CN203824976U - Oxygen content detection device - Google Patents
Oxygen content detection device Download PDFInfo
- Publication number
- CN203824976U CN203824976U CN201320802618.0U CN201320802618U CN203824976U CN 203824976 U CN203824976 U CN 203824976U CN 201320802618 U CN201320802618 U CN 201320802618U CN 203824976 U CN203824976 U CN 203824976U
- Authority
- CN
- China
- Prior art keywords
- oxygen content
- oxygen
- silicon chip
- control system
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 105
- 239000001301 oxygen Substances 0.000 title claims abstract description 105
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 105
- 238000001514 detection method Methods 0.000 title abstract description 20
- 239000000463 material Substances 0.000 claims description 7
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- 239000010935 stainless steel Substances 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 43
- 229910052710 silicon Inorganic materials 0.000 abstract description 43
- 239000010703 silicon Substances 0.000 abstract description 43
- 238000000034 method Methods 0.000 abstract description 12
- 239000004065 semiconductor Substances 0.000 abstract description 7
- 238000005516 engineering process Methods 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 9
- 238000012360 testing method Methods 0.000 description 9
- 238000012545 processing Methods 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen(.) Chemical compound [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- VYMDGNCVAMGZFE-UHFFFAOYSA-N phenylbutazonum Chemical compound O=C1C(CCCC)C(=O)N(C=2C=CC=CC=2)N1C1=CC=CC=C1 VYMDGNCVAMGZFE-UHFFFAOYSA-N 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to an oxygen content detection device. The oxygen content detection device comprises an oxygen analyzer and one or more control systems, wherein the oxygen analyzer is connected with a detection region by the control system. The oxygen content detection device can detect the oxygen content of a clean chip-transferring area of a microenvironment, can detect the content of oxygen inside a first silicon chip inlet/outlet area and a second silicon chip inlet/outlet area, meets the requirement of manufacture procedures of the semiconductor technology, has a simple structure and can reduce the equipment cost.
Description
Technical field
The utility model relates to semiconductor manufacturing equipment technical field, relates in particular to a kind of oxygen content detector.
Background technology
In semiconductor manufacturing equipment, requiring needs lower oxygen level at silicon chip exposed region, with the Si wafer quality that guarantees to produce, therefore realizes oxygen content in silicon chip exposed region and accurately detects most important.
The exposed region of silicon chip has two parts, and the one, the microenvironment of lifting boat passes sheet clean area, and another is that microenvironment passes sheet clean area and silicon chip transmits the region, silicon chip gateway between box.Traditional semiconductor equipment adopts an oxygen analyser, only detects the microenvironment region of lifting boat, does not detect the oxygen content numerical value in region, silicon chip gateway.When using classic method, if the oxygen content in region, silicon chip gateway is very high, do not reach technical requirement, the silicon chip being transmitted will be subject to serious quality influence herein, and after the lid in region, silicon chip gateway is opened, also can allow the oxygen content of microenvironment be subject to larger fluctuation, have a strong impact on silicon chip and transmit processing procedure; If adopt two oxygen analysers to detect respectively above region, can greatly increase again the cost of equipment.
Utility model content
(1) technical matters that will solve
The technical problems to be solved in the utility model has been to provide a kind of oxygen content detector, both can meet the oxygen content testing requirement that microenvironment passes sheet clean area, can meet again the oxygen content testing requirement that microenvironment passes the region, silicon chip gateway between sheet clean area and silicon chip transmission box, and both can realize single signal piping and control separately, also can realize the detection of going the same way.
(2) technical scheme
In order to solve the problems of the technologies described above, the utility model provides a kind of oxygen content detector, comprises oxygen analyser and one or more control system, and described oxygen analyser is connected with surveyed area by described control system.
Wherein, described control system is also connected with controller, and described controller is connected with described oxygen analyser.
Wherein, between described oxygen analyser, control system and surveyed area, by pipeline, be tightly connected successively.
