CN203892709U - Vacuum valve and vacuum pumping equipment - Google Patents
Vacuum valve and vacuum pumping equipment Download PDFInfo
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- CN203892709U CN203892709U CN201420136096.XU CN201420136096U CN203892709U CN 203892709 U CN203892709 U CN 203892709U CN 201420136096 U CN201420136096 U CN 201420136096U CN 203892709 U CN203892709 U CN 203892709U
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- 238000005086 pumping Methods 0.000 title claims abstract description 31
- 238000007789 sealing Methods 0.000 abstract description 20
- 230000000694 effects Effects 0.000 description 19
- 230000033001 locomotion Effects 0.000 description 14
- 238000010586 diagram Methods 0.000 description 11
- 230000032683 aging Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229920001973 fluoroelastomer Polymers 0.000 description 4
- 230000007774 longterm Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
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- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
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- 238000000034 method Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000001684 chronic effect Effects 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
The utility model provides a vacuum valve and vacuum pumping equipment. The vacuum valve comprises a cavity, a cylinder, a valve seat, a shaft body, a spring and a first sealing ring, wherein the cavity comprises a first interface and a second interface; the cylinder is arranged opposite to the cavity; the valve seat is connected with the cavity and the cylinder, is arranged opposite to the first interface, and comprises a through hole; the shaft body comprises a connecting rod as well as a sealing disk and a piston positioned at the two ends of the connecting rod respectively; the connecting rod passes through the through hole; the sealing disk and the piston are positioned in the cavity and the cylinder respectively; the two ends of the spring are connected with the sealing disk and the valve seat respectively; the connecting rod passes through the spring; the first sealing ring is arranged in the through hole; the connecting rod passes through the first sealing ring. The vacuum valve provided by the utility model has long service life, and the cost is reduced.
Description
Technical field
The utility model relates to a kind of valve, in particular, relates in particular to a kind of vacuum valve and comprises the vaccum-pumping equipment of this vacuum valve.
Background technique
Vacuum valve refers to the valve of working pressure lower than standard atmospheric pressure.All to improve and develop by common valve, when difference is its work, pressure is less than barometric pressure, better than the tightness of common valve, be applicable on vacuum pipe that medium is water and steam, in thermal power plant's steam turbine condensation and negative pressure of vacuum system, use the most extensively, the main start-stop device that act as, plays the effect of vacuum insulation sealing, there is opening speed fast, advantage applied widely.
At present, the vacuum valve on market adopts the form that bellows runs through cavity to reach sealing effect mostly, and as shown in Figure 1, Fig. 1 is the sectional structure schematic diagram of vacuum valve in prior art.As shown in the figure, vacuum valve is made up of cavity 11 and cylinder 12, and common described cavity 11 surfaces are provided with first interface 1101 and the second interface 1102, also comprise vent 1201 and air outlet hole 1202 in described cylinder 12.Control the isolated and circulation of gas in cavity 11 inside by bellows 19, be also provided with a spring 15 in bellows 19 inside.When vacuum valve is in the time working, air is inflated to cylinder 12 by described vent 1201, axis body 14 drives spring 15 to move to cylinder 12 directions together with bellows 19, now seal disc 1402 separates with first interface 1101, air in chamber (not shown) is inhaled into cavity 11 and then is drawn out of by first interface 1101 from the second interface 1102, described spring 15 drives described axis body 14 to move to the direction of first interface 1101 together with described bellows 19 subsequently, once vacuumizes and has moved.Vacuum valve is realized vacuumizing of chamber (not shown) by the to-and-fro motion of described axis body 14 thus, but the to-and-fro motion of axis body 14 easily causes the gas in cylinder 12 to overflow, enter cavity 11 and chamber (not shown), therefore arrange in the periphery of spring 15 can with the bellows 19 of axis body 14 and spring 15 associated movements, with spring 15 and a confined space of axis body 14 common formation, be used for preventing that the gas effusion in cylinder 12 from entering cavity 11 and then entering chamber (not shown), affect the vacuumizing effect of vacuum valve.But the vacuum valve after long-term use, after the periodicity of bellows 19 is stretched, there will be aging gas leak phenomenon, gas is overflowed and is entered cavity 11 from bellows 19, reduces the vacuum capability of vaccum-pumping equipment.Statistical conditions in vaccum-pumping equipment use at present, the type vacuum valve can be changed once because of aging gas leakage every year on average, the problem of having brought thus cost to increase.
