CN203741383U - Cooling water control system - Google Patents
Cooling water control system Download PDFInfo
- Publication number
- CN203741383U CN203741383U CN201320845188.0U CN201320845188U CN203741383U CN 203741383 U CN203741383 U CN 203741383U CN 201320845188 U CN201320845188 U CN 201320845188U CN 203741383 U CN203741383 U CN 203741383U
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- 239000000498 cooling water Substances 0.000 title claims abstract description 36
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 126
- 238000012544 monitoring process Methods 0.000 claims description 4
- 230000000977 initiatory effect Effects 0.000 claims description 3
- 239000002826 coolant Substances 0.000 description 17
- 238000001816 cooling Methods 0.000 description 7
- 238000012423 maintenance Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
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Abstract
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Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201320845188.0U CN203741383U (en) | 2013-12-19 | 2013-12-19 | Cooling water control system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201320845188.0U CN203741383U (en) | 2013-12-19 | 2013-12-19 | Cooling water control system |
Publications (1)
Publication Number | Publication Date |
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CN203741383U true CN203741383U (en) | 2014-07-30 |
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Application Number | Title | Priority Date | Filing Date |
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CN201320845188.0U Expired - Lifetime CN203741383U (en) | 2013-12-19 | 2013-12-19 | Cooling water control system |
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CN (1) | CN203741383U (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104534632A (en) * | 2014-12-12 | 2015-04-22 | 北京百度网讯科技有限公司 | Micro-negative-pressure pipeline system and failure processing method |
CN104760268A (en) * | 2015-04-14 | 2015-07-08 | 徐峰 | High-pressure water cooling device |
CN107366834A (en) * | 2017-08-22 | 2017-11-21 | 上海科勒电子科技有限公司 | Water pipe leakage detection method, storage medium and electronic equipment |
CN110890262A (en) * | 2018-09-11 | 2020-03-17 | 北京北方华创微电子装备有限公司 | Chamber cooling device and semiconductor processing equipment |
TWI709203B (en) * | 2018-09-11 | 2020-11-01 | 大陸商北京北方華創微電子裝備有限公司 | Chamber cooling device and semiconductor processing equipment |
CN112857421A (en) * | 2021-03-18 | 2021-05-28 | 正星科技股份有限公司 | Meter performance test system |
-
2013
- 2013-12-19 CN CN201320845188.0U patent/CN203741383U/en not_active Expired - Lifetime
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104534632A (en) * | 2014-12-12 | 2015-04-22 | 北京百度网讯科技有限公司 | Micro-negative-pressure pipeline system and failure processing method |
CN104534632B (en) * | 2014-12-12 | 2017-11-14 | 北京百度网讯科技有限公司 | Tiny structure pipe-line system and fault handling method |
CN104760268A (en) * | 2015-04-14 | 2015-07-08 | 徐峰 | High-pressure water cooling device |
CN104760268B (en) * | 2015-04-14 | 2017-06-30 | 深圳市昌本科技有限公司 | A kind of high-pressure water-cooling device |
CN107366834A (en) * | 2017-08-22 | 2017-11-21 | 上海科勒电子科技有限公司 | Water pipe leakage detection method, storage medium and electronic equipment |
CN107366834B (en) * | 2017-08-22 | 2024-03-26 | 上海科勒电子科技有限公司 | Water pipe water leakage detection method, storage medium and electronic equipment |
CN110890262A (en) * | 2018-09-11 | 2020-03-17 | 北京北方华创微电子装备有限公司 | Chamber cooling device and semiconductor processing equipment |
TWI709203B (en) * | 2018-09-11 | 2020-11-01 | 大陸商北京北方華創微電子裝備有限公司 | Chamber cooling device and semiconductor processing equipment |
CN112857421A (en) * | 2021-03-18 | 2021-05-28 | 正星科技股份有限公司 | Meter performance test system |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100015 Jiuxianqiao Chaoyang District, East Beijing Road, building M2, floor 1, No. 2 Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180316 Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |
|
CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20140730 |