CN203798137U - Heating control device for furnace body of vertical oxidation furnace - Google Patents

Heating control device for furnace body of vertical oxidation furnace Download PDF

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Publication number
CN203798137U
CN203798137U CN201420074332.XU CN201420074332U CN203798137U CN 203798137 U CN203798137 U CN 203798137U CN 201420074332 U CN201420074332 U CN 201420074332U CN 203798137 U CN203798137 U CN 203798137U
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contactor
transformer
relay
coil
heating control
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CN201420074332.XU
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付运涛
张海轮
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Beijing Sevenstar Electronics Co Ltd
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Beijing Sevenstar Electronics Co Ltd
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Abstract

The utility model relates to a heating control device for a furnace body of a vertical oxidation furnace. The heating control device comprises a transformer, a transformer primary side component set and a transformer secondary side component set, wherein the transformer primary side component set comprises a main breaker and a first contactor, one end of the main breaker is connected with a workshop three-phase alternating-current voltage, the other end of the main breaker is connected with the first contactor, and the first contactor is further connected with the primary side of the transformer. The transformer secondary side component set comprises a power output controller and a second contactor, the input end of the power output controller is connected with the secondary side of the transformer, the output end of the power output controller is connected with the second contactor, and the second contactor is further connected with a furnace body furnace wire. The first contactor controls the primary side of the transformer to be switched on, and the second contactor controls the secondary side of the transformer to supply power to the furnace body furnace wire. According to the device, the possibly-happening phenomenon of breaker tripping in the starting process of the transformer can be removed, meanwhile, the temperature of the furnace body can be prevented from being out of control, and equipment safety can be improved.

