CN203829881U - PSA (Pressure Swing Adsorption) technology based high-purity and high-pressure gas production device - Google Patents
PSA (Pressure Swing Adsorption) technology based high-purity and high-pressure gas production device Download PDFInfo
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- CN203829881U CN203829881U CN201420142395.4U CN201420142395U CN203829881U CN 203829881 U CN203829881 U CN 203829881U CN 201420142395 U CN201420142395 U CN 201420142395U CN 203829881 U CN203829881 U CN 203829881U
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Abstract
The utility model provides a PSA (Pressure Swing Adsorption) technology based high-purity and high-pressure gas production device. The PSA technology based high-purity and high-pressure gas production device comprises a gas source compressor which is communicated with a gas source buffer tank through a gas-liquid separator A, a refrigeration dryer, a gas-liquid separator B and a filter A. The PSA technology based high-purity and high-pressure gas production device is characterized in that a position which is located between the filter A and the gas source buffer tank and is closely adjacent to the gas source buffer tank is provided with a back pressure valve A, wherein the upstream pressure can be controlled by the back pressure valve A; a gas source bypass is arranged between the filter A and the back pressure valve A; the gas source buffer tank is communicated with the gas source bypass through a gas source buffer tank exhaust pipeline and a one-way valve A; the gas source bypass is communicated with a PSA gas separation device through a valve A; the PSA gas separation device is communicated with a product gas buffer tank through an output pipeline and a back pressure valve B; the product gas buffer tank is connected with a back pressure valve C through a filter B; a product gas output device is connected behind the back pressure valve C. According to the PSA technology based high-purity and high-pressure gas production device, the system preparation time is short, the qualified products gas can be rapidly separated out at any time, the running cost is low, the adaptability to different working conditions is high, and the working environment is friendly.
Description
Technical field
The utility model relates to gas compressing equipment, possesses and relates to a kind of high-purity high compacting gas equipment.
Background technology
Separated (PSA) equipment of PSA Gas that industrial gasses are separated conventional is generally by feed gas preprocessing devices such as source of the gas compressor, gas-liquid separator, freezing type drier, filters, pressure swing adsorption gas separation device, purity of product gas analyzer, dry (purifying) device, supercharger, and be the compositions such as balance sysmte gas flow rate and the source of the gas surge tank that reduces its system pressure fluctuation, gas product surge tank (process tank), the qualified gas product that can export in order to control pressure swing adsorption gas separation device, only have by purity of product gas analyzer, uniting and adjustment between pressure-reducing valve and other valve, determine after the flow of output products gas, and while reaching certain operating pressure in system, pressure swing adsorption gas separation device could be exported qualified gas product, because pressure varying adsorption gas separating equipment is in the stage of starting working (or be called startup stage), the gas product of output does not all reach purity requirement, need follow-up output can reach the gas product of purity requirement, to gas product surge tank and the intrasystem gas product that does not reach in advance purity requirement, fill and convert, displacement, can only be by vain emptying of substandard product gas discharge pipe.
In order to reduce the unit cost of gas product, people improve pressure swing adsorption gas separation device, as the PSA high efficiency opening device of China Patent No. UN 201664568 U, also can only carry out the utilization of poor efficiency to starting the underproof gas product of working stage, can not obviously shorten the system time of pressure swing adsorption gas separation device, particularly at the purity of product gas of output, require when very high, system time can not obviously shorten, and even will surpass 120min.In order to shorten the system time of pressure swing adsorption gas separation device, people improve pressure swing adsorption gas separation device, as the pressure-swing absorption apparatus of the quick rising adsorption column pressure of China Patent No. UN 201394410, by increasing flow controller part, improve traditional handicraft, shorten the pressure rising time of pressure-swing absorber, improve fast the operating pressure of adsorption tower, improve the gas product quality of variable-pressure adsorption equipment, but can not obviously shorten system time.
Pressure varying adsorption gas separating equipment is of many uses, also a lot of for the improvement of pressure varying adsorption gas separating equipment in the last few years, but actual conditions are, do not provide the gas separation system control method that effective system time is short, can isolate fast at any time qualified products gas.Meanwhile, user requires pressure varying adsorption gas separating equipment to adapt under various working condition to work, environmentally friendly, and requires to reduce equipment energy consumption, reduces operating cost.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of high-purity, high compacting gas equipment based on PSA technology, its system time is short, can isolate fast at any time qualified products gas, operating cost is low, strong to different adaptability for working condition, and working environment is friendly.
