CN203774260U - Safety state detection system - Google Patents
Safety state detection system Download PDFInfo
- Publication number
- CN203774260U CN203774260U CN201420125674.XU CN201420125674U CN203774260U CN 203774260 U CN203774260 U CN 203774260U CN 201420125674 U CN201420125674 U CN 201420125674U CN 203774260 U CN203774260 U CN 203774260U
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- CN
- China
- Prior art keywords
- signal
- detection system
- residual gas
- safe condition
- condition detection
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Abstract
The utility model provides a safety state detection system, comprising a first signal collection unit, a second signal collection unit, and a signal processing unit. The first signal collection unit is connected with a cavity. The first signal collection unit comprises a data collector and a data encoder. The data encoder is connected with the data collector. The second signal collection unit is connected with a residual gas analysis meter. The second signal collection unit comprises a color sensor and a signal collector. The color sensor is connected with the signal collector. The signal processing unit is used to determine whether the cavity and the residual gas analysis meter are online, and the signal processing unit is connected with the first signal collection unit and the second signal collection unit. The safety state detection system can find out potential safety hazard and give out an alarm in time through the detecting cavity and the residual gas analysis meter, so as to achieve effect of eliminating potential safety hazard, and meanwhile performance parameters of a wafer are effectively improved.
Description
Technical field
The utility model belongs to technical field of semiconductors, relates to a kind of detection system, particularly relates to a kind of safe condition detection system.
Background technology
Very lagre scale integrated circuit (VLSIC) refers on several millimeters of square silicon chips integrated up to ten thousand to 1,000,000 transistors, the integrated circuit of live width below 1 micron.Because transistor AND gate line once completes, be severally equal to transistorized man-hours up to a million and expense therefore make.When a large amount of production, hardware costs almost can be disregarded, and depends on design cost.Silicon area has increased to centimeter square in the world, and pipe number reaches 1,000,000,000 and live width is 0 to 1 micron.
In very lagre scale integrated circuit (VLSIC) system, and to leak (leakages of the gases such as oxygen, steam in cavity) be especially important for the cobalt final test data of crystal property in chamber, because the gases such as oxygen, steam are very large on the manufacture impact of cobalt element.Residual gas analyzer (residual gas analysis, RGA) in chemical technology monitoring and abnormal conditions detection, thering is very long applicating history. residual gas analyzer (RGA) has very high chemo-selective and sensitivity, therefore in semiconductor manufacture, there is very long applicating history, for the monitoring of chemical enginnering process and the detection of abnormal conditions.' so research staff can install a RGA instrument (residual gas analyzer) and prevent the discovery of chamber leakage phenomenon on board, and whether carry out the gas of examination and controlling inside cavity normal.When cavity is during in maintenance, or in the time that the cavity pump regeneration of cavity and cavity toast, residual gas analyzer will roll off the production line.But often board is after safeguarding, may make for some reason residual gas analyzer still not in on-line working state, if so the gas such as oxygen, steam in cavity occurs leaking and residual gas analyzer rolls off the production line, will there is so potential safety hazard.
Therefore, in semi-conductor industry, need a kind of test chamber and residual gas analyzer whether to exist the system of potential safety hazard to reach the function eliminating safe hidden trouble, effectively improve wafer property.
Utility model content
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of safe condition detection system, be used for solving and in prior art cavity, occur the Leakage Gas such as oxygen, steam, and the problem of the potential safety hazard that exists in the time of down status again of residual gas analyzer.
For achieving the above object and other relevant objects, the utility model provides a kind of safe condition detection system, for detection of with monitoring cavity and residual gas analyzer, described cavity comprises rotary magnetic motor, described residual gas analyzer comprises the online and indicator light that rolls off the production line, described safe condition detection system comprises: first signal collector unit, is connected on described cavity; Described first signal collector unit comprises the data collector for collecting described rotary magnetic motor speed and monitors described rotary magnetic motor speed for passing through, and rotating speed converted to the data encoder of the first pulse signal; Described data encoder is connected with described data collector; Secondary signal collector unit, is connected on described residual gas analyzer; Described secondary signal collector unit comprises for detection of online on described residual gas analyzer and the whether normal color sensor and export the signal picker of the second pulse signal for gathering described residual gas analyzer communication port of indicator light colors that rolls off the production line; Described color sensor is connected with described signal picker; For judging described cavity and the whether online signal processing unit of residual gas analyzer, be connected on described first signal collector unit and secondary signal collector unit.
Preferably, described safe condition detection system also comprises the signal alarm unit being connected on described signal processing unit.
Preferably, described signal alarm unit comprises the first alarm module for send alarm signal in the time that described cavity rolls off the production line and for send the second alarm module of alarm signal in the time that described residual gas analyzer rolls off the production line.
Preferably, described safe condition detection system also comprises the solar panel being respectively used to described first signal collector unit and the power supply of secondary signal collector unit, and described solar panel is connected on described first signal collector unit and secondary signal collector unit.
Preferably, described data collector is arranged on the rotation of described cavity, and described data encoder is arranged on described rotary magnetic motor.
Preferably, described color sensor and signal picker are connected on described residual gas analyzer.
Preferably, described data encoder is a disk, in the middle of described disk, is provided with circular hole, has some square sheets in described disk perimeter.
Preferably, described disc material is steel plate.
As mentioned above, safe condition detection system described in the utility model, has following beneficial effect:
1, whether safe condition detection system described in the utility model there is potential safety hazard by test chamber and residual gas analyzer, can find in time potential safety hazard send report to the police to reach the effect eliminating safe hidden trouble;
2, safe condition detection system described in the utility model exists potential safety hazard effectively to improve the performance parameter of wafer by getting rid of cavity and residual gas analyzer.
Brief description of the drawings
Fig. 1 is shown as safe condition detection system structural representation of the present utility model.
Fig. 2 is shown as data encoder structural representation in safe condition detection system of the present utility model.
Element numbers explanation
1 safe condition detection system
11 first signal collector units
12 secondary signal collector units
13 signal processing units
14 signal alarm units
15 solar panels
111 data collectors
112 data encoders
121 color sensors
122 signal pickers
141 first alarm modules
142 second alarm modules
Embodiment
By particular specific embodiment, execution mode of the present utility model is described below, person skilled in the art scholar can understand other advantages of the present utility model and effect easily by the disclosed content of this specification.
Refer to accompanying drawing.Notice, appended graphic the illustrated structure of this specification, ratio, size etc., all contents in order to coordinate specification to disclose only, understand and read for person skilled in the art scholar, not in order to limit the enforceable qualifications of the utility model, therefore the not technical essential meaning of tool, the adjustment of the modification of any structure, the change of proportionate relationship or size, do not affecting under effect that the utility model can produce and the object that can reach, all should still drop on the technology contents that the utility model discloses and obtain in the scope that can contain.Simultaneously, in this specification, quote as " on ", the term of D score, " left side ", " right side ", " centre " and " " etc., also only for ease of understanding of narrating, but not in order to limit the enforceable scope of the utility model, the change of its relativeness or adjustment, changing under technology contents, when being also considered as the enforceable category of the utility model without essence.
The present embodiment provides a kind of safe condition detection system 1, for detection of with monitoring cavity and residual gas analyzer, described cavity comprises rotary magnetic motor, described residual gas analyzer comprises the online and indicator light that rolls off the production line, refer to Fig. 1, be shown as the structure of safe condition detection system, described safe condition detection system comprises: first signal collector unit 11, secondary signal collector unit 12, signal processing unit 13, signal alarm unit 14 and solar panel 15.Wherein, described first signal collector unit 11 comprises data collector 111 and data encoder 112.Described secondary signal collector unit 12 comprises color sensor 121 and signal picker 122.Described signal alarm unit 14 comprises the first alarm module 141 and the second alarm module 142.
Respectively the composition device of safe condition detection system is described respectively below.
[first signal collector unit]
Described first signal collector unit 11 is connected on described cavity, for collecting first pulse signal whether online about cavity.Described first signal collector unit 11 comprises data collector 111 and data encoder 112.Wherein, described data collector 111 is connected on the rotary magnetic motor of described cavity for collecting the rotating speed of described rotary magnetic motor magnetic pole.Described data encoder 112 is connected the rotating speed for receiving the described rotary magnetic motor magnetic pole that described data collector 111 collects with described data collector 111, and by the rotating speed of the described rotary magnetic motor of monitoring, rotating speed is converted to the data encoder of the first pulse signal.Described data collector is connected on described cavity, and described data encoder is arranged on described rotary magnetic motor.In the present embodiment, in order to make data encoder and described rotary magnetic motor rotary synchronous error free, described data encoder is gone to be installed on described rotary magnetic motor top, therefore, refer to Fig. 2, be shown as the structure of data encoder, in the present embodiment, described data encoder is shaped as disk.Described disk material is steel plate materials.The thick 1.5mm of this steel plate, radius is 8.5mm, in described disk
between arrange there is the circular hole that a radius is 4.5cm, and there is the square sheets of 25 3mm*3mm in described disk perimeter.
[secondary signal collector unit]
Described secondary signal collector unit 12, is connected on described residual gas analyzer, for collecting the second pulse signal about described residual gas analyzer; Described secondary signal collector unit 12 color sensors 121 and signal picker 122.Whether described color sensor 121 is for detection of online normal with the indicator light colors that rolls off the production line on described residual gas analyzer.The described signal picker 122 being connected with described color sensor 121 and export the second pulse signal for gathering described residual gas analyzer communication port.
[signal processing unit]
Described signal processing unit 13 is connected with described first signal collector unit 11 and secondary signal collector unit 12 respectively for judging described cavity and the whether online signal processing unit of residual gas analyzer.Whether described signal processing unit 13 has rotation to judge that whether described cavity is online by receiving first signal pulse detection to magnetic pole, that is to say that magnetic pole does not rotate, and described cavity can not be online.Described signal processing unit 13 judges by the data that read on described residual gas analyzer whether it processes on line state simultaneously.In the time detecting that described cavity and described residual gas analyzer are all processed on line state, represent so cavity and residual gas analyzer processing safe condition.
[signal alarm unit]
Described signal alarm unit 14 is connected with described signal processing unit 13 for sending alarm signal in the time finding that described cavity rolls off the production line and/or when described residual gas analyzer rolls off the production line.Therefore, described signal alarm unit 14 comprises the first alarm module 141 for send alarm signal in the time that described cavity rolls off the production line and for send the second alarm module 142 of alarm signal in the time that described residual gas analyzer rolls off the production line.
[solar panel]
Described safe condition detection system 1 also comprises and is respectively used to the solar panel 15 of powering to described first signal collector unit 11 and secondary signal collector unit 12, and described solar panel is connected on described first signal collector unit and secondary signal collector unit.
Safe condition detection system described in the utility model is by first signal collector unit, secondary signal collector unit, signal processing unit, signal alarm unit composition, whether rotate and determine that whether cavity is online by the magnetic pole in rotary magnetic motor on first signal collector unit and the described cavity of signal processing unit cooperation detection, as magnetic pole does not rotate, represent that cavity can not be online, and detect magnetic pole rotating speed this be very important for the uniformity in manufacture process.Coordinate the data that detect described residual gas analyzer port to determine whether described RGA processes on line state by secondary signal collector unit and signal processing unit.Safe condition detection system described in the utility model detects when described cavity and described residual gas analyzer are all processed on line state, illustrates that described cavity and described residual gas analyzer are in a safe condition.Whether described safe condition detection system there is potential safety hazard by test chamber and residual gas analyzer, can find in time potential safety hazard send report to the police to reach the effect eliminating safe hidden trouble; And described safe condition detection system exists potential safety hazard can effectively improve the performance parameter of wafer by getting rid of cavity and residual gas analyzer.
In sum, the utility model has effectively overcome various shortcoming of the prior art and tool high industrial utilization.
Above-described embodiment is illustrative principle of the present utility model and effect thereof only, but not for limiting the utility model.Any person skilled in the art scholar all can, under spirit of the present utility model and category, modify or change above-described embodiment.Therefore, have in technical field under such as and conventionally know that the knowledgeable modifies or changes not departing from all equivalences that complete under spirit that the utility model discloses and technological thought, must be contained by claim of the present utility model.
Claims (8)
1. a safe condition detection system, for detection of with monitoring cavity and residual gas analyzer, described cavity comprises rotary magnetic motor, described residual gas analyzer comprises the online and indicator light that rolls off the production line, and it is characterized in that, described safe condition detection system comprises:
First signal collector unit, is connected on described cavity; Described first signal collector unit comprises the data collector for collecting described rotary magnetic motor speed and monitors described rotary magnetic motor speed for passing through, and rotating speed converted to the data encoder of the first pulse signal; Described data encoder is connected with described data collector;
Secondary signal collector unit, is connected on described residual gas analyzer; Described secondary signal collector unit comprises for detection of online on described residual gas analyzer and the whether normal color sensor and export the signal picker of the second pulse signal for gathering described residual gas analyzer communication port of indicator light colors that rolls off the production line; Described color sensor is connected with described signal picker;
For judging described cavity and the whether online signal processing unit of residual gas analyzer, be connected on described first signal collector unit and secondary signal collector unit.
2. safe condition detection system according to claim 1, is characterized in that: described safe condition detection system also comprises the signal alarm unit being connected on described signal processing unit.
3. safe condition detection system according to claim 2, is characterized in that: described signal alarm unit comprises the first alarm module for send alarm signal in the time that described cavity rolls off the production line and for send the second alarm module of alarm signal in the time that described residual gas analyzer rolls off the production line.
4. safe condition detection system according to claim 1, it is characterized in that: described safe condition detection system also comprises the solar panel being respectively used to described first signal collector unit and the power supply of secondary signal collector unit, and described solar panel is connected on described first signal collector unit and secondary signal collector unit.
5. safe condition detection system according to claim 1, is characterized in that: described data collector is arranged on the rotation of described cavity, described data encoder is arranged on described rotary magnetic motor.
6. safe condition detection system according to claim 1, is characterized in that: described color sensor and signal picker are connected on described residual gas analyzer.
7. safe condition detection system according to claim 1, is characterized in that: described data encoder is a disk, in the middle of described disk, is provided with circular hole, has some square sheets in described disk perimeter.
8. safe condition detection system according to claim 1, is characterized in that: described disc material is steel plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420125674.XU CN203774260U (en) | 2014-03-19 | 2014-03-19 | Safety state detection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420125674.XU CN203774260U (en) | 2014-03-19 | 2014-03-19 | Safety state detection system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203774260U true CN203774260U (en) | 2014-08-13 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420125674.XU Expired - Fee Related CN203774260U (en) | 2014-03-19 | 2014-03-19 | Safety state detection system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203774260U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107305365A (en) * | 2016-04-21 | 2017-10-31 | 北京北方华创微电子装备有限公司 | A kind of technical process control method and process control systems based on RGA |
-
2014
- 2014-03-19 CN CN201420125674.XU patent/CN203774260U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107305365A (en) * | 2016-04-21 | 2017-10-31 | 北京北方华创微电子装备有限公司 | A kind of technical process control method and process control systems based on RGA |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140813 Termination date: 20190319 |