CN203720553U - Alkali metal resonator - Google Patents
Alkali metal resonator Download PDFInfo
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- CN203720553U CN203720553U CN201420050120.8U CN201420050120U CN203720553U CN 203720553 U CN203720553 U CN 203720553U CN 201420050120 U CN201420050120 U CN 201420050120U CN 203720553 U CN203720553 U CN 203720553U
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- alkali metal
- resonator
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- cavity
- resonant cavity
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Abstract
The utility model discloses an alkali metal resonator. The alkali metal resonator is of a glass-silicon-glass sandwich structure and comprises a resonant cavity body and six side surfaces surrounding the resonant cavity body, wherein one surface which is formed by a silicon slice is provided with an opening, one end of the opening is communicated with a resonant cavity, and the other end of the opening is sealed by a welding material; a metal layer is arranged between the welding material and the silicon slice; the resonant cavity body is internally provided with alkali metal and is filled with buffer gas. According to the alkali metal resonator disclosed by the utility model, the alkali metal can enter into the resonant cavity through the opening reserved in one side surface, and the entering of the alkali metal and static bonding cannot be mutually affected; the opening is sealed by the welding material, thus the resonant cavity is sealed, and the buffer gas in the resonant cavity is kept; compared with the prior art, the alkali metal resonator provided by the utility model is simple in preparation method, low in cost, excellent in performance and suitable for industrial production.
Description
Technical field
The utility model relates to a kind of alkaline metal resonator.
Background technology
Current atom clock is the most artificial clock, and according to report, the precision of the up-to-date atomic clock of developing reaches 10 18 powers.The specific type of atomic clock quantum leap is hyperfine transition, and hyperfine transition relates to the interaction in atomic nucleus magnetic field and extranulear electron magnetic field.Current atom clock is mainly towards two aspect development: be the precision that improves atomic clock on the one hand; On the other hand, be exactly by its miniaturization, to be applicable to GPS and telstar etc. for the active demand of atomic clock under the prerequisite that guarantees its performance.Therefore how reducing volume and weight, reduce its power consumption simultaneously, and have higher accuracy and degree of stability, is the major technique challenge that current atom clock runs into.
Alkali metal atom clock, such as rubidium, cesium-beam atomic clock, volume is little, lightweight, performance is good, and cost is lower, is current most widely used a kind of atomic clock.Alkali metal atom clock consists of physical package part and circuit servo segment, and physical package part plays decisive role to the short-term of alkali metal atom clock and long-time stability.The core component of physical piece is alkaline metal resonator, it is generally the sandwich structure of glass-silicon sheet-glass, middle silicon chip has part to be emptied and forms cavity, be called resonator cavity, alkaline metal or insert in cavity the laser of particular modulation for the preparation of alkali-metal raw material, by quarter-wave plate, become circularly polarized light, then irradiate resonator cavity, CPT resonance occurs in alkaline metal resonator cavity, by photodiode, survey luminous energy and change.Realize the microminiaturization of alkali metal atom clock, key is the volume that reduces alkaline metal resonator; Realize the long-time stability of atomic clock, key is the stability that increases alkaline metal resonator.
Current atom clock alkaline metal resonator is total following several: 1, in the sandwich structure of glass-silicon-glass, directly add rubidium chloride and barium azide, then generate Alkali Metal Rb by reaction; But reaction residue barium chloride is trapped in alkaline metal resonator cavity, chemical window is produced and polluted, can have a strong impact on rubidium and light action, thereby the performance of the atomic clock obtaining is not high; 2, in the structure of glass-silicon-glass, design two chambers: a chamber is used for placing alkaline metal (such as rubidium, caesium) bubble release agent, a chamber is for alkaline metal resonance, and bubble release agent can discharge vapour of an alkali metal under state of activation, and then is diffused in this cavity; But this design has increased the total area of alkaline metal resonator, thereby increase the volume of atomic clock physical package, do not met the development trend of atomic clock miniaturization; 3, in the structure of glass-silicon-glass, first in cavity, insert pure alkaline metal, again by electrostatic bonding upper glass, closed cavity, still, alkali-metal fusing point is lower than electrostatic bonding temperature, so, electrostatic bonding temperature can cause alkali-metal volatilization, affects electrostatic bonding quality, has reduced the stability of alkaline metal resonator.
Summary of the invention
The purpose of this utility model is to provide a kind of alkaline metal resonator, and not only volume is little for it, and stable performance.