Description

Vertical oxidation furnace body heating control apparatus
Technical field
The utility model relates to temperature control technology field, more particularly, relates to a kind of vertical oxidation furnace body heating control apparatus. 
Background technology
Vertical oxidation equipment is indispensable in semiconductor production industry, domestic or import equipment no matter, for body of heater stove silk mode of heating, generally with transformer, add the heating and cooling that power controller is directly controlled stove silk, this mode, in the normal operation of equipment, can reach good power control effect. 
Yet, above-mentioned control mode exposes following problem in actual production: its shortcoming one is when transformer starts, have very large dash current, easily cause circuit breaker trip, can not give stove silk normal power supply, unless changed and can resist the more breaker of large impact electric current, just can make short-circuit protection and overcurrent protection portion meet the needs of transformer; Or, use soft starting device can eliminate circuit breaker trip phenomenon, but system have prolongation on start-up time, operating cost is high; The shortcoming two of above-mentioned control mode be when the heating of host computer and power controller components and parts fault rear furnace body can active or immediately not stop; While using soft starting mode, when host computer breaks down, also can cause furnace body temperature out of control, thereby personnel and device security are threatened. 
Therefore, need in the industry a kind of circuit breaker trip phenomenon while avoiding transformer to start, and the vertical oxidation furnace body heating control apparatus that can automatically stop heating after components and parts fault. 
Utility model content
The purpose of this utility model is to provide a kind of vertical oxidation furnace body heating control apparatus. 
For achieving the above object, the utility model one technical scheme is as follows:
A vertical oxidation furnace body heating control apparatus, comprises transformer, transformer primary side parts group and secondary parts group, and transformer is for being converted to the applicable voltage of heating furnace body stove silk by factory building three-phase alternating voltage; Transformer primary side parts group comprises: main circuit breaker, the first contactor; Main circuit breaker one end connects factory building three-phase alternating voltage, and the other end connects the first contactor, and the first contactor is the former avris of connection transformer also; Transformer secondary parts group comprises: power output controller, the second contactor; The secondary side of power output controller input connection transformer, output connects the second contactor, and the second contactor also connects body of heater stove silk; Wherein, the first former limit of contactor control transformer obtains electric, and the second contactor control transformer secondary is powered to body of heater stove silk. 
Preferably, transformer primary side parts group also comprises the first relay, and the contact of the coil of the first contactor and the first relay is serially connected with on AC network, the first contactor open/close action by the dead electricity of the first relay coil/electricity condition is controlled. 
Preferably, transformer secondary parts group also comprises the second relay, and the contact of the coil of the second contactor and the second relay is serially connected with on AC network, the second contactor open/close action by the dead electricity of the second relay coil/electricity condition is controlled. 
Preferably, the dead electricity of the first relay coil/electricity condition by a cut-off switch and a upper electrical switch, controlled respectively. 
Preferably, upper electrical switch, cut-off switch are respectively runback bit-type button. 
Preferably, transformer primary side parts group also comprises the 3rd relay, and upper electrical switch, cut-off switch are also connected in series with the contact of the 3rd relay, and after the coil losing electricity of the 3rd relay, upper electrical switch, cut-off switch lost efficacy, the first relay coil dead electricity. 
Preferably, the coil of the 3rd relay is connected with a main PLC controller, and main PLC controller is controlled the action of the 3rd relay. 
Preferably, the coil of the second relay is connected with main PLC controller, and main PLC controller is controlled the action of the second relay. 
Preferably, main PLC controller send first signal control the 3rd relay coil obtain electric, and send secondary signal control the second relay coil obtain electric, first signal in sequential prior to secondary signal. 
Preferably, another input of power output controller is also connected with a secondary PLC controller, and secondary PLC controller is controlled the heating power of body of heater stove silk by power output controller. 
The vertical oxidation furnace body heating control apparatus that the utility model provides, can not only carry out normal intensification to body of heater controls, contingent circuit breaker trip phenomenon when all right eliminating transformer starts, can also after host computer or PLC power-off, automatically stop to body of heater and transformer-supplied simultaneously, thereby effectively prevent that furnace body temperature is out of control, promote device security, and can extend the shelf life of transformer. 
Accompanying drawing explanation
Fig. 1 illustrates the vertical oxidation furnace body heating control apparatus structural representation that the utility model one embodiment provides. 
The specific embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present utility model is described in further detail. 
It should be noted that, in the utility model embodiment, each parts all indicate it with optimal way and are specially which kind of parts, but non-for limiting scope of the present utility model; It should be understood that those skilled in the art can make simple replacement or combination or restructuring use to each parts, should be considered as not departing from the deformation design of the utility model thought, and fall into protection domain of the present utility model. 
As shown in Figure 1, the utility model one embodiment provides a kind of vertical oxidation furnace body heating control apparatus, and it comprises: transformer 103, transformer primary side parts group and secondary parts group. 
Transformer 103 is for being converted to 380V factory building three-phase alternating voltage the applicable voltage of heating furnace body stove silk 107; Transformer primary side parts group comprises: main circuit breaker 101, the first contactor 102; Transformer secondary parts group comprises: power output controller 105, the second contactor 106. 
Wherein, main circuit breaker 101 is the main switch of body of heater power supply, and its one end directly connects factory building 380V three-phase alternating-current powered voltage, and its other end is by the first contactor 102 connection transformers 103; Transformer 103 by 380V three-phase alternating-current powered voltage transformation for being suitable for stove silk required voltage level, transformer 103 outputs connect SCR(power output controller) 105, power output controller 105 another inputs also can auxiliary connection PLC controller 104, receive the control signal that secondary PLC controller 104 sends, power output controller 105 outputs connect the stove silk 107 of vertical oxidation furnace body by the second contactor 106, control the heating power of stove silk 107. 
The first contactor 102 open/close action control transformer primary side obtain electric, the second contactor 106 open/close action control transformer secondary to body of heater stove silk 107 power supply. 
Further, transformer primary side parts group also comprises the first relay 201, the contact of the coil of the first contactor 102 and the first relay 201 is serially connected with on 220V AC network, the first contactor 102 open/close action by the dead electricity of the first relay 201 coils/electricity condition is controlled.Transformer secondary parts group also comprises the second relay 202, the contact of the coil of the second contactor 106 and the second relay 202 is serially connected with on 220V AC network, the second contactor 106 open/close action by the dead electricity of the second relay 202 coils/electricity condition is controlled. 
That is, the first relay 201 is controlled the action of the first contactors 102, and the first contactor 102 control transformers 103 electric and dead electricity; The second relay 202 is controlled the action of the second contactor 106, and the second contactor 106 is controlled the electric and dead electricity that obtains of stove silk 107. 
Wherein, the first relay 201 coils are by a 24V Power supply, a cut-off switch 206 and a upper electrical switch 205 can control the dead electricity of the first relay coil/electricity condition. 
Particularly, upper electrical switch 205 is runback bit-type button, and after pressing, the coil of the first relay 201 obtains electric, forms hardware self-locking, and can control the first contactor 102 coils obtain electric, the first contactor 102 actions, the former limit of transformer 103 can obtain electric; Cut-off switch 206 is runback bit-type button, after pressing, makes the first relay 201 coil losing electricities, the first relay 201 normally opened contacts disconnect, the first contactor 102 coil losing electricities, and transformer 103 former limit power supply disconnects, thereby transformer 103 secondary stop 107 power supplies of stove silk, and body of heater stops heating up. 
Further, transformer primary side parts group also comprises the 3rd relay 203, upper electrical switch 205, cut-off switch 206 also for example, are connected in series with the contact (being normally-closed contact) of the 3rd relay 203, after the coil losing electricity of the 3rd relay 203, upper electrical switch 205, cut-off switch 206 all lost efficacy, the first relay 201 coil losing electricities, the first contactor 102 coil losing electricities, cause transformer 103 to be stopped power supply. 
According to a kind of improvement embodiment of above-described embodiment, the coil of the 3rd relay 203 is also connected with a main PLC controller 204, and main PLC controller 204 is controlled the action of the 3rd relay 203.The coil of the second relay 202 is also connected with main PLC controller 204, and main PLC controller 204 is controlled the action of the second relay 202. 
Main PLC controller 204, by controlling these two relays 202,203, is realized control transformer 103 former limit power supply and the power supply of transformer 103 secondary to stove silk 107. 
Be appreciated that main PLC controller 204 also can be a kind of computer based control module, or other control system. 
Further, main PLC controller 204 send first signal control the 3rd relay 203 coils obtain electric, and send secondary signal control the second relay 202 coils obtain electric, first signal in sequential prior to secondary signal.According to this control mode, after transformer 103 former limit power supply success and secondary breaker (accompanying drawing is not shown) closure, by main PLC controller 204, by the second relay 202, control the second contactor 106 conductings, the supply electrical heating of realization to stove silk 107, with this element, connect and control mode, while powering on the former limit of transformer 103, its secondary is also Light Condition, little a lot of when the dash current on former limit is compared secondary and had load, thereby former limit main circuit breaker 101 can not trip easily. 
According to embodiment of the present utility model, between the input of the former limit of transformer 103 and main circuit breaker 101, increase by the first contactor 102, can realize the Long-distance Control to transformer 103 power supplies, after being used for reaching host computer or PLC power-off, disconnect the effect that stove silk is powered, stopped heating furnace body, reduce the mechanical switch action of main circuit breaker 101 simultaneously, prevented its excessive loss. 
Similarly, between the power output controller 105 of transformer secondary and each warm area stove silk 107, all can increase by the second contactor 106.When giving 107 power supply of stove silk, also can adopt distance control mode, thereby saved the operation of secondary breaker, eliminated operating personnel's Danger Electric shock risk, and the conducting of the second contactor 106 or disconnect do not affect power output controller 105 /dead electricity, reduced start-up time of power output controller 105 while again heating after heating stops. 
In the technical process of reality heating vertical oxidation furnace body, each parts of above-mentioned heating control apparatus can move as follows:
First, vertical oxidation furnace body heating control apparatus is in holding state; Whether main PLC controller 204 can continuous scanning have intensification instruction, if not, continues scanning, if there is intensification instruction, by the 3rd relay 203, upper electrical switch 205 and the former limit of the closed transformer 103 of the first relay 201 the first contactor 102. 
Meanwhile, whether the continuous scanning of secondary PLC controller 104 has the instruction of starting power o controller 105, if not, continues scanning, if had, just connects the second contactor 106 between power output controller 105 and stove silk 107.Subsequently, secondary PLC controller 104 is controlled the heating power of stove silk 107 by power output controller 105. 
In this process, whether the continuous scanning of main PLC controller 204 has the instruction that stops heating, if not, continues scanning, and normally controls heating power, if had, disconnects transformer 103 secondary the second contactors 106, and body of heater normally stops heating. 
After power output controller 105 starts, whether secondary PLC controller 104 can constantly scan abnormal signal, if not, continue scanning, if there are all contactors that just disconnect the former limit of transformer 103 and secondary, stop body of heater heating and notify operating personnel to investigate fault. 
Visible, the vertical oxidation furnace body heating control apparatus that this embodiment provides, can not only carry out normal intensification to body of heater controls, contingent circuit breaker trip phenomenon when all right eliminating transformer starts, can also after host computer and PLC power-off, automatically stop to body of heater and transformer-supplied simultaneously, thereby effectively prevent that furnace body temperature is out of control, promoted device security, also can improve the service life of transformer. 
Above-described is only preferred embodiment of the present utility model; described embodiment is not in order to limit scope of patent protection of the present utility model; therefore the equivalent structure that every utilization description of the present utility model and accompanying drawing content are done changes, and in like manner all should be included in protection domain of the present utility model.

Claims (10)

1. a vertical oxidation furnace body heating control apparatus, comprises transformer, transformer primary side parts group and secondary parts group, and described transformer is for being converted to the applicable voltage of heating furnace body stove silk by factory building three-phase alternating voltage;
Described transformer primary side parts group comprises: main circuit breaker, the first contactor; Described main circuit breaker one end connects described factory building three-phase alternating voltage, and the other end connects described the first contactor, and described the first contactor also connects the former avris of described transformer;
Described transformer secondary parts group comprises: power output controller, the second contactor; Described power output controller input connects the secondary side of described transformer, and output connects described the second contactor, and described the second contactor also connects described body of heater stove silk;
Wherein, described the first contactor is controlled described transformer primary side and is obtained electricly, and described the second contactor is controlled described transformer secondary and powered to described body of heater stove silk. 
2. vertical oxidation furnace body heating control apparatus as claimed in claim 1, it is characterized in that, described transformer primary side parts group also comprises the first relay, the contact of the coil of described the first contactor and described the first relay is serially connected with on AC network, described the first contactor open/close action by the dead electricity of described the first relay coil/electricity condition is controlled. 
3. vertical oxidation furnace body heating control apparatus as claimed in claim 2, it is characterized in that, described transformer secondary parts group also comprises the second relay, the contact of the coil of described the second contactor and described the second relay is serially connected with on AC network, described the second contactor open/close action by the dead electricity of described the second relay coil/electricity condition is controlled. 
4. vertical oxidation furnace body heating control apparatus as claimed in claim 3, is characterized in that, the dead electricity of described the first relay coil/obtain electricity condition to be controlled by a cut-off switch and a upper electrical switch respectively. 
5. vertical oxidation furnace body heating control apparatus as claimed in claim 4, is characterized in that, described upper electrical switch, cut-off switch are respectively runback bit-type button. 
6. vertical oxidation furnace body heating control apparatus as claimed in claim 5, it is characterized in that, described transformer primary side parts group also comprises the 3rd relay, described upper electrical switch, cut-off switch are also connected in series with the contact of described the 3rd relay, after the coil losing electricity of described the 3rd relay, described upper electrical switch, cut-off switch lost efficacy, described the first relay coil dead electricity. 
7. vertical oxidation furnace body heating control apparatus as claimed in claim 6, is characterized in that, the coil of described the 3rd relay is connected with a main PLC controller, and described main PLC controller is controlled the action of described the 3rd relay. 
8. vertical oxidation furnace body heating control apparatus as claimed in claim 7, is characterized in that, the coil of described the second relay is connected with described main PLC controller, and described main PLC controller is controlled the action of described the second relay. 
9. as right is wanted the vertical oxidation furnace body heating control apparatus as described in 8, it is characterized in that, described main PLC controller sends first signal and controls described the 3rd relay coil and obtain electric, and send secondary signal control described the second relay coil obtain electric, described first signal in sequential prior to described secondary signal. 
10. vertical oxidation furnace body heating control apparatus as claimed in any one of claims 1-9 wherein, it is characterized in that, another input of described power output controller is also connected with a secondary PLC controller, and described secondary PLC controller is controlled the heating power of described body of heater stove silk by described power output controller. 
CN201420074332.XU 2014-02-20 2014-02-20 Heating control device for furnace body of vertical oxidation furnace Active CN203798137U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420074332.XU CN203798137U (en) 2014-02-20 2014-02-20 Heating control device for furnace body of vertical oxidation furnace

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103759527A (en) * 2014-02-20 2014-04-30 北京七星华创电子股份有限公司 Furnace body heating control device of vertical type oxidizing furnace

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103759527A (en) * 2014-02-20 2014-04-30 北京七星华创电子股份有限公司 Furnace body heating control device of vertical type oxidizing furnace
CN103759527B (en) * 2014-02-20 2016-03-02 北京七星华创电子股份有限公司 Vertical oxidation furnace body heating control apparatus

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