CN203850259U - Device capable of detecting vacuum degree of cavity - Google Patents
Device capable of detecting vacuum degree of cavity Download PDFInfo
- Publication number
- CN203850259U CN203850259U CN201420262000.4U CN201420262000U CN203850259U CN 203850259 U CN203850259 U CN 203850259U CN 201420262000 U CN201420262000 U CN 201420262000U CN 203850259 U CN203850259 U CN 203850259U
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- China
- Prior art keywords
- thermocouple
- inert gas
- cavity
- detecting
- filled
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model provides a device capable of detecting vacuum degree of a cavity. The device at least comprises a base, a cavity located on the base, a thermocouple which is accommodated in the cavity through one end of the base, and an inert gas detection device located on a pipeline at the other end of the base. According to the device of the utility model, the thermocouple is filled with an inert gas in advance, and the corresponding inert gas detection device is installed on the pipeline at the other end of the base, and therefore, once the thermocouple is fractured, the inert gas which is filled in the thermocouple in advance will enter the cavity and can be detected by the inert gas detection device installed on the pipeline at the other end of the base, and therefore, an alarm triggering device which is connected with the inert gas detection device can be triggered, and corresponding alarm information can be displayed on a machine, and as a result, the fracture of the thermocouple can be timely and accurately found; and since the high-purity inert gas is filled in the thermocouple, and therefore, air can be prevented from entering the cavity when the thermocouple is fractured, and the relative cleanness of the cavity can be ensured, and the risk of product scrapping can be reduced.
Description
Technical field
The utility model relates to a kind of technical field of semiconductor device, particularly relates to a kind of device of detecting chamber vacuum degree.
Background technology
The situation that thermocouple breaks often can occur in semiconductor technology boiler tube processing procedure, and reason is in thin film deposition processes, conventionally need to use ClF
3gas is dry-cleaned, and ClF
3gas can cause damage to the surface quartz protective layer of thermocouple, and adding polysilicon membrane has very large stress, and this just has very large probability in the normal processing procedure of product, the phenomenon that thermocouple breaks to occur.Fig. 1 is the thermocouple schematic diagram that breaks in prior art, as seen from Figure 1, in thermocouple 10, be contained in cavity 12 via pedestal 11 one end, use sealing ring 13 to seal at pedestal 11 places, thermocouple 10 outer ends are directly communicated with extraneous, once thermocouple 10 breaks, extraneous air will enter cavity 12 by thermocouple rent 14, thereby causes product rejection.
And industry does not have effective prevention method for breaking in thermocouple processing procedure at present, only have when finding to leak hunting in processing procedure process to exceed and set specification or in the time that pressure control cannot meet the requirements of, just can pull down thermocouple inspection, but can not when thermocouple breaks, find in time like this, thereby cannot avoid the risk of product rejection.
Given this, be necessary to design a kind of new structure to solve the problems of the technologies described above.
Utility model content
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of device of detecting chamber vacuum degree, after being used for solving prior art thermocouple and breaking, can not detect in time discovery, and thermocouple break after outside air enter cavity, thereby cause the problem of product rejection.
For achieving the above object and other relevant objects, the utility model provides a kind of device of detecting chamber vacuum degree, and described device at least comprises:
Pedestal;
Be positioned at the cavity on pedestal;
Be contained in the thermocouple in cavity via pedestal one end, be arranged at the sealing ring of thermocouple and pedestal junction, in described thermocouple, be filled with in advance inert gas;
Be positioned at the inert gas arrangement for detecting of pedestal other end pipeline;
The alarm triggering device being connected with described inert gas arrangement for detecting.
As a kind of preferred version of a kind of device of detecting chamber vacuum degree of the present utility model, described thermocouple and pedestal junction are provided with the pressure control valve that the inert gas for ensureing in thermocouple is full of all the time.
