CN203703188U - Electric ultrahigh vacuum gate valve - Google Patents
Electric ultrahigh vacuum gate valve Download PDFInfo
- Publication number
- CN203703188U CN203703188U CN201420047391.8U CN201420047391U CN203703188U CN 203703188 U CN203703188 U CN 203703188U CN 201420047391 U CN201420047391 U CN 201420047391U CN 203703188 U CN203703188 U CN 203703188U
- Authority
- CN
- China
- Prior art keywords
- valve
- hole part
- corrosion resistant
- ultrahigh vacuum
- double link
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses an electric ultrahigh vacuum gate valve. The electric ultrahigh vacuum gate valve comprises an electric device, a valve body component, a valve element component and a movement component. The electric device comprises a motor and a gearbox, the motor drives the gearbox to act, and the electric device is fixedly arranged on the top of the valve body component. The valve element component is arranged in the valve and moves up and down to open and close the valve. The movement component comprises double connecting rods, guiding rods and a valve rod, one end of the valve rod is connected with the gearbox in the electric device, the other end of the valve rod is connected to the fixed ends of the double connecting rods, and the other ends of the double connecting rods are connected with the valve element component. The number of the guiding rods is two, the two guiding rods are vertically arranged on the two sides of the valve body component, the valve element component is arranged on the two guiding rods in a sliding mode, the valve rod drives the double connecting rods and the valve element component to move up and down along the guiding rods, the valve element component is driven to move up and down through the double connecting rods, and thus the valve can be opened and closed. The gate valve of the structure is stable in working performance, safe and reliable.
Description
Technical field
The utility model belongs to vacuum valve technical field, particularly a kind of electronic ultrahigh vacuum push-pull valve.
Background technique
Current electronic ultrahigh vacuum push-pull valve adopts the mode of link supports formula, pull-alongs or single link motion mostly, utilize valve interior wall to lead, for the mode that adopts single link motion, because one side in movement process is stressed, thereby cause push-pull valve work not steady, open or close sound large, vacuum system shake.
In addition, because the intensity of existing push-pull valve structure is less, when producing external pressure, particularly in valve body parts course of action, can produce internal pressure, easily cause valve body deformation, affect using effect, reduction of service life.
In view of above analysis, the inventor improves existing electronic ultrahigh vacuum push-pull valve structure, and this case produces thus.
Model utility content
Main purpose of the present utility model, is to provide a kind of electronic ultrahigh vacuum push-pull valve, and its stable work in work is safe and reliable.
Secondary objective of the present utility model, is to provide a kind of electronic ultrahigh vacuum push-pull valve, and it can avoid valve body parts distortion, increases the service life.
In order to reach above-mentioned purpose, solution of the present utility model is:
A kind of electronic ultrahigh vacuum push-pull valve, comprises Electric actuator, valve body parts, valve hole part and moving element, and wherein, Electric actuator comprises motor and gear-box, the action of motor-driven gear case, and Electric actuator is fixedly installed on the top of valve body parts; Valve hole part is located in valve, and it moves up and down and realizes the switch of valve; Moving element comprises double link, guide rod and valve rod, and one end of valve rod connects the gear-box in Electric actuator, and the other end connects the fixed end of double link, and the other end connection valve core components of double link; Described guide rod has two, vertically be arranged on the both sides of valve body parts, and valve hole part is located on two guide rods slidably, valve rod drives double link and valve hole part to move up and down along guide rod, drive valve hole part to move up and down by double link, realize the switch of valve.
Above-mentioned valve body parts comprises two corrosion resistant plates and a three-flange, the vertical parallel flanging of described two corrosion resistant plates, and described three-flange is welded on aforementioned corrosion resistant plate, and two guide rods are vertically arranged on the both sides of corrosion resistant plate.
The outer surface of above-mentioned corrosion resistant plate is also horizontally arranged with many stiffening ribs.
Adopt after such scheme, the utlity model has following improvement:
(1) the utility model adopts double link structure, drive valve hole part to move up and down along guide rod, can overcome the jiggly problem of work that existing structure causes because one side is stressed, strengthen the stability of work, avoid vacuum shake, make whole vacuum system smooth working;
(2) the utility model adopts the structure of stiffening rib, can bear larger external pressure and internal pressure, avoids valve body parts distortion, extends integrally-built working life.
Accompanying drawing explanation
Fig. 1 is closed condition structural drawing of the present utility model;
Fig. 2 is the sectional side view of Fig. 1;
Fig. 3 is the structure front view of valve body parts in the utility model;
Fig. 4 is the plan view of Fig. 3;
Fig. 5 is the side view of Fig. 3;
Fig. 6 is the stereogram of valve body parts in the utility model;
Fig. 7 is the linkage structure schematic diagram of double link and valve hole part in the utility model.
Embodiment
Below in conjunction with accompanying drawing of the present utility model, the technical solution of the utility model is carried out to clear, complete description, obvious described embodiment is only the utility model part embodiment, rather than whole embodiments.Based on the embodiment in the utility model, the every other embodiment that those of ordinary skills obtain under the prerequisite of not making creative work, belongs to the scope that the utility model is protected.
As depicted in figs. 1 and 2, the utility model provides a kind of electronic ultrahigh vacuum push-pull valve, comprises Electric actuator 1, valve body parts 2, valve hole part 3 and moving element 4, introduces respectively below.
It is power source that Electric actuator 1 adopts power supply AC220/50, comprises motor 11 and gear-box 12, and motor 11 drives the valve rod 43 in moving element 4 to move up and down by gear-box 12.