Model utility content
In view of this, the utility model provides a kind of vacuum valve, comprising:
Cavity, described cavity comprises first interface and the second interface;
The cylinder being oppositely arranged with described cavity;
Valve seat, connects described cavity and cylinder, and is oppositely arranged with described first interface, and described valve seat comprises through hole;
Axis body, comprises connecting rod, and lays respectively at seal disc and the piston at described connecting rod two ends, and described connecting rod is through described through hole, and described seal disc, piston lay respectively in described cavity, cylinder;
Spring, described both ends of the spring is connected with described seal disc and valve seat respectively, and described connecting rod is through described spring;
The first seal ring, is arranged in described through hole, and described connecting rod is through described the first seal ring.
Preferably, described seal disc mates setting with described first interface.
Preferably, described valve seat has ring outstanding at lead to the hole site.
Preferably, described cylinder comprises vent and air outlet hole.
Preferably, between described valve seat and described cavity, be provided with the second seal ring.
Preferably, described vacuum valve comprises slow vacuum pumping valve, and described chronic vacuum valve comprises cavity, cylinder, valve seat, axis body, spring, seal ring, vent, air outlet hole.
Preferably, described vacuum valve also comprises flange plate, and described flange plate is used for connecting described cylinder and described cavity.
Preferably, a kind of vaccum-pumping equipment, comprises described vacuum valve.
Preferably, described vaccum-pumping equipment also comprises vacuum pump and chamber, and described vacuum pump is connected with described first interface, and described chamber is connected with described the second interface.
The vacuum valve that the utility model provides, by using the structure of seal ring can make independent seal space of valve seat and axis body formation and reducing the scope of seal space, and without using bellows to seal, therefore can effectively avoid because of the bellows vacuum valve vacuum capability decline causing of leak gas.Thereby in the working life that extends vacuum valve, reduce costs expenditure.
Brief description of the drawings
Fig. 1 is the sectional structure schematic diagram of vacuum valve in prior art;
The sectional structure schematic diagram of the vacuum valve that Fig. 2 provides for the utility model embodiment one;
Fig. 3 is the schematic diagram that in the utility model embodiment one, cylinder is connected with cavity;
Fig. 4 is the schematic diagram of the flange plate of cylinder and cavity in the utility model embodiment one;
The sectional structure schematic diagram of the vacuum valve that Fig. 5 provides for the utility model embodiment two;
The slow vacuum pumping valve partial enlarged drawing that Fig. 6 provides for the utility model embodiment two.
Embodiment
The utility model provides a kind of vacuum valve, comprising: cavity, and described cavity comprises first interface and the second interface; The cylinder being oppositely arranged with described cavity; Valve seat, connects described cavity and cylinder, and is oppositely arranged with described first interface, and described valve seat comprises through hole; Axis body, comprises connecting rod, and lays respectively at seal disc and the piston at described connecting rod two ends, and described connecting rod is through described through hole, and described seal disc, piston lay respectively in described cavity, cylinder; Spring, described both ends of the spring is connected with described seal disc and valve seat respectively, and described connecting rod is through described spring; The first seal ring, is arranged in described through hole, and described connecting rod is through described the first seal ring.
The vacuum valve that the utility model provides, can make cylinder form an independent confined space by the structure of seal ring, thereby without using bellows to seal, therefore can effectively avoid the phenomenon declining due to the dry pump vacuum capability that bellows gas leakage causes.Thereby reduce the loss of vacuum valve, extend the working life of vacuum valve, reduce production costs.
In order to make the purpose of this utility model, technological scheme and advantage clearer, further elaborate below in conjunction with accompanying drawing.
Embodiment one
Please refer to Fig. 2, the sectional structure schematic diagram of the vacuum valve that Fig. 2 provides for the utility model embodiment one.As shown in Figure 2, described vacuum valve comprises: cavity 21, cylinder 22, valve seat 23, axis body 24, spring 25 and the first seal ring 2601, below introduce in detail the effect of each parts and annexation each other.
Cavity 21, described cavity 21 comprises first interface 2101 and the second interface 2102, described first interface 2101 is for being connected with a vacuum pump (not shown), and described the second interface 2102 is connected for the chamber (not shown) that need to be evacuated with.
Cylinder 22, described cylinder 22 is oppositely arranged with described cavity 21.
