CN203764039U - Waste gas treatment device - Google Patents
Waste gas treatment device Download PDFInfo
- Publication number
- CN203764039U CN203764039U CN201420100921.0U CN201420100921U CN203764039U CN 203764039 U CN203764039 U CN 203764039U CN 201420100921 U CN201420100921 U CN 201420100921U CN 203764039 U CN203764039 U CN 203764039U
- Authority
- CN
- China
- Prior art keywords
- circular hole
- keeper
- inner casing
- barrel
- cylindrical shell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002912 waste gas Substances 0.000 title abstract description 9
- 238000009434 installation Methods 0.000 claims abstract description 11
- 238000003780 insertion Methods 0.000 claims description 5
- 230000037431 insertion Effects 0.000 claims description 5
- 238000007789 sealing Methods 0.000 description 5
- 239000010408 film Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000005083 Zinc sulfide Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 238000000231 atomic layer deposition Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The utility model relates to a waste gas treatment device. The device comprises a barrel-shaped outer shell formed by a first barrel and a second barrel, a barrel-shaped inner shell and a fixing plate which are arranged in the barrel-shaped outer shell, an inlet flange and an outlet flange which are respectively arranged on the first barrel and the second barrel and N groups of filter barrels arranged in the barrel-shaped inner shell, wherein the barrel-shaped inner shell and the fixing plate are oppositely arranged and connected by adopting a fixing rod; the filter barrels form a ring array along the axis of the fixing rod; a first round hole and a second round hole which are communicated with the filter barrels are respectively arranged in one end of the barrel-shaped inner shell and an installation position, corresponding to the filter barrels, on the fixing plate. Compared with the prior art, the waste gas treatment device has the advantages that waste gas can be transferred from the inlet flange to the barrel-shaped outer shell through a pipeline, enters the filter barrels via the round hole in the end face of the barrel-shaped inner shell, is taken out through the outlet flange after being treated by the filter barrels and can be discharged via air extracting devices such as mechanical pumps finally, so that the purpose of waste gas treatment is achieved.
Description
Technical field
The utility model relates to a kind of emission-control equipment, particularly a kind of exhaust gas processing device that is applied to ald, chemical vapour deposition (CVD), magnetron sputtering and atmosphere reacting furnace equipment.
Background technology
Vacuum coating industry development is rapid, and ald (ALD) is a kind of film preparing technology up-to-date and forefront, is also a kind of method for nanotechnology research.Typical ald is the nano thin-film that deposits high accuracy, free of pinholes, high conformal in the substrate of various sizes and shape.
Ald (ALD) can range a kind of chemical vapour deposition technique.At the initial stage of this technological development, it is used to the insulator (A1 of production nanometer overlaying structure
2o
3/ TiO
2) and zinc sulphide (ZnS) luminescent film of thin-film electroluminescent displays (TFEL).Thereafter, ald is ripe gradually, as it is in the extensive use of the industry such as semiconductor.Today, technique for atomic layer deposition was applied to various industrial circles, was in development comprising photovoltaic, optics, chemistry, aqueous vapor barrier layer, organic printed electronic, jewelry protection and the more industrial circle of medical industry one.
Ald (ALD) is the film deposition techniques of controlling based on surface.In coating process, thereby two or more chemical gaseous phase precursors produces solid-state film at substrate surface generation chemical reaction successively.Because deposition is a saturated reaction process, if remaining reactant is discharged in atmosphere and can causes environmental pollution without processing.Existing apparatus, adsorption efficiency is low, and inconvenience is installed, and recycles weak effect.
Utility model content
The purpose of this utility model is to provide a kind of simple structure, the emission-control equipment that sealing effectiveness is good.
To achieve these goals, the utility model has designed a kind of emission-control equipment, comprises the cylindrical case that is made up of the first cylindrical shell and the second cylindrical shell, is arranged on tubular inner casing and fixed head in described cylindrical case, is separately positioned on inlet flange and outlet(discharge) flange on described the first cylindrical shell and described the second cylindrical shell; Wherein, described tubular inner casing is oppositely arranged and adopts fixed bar to be connected with described fixed head;
Described emission-control equipment also comprises: be arranged on the cartridge filter in described tubular inner casing; Described cartridge filter comprises N group and carries out annular array along the axle center of described fixed bar, wherein said N is natural number, and on the end of described tubular inner casing and described fixed head, the installation position of corresponding described cartridge filter offers respectively and the first circular hole and second circular hole of described cartridge filter conducting.
Embodiment of the present utility model in terms of existing technologies, simple in structure, sealing effectiveness is good, waste gas can be sent in cylindrical case by inlet flange by pipeline, then entered in cartridge filter by the circular hole of tubular inner casing end face, after being processed by cartridge filter, then taken out of by outlet(discharge) flange, finally can discharge through air extractors such as mechanical pumps, thereby reach the object of processing waste gas.
Wherein, corresponding described the first circular hole in the end of described tubular inner casing is provided with the first keeper; Described the first keeper have one suitable and insert the first hollow bulb of the first jut in described the first circular hole, first flange part that is against described tubular inner casing end face and and described the first circular hole conducting with described the first circular hole shape; Wherein, the first jut of described the first keeper has at least described in partial insertion in cartridge filter, by the first jut of described the first keeper, described cartridge filter is positioned in the installation position of described tubular inner casing end face.And corresponding described the second circular hole of described fixed head is provided with the second keeper; Described the second keeper have one suitable and insert the second hollow bulb of the second jut in described circular hole, second flange part that is against described fixed head end face and and described the second circular hole conducting with described the second circular hole shape; Wherein, the second jut of described the second keeper has at least described in partial insertion in cartridge filter, and by the second jut of described the second keeper, to described cartridge filter, the installation position on described fixed head positions.Owing to being provided with keeper on the end face at tubular inner casing and fixed head, can cartridge filter be fixed and be located by keeper, thereby guarantee cartridge filter fixing fastness in tubular inner casing.
Further, described emission-control equipment also comprises the center bearing bracket for connecting described the first cylindrical shell and described the second cylindrical shell, described center bearing bracket has at least part to be arranged in the joint portion of described the first cylindrical shell and described the second cylindrical shell, and is fixed and is connected with described tubular inner casing.Because the first cylindrical shell and the second cylindrical shell are to be fixed connection by center bearing bracket, and it is extend to the inside of the first cylindrical shell and the second cylindrical shell and be fixed and be connected with tubular inner casing that center bearing bracket has part, thereby can further fix the position in tubular inner casing tubular inner casing.
Further, described emission-control equipment also comprises two groups and is set on described center bearing bracket, the semi-circular clip that described center bearing bracket is stepped up.Can step up the first cylindrical shell and the second cylindrical shell by two groups of semi-circular clips, so that the space of cylindrical case inside reaches the effect of a sealing, thereby complete the assembling of whole cylindrical case.
Brief description of the drawings
Fig. 1 is the structural representation of the emission-control equipment of the utility model the first embodiment;
Fig. 2 is the installation diagram of the emission-control equipment of the utility model the first embodiment.
Detailed description of the invention
For making the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with accompanying drawing, each embodiment of the present utility model is explained in detail.But, persons of ordinary skill in the art may appreciate that in the each embodiment of the utility model, in order to make reader understand the application better, many ins and outs are proposed.But, even without these ins and outs and the many variations based on following embodiment and amendment, also can realize the each claim of the application technical scheme required for protection.
The first embodiment of the present utility model relates to a kind of emission-control equipment, as depicted in figs. 1 and 2, comprise the cylindrical case that formed by the first cylindrical shell 1 and the second cylindrical shell 2, be arranged on tubular inner casing 3 and fixed head 4 in cylindrical case, be separately positioned on inlet flange 5 and outlet(discharge) flange 6 on the first cylindrical shell 1 and the second cylindrical shell 2.Wherein, tubular inner casing 3 is oppositely arranged and adopts fixed bar 7 to be connected with fixed head 4.
In addition, the emission-control equipment of present embodiment also comprises: be arranged on the cartridge filter 8 in tubular inner casing 3.Wherein, in the present embodiment, cartridge filter 8 is provided with four groups and carry out annular array along the axle center of fixed bar 7, and on the end of tubular inner casing 3 and fixed head 4, the installation position of corresponding each group cartridge filter 8 offers respectively and the first circular hole and second circular hole of cartridge filter 8 conductings.
Specifically, waste gas can be sent in cylindrical case by inlet flange by pipeline, then entered in cartridge filter by the circular hole of tubular inner casing end face, after being processed by cartridge filter, taken out of by outlet(discharge) flange again, finally can discharge through air extractors such as mechanical pumps, thereby reach the object of processing waste gas.
As shown in the above, the emission-control equipment of present embodiment is simple in structure, and sealing effectiveness is good, after cartridge filter absorbing and filtering is saturated, can clean or replace, and reduces use cost.Sorbing material, according to differential responses gas, can be replaced, and this structure adopts flange form to fix, and easy accessibility is applicable to using in research and production.
In addition, in the present embodiment, corresponding the first circular hole in the end of tubular inner casing 3 is provided with the first keeper 11.This first keeper 11 have one suitable and insert the first hollow bulb of the first jut in the first circular hole, first flange part that is against tubular inner casing 3 end faces and and the first circular hole conducting with the first circular hole shape.Wherein, the first jut of the first keeper 11 has at least in partial insertion cartridge filter 8, by the first jut of the first keeper 11, cartridge filter 8 is positioned in the installation position of tubular inner casing 3 end faces.And corresponding the second circular hole of fixed head 4 is provided with the second keeper 12, this second keeper 12 have one suitable and insert the second hollow bulb of the second jut in described circular hole, second flange part that is against fixed head 4 end faces and and the second circular hole conducting with the second circular hole shape.Wherein, the second jut of described the second keeper has at least in partial insertion cartridge filter 8, and by the second jut of the second keeper 12, to cartridge filter 8, the installation position on fixed head 4 positions.Owing to being provided with keeper on the end face at tubular inner casing 3 and fixed head 4, can cartridge filter being fixed and being located by keeper, thereby guarantee cartridge filter fixing fastness in tubular inner casing.
Specifically, the keeper of two groups is annular table scalariform part, and respectively the jut of two groups of keepers is welded in the first and second circular holes of tubular inner casing 3 ends and has part outstanding.One end, two ends of four cartridge filters 8 is stuck on the jut of the first keeper 11 and the second keeper 12.And the center of end fixed head 4 and tubular inner casing 3 end faces has an aperture, one end of fixed bar 7 is through the aperture at end fixed head 4 centers, and the other end passes the aperture of tubular inner casing 3 end faces, and fastening by nut 13, and the quantity of nut 13 comprises two two ends that are separately positioned on fixed bar 7.And it is worth mentioning that, the first keeper 11, the second keeper 12, fixed head 4, fixed bar 7 materials are stainless steel, and size can design according to actual needs.Described cartridge filter 8 materials and specification also can design according to actual needs.
And, emission-control equipment in present embodiment also comprises: for connecting the center bearing bracket 14 of the first cylindrical shell 1 and the second cylindrical shell 2, and this center bearing bracket 14 has at least part to be arranged in the joint portion of the first cylindrical shell 1 and the second cylindrical shell 2, and is fixed and is connected with tubular inner casing 3.Hence one can see that, because the first cylindrical shell 1 and the second cylindrical shell 2 are to be fixed connection by center bearing bracket 14, and it is extend to the inside of the first cylindrical shell 1 and the second cylindrical shell 2 and be fixed and be connected with tubular inner casing 3 that center bearing bracket 14 has part, thereby can further fix the position in tubular inner casing tubular inner casing.
In addition, it is worth mentioning that, the emission-control equipment of present embodiment also comprises: two groups are set on described center bearing bracket 14, the semi-circular clip 15 that center bearing bracket 14 is stepped up.Can step up the first cylindrical shell and the second cylindrical shell by two groups of semi-circular clips, so that the space of cylindrical case inside reaches the effect of a sealing, thereby complete the assembling of whole cylindrical case.
Persons of ordinary skill in the art may appreciate that the respective embodiments described above are to realize specific embodiment of the utility model, and in actual applications, can do various changes to it in the form and details, and do not depart from spirit and scope of the present utility model.
Claims (5)
1. an emission-control equipment, is characterized in that: comprise the cylindrical case that is made up of the first cylindrical shell and the second cylindrical shell, be arranged on tubular inner casing and fixed head in described cylindrical case, be separately positioned on inlet flange and outlet(discharge) flange on described the first cylindrical shell and described the second cylindrical shell; Wherein, described tubular inner casing is oppositely arranged and adopts fixed bar to be connected with described fixed head;
Described emission-control equipment also comprises: be arranged on the cartridge filter in described tubular inner casing; Described cartridge filter comprises N group and carries out annular array along the axle center of described fixed bar, wherein said N is natural number, and on the end of described tubular inner casing and described fixed head, the installation position of corresponding described cartridge filter offers respectively and the first circular hole and second circular hole of described cartridge filter conducting.
2. emission-control equipment according to claim 1, is characterized in that: corresponding described first circular hole in end of described tubular inner casing is provided with the first keeper;
Described the first keeper have one suitable and insert the first hollow bulb of the first jut in described the first circular hole, first flange part that is against described tubular inner casing end face and and described the first circular hole conducting with described the first circular hole shape;
Wherein, the first jut of described the first keeper has at least described in partial insertion in cartridge filter, by the first jut of described the first keeper, described cartridge filter is positioned in the installation position of described tubular inner casing end face.
3. emission-control equipment according to claim 1, is characterized in that: corresponding described the second circular hole of described fixed head is provided with the second keeper;
Described the second keeper have one suitable and insert the second hollow bulb of the second jut in described circular hole, second flange part that is against described fixed head end face and and described the second circular hole conducting with described circular hole shape;
Wherein, the second jut of described the second keeper has at least part to enter in described cartridge filter, and by the second jut of described the second keeper, to described cartridge filter, the installation position on described fixed head positions.
4. emission-control equipment according to claim 1, it is characterized in that: described emission-control equipment also comprises the center bearing bracket for connecting described the first cylindrical shell and described the second cylindrical shell, described center bearing bracket has at least part to be arranged in the joint portion of described the first cylindrical shell and described the second cylindrical shell, and is fixed and is connected with described tubular inner casing.
5. emission-control equipment according to claim 4, is characterized in that: described emission-control equipment also comprises two groups and is set on described center bearing bracket, the semi-circular clip that described center bearing bracket is stepped up.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420100921.0U CN203764039U (en) | 2014-03-06 | 2014-03-06 | Waste gas treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420100921.0U CN203764039U (en) | 2014-03-06 | 2014-03-06 | Waste gas treatment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203764039U true CN203764039U (en) | 2014-08-13 |
Family
ID=51281287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420100921.0U Expired - Lifetime CN203764039U (en) | 2014-03-06 | 2014-03-06 | Waste gas treatment device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203764039U (en) |
-
2014
- 2014-03-06 CN CN201420100921.0U patent/CN203764039U/en not_active Expired - Lifetime
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140813 |
|
| CX01 | Expiry of patent term |