Wherein, described control system comprise for control described pipeline break-make switch module and for the execution module of operation switch module, described oxygen analyser is connected with described surveyed area by described switch module, described switch module is connected with described execution module, and described execution module is connected with described controller.
Wherein, described switch module is valve.
Wherein, described execution module is pneumatic actuator.
Wherein, the material of described pipeline is 316L stainless steel.
Wherein, the material of described switch module is 316L stainless steel.
(3) beneficial effect
Technique scheme of the present utility model has following beneficial effect: oxygen content detector of the present utility model comprises oxygen analyser and one or more control system, oxygen analyser is for the oxygen content in analyzing and testing region, oxygen analyser is connected with surveyed area by one or more control system, thereby the every bit in assurance surveyed area is all connected on oxygen analyser by a route, thereby by the control system on each route, control the break-make of this route, realize the detection of the oxygen content of the diverse location in surveyed area.Oxygen content detector of the present utility model both can detect microenvironment and pass the oxygen content in sheet clean area, also the oxygen content of the first region, silicon chip gateway and the second silicon chip gateway intra-zone can be detected, meet the requirement of semiconductor technology processing procedure, simple in structure, also can reduce equipment cost.
Accompanying drawing explanation
Fig. 1 is the fundamental diagram of the oxygen content detector of the utility model embodiment.
Wherein, 1: controller; 2: oxygen analyser; 3: the first topworkies; 4: the second topworkies; 5: the first valves; 6: the second valves; 7: the three valves; Detect mouth at 8: the first; Detect mouth at 9: the second; Within 10: the three, detect mouth; 11: pipeline; Within 12: the first, silicon chip transmits box; 13: San topworks; Region, 14: the first silicon chip gateways; Region, 15: the second silicon chip gateways; 16: microenvironment passes sheet clean area; Within 17: the second, silicon chip transmits box.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples are used for illustrating the utility model, but can not be used for limiting scope of the present utility model.
In description of the present utility model, except as otherwise noted, the implication of " a plurality of " is two or more; Except as otherwise noted, the implication of " nick shaped " is the shape except cross section is concordant.Term " on ", orientation or the position relationship of the indication such as D score, " left side ", " right side ", " interior ", " outward ", " front end ", " rear end ", " head ", " afterbody " be based on orientation shown in the drawings or position relationship, only the utility model and simplified characterization for convenience of description, rather than indicate or imply that the device of indication or element must have specific orientation, with specific orientation, construct and operation, therefore can not be interpreted as restriction of the present utility model.In addition, term " first ", " second ", " the 3rd " etc. are only for describing object, and can not be interpreted as indication or hint relative importance.
As shown in Figure 1, the oxygen content detector of the present embodiment comprises oxygen analyser 2 and one or more control system, oxygen analyser 2 is for the oxygen content in analyzing and testing region, oxygen analyser 2 is connected with surveyed area by one or more control system, thereby the every bit in assurance surveyed area is all connected on oxygen analyser 2 by a route, thereby by the control system on each route, control the break-make of this route, realize the detection of the oxygen content of the diverse location in surveyed area.
Control system is also connected with controller 1, controller 1 is connected with oxygen analyser 2, both can operation control system by controller 1, determine opening or the closure of this route, also can control the analyzing and testing that gas in 2 pairs of surveyed areas of oxygen analyser carries out oxygen content, to realize the detection of the oxygen content of the diverse location in surveyed area, make testing process automaticity high, simple to operation.
Consider the practicality of the oxygen content detector of the present embodiment, preferably, the feature such as controller 1 is selected PLC controller, and it has simple to operation, and cost performance is high, and antijamming capability is strong, easy to maintenance.
In the present embodiment, between oxygen analyser 2, control system and surveyed area, by pipeline 11, be tightly connected successively, guarantee that junction does not have Leakage Gas; Between control system, controller 1 and oxygen analyser, pass through respectively connection, controller 1 both can carry out by operation control system the open and close of pilot piping 11, and the gas that also can control in 2 pairs of surveyed areas of oxygen analyser carries out the detection analysis of oxygen content.
