CN203720488U - Support structure and vacuum equipment - Google Patents
Support structure and vacuum equipment Download PDFInfo
- Publication number
- CN203720488U CN203720488U CN201420099659.2U CN201420099659U CN203720488U CN 203720488 U CN203720488 U CN 203720488U CN 201420099659 U CN201420099659 U CN 201420099659U CN 203720488 U CN203720488 U CN 203720488U
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- CN
- China
- Prior art keywords
- feet
- supporting construction
- height
- board
- support
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000011521 glass Substances 0.000 claims abstract description 42
- 238000005520 cutting process Methods 0.000 claims abstract description 16
- 210000002683 foot Anatomy 0.000 claims description 132
- 239000000758 substrate Substances 0.000 claims description 35
- 238000010276 construction Methods 0.000 claims description 31
- 230000003028 elevating effect Effects 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 230000003068 static effect Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000001312 dry etching Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
The utility model discloses a support structure and vacuum equipment with the support structure. The support structure comprises a machine table and support feet arranged on the machine table; a first support foot is fixedly mounted on the edge of the machine table; a second support foot is movably mounted in a middle area of the machine table; the position of the second support foot corresponds to a cutting area of a glass base plate. When the support structure is used, the height of the second support foot in the middle area can be adjusted according to sizes of various products, the number and the position of the support feet with the effective support function are changed to be applicable to glass base plates with different sizes or different production requirements, and the second support foot constantly contacts the cutting area of the glass base plate, so that the occurrence rate that electrostatic discharge of the glass base plate happens in a pixel area because of the support feet is reduced, normal display of a product is not affected, and scratch on the pixel area of the glass base plate caused by the support feet is also avoided.
Description
Technical field
The utility model relates to technical field of liquid crystal display, particularly a kind of supporting construction and vacuum equipment.
Background technology
At TFT-LCD(Thin Film Transistor Liquid Crystal Display, Thin Film Transistor-LCD) in industry, the structure of feet (Pin) is widely used in various process equipments.The manufacturing process of liquid crystal panel in, need to carry out dry etching and wet etching to glass substrate, to obtain needed figure.Especially in dry etch process, glass substrate is placed in reaction chamber and is processed, need feet to support glass substrate, but produce line (G8.5 line for example for certain, be of a size of 2200mm*2500mm) dry etching equipment, the position of general feet on board fixed, and cannot adjust for the product of various sizes.
In dry etching equipment of the prior art, the distribution schematic diagram of feet as shown in Figure 1, Fig. 1 be take G8.5 line as example, on whole board, be provided with 18 feets, wherein these 18 feets are divided into two kinds, a kind of machine edge of table that is distributed in, have 10, another kind is distributed in the centre position of board, has 8.These 8 feets further distribute with three row again, and first row and the 3rd row are all two, and secondary series is 4.
As shown in Figure 1, only have 4 feets of secondary series to be positioned at the cutting zone of glass substrate, other 4 feets are just at the pixel region of glass substrate, in these 4 feets and glass contact process, can be in the charge generation accumulation of glass baseplate surface, because feet is metal material, when feet contacts with glass substrate, there is static discharge (Electro Static discharge in the position at feet place easily, be called for short ESD), especially at the pixel region of glass substrate, if generation static discharge, can cause adverse effect to the demonstration of product, affect the quality of product.In addition, feet also likely produces the destructions such as cut to the surface of glass substrate, also can affect yield and the performance of product.
Utility model content
(1) technical matters that will solve
The technical problems to be solved in the utility model is how to reduce feet and glass substrate in the incidence of pixel region generation static discharge, improves product yield and performance.
(2) technical scheme
For solving the problems of the technologies described above, the utility model provides a kind of supporting construction, comprise board and be arranged on the first feet and the second feet on board, on machine edge of table, fixedly mount the first feet, board zone line is movable installs the second feet, and the cutting area of the corresponding glass substrate in the second feet position.
Further, the bottom of described the first feet is directly fixedly mounted on board surface.
Further, the height of described the second feet is adjustable.
Further, the position of described the second corresponding board in feet bottom has via hole, and is provided with detent mechanism on the second feet or via hole, and the relative position between feet and via hole is adjusted.
Further, the height of described the second feet is not less than the height of the first feet.Further, the height of described the second feet is less than the height of the first feet, and the lower end of the second feet is also provided with elevating mechanism.
Further, described elevating mechanism is that bottom is fixed on the lip-deep tubular structure of board, and the internal orifice dimension of tubular elevating mechanism is greater than the overall diameter of the second feet.
Further, on the bottom of the second feet and the sidewall of tubular elevating mechanism, be provided with the snap fastener matching, and the height sum of the height of the second feet and tubular elevating mechanism is greater than the height of the first feet.
Further, on the edge of described each direction of board, be distributed with at least two the first feets.
Further, the top of described the first feet and the second feet all has ferrule.
For solving the problems of the technologies described above, the utility model also provides a kind of vacuum equipment, comprises reaction chamber, also comprises and is arranged on reaction chamber inside for the supporting construction of support glass substrate, and wherein said supporting construction is above-described supporting construction.
(3) beneficial effect
The vacuum equipment that the utility model provides a kind of supporting construction and comprised this supporting construction, above-mentioned supporting construction in use, can to the height of the second feet of zone line, adjust according to the size of various products, to change playing feet number and the position of effective supporting role, the glass substrate that can adapt to different size or different Production requirements, the second feet is contacted with the cutting area of glass substrate all the time, to reduce, cause glass substrate in the incidence of pixel region generation static discharge because of feet, avoid the normal demonstration of product to impact, can also avoid feet to cause scuffing to the pixel region of glass substrate., because the feet of vacuum equipment is all thin and be ferrule, can't exert an influence to etching structure simultaneously.
Accompanying drawing explanation
Fig. 1 is the distribution schematic diagram of feet on board in dry etching equipment in prior art;
Fig. 2 is the schematic diagram of a kind of supporting construction of providing in the utility model embodiment;
Fig. 3 is the schematic diagram in tubular elevating mechanism sidewall Shang Ka road when the second feet activity is installed in the utility model embodiment.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples are used for illustrating the utility model, but are not used for limiting scope of the present utility model.
A kind of supporting construction is provided in the utility model embodiment, schematic diagram as shown in Figure 2, comprise board 00 and be arranged on the first feet 10 and the second feet 20 on board 00, on the edge of board 00, fixedly mount the first feet 10, board zone line is movable installs the second feet 20, and the cutting area of the second corresponding glass substrate 30 in feet 20 positions.
It is all hard-wired feet that above-mentioned supporting construction changes in existing structure, can not be applied to the glass substrate of producing on various product lines, by adjustable for height the second feet is set at board zone line, the product that can produce line according to difference regulates the height of the second feet, change position and the number of effective feet, also due to the second feet, be positioned at the cutting zone of glass substrate, can avoid because producing static discharge, the demonstration of product pixel region being impacted, improve the yields of product.
Preferably, in the present embodiment, the bottom of the first feet 10 is directly fixedly mounted on board 00 surface.Because the first feet 10 is fixed installations, so position just cannot be changed once determining with height again.But the second feet 20 of zone line is different, because the second feet 20 is to be flexibly connected, need to select the second suitable feet 20 as effective feet according to product size and Production requirement, and other non-selected feets be invalid feet, can not play a supporting role.
Preferably, in the present embodiment, the height of the second feet 20 is adjustable.By adjusting the height of the second feet 20, to change the number that can play effective supporting role feet, reach and meet different demands of producing the different size product that lines produce.
Preferably, in the present embodiment, the height of the second feet 20 is adjustable specifically comprises following two kinds of implementations:
The first is that the position of the second corresponding board 00 in feet 20 bottoms has via hole, and be provided with detent mechanism on the second feet 20 or via hole, relative position between feet and via hole is adjusted, and the height of the second feet 20 is not less than the height of the first feet 10 in this case.Because the second feet 20 can carry out activity relatively in via hole, can reach the object that changes the second feet height by the relative position changing between the two.
Wherein the concrete implementation of detent mechanism is to form screw thread on the second feet 20, and after the height and position of the second feet 20 is determined, by nut screwing clamping, to be fixed, the annexation of principle and nuts and bolt is similar, repeats no more herein.
The second is the height that the height of the second feet 20 is less than the first feet 10, and the lower end of the second feet 20 is also provided with elevating mechanism.Concrete, elevating mechanism is that bottom is fixed on the lip-deep tubular structure of board 00, and the internal orifice dimension of tubular elevating mechanism is greater than the overall diameter of the second feet 20.
Preferably, above-mentioned the second implementation also comprises: on the bottom of the second feet 20 and the sidewall of tubular elevating mechanism, be provided with the snap fastener matching, and the second feet 20 be greater than the height of the first feet 10 with the height sum of tubular elevating mechanism.
Wherein the concrete implementation of snap fastener is on the sidewall of tubular elevating mechanism, to be provided with figure Ka road (or being called hole clipping) as shown in Figure 3, and on the second feet 20, be provided with the projection that width is slightly less than Tu3Zhong Ka road or hole clipping width, to in this projection Ka road, slide from top to bottom or from top to bottom, when the height of the second feet 20 meets the requirements, by projection to anticlockwise or to right rotation, be stuck in horizontal card road, realize fixing.By adjusting different position in the second feet upper process Ka road, also can reach the object that changes the second feet height.
Preferably, in the present embodiment, on the edge of board 00 each direction, be distributed with at least two the first feets 10.It is example that the G8.5 of take in the present embodiment produces line, is provided with three the first feets 10 on the X-direction edge of board 00, is provided with two the first feets 10 on Y-direction edge.Also it should be noted that, the number of the first feet 10 need meet the demand of concrete size, and concrete number is not done concrete restriction.
Preferably, as shown in Figure 2, it is example that the G8.5 of still take produces line to the schematic diagram that in the present embodiment, the second feet 20 distributes at board 00 zone line, at board 00 zone line, be provided with altogether 7 the second feets 20, with three row, distribute, 2 of the first rows, the second 3 of row, 2 of the third lines.These 7 the second feets 20 are all at the cutting area of glass substrate 30, the first row and the third line the second feet 20 are just on board X-direction cutting zone, second row the second feet 20 is just on Y-direction cutting zone, due to the cutting zone of equal corresponding glass substrate, therefore can pixel region on daughter board after glass substrate (motherboard) cutting not produced and be scratched.It should be noted that, the second 20 of feets needs meet the cutting area at glass substrate 30, and the distribution pattern in ranks (being XY) direction does not limit to and matrix form, can also be the non-matrix form in Fig. 2.
Preferably, in the present embodiment, the top of the first feet 10 and the second feet 20 all has ferrule.The first feet 10 and the second feet 20 are glass substrate 30 and provide a supporting role, according to producing linear dimension feature, select suitable effective the second feet 20, the support that the first feet 10 and the second feet 20 are provided for glass substrate 30 meets mechanics requirement, guarantees the firm of glass substrate 30.The position also contacting with glass substrate 30 due to the second feet 20 is all at cutting area, even if the second feet 20 and glass substrate 30 contact generation static discharge, can for the structure showing, not impact glass substrate 30 pixel regions yet, guarantee yields.
In sum, the supporting construction of the glass substrate that the present embodiment provides, by adjustable for height the second feet is set at board zone line, the product that can produce line according to difference regulates the height of the second feet, change position and the number of effective feet, to adapt to the glass substrate of various sizes.Because the second feet is positioned at the cutting zone of glass substrate, even if generation static discharge, because of not at pixel region, can also avoid because producing static discharge, the demonstration of product pixel region being impacted, improve the yields of product, simultaneously for the performance of product is given security.
Based on above-mentioned supporting construction, a kind of vacuum equipment is also provided in the utility model embodiment, except comprising reaction chamber, also comprise and be arranged on reaction chamber inside for the supporting construction of support glass substrate, wherein supporting construction is above-described supporting construction.
Concrete, the vacuum equipment in the present embodiment be take dry etching equipment as example, except comprising, glass substrate is carried out the vacuum reaction chamber of dry etch process, also comprises and carries out the supporting construction used in dry etch process process.
Above embodiment is only for illustrating the utility model; and be not limitation of the utility model; the those of ordinary skill in relevant technologies field; in the situation that not departing from spirit and scope of the present utility model; can also make a variety of changes and modification; therefore all technical schemes that are equal to also belong to category of the present utility model, and scope of patent protection of the present utility model should be defined by the claims.
Claims (11)
1. a supporting construction, it is characterized in that, comprise board and be arranged on the first feet and the second feet on board, on machine edge of table, fixedly mount the first feet, board zone line is movable installs the second feet, and the cutting area of the corresponding glass substrate in the second feet position.
2. supporting construction as claimed in claim 1, is characterized in that, the bottom of described the first feet is directly fixedly mounted on board surface.
3. supporting construction as claimed in claim 1, is characterized in that, the height of described the second feet is adjustable.
4. supporting construction as claimed in claim 3, is characterized in that, the position of described the second corresponding board in feet bottom has via hole, and is provided with detent mechanism on the second feet or via hole, and the relative position between feet and via hole is adjusted.
5. supporting construction as claimed in claim 4, is characterized in that, the height of described the second feet is not less than the height of the first feet.
6. supporting construction as claimed in claim 3, is characterized in that, the height of described the second feet is less than the height of the first feet, and the lower end of the second feet is also provided with elevating mechanism.
7. supporting construction as claimed in claim 6, is characterized in that, described elevating mechanism is that bottom is fixed on the lip-deep tubular structure of board, and the internal orifice dimension of tubular elevating mechanism is greater than the overall diameter of the second feet.
8. supporting construction as claimed in claim 7, it is characterized in that, on the bottom of the second feet and the sidewall of tubular elevating mechanism, be provided with the snap fastener matching, and the height sum of the height of the second feet and tubular elevating mechanism is greater than the height of the first feet.
9. supporting construction as claimed in claim 1, is characterized in that, is distributed with at least two the first feets on the edge of described each direction of board.
10. supporting construction as claimed in any one of claims 1-9 wherein, is characterized in that, the top of described the first feet and the second feet all has ferrule.
11. 1 kinds of vacuum equipments, comprise reaction chamber, it is characterized in that, also comprise and are arranged on reaction chamber inside for the supporting construction of support glass substrate, and wherein said supporting construction is the supporting construction described in any one in claim 1-10.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420099659.2U CN203720488U (en) | 2014-03-06 | 2014-03-06 | Support structure and vacuum equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420099659.2U CN203720488U (en) | 2014-03-06 | 2014-03-06 | Support structure and vacuum equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203720488U true CN203720488U (en) | 2014-07-16 |
Family
ID=51159629
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420099659.2U Expired - Fee Related CN203720488U (en) | 2014-03-06 | 2014-03-06 | Support structure and vacuum equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203720488U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105140169A (en) * | 2015-07-29 | 2015-12-09 | 深圳市华星光电技术有限公司 | Support structure and vacuum equipment |
| US10551651B2 (en) | 2017-01-13 | 2020-02-04 | Boe Technology Group Co., Ltd. | Substrate support device |
| CN112634774A (en) * | 2020-12-25 | 2021-04-09 | 深圳Tcl新技术有限公司 | Light source plate, display unit and display device |
-
2014
- 2014-03-06 CN CN201420099659.2U patent/CN203720488U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105140169A (en) * | 2015-07-29 | 2015-12-09 | 深圳市华星光电技术有限公司 | Support structure and vacuum equipment |
| WO2017016055A1 (en) * | 2015-07-29 | 2017-02-02 | 深圳市华星光电技术有限公司 | Supporting structure and vacuum device |
| US20170170046A1 (en) * | 2015-07-29 | 2017-06-15 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Pin structure and vacuum apparatus |
| CN105140169B (en) * | 2015-07-29 | 2018-10-19 | 深圳市华星光电技术有限公司 | A kind of support construction and vacuum equipment |
| US10551651B2 (en) | 2017-01-13 | 2020-02-04 | Boe Technology Group Co., Ltd. | Substrate support device |
| CN112634774A (en) * | 2020-12-25 | 2021-04-09 | 深圳Tcl新技术有限公司 | Light source plate, display unit and display device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140716 |