For achieving the above object, high-purity, high compacting gas equipment based on PSA technology of the present utility model, comprise source of the gas compressor, described source of the gas compressor is communicated with source of the gas surge tank through gas-liquid separator A, freezing type drier, gas-liquid separator B, filter A, it is characterized in that: between filter A and source of the gas surge tank, be close to source of the gas surge tank place and be provided with the counterbalance valve A that can control upstream pressure; Between filter A and counterbalance valve A, be provided with source of the gas bypass, described source of the gas surge tank communicates with source of the gas bypass through source of the gas surge tank gas exhaust piping, check valve A; Described source of the gas bypass is communicated with pressure swing adsorption gas separation device through valve A; Described pressure swing adsorption gas separation device is communicated with gas product surge tank through output pipe, counterbalance valve B, and described gas product surge tank is connected with counterbalance valve C through filter B, after described counterbalance valve C, is connected with gas product output device.
Described gas product output device comprises at least one in low voltage product gas output device and middle high-pressure gas product output device; Described low voltage product gas output device comprises the valve C being communicated with counterbalance valve C through pipeline; Described middle high-pressure gas product output device comprises and the direct-connected valve D of counterbalance valve C, the gas product supercharger that is connected with valve D, is provided with check valve C and valve F after gas product supercharger; Between valve F and check valve C, pipeline is set and is communicated with valve E.
Between described counterbalance valve C and valve D, be provided with valve L, the blow-off pipe of gas product surge tank and valve L is pooled to the secondary air inlet of source of the gas compressor through gas recovery pipe road and check valve D.
After described valve F, be provided with purification devices, described purification devices is communicated with valve G; On pipeline between purification devices and valve G, through valve H, be connected with middle high-pressure gas cylinder.
Described middle high-pressure gas cylinder recharges pipeline and is communicated with the export pipeline of counterbalance valve B through decompression, and described decompression recharges and on pipeline, is provided with valve I and pressure-reducing valve A.
Between described pressure swing adsorption gas separation device and counterbalance valve B, be parallel with displacement gas bypass, in described displacement gas bypass, be provided with check valve B and choke valve.
The blow-off pipe of described gas-liquid separator A, freezing type drier, gas-liquid separator B, filter A and the exhaust pipe of source of the gas surge tank are pooled to waste liquid separated and collected device, on described waste liquid separated and collected device, are provided with silencer.
Between described filter B and counterbalance valve C, be provided with purity of product gas analyzer.
At described counterbalance valve C, by valve B, pressure-reducing valve B, be connected with the flowmeter of testing product gas.
Adopted after technique scheme, its advantage applies exists:
High-purity based on PSA technology of the present utility model, when high compacting gas equipment is started working, unstripped gas enters before source of the gas surge tank, through counterbalance valve back pressure, rise to the minimum operating pressure of pressure swing adsorption gas separation device, under higher pressure condition, the impurity such as the moisture in unstripped gas, by gas-liquid separator A, freezing type drier, gas-liquid separator B, the effective pre-separation of filter A, make pressure swing adsorption gas separation device in the stage of starting working, just obtain the unstripped gas meeting the demands, thereby make pressure swing adsorption gas separation device in the stage of starting working, with regard to reach the gas product of purity requirement for isolating, created possibility.
After equipment is all pressed, through pre-separation, fall the unstripped gas of the impurity such as water, not by the larger source of the gas surge tank of volume, but be directly inputted to pressure swing adsorption gas separation device, pressure swing adsorption gas separation device internal pressure fast lifting, (unstripped gas that surpasses operating pressure, part enters source of the gas surge tank, for pressure swing adsorption gas separation device is all pressed and boosts and prepare fast next time to meet and exceed rapidly operating pressure.), make to reduce by the raw gas flow of pressure swing adsorption gas separation device, extend again unstripped gas by the time of pressure swing adsorption gas separation device simultaneously, improve the adsorption efficiency of pressure swing adsorption gas separation device, make absorption, separation is more thorough, the purity of product gas of output is higher, and system time is shorter, can isolate fast at any time qualified products gas.