Control system comprise for control described pipeline 11 break-make switch module and for the execution module of operation switch module, oxygen analyser 2 is connected with surveyed area by switch module, switch module is connected with execution module, execution module is connected with controller (1), by controller 1, control execution module, thereby gauge tap module is determined opening or the closure of this route, to realize the detection of zones of different oxygen content.
Practicality and the realizability of considering the oxygen content detector of the present embodiment, preferably, switch module is valve, execution module is pneumatic actuator, all has cost low, simple to operate, adaptable feature.
It should be noted that, switch module, except selecting valve, also can be selected other control modes, as long as meet the requirement of open and close that can pilot piping 11; Execution module, except selecting pneumatic actuator, also can be selected other topworkies, if meet can operation switch module requirement.
The material of pipeline 11 and switch module is 316L stainless steel, guarantees in gas testing process, does not have volatile particles and enter in surveyed area and affect processing quality in pipeline 11 and switch module, also can guarantee the accuracy of oxygen content detection simultaneously.
It should be noted that, the material of pipeline 11 and switch module is except selecting 316L stainless steel, can also select other material, as long as meet, guarantee in gas testing process, in pipeline 11 and switch module, not have that volatile particles enters in surveyed area and the requirement that affects processing quality.
In the present embodiment, surveyed area comprises three parts, be respectively the first region, silicon chip gateway 14, the second region 15, silicon chip gateway and microenvironment and pass sheet clean area 16, oxygen analyser 2 by three control system respectively with three joint areas, form three routes, the gas that the first region, silicon chip gateway 14, the second region 15, silicon chip gateway and microenvironment are passed to sheet clean area 16 is transported to and in oxygen analyser 2, detects analysis; Control system on each route is controlled the break-make of this route, thereby realizes the control that the detection of the oxygen molecule content of this place's gas is analyzed.
In surveyed area, be respectively equipped with the first detection mouth 8, second and detect mouthful the 9 and the 3rd and detect mouthfuls 10, the first and detect mouthfuls 8 and be positioned at the first silicon chip and transmit corresponding the first region, silicon chip gateway 14 of box 12, for detection of the oxygen content in the first region, silicon chip gateway 14; Second detects mouth 9 is positioned at the second silicon chip transmission corresponding the second region, silicon chip gateway 15 of box 17, for detection of the oxygen content in the second region, silicon chip gateway 15; The 3rd detects mouth 10 is positioned at microenvironment biography sheet clean area 16, for detection of microenvironment, passes the oxygen content in sheet clean area 16.
Switch module comprises the first valve 5, the second valve 6 and the 3rd valve 7, execution module comprises the first topworks 3, the second topworks 4 and San topworks 13, the first topworks 3 is connected with the first valve 5, the second topworks 4 is connected with the second valve 6, San topworks 13 is connected with the 3rd valve 7, oxygen analyser 2 is respectively by the first valve 5, the second valve 6 and the 3rd valve 7 and first detect mouth 8, the 3rd detects a mouthful 10 and second detection mouth 9 is connected, thereby by controlling the break-make of the switch module of each route, realize the detection of the oxygen content of the diverse location in surveyed area, the first topworks 3, the second topworks 4 are all connected with controller 1 with San topworks 13, controller 1 is controlled respectively the open and close of the first valve 5, the second valve 6 and the 3rd valve 7 by the first topworks 3, the second topworks 4 and San topworks 13, thereby control the unobstructed of three routes and sealing, and then realize each and detect the function that route is controlled separately.
During use, carry out making technology cross Cheng Qian at silicon chip, the gas displacement that microenvironment is passed in sheet clean area 16 becomes nitrogen, and oxygen molecule content is controlled at below technological requirement.
