CN2037874U - Automatic film-conveying and-withdrawing device - Google Patents

Abstract

The utility model provides a high-precision automatic film-conveying and withdrawing device which can be used on an electron beam exposure apparatus with uncomplicated structure and simple processing, assembly and adjustment; the utility model can not only be used in the vacuum chambers (box), but also can be used in other purposes. The high-precision automatic film-conveying and withdrawing device creates an important condition for the electron beam exposure technique and focused ion beam exposure technique of China to move towards actual production from the laboratory.

Description

Automatic film-conveying and-withdrawing device

The utility model relates to a kind of manufacturing process equipment of semiconductor integrated circuit, is made up of drive system and manipulator two parts.

Electron beam exposure apparatus is a key equipment of making extensive and very lagre scale integrated circuit (VLSIC), and the automatic film-transporter system is the main device of this key equipment.The up-to-date manufacturing technology of this kind equipment holds in close confidence in the world, domesticly retrieve one piece of " CN85 2 04855 " patent documentation, though this patent has been avoided the Japan Patent spy to open clear " 58-77239 " direct pulldown and has easily been made the cracked danger of slice, thin piece, avoided the Japan Patent spy to open clear " 58-118124 " complex structure again, the shortcoming of complex operation, but see from this patent accompanying drawing 1, the cantilever of its driven rod manipulator is extremely long, see that from accompanying drawing 2 manipulator and flat fork directly lift the substrate that is transferred, again sending to and fetching through long distance.Again from the described content of this patent specification, also the requirement of processing technologys such as plasma etching, reactive ion etching, chemical vapour deposition (CVD) and magnetron sputtering can only be suitable for, and the high-precision requirement that electron beam exposure technology is required can not be applicable to.

The purpose of this utility model is to make that a kind of to be suitable for the precision that electron beam exposure apparatus uses very high, and conveying sheet is steady, structure is terse, manufacturing process is easy to automatic transport sheet device.

The utility model adopts manipulator pushing piece folder, and sheet clamps and carries the scheme that processed substrate carries and solved.

Specified below in conjunction with accompanying drawing:

Accompanying drawing 1 is the driving mechanism schematic diagram.By shaft coupling bevel gear a (4) is driven and its meshed bevel gears b (7) by micro-processor controlled stepping motor (1).Axle (5) is rotated, move to order about spur gear (8), spur gear drives inner slider (12) and guide rail (11), outer slide plate (10) move.Pulley (9) plays mobile nimble and effect stably.

Accompanying drawing 2 is the manipulator schematic diagram.When outer slide (10) is released sheet folder (28) when being sent to laser Positioning Stage from valut, extension spring (18) impels two bearings (19) on two pieces of pulldown hooks (20) to oppress inner slider (12) taper can not be forward, and the pulldown hook is in the relieving state.The back locating piece a (25) that puts in place bumps travel switch a (17), and all slide plate stops mobile step motor stop, and the pulldown hook is still decontroled, the manipulator backlash.When the substrate completion of processing on the sheet folder, under system controlled by computer manipulator still the original state sky advance.Locating piece a (25) bumps travel switch a (17) and spacing addendum cone (27) when putting in place, and outer slide plate is motionless, and stepping motor does not stop, and inner slider continues to move.Locating piece b (26) on inner slider bumps travel switch b (24), when making step motor stop, inner slider awl point surpasses spring (18) stress, back down two bearings (19) on the grapple, under the leverage of grapple screw, pulldown hook (20) is caught sheet folder (28) handle.At the same time, the location fork (21) that is fixed on inner slider is hooked by locking bail (22) before two pieces, thereby makes inside and outside slide plate flexible fastening, and the pulldown hook just catches also that the sheet clamp holder is fixing not to have been decontroled.When manipulator takes out the backhaul of sheet folder to the valut position, locking bail (22) is decontroled location fork (21) moment before before two positive stops (23) force two pieces, locking bail (15) hooks two backstops (16) after be fixed together with outer slide plate two pieces, makes the sheet folder do not ejected film magazine by the bounce of spring.Inner slider is still by motor-driven, and when its conical nose unclamped bearing (19), the back locking bail block of inner slider afterbody pushed back locking bail (15) and unclamps backstop (16), and pulldown hook (20) loosens the sheet clamp holder.Under system controlled by computer, the lifting stepping motor of valut makes valut move lattice, prepares to carry out the conveying of next sheet folder, and manipulator repeats above-mentioned course of action again.

The utility model has following advantage: at first, for making China's electron beam lithography march toward the actual essential condition of having created of production from the laboratory, this mechanism not only can be used in the electron beam exposure apparatus system, also can be used in the focused ion beam exposure machine system.Since be to use microcomputer automatic control, fully can be in remote operation.This apparatus structure is uncomplicated, and all than being easier to reach the high requirement of precision, very suitable application in vacuum chamber (case) also can be applicable to other purposes for part processing and assembling and setting.This device design science, action is dexterous, dependable performance, time-consuming 30 seconds of do action of every film conveying and withdrawing folder.According to valut sheet folder number, film conveying and withdrawing presss from both sides 12 continuously, or 12 with interior arbitrary number.

Description of drawings:

Fig. 1 is the drive system schematic diagram, and Fig. 2 is the manipulator schematic diagram.Wherein: (1) stepping motor, (2) shaft coupling, (3), (6) bearing, (4) bevel gear a, (5) axle, (7) bevel gear b, (8) spur gear, (9) pulley, (10) outer slide plate, (11) guide rail, (12) inner slider, (13) steel ball, (14) travel switch c, (15) back locking bail, (16) backstop, (17) travel switch a, (18) extension spring, (19) bearing, (20) pulldown hook, (21) location fork, (22) preceding locking bail, (23) positive stop, (24) travel switch b, (25) locating piece a, (26) locating piece b, (27) spacing addendum cone, (28) sheet folder.

Fig. 3 is that automatic film movement device is at electron beam exposure apparatus advance system service position schematic diagram.Wherein: (1) valve cover plate, (2) valve housing, (3) drive nut, (4), (6), (14) stepping motor, (5) valut housing, (7) drive screw mandrel, (8) guide pillar, (9) sheet folder frame, (10) sheet folder, (11) manipulator case top lid, (12) driving gearbox, (13) manipulator (slide plate assembly), (15) sheet grip box.

Embodiment:

Disturb for avoiding magnetic that the electron beam deflecting is produced, the part of film conveying and withdrawing mechanism adopts magnetism-free stainless steel or tin bronze to make as far as possible, stepping motor will be installed in outside the vacuum chamber (case), as (4) among Fig. 3, (6), (14).

The thickness of whole slide plate (manipulator) should press from both sides thin thickness than sheet.

Claims (5)

1. automatic film conveying and withdrawing device of forming by drive system and manipulator, it is characterized in that the manipulator slide plate is made up of inner slider (12), two guide rails (11) and outer slide plate (10), between guide rail and inner slider, have steel ball (13) some.

2. automatic film conveying and withdrawing device according to claim 1, it is characterized in that the inner slider head is taper, be fixed with location fork (21), stuck the hook groove, afterbody is fixed with locating piece b (26) and back locking bail block.

3. automatic film conveying and withdrawing device according to claim 1 is characterized in that being fixed with on the outer slide plate (10) pulldown hook (20) and preceding locking bail (22), back locking bail (15).

4. according to claim 1 or 3 described automatic film conveying and withdrawing devices, it is characterized in that the pulldown hook has spring (18) and bearing (19), bearing contacts with the inner slider conical head.

5. automatic film conveying and withdrawing device according to claim 1 is characterized in that being fixed with on the fuselage pulley (9), forward and backward baffle plate (16) (23) and three pieces of travel switches (14) (17) (24).

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