Counterbalance valve B is set before gas product surge tank, only when the pressure of pressure swing adsorption gas separation device surpasses minimum operating pressure, just understand the gas product from pressure swing adsorption gas separation device output separation, the in the situation that of avoiding pressure varying adsorption gas separating equipment also not set up effective back pressure in the stage system rear end of starting working, there is the underproof situation of output products gas, the gas product of guaranteeing pressure swing adsorption gas separation device output, meets purity requirement all the time.
The gas product of pressure swing adsorption gas separation device output, after gas product surge tank is for user or supercharging for user.When user has change to the purity of product gas of demand, or pressure swing adsorption gas separation device work-yard converts while causing operating mode (ambient atmosphere pressure, temperature) to change, and source of the gas compressor performance variation material gas quantity is when diminish, by the adjusting to counterbalance valve, make pressure swing adsorption gas separation device can be in all the time work in normal working pressure range, thereby guarantee the gas product satisfactory purity all the time of output, thereby the utility model possesses the advantage that adaptability for working condition is good.Also avoided in the situation that gas source and flow amount has change, press the testing result of purity of product gas analyzer and adjust gas product flow, Indirect method pressure swing adsorption gas separation device makes output products gas purity to the difficulty in the scope requiring, also avoided the difficulty because adjusting, pressure swing adsorption gas separation device is worked and the waste of the energy that causes for a long time under the condition that exceeds purity of product gas requirement, thereby the utility model use cost is low.
The gas product of pressure swing adsorption gas separation device output, after the supercharging of gas product supercharger, further disposes the impurity such as moisture wherein and carbon dioxide by purification devices, by mesohigh gas cylinder buffering, be the more highly purified gas product of user's conveying.The valve of everywhere system being exported outward on the way by pipeline, for user carries low pressure, or high pressure, or the gas product after repurity, or by pipeline on the way valve everywhere, carry out intercommunication with the original pressure swing adsorption gas separation device of user, gas product or commodity gas for the original pressure swing adsorption gas separation device output of user, carry out supercharging, or supercharging, purifying, realize user's multiple demand.
The waste liquid producing carries out separation, storage by waste liquid separated and collected device, is convenient to concentrate process, and waste gas is by the silencer discharge of eliminating the noise, and realizes that it is environmentally friendly.
Accompanying drawing explanation
Fig. 1 is the structural representation of high-purity, the high compacting gas apparatus embodiments one based on PSA technology of the present utility model;
Fig. 2 is the structural representation of high-purity, the high compacting gas apparatus embodiments two based on PSA technology of the present utility model;
Fig. 3 is the structural representation of high-purity, the high compacting gas apparatus embodiments three based on PSA technology of the present utility model.
The specific embodiment
Below in conjunction with accompanying drawing, the utility model is described further.
Embodiment mono-
As shown in Figure 1, high-purity, the high compacting gas equipment based on PSA technology of the present embodiment, comprise source of the gas compressor 1, described source of the gas compressor 1 is communicated with source of the gas surge tank 8 through gas-liquid separator A2, freezing type drier 3, gas-liquid separator B4, filter A5, is close to source of the gas surge tank 8 places and is provided with the counterbalance valve A7 that can control upstream pressure between filter A5 and source of the gas surge tank 8; Between filter A5 and counterbalance valve A7, be provided with source of the gas bypass 6, described source of the gas surge tank 8 communicates with source of the gas bypass 6 through source of the gas surge tank gas exhaust piping 9, check valve A10; Described source of the gas bypass 6 is communicated with pressure swing adsorption gas separation device 12 through valve A11; Described pressure swing adsorption gas separation device 12 is communicated with gas product surge tank 20 through output pipe 15, counterbalance valve B18, and described gas product surge tank 20 is connected with counterbalance valve C23 through filter B21, after described counterbalance valve C23, is connected with gas product output device.
Described pressure swing adsorption gas separation device 12 comprise work in coordination, pressure-swing absorber A13 and the pressure-swing absorber B14 of alternation.
Described gas product output device comprises low voltage product gas output device and middle high-pressure gas product output device.In the utility model, gas product output device is arranged on after described counterbalance valve C23.As long as the pressure that the equipment of reaching can normally be worked, what equipment was exported must be just qualified gas product.If do not reach the operating pressure of equipment, equipment is output products gas not, does not have the system of underproof gas product contaminated equipment and user's gas pipeline network, equipment of the present utility model, and environmental suitability is very strong.
Described low voltage product gas output device comprises the valve C26 being communicated with counterbalance valve C23 through pipeline; By valve C26, export low pressure qualified products gas for user.
Described middle high-pressure gas product output device comprises and the direct-connected valve D27 of counterbalance valve C23, the gas product supercharger 28 that is connected with valve D27, is provided with check valve C29 and valve F31 after gas product supercharger 28; Between valve F31 and check valve C29, pipeline is set and is communicated with valve E30.By valve E30, export middle high-pressure qualified products gas for user.
After valve F31, be provided with purification devices 32, described purification devices 32 is communicated with valve G33, on the pipeline between purification devices 32 and valve G33, through valve H34, is connected with middle high-pressure gas cylinder 35.By the dry processing of purifying further of 32 pairs of middle high-pressure qualified products gas of purification devices, obtain high-purity gas product; High-purity gas product, by valve H34, enter middle high-pressure gas cylinder 35, the high purity product being pressurized is so incensed that to fill bottle storage, or after cushioning by middle high-pressure gas cylinder 35, the high-purity gas product of middle high-pressure is exported by valve G33, for user's middle high-pressure gas cylinder is inflated or directly for user.
In the present embodiment, the blow-off pipe of gas-liquid separator A2, freezing type drier 3, gas-liquid separator B4, filter A5 collects waste liquid separated and collected device 38, the exhaust pipe of source of the gas surge tank 8 is also pooled to waste liquid separated and collected device 38, be convenient to waste liquid centralized stores and process, on described waste liquid separated and collected device 38, be provided with silencer 39.
The exhaust pipe of source of the gas surge tank 8, gas product surge tank 20, is pooled on waste liquid separated and collected device 38, and carries out waste gas noise elimination discharge by silencer 39.Can in the situation that stage of starting working of equipment or may occur in the course of the work exporting substandard product gas the substandard product gas of output is discharged in time, thereby shorten system time.
In the present embodiment, between described filter B 21 and counterbalance valve C23, be provided with purity of product gas analyzer 22.
At described counterbalance valve C23, by valve B24, pressure-reducing valve B40, be connected with the flowmeter 25 of testing product gas.
Embodiment bis-
As shown in Figure 2, the difference of the present embodiment and embodiment mono-is:
One, between described pressure swing adsorption gas separation device 12 and counterbalance valve B18, be parallel with displacement gas bypass 16, in described displacement gas bypass 16, be provided with check valve B17 and choke valve 19.Counterbalance valve B18 place before gas product surge tank 20, displacement gas bypass 16 in parallel is set, by the throttle orifice of the check valve B17 in displacement gas bypass and choke valve 19, by the qualified products gas being stored in gas product surge tank 20, after pressure-swing absorber A13 or pressure-swing absorber B14 all press, again pressure-variable adsorption top of tower is pressed forward with the gas of impurity, all pressing under the condition of (lower than operating pressure) simultaneously, displace the impurity of pressure-variable adsorption top of tower absorption, reduce the gaseous impurity concentration containing in adsorbent, make pressure-variable adsorption top of tower in strong adsorbed state, the purity of product gas of further guaranteeing pressure swing adsorption gas separation device output is higher.
Two,, on the pipeline between counterbalance valve C23 and valve D27, be set to the blow-off pipe of waste liquid separated and collected device 38, and valve L45 is set on pipeline.Its object and embodiment mono-are similar, can in the situation that stage of starting working of equipment or may occur in the course of the work exporting substandard product gas the substandard product gas of output is discharged in time, thereby shorten system time; Can play blowdown effect in addition.
Embodiment tri-
As shown in Figure 3, in the present embodiment, between valve H34 and middle high-pressure gas cylinder 35 between check valve B17 and gas product surge tank 20, decompression being set and recharging pipeline 46, reducing pressure to recharge arranges valve I36, pressure-reducing valve A37 on pipeline 46; The high purity product gas that device separates goes out, is stored in middle high-pressure gas cylinder 35; When needs are when producing highly purified gas product once starting shooting, by the high pressure high purity product gas being stored in middle high-pressure gas cylinder 35, through pressure-reducing valve A37 reduced pressure delivery in gas product surge tank 20, under duty and condition of work when realizing pressure swing adsorption gas separation device being just in normal separation, output high purity product gas when a start, thereby further shortened system time, reduced operating cost.
The blow-off pipe of gas product surge tank 20 and valve L45, is pooled to the secondary air inlet of source of the gas compressor 1, forms gas recovery pipe road 43, and check valve D44 is set on gas recovery pipe road 43, prevents gas backstreaming, realizes the recycling of defective gas (waste gas).
High-purity, high compacting gas equipment based on PSA technology of the present utility model, in normal work, as long as there is the low pressure unstripped gas that reaches equipment job requirement, equipment just can produce qualified gas product, equipment is without system time, even do not arrange and automatically unloads place system because of the indispensable substandard product gas of the long-time discharge of need; In the debug process of only not dispatching from the factory at equipment, and equipment is after maintenance, the system flow space of equipment has in the situation of unstripped gas or impure gas product, the gas product of manufacturing in the time of just need to starting shooting, the unstripped gas in device systems space or impure gas product are replaced, due to high for the purity of product gas of replacing, need the time of displacement short, therefore system time is also very short.
In the process of high-purity, high compacting gas equipment based on PSA technology of the present utility model for separating of output products gas, the moisture dust of generation is able to separation, collection, is convenient to concentrate carry out environmental protection treatment, and waste gas discharges by noise elimination, friendly to working environment.
According to the utility model, by controlling the pressure in technological process, guarantee that high-purity, the high compacting gas device fabrication based on PSA technology of the present utility model goes out the high purity product gas of middle high-pressure, guarantee meeting under the pressure condition of purity requirement, the flow of equipment output high purity product gas is always in optimum state simultaneously.The flow of having avoided existing equipment to export by continuous adjustment equipment, control the quality (purity) of gas product, or the purity situation of looking gas product, by continuous adjusting unstripped gas gas source and flow amount, control the output flow of gas product, and cause the pressure in existing equipment to occur wide fluctuations, make existing equipment be in for a long time unsure state.Also the purity of product gas of having avoided existing equipment output is when requiring, because because regulating difficulty, (gas product surge tank 20 volumes are larger, the gas product of exporting with the delivery outlet of pressure swing adsorption gas separation device 12 has larger hysteresis quality, in addition the detection hysteresis quality of purity of product gas analyzer 22, the purity that can not effectively regulate in good time, detect output products gas, the adjusting time is long.), and no longer carry out the adjusting of purity of product gas, and make the purity of product gas of output, be in for a long time the state higher than index request, thereby bring unnecessary energy waste.
Because the utility model is by controlling the pressure in technological process, guarantee that high-purity, the high compacting gas equipment based on PSA technology of the present utility model, in very short time, produces the high purity product gas of middle high-pressure.When equipment is in hypobaric, or source of the gas pipeline has leakage phenomenon, or the source of the gas compressor performance variation of equipment, and capacity reduces, as long as reach the minimum pressure that equipment can normally be worked, equipment output must be just qualified gas product.If the operating pressure that the equipment that do not reach is minimum, output products gas, does not have the system of underproof gas product contaminated equipment and user's gas pipeline network, equipment of the present utility model, and environmental suitability is very strong.
High-purity, high compacting gas equipment based on PSA technology of the present utility model, the gas product that pressure swing adsorption gas separation device 12 is manufactured, not step-down in the process that is transported to gas product supercharger 28, gas product is not in the situation that being depressurized, more be conducive to carry, in the situation that particularly gas product needs to use after supercharging storage or supercharging, avoided the very large energy waste causing because of repressurize after reducing pressure.
Claims (9)
1. high-purity, the height based on PSA technology suppressed gas equipment, comprise source of the gas compressor (1), described source of the gas compressor (1) is through gas-liquid separator A(2), freezing type drier (3), gas-liquid separator B(4), filter A(5) be communicated with source of the gas surge tank (8), it is characterized in that: at filter A(5) and source of the gas surge tank (8) between be close to source of the gas surge tank (8) and locate to be provided with the counterbalance valve A(7 that can control upstream pressure); At filter A(5) and counterbalance valve A(7) between be provided with source of the gas bypass (6), described source of the gas surge tank (8) is through source of the gas surge tank gas exhaust piping (9), check valve A(10) communicate with source of the gas bypass (6); Described source of the gas bypass (6) is through valve A(11) be communicated with pressure swing adsorption gas separation device (12); Described pressure swing adsorption gas separation device (12) is through output pipe (15), counterbalance valve B(18) be communicated with gas product surge tank (20), described gas product surge tank (20) is through filter B(21) be connected with counterbalance valve C(23), described counterbalance valve C(23) after be connected with gas product output device.