As a kind of preferred version of a kind of device of detecting chamber vacuum degree of the present utility model, the inert gas being filled with in advance in described thermocouple is helium.
As a kind of preferred version of a kind of device of detecting chamber vacuum degree of the present utility model, the outer end of described thermocouple is connected with inert gas source, and when thermocouple breaks, inert gas source is that thermocouple is filled with inert gas by pressure control valve.
As a kind of preferred version of a kind of device of detecting chamber vacuum degree of the present utility model, described inert gas source is nitrogen gas source.
As a kind of preferred version of a kind of device of detecting chamber vacuum degree of the present utility model, described inert gas arrangement for detecting is helium arrangement for detecting.
As mentioned above, a kind of device of detecting chamber vacuum degree of the present utility model, there is following beneficial effect: in the utility model, first in thermocouple, be filled with in advance inert gas, and the arrangement for detecting of corresponding inert gas is installed on pedestal other end pipeline, once this just ensures that thermocouple breaks, the inert gas being filled with in advance in thermocouple will enter cavity and the inert gas arrangement for detecting that is installed on pedestal other end pipeline detects, and then triggering is attached thereto the alarm triggering device connecing, on board, demonstrate corresponding warning message, breaking of discovery thermocouple that can be promptly and accurately, simultaneously, the outer end of thermocouple is connected with inert gas source, and there is pressure control valve in the sealing ring arranged outside of thermocouple and pedestal junction, once this just ensures that thermocouple breaks, and under the adjusting of pressure control valve, is filled with inert gas in inert gas source thermoelectric couple, being filled with of high-purity inert gas, avoid the thermocouple air in situation that breaks to enter cavity, ensured the relative clean of cavity, reduced the risk of product rejection.
Brief description of the drawings
Fig. 1 is shown as in prior art the thermocouple schematic diagram that breaks.
Fig. 2 a is shown as the schematic diagram of the device of detecting chamber vacuum degree of the present utility model.
Fig. 2 b is shown as thermocouple in the device of the detecting chamber vacuum degree of the present utility model schematic diagram that breaks.
Element numbers explanation
10,20 thermocouples
11,21 pedestals
12,22 cavitys
13,23 sealing rings
14,24 thermocouple rents
25 pressure control valves
26 pedestal other end pipelines
27 inert gas arrangement for detecting
28 alarm triggering devices
29 inert gas flows
Embodiment
By specific instantiation, execution mode of the present utility model is described below, those skilled in the art can understand other advantages of the present utility model and effect easily by the disclosed content of this specification.The utility model can also be implemented or be applied by other different embodiment, and the every details in this specification also can be based on different viewpoints and application, carries out various modifications or change not deviating under spirit of the present utility model.
Refer to Fig. 2 a to Fig. 2 b.Notice, appended graphic the illustrated structure of this specification, ratio, size etc., all contents in order to coordinate specification to disclose only, understand and read for person skilled in the art scholar, not in order to limit the enforceable qualifications of the utility model, therefore the not technical essential meaning of tool, the adjustment of the modification of any structure, the change of proportionate relationship or size, do not affecting under effect that the utility model can produce and the object that can reach, all should still drop on the technology contents that the utility model discloses and obtain in the scope that can contain.Simultaneously, in this specification, quote as " on ", the term of D score, " left side ", " right side ", " centre " and " " etc., also only for ease of understanding of narrating, but not in order to limit the enforceable scope of the utility model, the change of its relativeness or adjustment, changing under technology contents, when being also considered as the enforceable category of the utility model without essence.
Refer to Fig. 2 a, be shown as the schematic diagram of the device of detecting chamber vacuum degree of the present utility model, described device at least comprises: pedestal 21; Be positioned at the cavity 22 on pedestal 21; Be contained in the thermocouple 20 in cavity 22 via pedestal 21 one end, be arranged at the sealing ring 23 of thermocouple 20 and pedestal 21 junctions, in described thermocouple 20, be filled with in advance inert gas; Be positioned at the inert gas arrangement for detecting 27 of pedestal other end pipeline 26; The alarm triggering device 28 being connected with described inert gas arrangement for detecting 27.
Described thermocouple 20 is roughly L-shaped, it is made up of outer quartz ampoule and inner thermocouple wire, in the present embodiment, the corner of the outer quartz ampoule of described thermocouple 20 adopts right-angle design, right-angle design can increase the thickness of the tube wall of corner, therefore can increase the shear stress that the outer quartz ampoule of corner can bear, thereby avoid the fracture of outer quartz ampoule corner.
In described thermocouple 20, be filled with in advance inert gas, the amount of inert gas being filled with by the air in thermocouple 20 discharge all of limit.The detection when inert gas being filled with in advance in thermocouple 20 breaks for thermocouple 20, therefore, the inert gas being filled with should be for ease of the inert gas detecting.Because helium has strong diffusivity, penetration capacity is stronger, is easy to catch, and leak source is had to good Detection capability, and therefore, in the present embodiment, preferably, the inert gas being filled with in advance in thermocouple 20 is helium.
Described thermocouple 20 has pressure control valve 25 with sealing ring 23 arranged outside of pedestal 21 junctions, ensures that by described pressure control valve 25 inert gas in thermocouple 20 is full of all the time, does not leave air.
The outer end (i.e. one end of close pressure valve) of described thermocouple 20 is connected with inert gas source by gas pipeline, once thermocouple 20 breaks, inert gas source just can be filled with inert gas for thermocouple 20 by pressure control valve 25.Fig. 2 b can detect thermocouple in the device of the chamber vacuum degree schematic diagram that breaks in the present embodiment, from Fig. 2 a and Fig. 2 b, in the time that thermocouple 20 breaks, the inert gas being filled with in advance in thermocouple 20 will be leaked in cavity 22 from thermocouple rent 24, and simultaneously, because thermocouple 20 internal pressures diminish, pressure control valve 25 is opened, and the gas of inert gas source is filled with thermocouple 20 and cavity 22.Be filled with under being constantly filled with of inert gas follow-up, inert gas in thermocouple 20 forms inert gas flow 29 from top to bottom by thermocouple rent 24, make inert gas enter pedestal 21 other end pipelines 26 via cavity 22, the inert gas arrangement for detecting 27 being arranged in pedestal 21 other end pipelines 26 detects, and then trigger alarm trigger equipment 28, on board, show that corresponding warning message is warned.
It should be noted that, because inert gas arrangement for detecting 27 is positioned at pedestal 21 other end pipeline 26 inside, in the schematic diagram of the device of the chamber vacuum the detected degree of reality, can not directly observe inert gas arrangement for detecting 27, just be drawn for the position of inert gas arrangement for detecting 27 is described here.
Concrete, in the situation of breaking due to thermocouple 20, the amount of inert gas being filled with by inert gas source is larger, therefore the inert gas source that the outer end of thermocouple 20 (i.e. one end of close pressure valve) connects should be the inert gas source of a kind of relatively general cheapness, easy acquisition.In the present embodiment, preferably, inert gas source is nitrogen gas source.
Concrete, in the present embodiment, under the prerequisite that the inert gas being filled with in advance in thermocouple 20 is preferably helium, being positioned at pedestal 21 other end pipelines 26 inert gas arrangement for detecting 27 is above helium arrangement for detecting.Also can be the arrangement for detecting of other kind inert gases.
Concrete, in the time that thermocouple 20 breaks, the indifferent gas cognition of thermocouple 20 leaks in cavity 22 and pedestal 21 other end pipelines 26, if inert gas arrangement for detecting 27 detects inert gas, after trigger alarm trigger equipment 28, can on board, show in many ways that corresponding warning message is warned, for example, it can be the warning lamp flicker of alarm triggering device, also can, for alarm triggering device sends early warning sound, when can also glimmering for the warning lamp of the triggering kitchen apparatus of reporting to the police, send early warning sound etc.