Valve body parts 2 comprises two corrosion resistant plates 21 and a three-flange 22, coordinate shown in Fig. 3 to Fig. 6, two corrosion resistant plates 21 vertically be arranged in parallel, specifically by behind two bright corrosion resistant plate 21 flanging laser beam cutting holes, again the three-flange processing 22 be welded on aforementioned corrosion resistant plate 21 and form, as being in the present embodiment the bottom that three-flange 22 is welded on to corrosion resistant plate 21; In order to strengthen the robustness of corrosion resistant plate 21, the outer surface of corrosion resistant plate 21 is also horizontally arranged with many stiffening ribs 23, can adopt profile structure; Then the structure after welding is carried out to electropolishing processing, guarantee that the degree of finish of the intensity of valve body parts 2 and the internal surface of corrosion resistant plate 21 can reach the requirement of ultrahigh vacuum.By adopting corrosion resistant plate flanging, the rigidity of material improves, and adds the reinforcement of section bar, makes valve body parts avoid distortion under vacuum condition, thus the working life of extending structure.
Valve hole part 3 is located at (not shown) in valve, moves up and down by it, realizes opening or closing of valve, and this is existing structure, repeats no more.
Moving element 4 comprises double link 41, guide rod 42 and valve rod 43, wherein, one end of valve rod 43 connects the gear-box 12 in Electric actuator 1, the other end connects the fixed end of double link 41, and the other end connection valve core components 3 of double link 41, specifically as shown in Figure 7, described double link 41 comprises two symmetrical bar linkage structures, article two, the top of bar linkage structure connects, form the fixed end of double link 41, be connected to the gear-box 12 in Electric actuator 1, and the bottom of two bar linkage structures is connected with valve hole part 3 respectively; Described guide rod 42 has two, vertically be arranged on the both sides of corrosion resistant plate 21, and valve hole part 3 is located on two guide rods 42 slidably, valve rod 43 drives double link 41 and valve hole part 3 to move up and down along guide rod 42, by adopting the motion effect of double link 41, valve hole part 3 is moved in valve stressed even and steady.
When the utility model work, Electric actuator 1 is fixedly installed on the top of valve body parts 2, motor 11 driving gearboxs 12 move, thereby band ovable valve stem 43 moves up and down, and moving up and down by the transmission of double link 41 of valve rod 43 realizes valve hole part 3 to slide up and down along guide rod 42, in the time that valve hole part 3 moves upward, make valve open, in the time that valve hole part 3 moves downward, realize closing of valve.
Comprehensively above-mentioned, a kind of electronic ultrahigh vacuum push-pull valve of the utility model, take power supply as power source, make valve rod drive valve hole part to move up and down by Electric actuator, reach valve opening or close, valve is applicable in ultra-high vacuum system to cut off or to connect the use of air-flow, more can embody safe and reliablely, adapts to ultrahigh vacuum (105～1x10-7Pa) environmental work.
The above; it is only embodiment of the present utility model; but protection domain of the present utility model is not limited to this; any be familiar with those skilled in the art the utility model disclose technical scope in; can expect easily changing or replacing, within all should being encompassed in protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain of described claim.
Claims (3)
1. an electronic ultrahigh vacuum push-pull valve, it is characterized in that: comprise Electric actuator, valve body parts, valve hole part and moving element, wherein, Electric actuator comprises motor and gear-box, the action of motor-driven gear case, and Electric actuator is fixedly installed on the top of valve body parts; Valve hole part is located in valve, and it moves up and down and realizes the switch of valve; Moving element comprises double link, guide rod and valve rod, and one end of valve rod connects the gear-box in Electric actuator, and the other end connects the fixed end of double link, and the other end connection valve core components of double link; Described guide rod has two, vertically be arranged on the both sides of valve body parts, and valve hole part is located on two guide rods slidably, valve rod drives double link and valve hole part to move up and down along guide rod, drive valve hole part to move up and down by double link, realize the switch of valve.
2. the electronic ultrahigh vacuum push-pull valve of one as claimed in claim 1, it is characterized in that: described valve body parts comprises two corrosion resistant plates and a three-flange, the vertical parallel flanging of described two corrosion resistant plates, described three-flange is welded on aforementioned corrosion resistant plate, and two guide rods are vertically arranged on the both sides of corrosion resistant plate.
3. the electronic ultrahigh vacuum push-pull valve of one as claimed in claim 2, is characterized in that: the outer surface of described corrosion resistant plate is also horizontally arranged with many stiffening ribs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420047391.8U CN203703188U (en) | 2014-01-24 | 2014-01-24 | Electric ultrahigh vacuum gate valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420047391.8U CN203703188U (en) | 2014-01-24 | 2014-01-24 | Electric ultrahigh vacuum gate valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203703188U true CN203703188U (en) | 2014-07-09 |
Family
ID=51053633
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420047391.8U Expired - Fee Related CN203703188U (en) | 2014-01-24 | 2014-01-24 | Electric ultrahigh vacuum gate valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203703188U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106321877A (en) * | 2015-07-03 | 2017-01-11 | 东莞市中镓半导体科技有限公司 | Large-channel-size vacuum gate valve |
| CN111706687A (en) * | 2020-07-15 | 2020-09-25 | 成都中科唯实仪器有限责任公司 | Ultrahigh vacuum pneumatic gate valve |
-
2014
- 2014-01-24 CN CN201420047391.8U patent/CN203703188U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106321877A (en) * | 2015-07-03 | 2017-01-11 | 东莞市中镓半导体科技有限公司 | Large-channel-size vacuum gate valve |
| CN111706687A (en) * | 2020-07-15 | 2020-09-25 | 成都中科唯实仪器有限责任公司 | Ultrahigh vacuum pneumatic gate valve |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140709 Termination date: 20190124 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |