CN203715789U - Cooling structure of single crystal furnace turn-over box - Google Patents
Cooling structure of single crystal furnace turn-over box Download PDFInfo
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- CN203715789U CN203715789U CN201320823428.7U CN201320823428U CN203715789U CN 203715789 U CN203715789 U CN 203715789U CN 201320823428 U CN201320823428 U CN 201320823428U CN 203715789 U CN203715789 U CN 203715789U
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- cooling
- cooling structure
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- turn
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Abstract
The utility model relates to a cooling structure of a single crystal furnace turn-over box. The cooling structure comprises a box body, an upper interface, a lower interface and a turn-over valve, wherein the upper interface is used for being connected with an assistant work room; the lower interface is used for being connected with the furnace cover of a main work room; the box body is divided into an inner layer and an outer layer; a cooling interlayer is arranged between the inner layer and the outer layer; a water inlet and outlet hole base communicated with the cooling interlayer is arranged outside the box body; a plurality of grid plates are arranged in a staggered way from top to bottom in the cooling interlayer; as for the two adjacent grid plates, one end of one grid plate is fixed on the inner layer, a gap is reserved between the other end of the grid plate and the outer layer, one end of the other grid plate is fixed on the outer layer, and the gap is reserved between the other end of the other grid plate and the inner layer. The cooling structure disclosed by the utility model enlarges the contact surface between the inner wall and outer wall and water and enhances the cooling temperature reduction effect by arranging the staggered grid plates in the cooling interlayer, thereby effectively absorbing the heat and better protecting the turn-over box.
Description
Technical field
The utility model relates to a kind of plate turning box of mono-crystal furnace cooling structure.
Background technology
Silicon single crystal is the crystal with substantially complete lattice structure, is a kind of good material of partly leading, and is used for producing the semiconductor devices, solar cell etc.Silicon single crystal is to draw and form in single crystal growing furnace with highly purified polysilicon, to the improvement of silicon single crystal control device and control technique, will produce far-reaching influence to semi-conductor industry.Existing pulling single crystal silicon device is single crystal growing furnace, and it is comprised of furnace bottom, lower furnace chamber, upper furnace chamber, bell, perble range, concubine six major parts.The cooling structure of existing plate turning box of mono-crystal furnace is perfect not enough, in pulling monocrystal process, can better not reduce perble range temperature.
Utility model content
The purpose of this utility model is to provide the plate turning box of mono-crystal furnace cooling structure that a kind of heat can more fully absorb.
Realize the technical solution of the utility model as follows: a kind of plate turning box of mono-crystal furnace cooling structure, lower interface and turning plate valve that the upper interface that comprise casing, is used for being connected with subtask chamber, the bell that is used for Yu Zhu working spaces connect, described casing is divided into internal layer and skin, internal layer and outer interlayer are provided with cooling sandwith layer, and casing is provided with the paddle hole seat communicating with cooling sandwith layer outward; In described cooling sandwith layer, staggered arrangement has some screens from top to bottom, in two blocks of adjacent screens, one end of a screen is fixed on internal layer, between the other end and skin, leaves gap, and another piece screen one end is fixed on skin above, between the other end and internal layer, leave gap.
Described casing skin is provided with vacuum port.
The beneficial effects of the utility model are: the utility model is provided with staggered screen in cooling sandwith layer, have increased the contact surface of water and inner and outer wall, have improved the effect cooling, thereby effectively absorb heat, can better protect perble range.
Accompanying drawing explanation
By the detailed description below in conjunction with accompanying drawing, the utility model is aforesaid will be become apparent with other object, feature and advantage.Wherein:
Fig. 1 is structural representation of the present utility model;
In accompanying drawing, 1 is casing, and 11 is internal layer, and 12 is outer, and 13 is cooling sandwith layer, and 2 is upper interface, and 3 is lower interface, and 4 is turning plate valve, and 5 is prosopyle seat, and 6 is posticum seat, and 7 is screen, and 8 is vacuum port.
Embodiment
Below in conjunction with accompanying drawing, the utility model is further described;
Shown in Figure 1, a kind of plate turning box of mono-crystal furnace cooling structure, lower interface 3 and turning plate valve 4 that the upper interface 2 that comprise casing 1, is used for being connected with subtask chamber, the bell that is used for Yu Zhu working spaces connect, described casing is divided into internal layer 11 and outer 12, internal layer 11 and outer 12 are provided with cooling sandwith layer 13, and casing 1 is outer to be provided with entering of communicating with cooling sandwith layer 13 and 5 to go out 6 water hole seats; In described cooling sandwith layer 13, staggered arrangement has some screens 7 from top to bottom, in two blocks of adjacent screens 7, one end of a screen 7 is fixed on internal layer 11, between the other end and outer 12, leave gap, and another piece screen 7 one end are fixed on outer 12, between the other end and internal layer 11, leave gap.Described casing skin 12 is provided with vacuum port 8.
The utility model is not limited to described embodiment; those skilled in the art is not departing from spirit of the present utility model openly in scope; still can do some corrections or change, therefore the scope that rights protection scope of the present utility model limits with claims is as the criterion.
Claims (2)
1. plate turning box of mono-crystal furnace cooling structure, lower interface and turning plate valve that the upper interface that comprise casing, is used for being connected with subtask chamber, the bell that is used for Yu Zhu working spaces connect, it is characterized in that: described casing is divided into internal layer and skin, internal layer and outer interlayer are provided with cooling sandwith layer, and casing is provided with the paddle hole seat communicating with cooling sandwith layer outward; In described cooling sandwith layer, staggered arrangement has some screens from top to bottom, in two blocks of adjacent screens, one end of a screen is fixed on internal layer, between the other end and skin, leaves gap, and another piece screen one end is fixed on skin above, between the other end and internal layer, leave gap.
2. plate turning box of mono-crystal furnace cooling structure according to claim 1, is characterized in that: described casing skin is provided with vacuum port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320823428.7U CN203715789U (en) | 2013-12-12 | 2013-12-12 | Cooling structure of single crystal furnace turn-over box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320823428.7U CN203715789U (en) | 2013-12-12 | 2013-12-12 | Cooling structure of single crystal furnace turn-over box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203715789U true CN203715789U (en) | 2014-07-16 |
Family
ID=51154958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320823428.7U Expired - Fee Related CN203715789U (en) | 2013-12-12 | 2013-12-12 | Cooling structure of single crystal furnace turn-over box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203715789U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108456918A (en) * | 2018-06-20 | 2018-08-28 | 南京晶能半导体科技有限公司 | A kind of flap valve and single crystal growing furnace for semiconductor silicon single crystal stove |
-
2013
- 2013-12-12 CN CN201320823428.7U patent/CN203715789U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108456918A (en) * | 2018-06-20 | 2018-08-28 | 南京晶能半导体科技有限公司 | A kind of flap valve and single crystal growing furnace for semiconductor silicon single crystal stove |
| CN108456918B (en) * | 2018-06-20 | 2024-04-05 | 南京晶能半导体科技有限公司 | Flap valve for semiconductor silicon single crystal furnace and single crystal furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140716 Termination date: 20151212 |
|
| EXPY | Termination of patent right or utility model |