To achieve the above object of the invention, the technical solution adopted in the utility model is:
An alkaline metal resonator, it is glass-silicon sheet-glass sandwich structure, comprises resonator cavity cavity and six sides that surround cavity, on the side consisting of silicon chip, is provided with an opening, and one end of opening is communicated with resonator cavity, and the other end is sealed by scolder; Between described scolder and silicon chip, be provided with metal level; In resonator cavity cavity, be placed with alkaline metal and be filled with buffer gas.
Due to the utilization of technique scheme, the utility model compared with prior art has following advantages:
According to alkaline metal resonator of the present utility model, alkaline metal can enter in resonator cavity by the reserved opening in its side, can not interact with electrostatic bonding; Scolder, by closure of openings, makes resonator cavity airtight, keeps the buffer gas in resonator cavity; Compare with existing, alkaline metal resonator preparation method that the utility model provides is simple, cost is low, excellent performance, is suitable for suitability for industrialized production.
Accompanying drawing explanation
Fig. 1 is the structural representation of the alkaline metal resonator in embodiment mono-;
Wherein, 1, scolder, 2, metal level, 3, glass, 4, glass, 5, silicon chip, 6, resonator cavity, 7, opening, 8, alkaline metal.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the utility model is further described:
Embodiment mono-: a kind of alkaline metal resonator
The structural representation of the alkaline metal resonator that accompanying drawing 1 provides for the present embodiment; Referring to accompanying drawing 1, alkaline metal resonator comprises scolder 1, metal level 2, glass 3, glass 4, silicon chip 5, resonator cavity 6, opening 7 and alkaline metal 8, it is glass-silicon sheet-glass sandwich structure, comprise resonator cavity cavity and six sides that surround cavity, wherein resonator cavity is square structure, a side consisting of silicon chip of cavity arranges oblong openings, and one end of opening is communicated with cavity, and one end is sealed by scolder; Between described scolder and silicon chip, be provided with metal level; In resonator cavity cavity, be placed with alkaline metal and be filled with buffer gas.
The concrete preparation method of above-mentioned alkaline metal resonator is as follows:
(1) adopt RCA standard cleaning step cleaning silicon chip; Silicon chip two sides thermal oxide growth oxide layer after cleaning is also passed through LPCVD deposit silicon nitride in oxide layer; According to required cavity geometry, adopt dual surface lithography etching, etching oxidation silicon and silicon nitride, exposed portions serve silicon chip, recycles two-sided KOH wet etching and removes the silicon chip that there is no monox and silicon nitride protection, thereby prepare through hole and the opening as resonator cavity; Adopt dual surface lithography etching, etching oxidation silicon and silicon nitride, expose remaining silicon chip again;
(2) by electrostatic bonding mode, the above-mentioned silicon chip with through hole and opening is carried out to glass-silicon sheet-glass electrostatic bonding, form sandwich structure; So far the cavity of resonator forms, and one of them side is in communication with the outside by opening;
(3) at the surface sputtering metal of opening both sides silicon chip;
(4), in glove box, alkaline metal is migrated in resonator cavity by opening; Then buffer gas nitrogen is filled with in resonator cavity; Recycling scolder completes opening sealing the preparation of alkaline metal resonator.
Claims (1)
1. an alkaline metal resonator, it is glass-silicon sheet-glass sandwich structure, comprises resonator cavity cavity and six sides that surround cavity, it is characterized in that: on the side consisting of silicon chip, be provided with an opening, one end of opening is communicated with resonator cavity, and the other end is sealed by scolder; Between described scolder and silicon chip, be provided with metal level; In resonator cavity cavity, be placed with alkaline metal and be filled with buffer gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420050120.8U CN203720553U (en) | 2014-01-26 | 2014-01-26 | Alkali metal resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420050120.8U CN203720553U (en) | 2014-01-26 | 2014-01-26 | Alkali metal resonator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203720553U true CN203720553U (en) | 2014-07-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420050120.8U Expired - Fee Related CN203720553U (en) | 2014-01-26 | 2014-01-26 | Alkali metal resonator |
Country Status (1)
| Country | Link |
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| CN (1) | CN203720553U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108107707A (en) * | 2017-11-22 | 2018-06-01 | 北京无线电计量测试研究所 | A kind of atomic gas chamber and preparation method |
-
2014
- 2014-01-26 CN CN201420050120.8U patent/CN203720553U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108107707A (en) * | 2017-11-22 | 2018-06-01 | 北京无线电计量测试研究所 | A kind of atomic gas chamber and preparation method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140716 Termination date: 20170126 |
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| CF01 | Termination of patent right due to non-payment of annual fee |