertical with the 2nd in described the 2nd level is provided with vacuum place, and the bottom land that adsorbs the cross-point of groove upper absorption groove vertical with the 3rd in described the 3rd level is provided with vacuum place; The bottom land that adsorbs the cross-point of groove upper absorption groove vertical with the 3rd in described the 1st level of the binding domain of the first row secondary series and the second row first row is provided with vacuum place, the bottom land that adsorbs the cross-point of groove upper absorption groove vertical with the 2nd in described the 2nd level is provided with vacuum place, and the bottom land that adsorbs the cross-point of groove upper absorption groove vertical with the 1st in described the 3rd level is provided with vacuum place.
9. the adsorption plant described according to Claim 8, is characterized in that, also comprise vacuum monitoring means, described vacuum monitoring means is corresponding one by one with binding domain, and the adsorption tank of each vacuum monitoring means and corresponding with it binding domain is connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420343292.4U CN203893506U (en) | 2014-06-20 | 2014-06-20 | Adsorption equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420343292.4U CN203893506U (en) | 2014-06-20 | 2014-06-20 | Adsorption equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203893506U true CN203893506U (en) | 2014-10-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420343292.4U Expired - Fee Related CN203893506U (en) | 2014-06-20 | 2014-06-20 | Adsorption equipment |
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| Country | Link |
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| CN (1) | CN203893506U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104669221A (en) * | 2015-03-17 | 2015-06-03 | 合肥京东方光电科技有限公司 | Insulation machine, equipment and method for eliminating static electricity |
-
2014
- 2014-06-20 CN CN201420343292.4U patent/CN203893506U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104669221A (en) * | 2015-03-17 | 2015-06-03 | 合肥京东方光电科技有限公司 | Insulation machine, equipment and method for eliminating static electricity |
| US9661726B2 (en) | 2015-03-17 | 2017-05-23 | Boe Technology Group Co., Ltd. | Insulation machine platform, substrate-contact type apparatus, and static electricity elimination method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141022 Termination date: 20170620 |
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| CF01 | Termination of patent right due to non-payment of annual fee |