2. high-purity, the high compacting gas equipment based on PSA technology as claimed in claim 1, is characterized in that: described gas product output device comprises at least one in low voltage product gas output device and middle high-pressure gas product output device; Described low voltage product gas output device comprises through pipeline and counterbalance valve C(23) the valve C(26 that is communicated with); Described middle high-pressure gas product output device comprises and counterbalance valve C(23) direct-connected valve D(27), with valve D(27) the gas product supercharger (28) that is connected, after gas product supercharger (28), be provided with check valve C(29) and valve F(31); At valve F(31) and check valve C(29) between, pipeline and valve E(30 are set) be communicated with.
3. high-purity, the height based on PSA technology as claimed in claim 2 suppressed gas equipment, it is characterized in that: described counterbalance valve C(23) and valve D(27) between be provided with valve L(45), gas product surge tank (20) and valve L(45) blow-off pipe through gas recovery pipe road (43) and check valve D(44) be pooled to the secondary air inlet of source of the gas compressor (1).
4. high-purity, the high compacting gas equipment based on PSA technology as claimed in claim 2, is characterized in that: at described valve F(31) after be provided with purification devices (32), described purification devices (32) and valve G(33) be communicated with; Purification devices (32) and valve G(33) between pipeline on through valve H(34) be connected with middle high-pressure gas cylinder (35).
5. high-purity, the height based on PSA technology as claimed in claim 4 suppressed gas equipment, it is characterized in that: described middle high-pressure gas cylinder (35) recharges pipeline (46) and counterbalance valve B(18 through decompression) export pipeline be communicated with, described decompression recharges on pipeline (46) and is provided with valve I(36) and pressure-reducing valve A(37).
6. high-purity, the height based on PSA technology as described in claim 1,2,3,4 or 5 suppressed gas equipment, it is characterized in that: described pressure swing adsorption gas separation device (12) and counterbalance valve B(18) between be parallel with displacement gas bypass (16), in described displacement gas bypass (16), be provided with check valve B(17) and choke valve (19).
7. high-purity, the height based on PSA technology as described in claim 1,2,3,4 or 5 suppressed gas equipment, it is characterized in that: described gas-liquid separator A(2), freezing type drier (3), gas-liquid separator B(4), filter A(5) blow-off pipe and the exhaust pipe of source of the gas surge tank (8) be pooled to waste liquid separated and collected device (38), on described waste liquid separated and collected device (38), be provided with silencer (39).
8. high-purity, the high compacting gas equipment based on PSA technology as described in claim 1,2,3,4 or 5, is characterized in that: at described filter B (21) and counterbalance valve C(23) between be provided with purity of product gas analyzer (22).
9. high-purity, the high compacting gas equipment based on PSA technology as described in claim 1,2,3,4 or 5, is characterized in that: at described counterbalance valve C(23) by valve B(24), pressure-reducing valve B(40) be connected with the flowmeter (25) of testing product gas.
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CN201420142395.4U CN203829881U (en) | 2014-03-27 | 2014-03-27 | PSA (Pressure Swing Adsorption) technology based high-purity and high-pressure gas production device |
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CN201420142395.4U CN203829881U (en) | 2014-03-27 | 2014-03-27 | PSA (Pressure Swing Adsorption) technology based high-purity and high-pressure gas production device |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103894036A (en) * | 2014-03-27 | 2014-07-02 | 安徽华晶机械股份有限公司 | PSA technology-based high-purity and high-pressure gas production equipment |
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2014
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103894036A (en) * | 2014-03-27 | 2014-07-02 | 安徽华晶机械股份有限公司 | PSA technology-based high-purity and high-pressure gas production equipment |
CN103894036B (en) * | 2014-03-27 | 2015-11-18 | 安徽华晶机械股份有限公司 | Based on high-purity, the high compacting gas equipment of PSA technology |
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