CN203697270U - Silicon wafer multi-line cutting broken-line detection protection plate component - Google Patents
Silicon wafer multi-line cutting broken-line detection protection plate component Download PDFInfo
- Publication number
- CN203697270U CN203697270U CN201320840565.1U CN201320840565U CN203697270U CN 203697270 U CN203697270 U CN 203697270U CN 201320840565 U CN201320840565 U CN 201320840565U CN 203697270 U CN203697270 U CN 203697270U
- Authority
- CN
- China
- Prior art keywords
- detection
- backplate
- line
- detection protection
- guide wheel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 52
- 238000005520 cutting process Methods 0.000 title claims abstract description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title abstract description 6
- 229910052710 silicon Inorganic materials 0.000 title abstract description 6
- 239000010703 silicon Substances 0.000 title abstract description 6
- 238000009413 insulation Methods 0.000 claims description 6
- 229910000831 Steel Inorganic materials 0.000 abstract description 5
- 239000010959 steel Substances 0.000 abstract description 5
- 230000035945 sensitivity Effects 0.000 abstract description 3
- 239000004484 Briquette Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000013459 approach Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- 101100008050 Caenorhabditis elegans cut-6 gene Proteins 0.000 description 2
- 230000000739 chaotic effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000010008 shearing Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The utility model discloses a silicon wafer multi-line cutting broken-line detection protection plate component. The component comprises an external detection protection plate which is positioned outside a cutting line, and two upper internal detection protection plates and two lower internal detection protection plates which are positioned inside the cutting line; two detection rods are horizontally arranged on the two upper internal detection protection plates along the excircle direction of a guide wheel; two ends of the two detection rods are respectively fixed on trapezoidal insulated fixing plates at two ends of the inner sides of the two upper internal detection protection plates; the two detection rods are electrically connected with each other, and are electrically connected with the upper internal detection protection plates; a detection rod is horizontally arranged on the two lower internal detection protection plates along the excircle direction of the guide wheel; two ends of the detection rod are respectively fixed on the trapezoidal insulated fixing plates at two ends of the inner sides of the two lower internal detection protection plates; the detection rod is electrically connected with the lower internal detection protection plates. The silicon wafer multi-line cutting broken-line detection protection plate component is high in detection sensitivity; the detection time after the wire mesh is broken is greatly shortened, the loss of cutting broken-lines caused by the broken-lines is reduced to a large extent; steel wires after the lines are broken can be prevented from being wound into the guide wheel to damage the guide wheel.
Description
Technical field
The utility model belongs to silicon chip cutting technique field, is specifically related to a kind of Multi-wire wafer cutting burn out detection backplate assembly.
Background technology
Silicon chip is the main production material in semiconductor and photovoltaic field.Multi-wire saw equipment is the equipment for cutting silicon wafer, and it is the high-speed mobile by intensive metal wire, and silico briquette material is once cut into hundreds of or thousands of plate sheets simultaneously.In whole cutting process, metal wire by the guiding of multiple Wire guide rollers, forms a horizontal gauze from unwrapping wire roller to take-up roller on a pair of working roll being oppositely arranged, and silico briquette to be cut is realized feeding from top to bottom by the decline of workbench.
In the process of cutting, broken string phenomenon is serious problems in line cutting processing always.Broken string makes processing pause and have to and again prepare, thereby wastes a large amount of man-hours, and has destroyed the integrality of machined surface.Owing to being by wires ordered arrangement between two working rolls as the gauze of cut surface; form cutting planes; after cutting broken string occurs; the gauze of broken string position cannot continue to travel according to the order of sequence; if can not shut down in time, working roll will be still in operating condition, like this will be because inertia causes in broken string position gauze confusion; even be wound around guide wheel, coating is damaged cannot be used.Because gauze confusion in cutting process cannot be arranged again, must cut the gauze of broken string position confusion, not only lose line of cut, and the silico briquette at the chaotic place of gauze cannot continue cutting, cause the serious waste of silico briquette raw material and process time, processing quality is affected in various degree depending on the broken string order of severity.Therefore burn out detection equipment must be set, to shut down in time, avoid or reduce the generation of gauze confusion after broken string occurs.
Existing burn out detection equipment comprises the burn out detection controller that is electrically connected with casing, be installed on the about 8mm of side guide wheel side-lower or top place in steel wire for preventing that broken string is involved in guide wheel and causes in 4 netted rectangles of square hole of large area gauze loss and detect backplate, respectively have a netted rectangle of square hole to detect backplate outward in guide wheel outside.Interior detection backplate is electrically connected with casing respectively with outer detection backplate.When the steel wire on guide wheel disconnects, be thrown at a high speed on outer detection backplate and will be produced warning.But steel wire breaks suddenly in motion process, it is longer that outer side guard plate detects distance, generally be not easy to detect in time, interior side guard plate area of detection is less, if steel wire head is pressed into other gauze, slack needs just can be detected a longer detection time, so still very easily causes large area gauze confusion, even be wound around guide wheel, coating is damaged cannot be used.Cannot again arrange because of gauze confusion in cutting process, must cut the gauze of broken string position confusion, not only lose line of cut, and the silico briquette at the chaotic place of gauze cannot continue cutting, cause the serious waste of silico briquette raw material.
Utility model content
The purpose of this utility model solves the above-mentioned problems in the prior art exactly, a kind of Multi-wire wafer cutting burn out detection backplate assembly is provided, the detection sensitivity of this detection backplate assembly is high, greatly shorten the detection time after gauze broken string, can reduce to a great extent the loss of the shearing secant causing because of broken string, and prevent that the line of cut after broken string is involved in guide wheel, removes to damage guide wheel.
For achieving the above object, technical solution of the present utility model is: a kind of Multi-wire wafer cutting burn out detection backplate assembly, it comprise be positioned at the outer detection backplate in line of cut outside and be positioned at line of cut inner side two on, detect backplate twice, it is characterized in that: on two, detect backplate and be horizontally disposed with two test rods along the direction of guide wheel cylindrical, in being separately fixed on two, the two ends of two test rods detect on the trapezoidal insulation fixing plate at two ends inside backplate, two test rod electrical connections, and be electrically connected with upper interior detection backplate; In twice, detect backplate and be horizontally disposed with a test rod along the direction of guide wheel cylindrical, the two ends of this root test rod are separately fixed on the trapezoidal insulation fixing plate that detects two ends inside backplate in twice, and test rod is electrically connected with lower interior detection backplate.
Because the utility model is on the basis of original interior detection backplate, detect backplate inner side on two two test rods that more approach guide wheel cylindrical have been installed, in twice, detect a test rod that more approaches guide wheel cylindrical has been installed on backplate; Make the test rod on interior detection backplate more approach guide wheel cylindrical, once be wrapped in the line of cut broken string on guide wheel, it can respond to broken string more quickly, and by 4 detection lines of original interior detection backplate, become 10 detection lines, detected that the possibility of broken string is higher.In a word, the utility model has increased the sensitivity that detects broken string, has greatly shortened the detection time after gauze broken string, and in the situation that not affecting existing operating process, can reduce to a great extent the loss of the shearing secant causing because of broken string.And due to many effects that much more approach the test rod of guide wheel, make to be involved in guide wheel after line of cut broken string and go the possibility of damaging guide wheel greatly to reduce, save again coating and changed the cost of guide wheel.
Brief description of the drawings
Fig. 1 is the structural representation after the utility model is installed;
Fig. 2 is the upper interior front view that detects backplate in the utility model;
Fig. 3 is the upper interior rearview that detects backplate in the utility model;
Fig. 4 is the upper interior top view that detects backplate in the utility model;
Fig. 5 is the upper interior left view that detects backplate in the utility model;
Fig. 6 is the lower interior front view that detects backplate in the utility model;
Fig. 7 is the lower interior rearview that detects backplate in the utility model;
Fig. 8 is the lower interior upward view that detects backplate in the utility model;
Fig. 9 is the lower interior right view that detects backplate in the utility model.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the utility model is described further.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5, Fig. 6, Fig. 7, Fig. 8 and Fig. 9, the present embodiment comprise be positioned at the outer detection backplate 2 in line of cut 6 outsides and be positioned at line of cut 6 inner sides two on detection backplate 5 and detect backplate 8 twice.In on two, detect backplate 5 and be horizontally disposed with two test rods 3 along the direction of guide wheel A 1 and guide wheel B 13 cylindricals, the two ends of these two test rods 3 are detected on the trapezoidal insulation fixing plate 4 at backplate 5 two ends, inner side in being separately fixed on two, these two test rods 3 are electrically connected, and are electrically connected with upper interior detection backplate 5.In twice, detect backplate 8 and be horizontally disposed with a test rod 3 along the direction of guide wheel C 10 and guide wheel D 12 cylindricals, the two ends of this root test rod 3 are separately fixed on the trapezoidal insulation fixing plate 9 that detects backplate 8 two ends, inner side in twice, and this root test rod 3 is electrically connected with lower interior detection backplate 9.
Claims (1)
1. a Multi-wire wafer cutting burn out detection backplate assembly, it comprise be positioned at the outer detection backplate in line of cut outside and be positioned at line of cut inner side two on, detect backplate twice, it is characterized in that: on two, detect backplate and be horizontally disposed with two test rods along the direction of guide wheel cylindrical, in being separately fixed on two, the two ends of two test rods detect on the trapezoidal insulation fixing plate at two ends inside backplate, two test rod electrical connections, and be electrically connected with upper interior detection backplate; In twice, detect backplate and be horizontally disposed with a test rod along the direction of guide wheel cylindrical, the two ends of this root test rod are separately fixed on the trapezoidal insulation fixing plate that detects two ends inside backplate in twice, and test rod is electrically connected with lower interior detection backplate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320840565.1U CN203697270U (en) | 2013-12-19 | 2013-12-19 | Silicon wafer multi-line cutting broken-line detection protection plate component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320840565.1U CN203697270U (en) | 2013-12-19 | 2013-12-19 | Silicon wafer multi-line cutting broken-line detection protection plate component |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203697270U true CN203697270U (en) | 2014-07-09 |
Family
ID=51047764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320840565.1U Expired - Fee Related CN203697270U (en) | 2013-12-19 | 2013-12-19 | Silicon wafer multi-line cutting broken-line detection protection plate component |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203697270U (en) |
-
2013
- 2013-12-19 CN CN201320840565.1U patent/CN203697270U/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206379220U (en) | A kind of cable-former with fault detection capability | |
| CN104226730B (en) | Steel strand drawn wire winding displacement fault detection method | |
| CN203888045U (en) | Diamond wire guide roller structure | |
| CN203955743U (en) | Actinobacillus device in big drawing machine | |
| CN103177821A (en) | Automatic wire-breaking alarming device | |
| CN203697270U (en) | Silicon wafer multi-line cutting broken-line detection protection plate component | |
| CN205589923U (en) | Cable production equipment's traction belt detection device that skids | |
| CN103350119A (en) | Wire-drawing equipment | |
| CN203922284U (en) | A kind of cable pressing device | |
| CN103708289A (en) | Yarn break detecting device | |
| CN203371671U (en) | Disconnection detecting device of multi-wire sawing machine | |
| CN203805165U (en) | Wire breaking detection device of multi-wire cutting machine | |
| CN203389958U (en) | Wire drawing equipment | |
| CN104859064B (en) | Broken wire monitoring device for silicon rod slicer | |
| CN204433956U (en) | A kind of copper cash rewinder bus cable device | |
| CN203389957U (en) | Wire drawing device | |
| CN105642997B (en) | A kind of copper strip splitting device with speed adaptive | |
| CN203377034U (en) | Fault wire clamping device of high speed electric wire production line | |
| CN207180551U (en) | Ribbon thickness detection apparatus | |
| CN203192544U (en) | Automatic wire-break alarm device | |
| CN204448837U (en) | Device for on-line detection of tower shape of hot-rolled steel coil | |
| CN203820169U (en) | Protecting device of wire-releasing machine reversing arm | |
| CN203269209U (en) | Wire traverse unit | |
| CN203805164U (en) | Detection mechanism of silicon wafer cutting machine and silicon wafer cutting machine | |
| CN103317608B (en) | The broken thread detector of multi-line cutting machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 074000 new industrial zone, Baoding, Hebei, Gaobeidian Patentee after: Green Energy Technology Co., Ltd. Address before: 074000 new industrial zone, Baoding, Hebei, Gaobeidian Patentee before: Lightway Green New Enegy Co., Ltd. |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20160711 Address after: 071000, Baoding City, Hebei province Gaobeidian City Road on the north side of the west side of prosperous street Patentee after: Baoding Guangwei Green Energy Technology Co., Ltd. Address before: 074000 new industrial zone, Baoding, Hebei, Gaobeidian Patentee before: Green Energy Technology Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140709 Termination date: 20181219 |