CN203732747U - Metallic glass thin film micro device for plastic deformation processing - Google Patents

Abstract

The utility model discloses a metallic glass thin film micro device used for plastic deformation processing. A lanthanum-based metallic glass film with strong thermoplasticity, low glass transition temperature, high flatness, and corrosion resistance. The structural formula of this alloy is La _100-xy Co _x Al _y , where x is the atomic percentage of Co, and y is Al The atomic percentage of the element, 5≤x≤35, 5≤y≤35, 25≤x+y≤50, is arc smelted more than four times in the argon arc adsorbed by zirconium to obtain a uniformly mixed alloy block, and finally uses wire cutting Obtain a target material that meets the coating requirements, and use DC magnetron sputtering to obtain a metallic glass film with the required thickness. Metallic glass thin film micro-devices for plastic deformation processing, obtained two-dimensional sub-wavelength transmission grating filter with polarization insensitive characteristics, the grating unit is a raised square array, the height is 200nm, the square array period is 240nm, and the square side length is 120nm. It is insensitive to the polarization of incident light, which can improve the transmittance of incident light and realize the screening of blue light.

Description

A metallic glass thin film microdevice for plastic deformation processing

technical field

The utility model relates to micro-nano preparation technology, in particular to a metallic glass film micro-device used for plastic deformation processing.

Background technique

The traditional semiconductor processing technology is developed on the basis of microelectronics integration technology. The processing of micro parts mainly uses silicon materials, but due to the low mechanical strength of silicon wafers, it is increasingly unable to meet the functional requirements of parts in modern micro optics and micro systems. . For metal materials, micro parts processed by LIGA technology have a good aspect ratio, but due to technical limitations, it is difficult to apply to inclined surfaces and micro-precision processing. At the same time, the synchrotron radiation source used in it is expensive, which limits the application of this technology. application range. Amorphous alloys (commonly known as metallic glasses) are a new type of alloy material whose constituent atoms are not arranged periodically and symmetrically. Due to their special microstructure, they have superior mechanical, physical, chemical and magnetic properties, and are especially suitable for microstructures. However, due to the difficulty in preparing bulk amorphous alloys and the lack of excellent ductility, they cannot be widely used. Therefore, the study of amorphous alloy thin films emerged as the times require, which not only inherits the advantages of amorphous alloys, such as high strength, high hardness, wear resistance, and corrosion resistance, but also can avoid bulk amorphous alloys on a small scale. The disadvantage of poor ductility, so it has a wide range of application prospects. However, at present, most amorphous films have a narrow supercooled liquid phase region, resulting in low stability, and most of the glass transition temperatures are above 250°C. In view of the above shortcomings and limitations, we designed and prepared lanthanum-based metallic glass films.

The lanthanum-based metallic glass film designed and prepared in this project has an extremely low glass transition temperature (the lowest can reach 140°C), simple proportioning, excellent thermoplasticity, high flatness, small roughness, and strong corrosion resistance. It has high stability and has unique advantages in net shape. It is an ideal structural material in microsystems and micromachining. We have successfully prepared sub-wavelength microdevices by using this series of metal films designed by ourselves.

Utility model content

The purpose of this utility model is to overcome the deficiencies of the prior art and provide a metal glass thin film micro-device for plastic deformation processing.

The technical solution adopted by the utility model to solve its technical problems is as follows:

A metallic glass thin film micro-device for plastic deformation processing, a two-dimensional sub-wavelength transmission grating filter with polarization insensitivity obtained on a lanthanum-based metallic glass thin film, the grating unit is a raised square array, with a height of 200nm, square The array period is 240nm, and the square side length is 120nm. The filter is insensitive to the polarization of incident light, which can improve the transmittance of incident light and realize the screening of blue light.

The beneficial effects of the utility model are: the utility model discloses a ternary lanthanum-based metal glass film with low glass transition temperature, high flatness, small roughness, good thermoplasticity, excellent net shape ability and corrosion resistance, and has successfully A polarization-insensitive two-dimensional subwavelength transmission grating filter and a simple one-dimensional grating were prepared. The excellent performance of the ternary lanthanum-based film makes it have a wide application prospect in the manufacture of nanoimprinting and precision micro-nano devices.

Description of drawings

Figure 1 is the XRD pattern of La ₅₃ Co ₁₅ Al ₃₂ film;

Fig. 2 is the DSC figure of La ₅₃ Co ₁₅ Al ₃₂ film;

Fig. 3 is the mechanical performance figure of La ₅₃ Co ₁₅ Al ₃₂ film;

Fig. 4 is the AFM figure of La ₅₃ Co ₁₅ Al ₃₂ film;

Fig. 5 is a flow chart of micro-device preparation;

Fig. 6 is a diagram of a two-dimensional sub-wavelength transmission grating filter with a polarization-insensitive characteristic with a grating unit of a raised square, a period of 240 nm, and a side length of 120 nm;

Figure 7 is a one-dimensional simple line grating diagram with a line width of 150nm, a period of 300nm, and a depth of 200nm.

Detailed ways

Step 1: Put La with a purity of 99.9%, Co with a purity of 99.95%, and Al with a purity of 99.95% as La _100-xy Co _x Al _y, where x is the atomic percentage of the La element, and y is the atomic percentage of the Co element , 5≤x≤35, 5≤y≤35, 25≤x+y≤50, arc melting more than four times in the zirconium-adsorbed argon arc to obtain a uniformly mixed alloy block, and then pass the alloy block through a copper mold Prepare a 2-inch original target by casting, and finally use wire cutting to obtain a target that meets the coating requirements;

Step 2: Put the target material and substrate obtained in Step 1 into a well-vacuum operating chamber by DC sputtering to obtain a dense lanthanum-based metallic glass film;

Step 3: Characterize the structure of the obtained sample by X-ray diffraction;

Step 4: obtain thermal parameters by differential scanning calorimetry;

Step 5: using a mechanical property testing machine to test the mechanical properties of the obtained material;

Step 6: using an atomic force microscope to test the surface roughness of the film;

Step 7: Measure the flatness of the film surface with a ZYGO interferometer;

Step 8: Use focused ion beam (FIB) technology to process on single crystal silicon to obtain the reverse structure of the required micro-device as a mold;

Step 9: Place the prepared silicon mold and La-Co-Al metallic glass film sample up and down in the cavity of the imprinting machine, set the pressure and heating temperature, carry out hot pressing and hold the heat for 3 minutes, then remove the temperature and pressure , after the sample is cooled, separate the mold from the sample;

Step 10: Ultrasonic cleaning is performed on the prepared sample in absolute ethanol, and finally the desired lanthanum-based metallic glass thin film micro-device with the structure opposite to the mold is obtained.

Example 1

In this example, a 200nm thick La ₅₃ Co ₁₅ Al ₃₂ metallic glass film was prepared by magnetron sputtering, and the film was used to prepare a grating unit with a raised square, a period of 240nm, and a side length of 120nm with polarization insensitivity. Two-dimensional subwavelength transmission grating filter.

Step 1: La with a purity of 99.9%, Co with a purity of 99.95%, and Al with a purity of 99.95% are arc-melted five times in an argon arc adsorbed by zirconium according to the ratio of La ₅₃ Co ₁₅ Al ₃₂ to obtain a well-mixed Alloy block, and then cast the alloy block through a copper mold to prepare a 2-inch original target, and finally use wire cutting to obtain a target that meets the coating requirements;

Step 2: Put the target and quartz glass substrate obtained in step 1 into a vacuum chamber, and in a vacuum of 5×10 ^-4 Pa to 6×10 ^-4 Pa, ionize argon gas at a low pressure and introduce Magnetic field, using DC magnetron sputtering, with a power of 60W and a deposition rate of (20+/- 0.5)nm/s, sputtering for 10s to obtain a 200um lanthanum-based metallic glass film;

Step 3: Characterize the structure of the obtained sample by X-ray diffraction, and Figure 1 is the X-ray diffraction pattern of the sample, indicating that the film sample is an amorphous alloy structure;

Step 4: Obtain thermal parameters by differential scanning calorimetry, and Figure 2 is the DSC diagram of the sample;

Step 5: Use a mechanical performance testing machine to test the mechanical properties of the obtained material as shown in Figure 3;

Step 6: Use AFM to measure the roughness of the film sample. Figure 4 is the AFM image of the sample. The roughness is less than 1 nanometer, only 0.3nm;

Step 7: Use a ZYGO interferometer to measure the flatness of the film surface. If it is less than 2 apertures, the flatness is very high.

Step 8: Use focused ion beam (FIB) technology to process the grating unit on the single crystal silicon into a concave square array with a depth of 200nm, a period of 240nm, and a side length of 120nm as a mold;

Step 9: Place the prepared silicon mold and La-Co-Al metallic glass film sample up and down in the cavity of the imprinting machine, set the pressure to 300N and the temperature to 240°C, perform hot pressing and heat preservation and pressure for 3 minutes before withdrawing After the temperature is removed and the pressure is removed, the mold and the sample are separated after the sample is cooled;

Step 10: Clean the prepared sample ultrasonically in absolute ethanol, and finally obtain a polarization-insensitive two-dimensional sub-wavelength transmission grating unit on the lanthanum-based metallic glass film, which is a raised square, with a period of 240 nm and a side length of 120 nm. Raster filter. The fabrication process of the micro-device is shown in Fig. 5.

It can be seen from Figures 1 to 4 that in Example 1, a lanthanum-based metallic glass film with a film thickness of 200nm was obtained, and a two-dimensional sub-wavelength transmission grating filter with polarization insensitivity was obtained on the lanthanum-based metallic glass film (Figure 6 ). The properties of the lanthanide metal glass film obtained in this embodiment are shown in Table 1. The glass transition temperature of the lanthanum-based metal glass film with this ratio is low and the elastic modulus is large, which is suitable for the material of the convex two-dimensional complex array grating filter that requires high structural stability and is not easily deformed. According to the surface plasmon effect, We designed a period of 240nm, a film thickness of 200nm, and an array shape of two-dimensional convex square arrays. When the light interacts with the sub-wavelength structure on the surface of our film, the matching of the incident wave vector and the surface resonance wave vector is realized. Here In this mutual coupling process, due to the confinement and non-radiation of the surface plasmon element, the energy is prevented from attenuating along the metal surface, and the oscillation excitation of the regional plasmon wave is enhanced, thus improving the transmittance of the filter. At the same time, due to the periodic structure Symmetry avoids the influence of the polarization of incident light. We can also filter the incident light at different frequencies by adjusting the period size and film thickness of the grating.

Table 1 Properties of La ₅₃ Co ₁₅ Al ₃₂ thin films

 

Example 2

In this embodiment, a La ₇₂ Co ₁₈ Al ₁₀ metallic glass thin film with a film thickness of 200 nm is prepared by magnetron sputtering, and a one-dimensional grating is fabricated by using the thin film.

Step 1: La with a purity of 99.9%, Co with a purity of 99.95%, and Al with a purity of 99.95% are arc-melted five times in an argon arc adsorbed by zirconium according to the ratio of La ₇₂ Co ₁₈ Al ₁₀ to obtain a well-mixed Alloy block, and then cast the alloy block through a copper mold to prepare a 2-inch original target, and finally use wire cutting to obtain a target that meets the coating requirements;

Step 2: Put the target and quartz glass substrate obtained in step 1 into a vacuum chamber, and in a vacuum of 5×10 ^-4 Pa to 6×10 ^-4 Pa, ionize argon gas at a low pressure and introduce Magnetic field, using DC magnetron sputtering, with a power of 60W and a deposition rate of (20+/- 0.5)nm/s, sputtering for 10s to obtain a 200nm lanthanum-based metallic glass film sample;

Step 3: Characterize the structure of the obtained sample by X-ray diffraction;

Step 4: obtain thermal parameters by differential scanning calorimetry;

Step 5: using a mechanical property testing machine to test the mechanical properties of the obtained material;

Step 6: Measure the roughness of the film sample with AFM;

Step 7: Measure the flatness of the film surface with a ZYGO interferometer;

Step 8: Process a line grating mold with a period of 300nm and a depth of 200nm on single crystal silicon by using focused ion beam (FIB) technology;

Step 9: Place the prepared silicon mold and La-Co-Al metallic glass film sample up and down in the cavity of the imprinting machine, set the pressure at 160N and the temperature at 150°C, perform hot pressing and heat preservation and pressure for 3 minutes before withdrawing After the temperature is removed and the pressure is removed, the mold and the sample are separated after the sample is cooled;

Step 10: Ultrasonic cleaning was performed on the prepared sample in absolute ethanol, and finally a one-dimensional simple grating with a period of 300 nm was obtained on the lanthanum-based metal glass film (Figure 7).

In Example 2, a lanthanum-based metallic glass film with a film thickness of 200 nm was obtained and processed to obtain a one-dimensional simple line grating with a line width of 150 nm, a period of 300 nm, and a depth of 200 nm. The performance of the lanthanide metal glass film obtained in this embodiment is shown in Table 2. The glass transition temperature of the lanthanide metal glass thin film with the ratio is very low, and the elastic modulus is low, and is suitable for rapid processing of simple micro-devices with relatively low rigidity requirements.

Table 2 Properties of La ₇₂ Co ₁₈ Al ₁₀ thin films

 

Claims (1)

1. A metallic glass film micro-device for plastic deformation processing, characterized in that the two-dimensional sub-wavelength transmission grating filter with polarization insensitivity obtained on the lanthanum-based metallic glass film, the grating unit is a raised square The array has a height of 200nm, a square array period of 240nm, and a square side length of 120nm. The filter is insensitive to the polarization of incident light, which can increase the transmittance of incident light and realize the screening of blue light.