Valve seat 23, connects described cavity 21 and cylinder 22, and is oppositely arranged with described first interface 2101, and described valve seat 23 comprises a through hole 2301, and the direction setting of described through hole 2301 along cavity 21 to cylinder 22 also connects described valve seat 23.
Axis body 24, described axis body 24 comprises connecting rod 2401, and lay respectively at seal disc 2402 and the piston 2403 at described connecting rod 2401 two ends, described connecting rod 2401 is through described through hole 2301, described seal disc 2402 is positioned at described cavity 21, and mate setting with described first interface 2101, and that is to say that described seal disc 2402 can be by clogging first interface 2101, make itself and cavity 21 stuffiness each other.Described piston 2403 is positioned at described cylinder 22, and described cylinder 22 is divided into two-part space, in space between valve seat 23 and described piston 2403, on the wall of cylinder 22, be also provided with a vent 2201, and described piston 2403 the vent 2201 of cylinder 22 in the scope between the bottom of cylinder 22 can before and after movable, the size in described two-part space also can change thereupon.Vent 2201 moves and then drives axis body 24 to cylinder 22 direction motions to promote piston 2403 for input gas to cylinder 22, and the gas in cylinder 22 also can be discharged cylinder 22 by described vent 2201, and then axis body 24 is moved to cavity 21 directions.In another space forming in the bottom of piston 2403 and cylinder 22, on the wall of cylinder 22, be also provided with an air outlet hole 2202, for ensureing in the time that cylinder 22 is inflated by vent 2201, piston 2403 drives axis body 24 to move to cylinder 21 bottom direction, now the air in the bottom space of piston 2403 and cylinder 22 can be discharged by air outlet hole 2202, reduce pressure, be convenient to piston 2403 and move.
Spring 25, the two ends of described spring 25 are connected with described seal disc 2402 and described valve seat 23 respectively, and described connecting rod 2401 is through described spring 25.
The first seal ring 2601, be arranged in described through hole 2301, described connecting rod 2401, through described the first seal ring 2601, is provided with 3 the first seal rings 2601 in embodiment one, and the quantity of described the first seal ring 2601 does not restrict in other embodiments.Described the first seal ring 2601 is fluororubber material, there is good wear resistance, heat-resisting quantity, ageing-resistant performance and good elasticity and stability, can when axis body 24 is moved forward and backward in through hole 2301, ensure sealing between axis body 24 and valve seat 23.The working principle of the vacuum valve that embodiment one provides is described below in conjunction with Fig. 2:
When vacuum valve work, described first interface 2101 is connected with a vacuum pump (not shown), and the chamber (not shown) that described the second interface 2102 need to be evacuated with is connected.Under original state, described vent 2201 does not pass into gas, not Exhaust Gas outside cylinder of described air outlet hole 2202, and described spring 25 is in uncompressed state, so the seal disc 2402 of connecting rod 2401 one end contacts with first interface 2101, by airtight isolated to first interface 2101 and cavity 21.Described the second interface 2102 and cavity 21 are communicated with, and both air pressure is identical.
In the time that vacuum valve starts to vacuumize, gas enters in described cylinder 22 by described vent 2201, and be the part entering between valve seat 23 and piston 2403, between valve seat 23 in described cylinder 22 and piston 2403, the gas pressure intensity of part becomes large gradually, described gas can promote the bottom motion of piston 2403 to cylinder 22, gas pressure intensity between described piston 2403 and cylinder 22 bottoms becomes large gradually, gas is discharged by air outlet hole 2202, and then piston 2403 drives described connecting rod 2401, seal disc 2402 bottom direction to described cylinder 22 together with spring 25 is moved, now, described seal disc 2402 separates with first interface 2101, described spring 25 is compressed gradually.Because start to vacuumize after action at vacuum valve, described seal disc 2402 separates with first interface 2101, therefore first interface 2101 and cavity 21 also become connection, and then be also communicated with the second interface 2102, the gas in the chamber that vacuum pump can be evacuated needs by first interface 2101, cavity 21 and the second interface 2102 is extracted out.Along with the gas pressure intensity of part between the valve seat 23 in cylinder 22 and piston 2403 becomes greatly gradually, the gas between piston 2403 and cylinder bottom is discharged by air outlet hole 2202 gradually, and final spring is little by little compressed to the position of maximum compressibility.
Subsequently, gas no longer passes through vent 2201 to cylinder 22 transport gas, under the elastic returning effect of spring 25, drive described axis body 24 comprise piston 2403, seal disc 2402 together with connecting rod 2401 to moving away from the direction of cylinder 22, and now the valve seat 23 in described cylinder 22 and the gas between piston 2403 are discharged by described vent 2201, the gas in atmosphere enters the space of piston 2403 and cylinder 22 bottoms by air outlet hole 2202.Along with the reply of spring 25, described seal disc 2402 finally will fit tightly with described first interface 2101, and first interface 2101 and cavity 21, the second interface 2102 is airtight isolated, and vacuum valve has been got back to again original state, has completed and has once vacuumized motion.
The vacuum valve that the utility model embodiment one provides is got back to again original state by as above exactly from original state starts to exhaust a vacuum, realizes the vacuumizing effect of chamber by the common to-and-fro motion of described axis body 24 and described spring 25.The vacuum valve that embodiment one provides can be down to lowpressure or vacuum by the air pressure in chamber from highpressure by repeatedly vacuumizing, and the air pressure in chamber declines gradually.Because much vacuumize that chamber needs air pressure steadily and slow underground falling, such as component vacuum absorption etc., if declining fast, air pressure may cause damage to device.The vacuum valve that embodiment one provides is the decline gradually that realizes chamber pressure by the repeatedly common to-and-fro motion of axis body 24 and described spring 25, therefore can not cause damage to the device in chamber or chamber.
The vacuum valve that embodiment one provides, in the time that chamber is vacuumized, the sealing that the first seal ring 2601 passing by the connecting rod 2401 being arranged in through hole 2301 carries out among a small circle cavity 21, and do not need the sealing on a large scale that uses bellows to carry out whole cavity in tratitional technology, simplify process step, again because the first seal ring 2601 is fluororubber material, there is good wear resistance, heat-resisting quantity, ageing-resistant performance and good elasticity and stability, can be in the sealing ensureing between axis body 24 and valve seat 23, maintain longer working life, reduce production costs, the vacuum valve that bellows is disposed in solution in the time of work due to the gas leakage problem of bringing in to-and-fro motion state for a long time, keep after long-term use still airtight performance preferably.
Preferably, in embodiment one, the position of described the second interface 2102 is positioned at the sidewall of cavity 21, as long as but play the effect being communicated with the gas of cavity 21, described the second interface 2102 be positioned at described cavity 21 any position not overlapping with other device can, embodiment one does not restrict this.
Preferably, in embodiment one, be provided with cylindrical projection 2302 at described valve seat 23 towards first interface 2,101 one sides, described through hole 2301 also connects described cylindrical projection 2302, and described connecting rod 2401 is entrenched in described cylindrical projection 2302.Described cylindrical projection 2302 can better ensure the accuracy of connecting rod 2401 moving direction, and then ensure that seal disc 2402, by first interface 2101 and cavity 21, the airtight isolated effect of the second interface 2102, can also play the effect of fixing spring 25 simultaneously.
Preferably, in embodiment one, described through hole 2301 is inner for first seal ring 2601 to be set every 15 ± 10%mm, if the interval that the first seal ring 2601 arranges is less than this scope, can cause too closely causing unnecessary waste of material due to what arrange, if the interval arranging is greater than this scope, can cause that the too loose sealing effect causing arranging due to the first seal ring 2601 declines, phenomenon leaks air.
Preferably, described vacuum valve also comprises one second seal ring 2602, described the second seal ring 2602 is arranged between described valve seat 23 and described cavity 21, in order to prevent that cylinder 22 and valve seat 23 from leaking gas, keep the seal of cavity 21, thereby avoid gas to overflow and enter described cavity 21 from described cylinder 22, affect the vacuumizing effect of vacuum valve.
In embodiment one, described cavity 21 is connected by flange-interface with cylinder 22, but cavity 21 and cylinder 22 can also have other Placements, and embodiment one does not make restriction to this.Please refer to Fig. 3 and Fig. 4, Fig. 3 is the schematic diagram that in the utility model embodiment one, cylinder is connected with cavity, and Fig. 4 is the schematic diagram of the flange plate of cylinder and cavity in the utility model embodiment one.
In embodiment one, described cavity 21 and described cylinder 22 are the cylindrical structural of hollow, be provided with flange plate 2103 at cavity 21 near one end of cylinder 22, cylinder 22 is also provided with flange plate 2203 near one end of cavity 21, and at flange plate 2103, on the outer of flange plate 2203 and valve seat 23, all average mark is furnished with 8 eyelets 2702, be used for connecting cavity 21, valve seat 23 and cylinder 22, preferably use hex head bolt 2701 as fastening piece herein, described hex head bolt 2701 is through described flange plate 2103, eyelet 2702 in flange plate 2203 and valve seat 23, by cavity 21, valve seat 23 and cylinder 22 are fixed together.
Please refer to Fig. 4, Fig. 4 is the flange plate schematic diagram from cylinder 22 1 sides, therefore in Fig. 4, can only see the flange plate 2203 of cylinder 22, but be the structure that flange plate 2203, the outer of valve seat 23 and flange plate 2103 threes of cavity 21 of cylinder 22 are superimposed in fact herein.
By being connected cavity 21, valve seat 23 and cylinder 22 with eyelet 2702, flange plate 2103 and flange plate 2201, can make described vacuum valve there is the installing/dismounting of being convenient to, convenient for maintaining, strengthen the stability connecting, after long-term use, joint is difficult for loosening simultaneously.
Embodiment one also provides a kind of vaccum-pumping equipment, and described vaccum-pumping equipment comprises described vacuum valve, and described vaccum-pumping equipment also comprises vacuum pump and chamber, and described vacuum pump is connected with described first interface, and described chamber is connected with described the second interface.
Embodiment two
Please refer to Fig. 5 and Fig. 6, the sectional structure schematic diagram of the vacuum valve that Fig. 5 provides for the utility model embodiment two, the slow vacuum pumping valve partial enlarged drawing that Fig. 6 provides for the utility model embodiment two.Embodiment illustrated in fig. 5 two and embodiment illustrated in fig. 2 one only have small difference, and therefore the label of Fig. 2 is used to represent identical structural element.
The structure of the vacuum valve in comprising embodiment one of vacuum valve described in the present embodiment, also comprise a slow vacuum pumping valve 28, described slow vacuum pumping valve 28 is positioned on the outer wall of cavity 21, near first interface 2101 places, be connected with described cavity 21, for extracting and import the air in cavity 21 out vacuum pump (not shown) with lower speed from cavity 21, keep the vacuum effectiveness of chamber (not shown).Please refer to Fig. 6, the described actuating valve 28 of taking out slowly comprises: cavity 61, and cylinder 62, axis body 64, spring 65 and the first seal ring 6601, below introduce the effect of each parts and annexation each other in detail.
Cavity 61, described cavity 61 comprises first interface 6101 and the second interface 6102, the first interface 2101 of first interface 6101 and described vacuum valve is connected, and then described slow vacuum pumping valve 28 and vacuum valve can use same vacuum pump by the gas in chamber (not shown) by described first interface 6101 and then by the first interface 2101 suction vacuum pump (not shown) of described vacuum valve, the cavity 21 of the second interface 6102 and described vacuum valve is connected, with the cavity 21 of described vacuum valve and the chamber (not shown) that need to be evacuated all in connected state.
Cylinder 62, described cylinder 62 is oppositely arranged with described cavity 61; Valve seat 63, connects described cavity 61 and cylinder 62, and is oppositely arranged with described first interface 6101, and described valve seat 63 comprises a through hole 6301, and the direction setting of described through hole 6301 along cavity 61 to cylinder 62 also connects described valve seat 63.
Axis body 64, described axis body 64 comprises connecting rod 6401, and lay respectively at seal disc 6402 and the piston 6403 at described connecting rod 6401 two ends, described connecting rod 6401 is through described through hole 6301, described seal disc 6402 is positioned at described cavity 61, and mate setting with described first interface 6101, that is to say that described seal disc 6402 can be by clogging first interface 6101, make itself and cavity 61 stuffiness each other, described piston 6403 is positioned at described cylinder 62, and described cylinder 62 is divided into two-part space.In space between valve seat 63 and described piston 6403, on the wall of cylinder 62, be also provided with a vent 6201, and described piston 6403 the vent 6201 of cylinder 62 in the scope between the base wall of cylinder 62 can before and after movable, the size in described two-part space also can change thereupon.Vent 6201 moves and then drives axis body 64 to cylinder 62 direction motions to promote piston 6403 for input gas to cylinder 62.Gas in cylinder 62 also can be discharged cylinder 62 by described vent 6201, and then axis body 64 is moved to cavity 61 directions.In another space forming in the bottom of piston 6403 and cylinder 62, on the wall of cylinder 62, be also provided with an air outlet hole 6202, for ensureing in the time that cylinder 62 is inflated by vent 6201, piston 6403 drives axis body 64 to move to cylinder 62 bottom direction, now the air in the space of the bottom of piston 6403 and cylinder 62 can be discharged by air outlet hole 6202, reduce pressure, be convenient to piston movement.
Spring 65, the two ends of described spring 65 are connected with described seal disc 6402 and described valve seat 63 respectively, and described connecting rod 6401 is through described spring 65.
The first seal ring 6601, be arranged in described through hole 6301, described connecting rod 6401, through described the first seal ring 6601, is provided with 3 the first seal rings 6601 in embodiment two, the quantity of described the first seal ring 6601 can also be other quantity in other embodiments, does not limit at this.Described the first seal ring 6601 is fluororubber material, have good wear resistance, heat-resisting quantity and, ageing-resistant performance, and rubber also have with good elasticity and and stability, in can making axis body 64 move forward and backward, ensure sealing between axis body 64 and valve seat 63 in through hole 6301, and extend the working life of vacuum valve.
Vacuum valve in the present embodiment is identical with the working principle of the vacuum valve in embodiment one, only structurally has small difference, does not describe one by one herein.Difference is that vent 6201 diameters of described slow vacuum pumping valve are less than the diameter of the vent 2201 of vacuum valve described in embodiment one; therefore described air inlet speed of taking out slowly actuating valve 28 is less than described vacuum valve; so can reduce the speed vacuumizing; with milder speed, chamber (not shown) is vacuumized, protection device is without prejudice.When chamber (not shown) reduces the rate requirement vacuumizing; while the protection of device being required to improve simultaneously; need to vacuumize with slower speed chamber (not shown); now can adopt the described actuating valve 28 of taking out slowly to vacuumize chamber (not shown); and then vacuum pumping valve 28 is started working slowly, described vacuum valve quits work.Gas in chamber (not shown) is inhaled into the cavity 61 of slow vacuum pumping valve 28 by the second interface 6102, to-and-fro motion by slow vacuum pumping valve 28 is expelled to vacuum pump (not shown) by the gas of suction by first interface 6101 and then by the first interface 2101 of described vacuum valve, vacuum valve and slow vacuum pumping valve 28 are and work alone, can not use simultaneously, need select according to the specific requirement of product.
The vacuum valve that embodiment two provides, in the time that chamber is vacuumized, the first seal ring 2601 passing by the connecting rod 2401 being arranged in through hole 2301 carries out sealing among a small circle to cavity, and does not need the sealing on a large scale that uses bellows to carry out whole cavity in tratitional technology.Slowly take out actuating valve 28 because disposing simultaneously, can select the speed vacuumizing according to the product situation of producing, in the time that product needed vacuumizes to ensure that with comparatively mild speed air pressure steadily declines, can choice for use taking out slowly actuating valve 28 vacuumizes, and in the time that needs vacuumize fast to chamber, can chamber be vacuumized choice for use vacuum valve, there is larger range of choice.Again because the first seal ring 2601 is fluororubber material, there is good wear resistance, heat-resisting quantity, ageing-resistant performance and good elasticity and stability, can be in the sealing ensureing between axis body 24 and valve seat 23, maintain longer working life, reduce production costs, the vacuum valve that bellows is disposed in solution due to the gas leakage problem of bringing in to-and-fro motion state for a long time, keeps after long-term use still airtight performance preferably in the time of work.
Preferably, in embodiment two, described position of taking out slowly actuating valve 28 is positioned at sidewall and the close first interface 2101 of described cavity 21, as long as but play the effect being communicated with the gas of cavity 21 and first interface 2101, described take out slowly actuating valve 28 be positioned at described cavity 21 any position not overlapping with other device can, embodiment two does not restrict this.
Preferably, in embodiment two, the position of described the second interface 6102 is positioned at the sidewall of cavity 61, as long as but play the effect being communicated with the gas of cavity 61, described the second interface 6102 be positioned at described cavity 61 any position not overlapping with other device can, embodiment two does not restrict this.
Preferably, in embodiment two, be provided with cylindrical projection 6302 at described valve seat 63 towards first interface 6,101 one sides, described through hole 6301 also connects described cylindrical projection 6302, and described connecting rod 6401 is entrenched in described cylindrical projection 6302.Described cylindrical projection 6302 can better ensure the accuracy of connecting rod 6401 moving direction, and then ensure that seal disc 6402, by first interface 2101 and cavity 61, the airtight isolated effect of the second interface 6102, can also play the effect of fixing spring 65 simultaneously.
Preferably, in embodiment two, described through hole 6301 is inner for first seal ring 6601 to be set every 15 ± 10%mm, if the interval that the first seal ring 6601 arranges is less than this scope, can cause too closely causing unnecessary waste of material due to what arrange, if the interval arranging is greater than this scope, can cause that the too loose sealing effect causing arranging due to the first seal ring 6601 declines, phenomenon leaks air.
Preferably, described vacuum valve also comprises one second seal ring 6602, described the second seal ring 6602 is arranged between described valve seat 63 and described cavity 61, in order to prevent that cylinder 62 and valve seat 63 from leaking gas, keep the seal of cavity 61, thereby avoid gas to overflow and enter described cavity 61 from described cylinder 62, affect the vacuumizing effect of vacuum valve.
Embodiment two also comprises a kind of vaccum-pumping equipment, described vaccum-pumping equipment comprises described vacuum valve, and described vaccum-pumping equipment also comprises vacuum pump and chamber, described vacuum pump is connected with described first interface, for by the gas sucking-off in described cavity, ensure the seal of vacuum valve, described chamber is connected with described the second interface, therefore the gas in chamber can enter described cavity and then be expelled to described vacuum pump, ensures that the vacuum performance of chamber is good.
The vacuum valve that the utility model provides, in the time that chamber is vacuumized, by between cavity and valve seat and the seal ring of axis body and the chimeric position of valve seat vacuum valve is carried out to sealing among a small circle, can solve the vacuum valve that disposes bellows in the time of work due to the gas leakage problem of bringing in to-and-fro motion state for a long time.To sum up, the vacuum valve that the utility model provides can reduce seal space, optimizes sealing effect, extends working time, and reduces costs expenditure.
Obviously, those skilled in the art can carry out various changes and modification and not depart from spirit and scope of the present utility model model utility.Like this, if these amendments of the present utility model and within modification belongs to the scope of the utility model claim and equivalent technologies thereof, the utility model is also intended to including these changes and modification.
Claims (10)
1. a vacuum valve, is characterized in that, comprising:
Cavity, described cavity comprises first interface and the second interface;
The cylinder being oppositely arranged with described cavity;
Valve seat, connects described cavity and cylinder, and is oppositely arranged with described first interface, and described valve seat comprises through hole;
Axis body, comprises connecting rod, and lays respectively at seal disc and the piston at described connecting rod two ends, and described connecting rod is through described through hole, and described seal disc, piston lay respectively in described cavity, cylinder;
Spring, described both ends of the spring is connected with described seal disc and valve seat respectively, and described connecting rod is through described spring;
The first seal ring, is arranged in described through hole, and described connecting rod is through described the first seal ring.
2. vacuum valve as claimed in claim 1, is characterized in that, described seal disc mates setting with described first interface.
3. vacuum valve as claimed in claim 1, is characterized in that, described valve seat has ring outstanding at lead to the hole site.
4. vacuum valve as claimed in claim 1, is characterized in that, described cylinder comprises vent and air outlet hole.
5. vacuum valve as claimed in claim 1, is characterized in that, between described valve seat and described cavity, is provided with the second seal ring.
6. vacuum valve as claimed in claim 1, is characterized in that, described vacuum valve comprises slow vacuum pumping valve, and described slow vacuum pumping valve comprises cavity, cylinder, valve seat, axis body, spring, seal ring, vent, air outlet hole.
7. vacuum valve as claimed in claim 6, is characterized in that, the vent diameter of described slow vacuum pumping valve is less than the vent diameter of described vacuum valve.
8. vacuum valve as claimed in claim 1, is characterized in that, described vacuum valve also comprises flange plate, and described flange plate is used for connecting described cylinder and described cavity.
9. a vaccum-pumping equipment, comprises the vacuum valve as described in as arbitrary in claim 1-7.
10. vaccum-pumping equipment as claimed in claim 9, is characterized in that, described vaccum-pumping equipment also comprises vacuum pump and chamber, and described vacuum pump is connected with described first interface, and described chamber is connected with described the second interface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420136096.XU CN203892709U (en) | 2014-03-25 | 2014-03-25 | Vacuum valve and vacuum pumping equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420136096.XU CN203892709U (en) | 2014-03-25 | 2014-03-25 | Vacuum valve and vacuum pumping equipment |
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| CN203892709U true CN203892709U (en) | 2014-10-22 |
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| CN201420136096.XU Expired - Lifetime CN203892709U (en) | 2014-03-25 | 2014-03-25 | Vacuum valve and vacuum pumping equipment |
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| CN (1) | CN203892709U (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104369896A (en) * | 2014-11-12 | 2015-02-25 | 山西江淮重工有限责任公司 | Vacuuming and nitrogen inflating device for sealed packaging box |
| CN106870950A (en) * | 2017-04-01 | 2017-06-20 | 朱洲山 | A kind of Double pump circulation feeding device |
| CN109883919A (en) * | 2019-02-28 | 2019-06-14 | 华中科技大学 | A kind of vacuum environment replacement sampling device |
| CN113042325A (en) * | 2020-12-28 | 2021-06-29 | 苏州特瑞特机器人有限公司 | Vacuum dispensing integrated device |
| CN113042310A (en) * | 2020-12-31 | 2021-06-29 | 苏州特瑞特机器人有限公司 | Dispensing equipment for assembling 3C parts |
| CN113042306A (en) * | 2020-12-31 | 2021-06-29 | 苏州特瑞特机器人有限公司 | Vacuum dispensing system |
| CN114687992A (en) * | 2020-12-31 | 2022-07-01 | 苏州卓兆点胶股份有限公司 | Vacuum generating system for sealed cavity |
| CN114682437A (en) * | 2020-12-31 | 2022-07-01 | 苏州卓兆点胶股份有限公司 | Multifunctional vacuum adhesive dispensing device |
| CN114687998A (en) * | 2020-12-28 | 2022-07-01 | 苏州卓兆点胶股份有限公司 | Gas suction device for vacuum cavity |
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2014
- 2014-03-25 CN CN201420136096.XU patent/CN203892709U/en not_active Expired - Lifetime
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104369896A (en) * | 2014-11-12 | 2015-02-25 | 山西江淮重工有限责任公司 | Vacuuming and nitrogen inflating device for sealed packaging box |
| CN104369896B (en) * | 2014-11-12 | 2016-04-27 | 山西江淮重工有限责任公司 | Sealed packet vanning vacuumizes and nitrogen charging device |
| CN106870950A (en) * | 2017-04-01 | 2017-06-20 | 朱洲山 | A kind of Double pump circulation feeding device |
| CN109883919A (en) * | 2019-02-28 | 2019-06-14 | 华中科技大学 | A kind of vacuum environment replacement sampling device |
| CN114687998A (en) * | 2020-12-28 | 2022-07-01 | 苏州卓兆点胶股份有限公司 | Gas suction device for vacuum cavity |
| CN113042325A (en) * | 2020-12-28 | 2021-06-29 | 苏州特瑞特机器人有限公司 | Vacuum dispensing integrated device |
| CN114849974A (en) * | 2020-12-28 | 2022-08-05 | 苏州卓兆点胶股份有限公司 | Vacuum dispenser for processing electronic equipment |
| CN114687998B (en) * | 2020-12-28 | 2024-04-30 | 苏州卓兆点胶股份有限公司 | Gas suction device for vacuum chamber |
| CN113042310A (en) * | 2020-12-31 | 2021-06-29 | 苏州特瑞特机器人有限公司 | Dispensing equipment for assembling 3C parts |
| CN113042306A (en) * | 2020-12-31 | 2021-06-29 | 苏州特瑞特机器人有限公司 | Vacuum dispensing system |
| CN114687992A (en) * | 2020-12-31 | 2022-07-01 | 苏州卓兆点胶股份有限公司 | Vacuum generating system for sealed cavity |
| CN114682437A (en) * | 2020-12-31 | 2022-07-01 | 苏州卓兆点胶股份有限公司 | Multifunctional vacuum adhesive dispensing device |
| CN114687992B (en) * | 2020-12-31 | 2024-04-30 | 苏州卓兆点胶股份有限公司 | Vacuum generating system for sealing cavity |
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