First by controller 1, send a signal to the first topworks 3 and San topworks 13, the first valve 5 and the 3rd valve 7 are closed, guarantee that the gas in the first region, silicon chip gateway 14 and the second region, silicon chip gateway 15 can not be delivered in oxygen analyser 2, then send a signal to the second topworks 4, the second valve 6 is opened, the route that assurance microenvironment passes in sheet clean area 16 and between oxygen analyser 2 is unobstructed, and carry out purging work, oxygen content detector by the present embodiment detects the oxygen content that the 3rd microenvironment that detects mouthful 10 places passes sheet clean area 16 again, the oxygen content detecting according to oxygen analyser 2, whether the oxygen content that can judge microenvironment biography sheet clean area 16 reaches technological requirement, when this place's oxygen content reaches after technological requirement, can carry out next step technological preparation.
When microenvironment pass the oxygen content of sheet clean area 16 up to standard after, if adopt the first region, silicon chip gateway 14 to pass sheet, by controller 1, controlling the second topworks 4 closes the second valve 6, controlling the first topworks 3 opens the first valve 5, detect the first oxygen content that detects mouthful 8 the first regions, silicon chip gateway 14 that are positioned at and whether meet technological requirement, if do not meet, pass into nitrogen and purge, until the oxygen content in this region reaches technological requirement; If adopt the second region, silicon chip gateway 15 to pass sheet, controlling the first topworks 3 closes the first valve 5, controlling San topworks 13 opens the 3rd valve 7, detect the second oxygen content that detects mouthful 9 the second regions, silicon chip gateway 15 that are positioned at, and the standard in technological requirement by the Control for Oxygen Content in this region in a manner described.
During use, also the first valve 5, the second valve 6 and the 3rd valve 7 can be opened simultaneously, detect the oxygen content of analyzing in three route corresponding regions, in above-mentioned three regions, there is any one region to occur that oxygen content exceeds standard, can be reported to the police in time, then respectively above-mentioned zone is detected, effectively guarantee the processing quality of silicon chip.
Oxygen content in the region that the silicon chip course of work exposes reaches technical requirement, can start to carry out the transport process of silicon chip.
In silicon chip transport process, by controller 1 control execution module, open the first valve 5, the second valve 6 and the 3rd valve 7 and make three routes keep unimpeded, can conveniently monitor the oxygen content in surveyed area, avoiding oxygen content to exceed standard affects technological process.
In sum, the oxygen content detector of the present embodiment comprises oxygen analyser 2 and one or more control system, oxygen analyser 2 is for the oxygen content in analyzing and testing region, oxygen analyser 2 is connected with surveyed area by one or more control system, thereby the every bit in assurance surveyed area is all connected on oxygen analyser 2 by a route, thereby by the control system on each route, control the break-make of this route, realize the detection of the oxygen content of the diverse location in surveyed area.The oxygen content detector of the present embodiment both can detect microenvironment and pass the oxygen content in sheet clean area 16, also the oxygen content of the inside in the first region, silicon chip gateway 14 and the second region, silicon chip gateway 15 can be detected, meet the requirement of semiconductor technology processing procedure, simple in structure, also can reduce equipment cost.
Embodiment of the present utility model provides for example with for the purpose of describing, and is not exhaustively or by the utility model to be limited to disclosed form.Many modifications and variations are apparent for the ordinary skill in the art.Selecting and describing embodiment is for better explanation principle of the present utility model and practical application, thereby and makes those of ordinary skill in the art can understand the various embodiment with various modifications that the utility model design is suitable for special-purpose.
Claims (7)
1. an oxygen content detector, comprise oxygen analyser (2), it is characterized in that, also comprise one or more control system, described oxygen analyser (2) is connected with surveyed area by described control system, described control system comprise for control described pipeline (11) break-make switch module and for the execution module of operation switch module, described oxygen analyser (2) is connected with described surveyed area by described switch module, described switch module is connected with described execution module, and described execution module is connected with described controller (1).
2. oxygen content detector according to claim 1, is characterized in that, described control system is also connected with controller (1), and described controller (1) is connected with described oxygen analyser (2).
3. oxygen content detector according to claim 2, is characterized in that, between described oxygen analyser (2), control system and surveyed area, by pipeline (11), is tightly connected successively.
4. oxygen content detector according to claim 3, is characterized in that, described switch module is valve.
5. oxygen content detector according to claim 3, is characterized in that, described execution module is pneumatic actuator.
6. oxygen content detector according to claim 3, is characterized in that, the material of described pipeline (11) is 316L stainless steel.
7. oxygen content detector according to claim 4, is characterized in that, the material of described switch module is 316L stainless steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320802618.0U CN203824976U (en) | 2013-12-06 | 2013-12-06 | Oxygen content detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320802618.0U CN203824976U (en) | 2013-12-06 | 2013-12-06 | Oxygen content detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203824976U true CN203824976U (en) | 2014-09-10 |
Family
ID=51480459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320802618.0U Expired - Lifetime CN203824976U (en) | 2013-12-06 | 2013-12-06 | Oxygen content detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203824976U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113567638A (en) * | 2021-08-27 | 2021-10-29 | 湖北融通高科先进材料有限公司 | Device for automatically measuring oxygen content of kiln |
-
2013
- 2013-12-06 CN CN201320802618.0U patent/CN203824976U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113567638A (en) * | 2021-08-27 | 2021-10-29 | 湖北融通高科先进材料有限公司 | Device for automatically measuring oxygen content of kiln |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102494980A (en) | Concentration measuring and sampling device for high-temperature pressured dust | |
| CN105510088A (en) | Sampling system for online gas sample analysis and monitoring of high-temperature flue gas emission | |
| CN105043826B (en) | A kind of intelligent constant-temperature multichannel atmospheric sampling method | |
| CN203824976U (en) | Oxygen content detection device | |
| CN204214688U (en) | A kind of gas phase separation sampling system of hydrolysis of urea reactor | |
| CN202066654U (en) | Air-tightness measurement device | |
| CN104655372B (en) | Pantograph pan air tightness detection system and its detection method | |
| CN203247283U (en) | Device for measuring micro differential pressure at converter opening | |
| CN107064282A (en) | The monitoring device and method of total hydrocarbon concentration in petrochemical industry waste gas | |
| CN203869854U (en) | Thermal expansion valve integrated testing apparatus | |
| CN105651562A (en) | Gas sampling device for pipeline | |
| CN101799377B (en) | Sampling test point scavenging pipeline for on-site gas analyzer | |
| CN204064765U (en) | For detecting process in early stage, the sampler of industrial germanium tetrachloride | |
| CN107543903A (en) | A kind of method and apparatus for monitoring dewatering technology of mud ammonia and hydrogen sulfide on-line | |
| CN106526092A (en) | Automatic calibration system for ammonia escape | |
| CN203798789U (en) | Acidity measuring and absorbing device for sulfur hexafluoride gas | |
| CN110261540A (en) | Gaseous pollutant sampling probe and its application method with motoring condition switching valve | |
| CN202942115U (en) | Gas recovery rate determination device for detecting open type animal respiratory calorimetric system | |
| CN215355249U (en) | Ventilation and dust removal system for closed greenhouse of coke oven | |
| CN205643155U (en) | Detection apparatus for ammonia escape volume among out of stock exhaust pass | |
| CN109681187B (en) | System and method for measuring single-hole gas micro-flow of coal seam based on accumulation principle | |
| CN207050803U (en) | Level-sensing device with anti-bridging blow device | |
| CN204346777U (en) | Control H is crossed in hot and humid Crouse's desulfurization 2s, SO 2measure harvester | |
| CN210269790U (en) | Zero calibration device and zero calibration system | |
| CN203385510U (en) | Boiler flue wind pressure detection anti-blockage device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100015 Jiuxianqiao Chaoyang District, East Beijing Road, building M2, floor 1, No. 2 Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180328 Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140910 |