In sum, in the utility model, first in thermocouple, be filled with in advance inert gas, and the arrangement for detecting of corresponding inert gas is installed on pedestal other end pipeline, once this just ensures that thermocouple breaks, the inert gas being filled with in advance in thermocouple will enter cavity and the inert gas arrangement for detecting that is installed on pedestal other end pipeline detects, and then triggering is attached thereto the alarm triggering device connecing, on board, demonstrate corresponding warning message, the breaking of discovery thermocouple that can be promptly and accurately; Simultaneously, the outer end (i.e. one end of close pressure valve) of thermocouple is connected with inert gas source, and there is pressure control valve in the sealing ring arranged outside of thermocouple and pedestal junction, once this just ensures that thermocouple breaks, and under the adjusting of pressure control valve, is filled with inert gas in inert gas source thermoelectric couple, being filled with of high-purity inert gas, avoid the thermocouple air in situation that breaks to enter cavity, ensured the relative clean of cavity, reduced the risk of product rejection.
Above-described embodiment is illustrative principle of the present utility model and effect thereof only, but not for limiting the utility model.Any person skilled in the art scholar all can, under spirit of the present utility model and category, modify or change above-described embodiment.Therefore, have in technical field under such as and conventionally know that the knowledgeable modifies or changes not departing from all equivalences that complete under spirit that the utility model discloses and technological thought, must be contained by claim of the present utility model.
Claims (6)
1. the device that can detect chamber vacuum degree, is characterized in that, described device at least comprises:
Pedestal;
Be positioned at the cavity on pedestal;
Be contained in the thermocouple in cavity via pedestal one end, be arranged at the sealing ring of thermocouple and pedestal junction, in described thermocouple, be filled with in advance inert gas;
Be positioned at the inert gas arrangement for detecting of pedestal other end pipeline;
The alarm triggering device being connected with described inert gas arrangement for detecting.
2. the device of detecting chamber vacuum degree according to claim 1, is characterized in that: described thermocouple and pedestal junction are provided with the pressure control valve that the inert gas for ensureing in thermocouple is full of all the time.
3. the device of detecting chamber vacuum degree according to claim 1, is characterized in that: the inert gas being filled with in advance in described thermocouple is helium.
4. the device of detecting chamber vacuum degree according to claim 1, is characterized in that: the outer end of described thermocouple is connected with inert gas source, and when thermocouple breaks, inert gas source is that thermocouple is filled with inert gas by pressure control valve.
5. the device of detecting chamber vacuum degree according to claim 4, is characterized in that: described inert gas source is nitrogen gas source.
6. the device of detecting chamber vacuum degree according to claim 3, is characterized in that: described inert gas arrangement for detecting is helium arrangement for detecting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420262000.4U CN203850259U (en) | 2014-05-21 | 2014-05-21 | Device capable of detecting vacuum degree of cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420262000.4U CN203850259U (en) | 2014-05-21 | 2014-05-21 | Device capable of detecting vacuum degree of cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203850259U true CN203850259U (en) | 2014-09-24 |
Family
ID=51563242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420262000.4U Expired - Fee Related CN203850259U (en) | 2014-05-21 | 2014-05-21 | Device capable of detecting vacuum degree of cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203850259U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110767568A (en) * | 2018-07-26 | 2020-02-07 | 北京北方华创微电子装备有限公司 | Pressure regulating assembly, lower electrode device, process chamber and semiconductor processing equipment |
-
2014
- 2014-05-21 CN CN201420262000.4U patent/CN203850259U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110767568A (en) * | 2018-07-26 | 2020-02-07 | 北京北方华创微电子装备有限公司 | Pressure regulating assembly, lower electrode device, process chamber and semiconductor processing equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140924 Termination date: 20190521 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |