CN203857467U - Novel silane combustion barrel - Google Patents
Novel silane combustion barrel Download PDFInfo
- Publication number
- CN203857467U CN203857467U CN201420260329.7U CN201420260329U CN203857467U CN 203857467 U CN203857467 U CN 203857467U CN 201420260329 U CN201420260329 U CN 201420260329U CN 203857467 U CN203857467 U CN 203857467U
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- Prior art keywords
- cylindrical shell
- combustion
- combustion barrel
- filter
- end socket
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Abstract
A novel silane combustion barrel comprises a barrel body, an air inlet, a combustion-supporting gas inlet, an air outlet, a sealing head and filtering devices. The air inlet and the combustion-supporting gas inlet are arranged on the barrel body, an opening is formed at the upper end of the barrel body, the sealing head is movably mounted at the opening at the upper end of the barrel body, the sealing head and the barrel body form a sealed cavity structure, the air outlet is arranged on the sealing head, and the filtering devices are movably mounted at positions where the sealing head is connected with the barrel body to isolate the cavity structure into an upper section and a lower section. Even if being used for a long time, the novel silane combustion barrel cannot cause blockage of filling in a combustion tower and a nozzle, so that maintenance cycle of the combustion tower can be prolonged.
Description
Technical field
The utility model relates to photovoltaic industry, is specifically related to the exhaust treatment system of a kind of PECVD (abbreviation of Plasma Enhanced Chemical Vapor Deposition) equipment.
Background technology
The tail gas such as silane, ammonia of the PECVD equipment exhausting in photovoltaic industry is mainly by combustion tower processing at present, wherein, silane in tail gas needs first at burning cylinder roasting, in combustion barrel, pass into tail gas and combustion-supporting gas (being called for short CDA), the silane that both mix in rear tail gas can burn, and produces silica dust after burning.Due in combustion barrel without filter element, combustion barrel cannot be collected whole silica dusts, part silica dust can enter combustion tower tower body inside by combustion barrel gas outlet, easily cause inner-tower filling material and shower nozzle frequent jams, need periodic cleaning, affect the normal operation of equipment, increased the maintenance workload of equipment.
Utility model content
Goal of the invention of the present utility model is to provide a kind of novel silane combustion barrel, even if this combustion barrel uses for a long time, also can not cause burning inner-tower filling material and shower nozzle stop up, maintenance period that can prolonging combustion tower.
The utility model is achieved through the following technical solutions its goal of the invention: a kind of novel silane combustion barrel, comprise cylindrical shell, air inlet, combustion-supporting gas entrance and gas outlet, air inlet, combustion-supporting gas entrance is arranged on cylindrical shell, it is characterized in that, described cylindrical shell upper end open, described combustion barrel also comprises end socket and filter, described end socket is movably arranged on the upper end open place of described cylindrical shell, form a cavity body structure sealing with cylindrical shell, described gas outlet is arranged on described end socket, described filter is movably arranged on the junction of described end socket and described cylindrical shell, described cavity body structure is isolated into two sections.
Tail gas enters cylindrical shell from air inlet, mix with the combustion-supporting gas that enters cylindrical shell from combustion-supporting gas entrance, in combustion barrel, form eddy current and burn, silica dust in tail gas after filter filtering burning, tail gas after filtration is discharged and is entered combustion tower tower body inside from the gas outlet of combustion barrel, the generation of can effectively avoid burning inner-tower filling material and shower nozzle blockage problem.End socket and filter all adopt the mode of flexible connection to install, so that after filter stops up, can open in time the end socket of combustion barrel, pull down filter and clean or change.
As a kind of improvement of the present utility model, the top of the end socket of described combustion barrel is provided with filter clean-up port, when filter in combustion barrel occurs to stop up, can open described filter clean-up port and described filter is carried out to blowback sweep, thereby realize filter is cleared up easily.
As further improvement of the utility model: described filter is made up of the column filter core of multiple inner hollow, the bottom surface of column filter core and cylinder are its filtering surface, upper end open, on one end that described end socket is connected with described cylindrical shell, level is fixed with a base plate, on this base plate, have multiple filter core installing holes, described column filter core is arranged in described filter core installing hole one to one by its top.
Further improve as of the present utility model: described cylindrical shell lower end is also opening, described combustion barrel also comprises the absorption storehouse of the lower ending opening that is movably connected in described cylindrical shell, and described absorption storehouse is made up of for the liquid of collecting silica dust with being contained in warehouse the warehouse of peviform.Tail gas is at burning cylinder roasting, and combustion product silica dust is collected in the absorption storehouse of cylinder body bottom.
With respect to prior art, the utlity model has following beneficial effect: 1) the utility model arranges filter in combustion barrel, tail gas after burning is first sent in combustion tower after filtering filtering silica dust wherein again, even if filler and shower nozzle in combustion tower are used for a long time, also can not stop up, be conducive to the maintenance period of prolonging combustion tower;
2) filter of the present utility model can remove at any time and clean or change, and is conducive to reduce the use cost of the utility model combustion barrel; The utility model arranges filter clean-up port, when filter in combustion barrel occurs to stop up, can open timely and conveniently filter clean-up port and filter is carried out to blowback sweep, and is conducive to reduce the maintenance times of the utility model combustion barrel;
3) combustion barrel of the present utility model arranges absorption storehouse, than the natural sedimentation mode of prior art silica dust, can better collect silica dust, further reduces filter the probability stopping up occurs.
Brief description of the drawings
Fig. 1 is the structural representation of the combustion barrel of the utility model preferred embodiment.
Detailed description of the invention
As shown in Figure 1, the novel silane combustion barrel of the present embodiment, comprise cylindrical shell 8, end socket 7, filter 3 and absorption storehouse 2, cylindrical shell 8 both ends opens, end socket 7 is arranged on the upper end open place of cylindrical shell 8 by flange arrangement, absorption storehouse 2 is arranged on the lower ending opening place of cylindrical shell 8 by flange arrangement, absorption storehouse 2 is made up of for the liquid of collecting silica dust with being contained in warehouse the warehouse of peviform, the liquid here has multiple choices, in the present embodiment, adopt water to collect silica dust, moistening by water after silica dust falls into the water, cannot again kick up.The liquid is here mainly used in collecting silica dust, so general liquid fire-retardant or that do not fire all can be used as the liquid filler in absorption storehouse.The dismountable junction that is arranged on end socket 7 and cylindrical shell 8 of filter 3, the cavity body structure of the sealing that end socket 7, cylindrical shell 8 and absorption storehouse 2 are formed is isolated into two sections, the air inlet 1 of combustion barrel, combustion-supporting gas entrance 5 are arranged on cylindrical shell 8, the gas outlet 4 of combustion barrel is arranged on end socket 4, the top of end socket 4 is also provided with filter clean-up port 6, on filter clean-up port 6 and combustion-supporting gas entrance 5, is all connected with magnetic valve.
Tail gas enters combustion barrel by air inlet 1, be mixed to form eddy current and burn with the combustion-supporting gas that enters combustion barrel from combustion-supporting gas entrance 5, combustion product silica dust is collected by the absorption storehouse 2 of combustion barrel bottom, gas after burning installs 3 after filtration, after filtering filtration silica dust wherein, enter in combustion tower (not shown) from the gas outlet 4 of combustion barrel, in combustion tower, can adopt the ammonia in water absorption extraction tail gas, can reach the object of vent gas treatment.When filter 3 in combustion barrel occurs to stop up, the magnetic valve that can open 6 places, filter clean-up port carries out blowback to filter 3 to be swept, and reduces the probability that filter 3 stops up.
Combustion barrel of the present utility model is because the tail gas of having realized entering in combustion tower filters, and can effectively prevent from burning inner-tower filling material and shower nozzle stop up, the maintenance period of prolonging combustion tower.The utility model arranges absorption storehouse 2 in combustion barrel bottom, and the afterproduct silica dust that makes to burn is adsorbed in absorption storehouse, can effectively reduce the content of silica dust in combustion barrel, reduces filter as far as possible the probability stopping up occurs.
Filter 3 is made up of the column filter core of multiple inner hollow, the bottom surface of column filter core and cylinder are its filtering surface, upper end open, on one end that end socket 7 is connected with cylindrical shell 8, level is fixed with a base plate, on this base plate, have multiple filter core installing holes, column filter core is arranged in described filter core installing hole one to one by its top.
Claims (4)
1. a novel silane combustion barrel, comprise cylindrical shell, air inlet, combustion-supporting gas entrance and gas outlet, air inlet, combustion-supporting gas entrance are arranged on cylindrical shell, it is characterized in that, described cylindrical shell upper end open, described combustion barrel also comprises end socket and filter, described end socket is movably arranged on the upper end open place of described cylindrical shell, form a cavity body structure sealing with cylindrical shell, described gas outlet is arranged on described end socket, described filter is movably arranged on the junction of described end socket and described cylindrical shell, and described cavity body structure is isolated into two sections.
2. novel silane combustion barrel according to claim 1, is characterized in that, the top of the end socket of described combustion barrel is provided with filter clean-up port.
3. novel silane combustion barrel according to claim 2, it is characterized in that, described filter is made up of the column filter core of multiple inner hollow, the bottom surface of column filter core and cylinder are its filtering surface, upper end open, on one end that described end socket is connected with described cylindrical shell, level is fixed with a base plate, has multiple filter core installing holes on this base plate, and described column filter core is arranged in described filter core installing hole one to one by its top.
4. novel silane combustion barrel according to claim 3, it is characterized in that, described cylindrical shell lower end is also opening, described combustion barrel also comprises the absorption storehouse of the lower ending opening that is movably connected in described cylindrical shell, and described absorption storehouse is made up of for the liquid of collecting silica dust with being contained in warehouse the warehouse of peviform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420260329.7U CN203857467U (en) | 2014-05-21 | 2014-05-21 | Novel silane combustion barrel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420260329.7U CN203857467U (en) | 2014-05-21 | 2014-05-21 | Novel silane combustion barrel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203857467U true CN203857467U (en) | 2014-10-01 |
Family
ID=51607314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420260329.7U Active CN203857467U (en) | 2014-05-21 | 2014-05-21 | Novel silane combustion barrel |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203857467U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107029481A (en) * | 2017-06-21 | 2017-08-11 | 上海昶艾电子科技有限公司 | Mist of oil dust filtering device for sample gas |
-
2014
- 2014-05-21 CN CN201420260329.7U patent/CN203857467U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107029481A (en) * | 2017-06-21 | 2017-08-11 | 上海昶艾电子科技有限公司 | Mist of oil dust filtering device for sample gas |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |