CN203688581U - Atmosphere controlling device used for atomic force microscope - Google Patents
Atmosphere controlling device used for atomic force microscope Download PDFInfo
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- CN203688581U CN203688581U CN201420011858.3U CN201420011858U CN203688581U CN 203688581 U CN203688581 U CN 203688581U CN 201420011858 U CN201420011858 U CN 201420011858U CN 203688581 U CN203688581 U CN 203688581U
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- atomic force
- force microscope
- gas
- flowmeter
- atmosphere
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Abstract
An atmosphere controlling device used for an atomic force microscope is characterized in that a first gas bottle (1a) and a second gas bottle (1b) are connected with a gas inlet of a mixed gas pipe (4) through a first flowmeter (3a) and a second flowmeter (3b) respectively. A gas outlet of the mixed gas pipe (4) is connected with a gas inlet of an atmosphere chamber (7) on the atomic force microscope through a gas inlet chamber (6). The device can provide controllable mixed atmospheres composed of different gases with various proportions for the atomic force microscope, thereby enabling the atomic force microscope to conduct simulation tests and researches of wear-out failures and protection mechanisms under the mixed atmospheres composed of the different gases with various proportions, providing more accurate and reliable test evidences for design, manufacture, and maintenance of micro-electro-mechanical systems working in the corresponding mixed atmospheres, and thus reducing the wear of the micro-electro-mechanical systems and prolonging the service lives of the micro-electro-mechanical systems.
Description
Technical field
The utility model relates to a kind of auxiliary device of atomic force microscope, relates in particular to a kind of atmosphere control device for atomic force microscope.
Background technology
The development of nanoscale science and technology, makes the development and application of MEMS (micro electro mechanical system) (MEMS) more and more extensive.MEMS (micro electro mechanical system) (Micro-electromechanical system, MEMS) structure is even nanoscale structures of micron, and due to surface and size effect, its Contact Pair is easy to damage even and lost efficacy because of friction problem such as adhesion, friction and wears.At present, the most frequently used equipment of research Nanotribology is atomic force microscope.Because the radius-of-curvature of its probe is in nanometer scale, by controlling it after the contact under different loads is moved, and home position observation and analysis are carried out in deformation and damage that place sample surfaces is produced, can work out wearing and tearing, protective mechanism and the rule of MEMS (micro electro mechanical system), thereby for design, manufacture and the maintenance of MEMS (micro electro mechanical system) provide test basis, to reduce the wearing and tearing of MEMS (micro electro mechanical system), the serviceable life of improving MEMS (micro electro mechanical system).
For the Study on Wear Mechanism and the experiment that are operated in the MEMS (micro electro mechanical system) in varying environment, the needle point that requires atomic force microscope, just can provide more also in the running environment identical with MEMS (micro electro mechanical system) with sample, test findings accurately.Existing atomic force microscope can be realized controlled temperature, the environment of liquid phase; Also can provide vacuum and gas componant fixing uncontrollable atmosphere.Pure gas, the fixing air of composition are entered atmosphere chamber and intracavity gas are discharged by outlet nozzle by the air intake opening in atmosphere chamber, and then making the atmosphere in atmosphere chamber consistent with external gas componant.The problem of its existence is: be merely able to realize the fixing atmosphere of the composition such as vacuum and air, and cannot realize the mixed atmosphere of two or more gas composition and the measurement of ratio, adjusting and variation arbitrarily; Can not realize measurement and the adjusting of humidity in mixed atmosphere or alcohol steam content.Can not meet the MEMS (micro electro mechanical system) wear out failure under the mixed atmosphere of corresponding gas with various, various ratio composition and under different humidity or alcohol steam content environment and simulation test and the research of protective mechanism.
Utility model content
The purpose of this utility model is to provide a kind of atmosphere control device for atomic force microscope, this device can provide gas with various for atomic force microscope, the controlled mixed atmosphere of various ratio compositions, thereby the wear out failure of MEMS (micro electro mechanical system) under the mixed atmosphere that the gas with various that makes atomic force microscope can carry out various ratios forms, the simulation test of protective mechanism and research, thereby be the design of the MEMS (micro electro mechanical system) in corresponding mixed atmosphere work, manufacture with maintenance and provide more accurate, test basis reliably, to reduce the wearing and tearing of MEMS (micro electro mechanical system), improve the serviceable life of MEMS (micro electro mechanical system).
The utility model is for solving its goal of the invention, the technical scheme adopting is, a kind of atmosphere control device for atomic force microscope, it is characterized in that: gas bottle one is connected with the air intake opening of mixture pipe by flowmeter one, flowmeter two respectively with gas bottle two, and the gas outlet of mixture pipe is connected with the air intake opening in the atmosphere chamber on atomic force microscope by inlet chamber.
Compared with prior art, the beneficial effects of the utility model:
By regulating, control the flow of flowmeter one and flowmeter two, can realize the blending ratio at mixture pipe to two kinds of gases of gas bottle one and gas bottle two, thereby realizing atmosphere in the atmosphere chamber on atomic force microscope is two kinds of mixed atmospheres that gas forms in any proportion, and blending ratio can regulate at any time.Thereby the wear out failure of MEMS (micro electro mechanical system), simulation test and the research of protective mechanism under the mixed atmosphere that the gas with various that makes atomic force microscope can carry out various ratios forms, thereby for design, manufacture and the maintenance of the MEMS (micro electro mechanical system) in corresponding mixed atmosphere work provide more accurately, reliable test basis, to reduce the wearing and tearing of MEMS (micro electro mechanical system), the serviceable life of improving MEMS (micro electro mechanical system).
The air intake opening of above-mentioned mixture pipe also with by flowmeter three is connected with gas bottle three.
Like this, the atmosphere that the utility model can be realized in the atmosphere chamber on atomic force microscope is easily three kinds of mixed atmospheres that gas with various forms in any proportion, to meet the wear out failure of the MEMS (micro electro mechanical system) of working, simulation test and the research requirement of protective mechanism under the mixed atmosphere of three kinds of gas with various compositions.
The vial that is serially connected with splendid attire water or alcohol in above-mentioned gas bottle one and the connecting line of flowmeter one, the air intake opening of glass stopper is connected with gas bottle one, and the gas outlet of glass stopper is connected with flowmeter one; Humidity tester and/or tester for alcohol concentration are installed on described inlet chamber.
Like this, can be by the gas flow of gas bottle one when the water in vial or alcohol by water or alcohol is taken away or atomization, make mixed atmosphere contain steam or alcohol steam, and measure the content of steam or alcohol steam by humidity tester, tester for alcohol concentration; In the time that the gas of gas bottle one and gas bottle two or gas bottle three is identical, can realize the independent regulation (otherwise the adjusting of steam or alcohol steam content and the gas ratio of gas bottle one regulate interlock) of steam or alcohol steam content.And then make atomic force microscope can carry out the wear out failure of the MEMS (micro electro mechanical system) under the mixed atmosphere of corresponding humidity or alcohol steam concentration, simulation test and the research of protective mechanism.
When being serially connected with the secondary vial of splendid attire alcohol or water in the connecting line of above-mentioned gas bottle two and flowmeter two, the air intake opening of secondary glass stopper is connected with gas bottle two, and the gas outlet of secondary glass stopper is connected with flowmeter two.Like this, can be by the gas flow of gas bottle two when the alcohol in secondary vial or water by water or alcohol is taken away or atomization, make mixed atmosphere on the basis of the steam that contains gas bottle one or alcohol steam, contain again alcohol steam or steam, and by tester for alcohol concentration or humidity tester, measure the content of alcohol steam or steam; And then make atomic force microscope can carry out the wear out failure of the MEMS (micro electro mechanical system) under the mixed atmosphere of corresponding humidity and alcohol steam concentration, simulation test and the research of protective mechanism.
On above-mentioned mixture pipe or inlet chamber, safety valve is installed.
Like this, in the time that air pressure is too high, safety valve starts, and by the air release of mixed atmosphere, avoids damage of components or blast in gas circuit, guarantees safety.
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model embodiment.
Embodiment
Embodiment
Fig. 1 illustrates, a kind of embodiment of the present utility model is, a kind of atmosphere control device for atomic force microscope, it is characterized in that: gas bottle one 1a is connected with the air intake opening of mixture pipe 4 by flowmeter one 3a, flowmeter two 3b respectively with gas bottle two 1b, the gas outlet of mixture pipe 4 is connected with the air intake opening in the atmosphere chamber 7 on atomic force microscope by inlet chamber 6.
The air intake opening of this routine mixture pipe 4 also with by flowmeter three 3c is connected with gas bottle three 1c.
The vial 2a that is serially connected with splendid attire water or alcohol in gas bottle one 1a that this is routine and the connecting line of flowmeter one 3a, the air intake opening of vial 2a bottle stopper is connected with gas bottle one 1a, and the gas outlet of vial 2a bottle stopper is connected with flowmeter one 3a; Humidity tester and tester for alcohol concentration 5 are installed on described inlet chamber 6.
The secondary vial 2b that is serially connected with splendid attire alcohol or water in gas bottle two 1b that this is routine and the connecting line of flowmeter two 3b, the air intake opening of secondary vial 2b bottle stopper is connected with gas bottle two 1b, and the gas outlet of secondary vial 2b bottle stopper is connected with flowmeter two 3b.
On this routine inlet chamber 6, safety valve 8 is installed.
In the vial 2a that this is routine and secondary vial 2b, beaded glass 10 is housed.
Claims (5)
1. the atmosphere control device for atomic force microscope, it is characterized in that: gas bottle one (1a) is connected with the air intake opening of mixture pipe (4) by flowmeter one (3a), flowmeter two (3b) respectively with gas bottle two (1b), the gas outlet of mixture pipe (4) is connected with the air intake opening in the atmosphere chamber (7) on atomic force microscope by inlet chamber (6).
2. the atmosphere control device for atomic force microscope according to claim 1, is characterized in that: the air intake opening of described mixture pipe (4) also with by flowmeter three (3c) is connected with gas bottle three (1c).
3. the atmosphere control device for atomic force microscope according to claim 1 and 2, it is characterized in that: the vial (2a) that is serially connected with splendid attire water or alcohol in described gas bottle one (1a) and the connecting line of flowmeter one (3a), the air intake opening that is vial (2a) bottle stopper is connected with gas bottle one (1a), and the gas outlet of vial (2a) bottle stopper is connected with flowmeter one (3a); Humidity tester and/or tester for alcohol concentration (5) are installed on described inlet chamber (6).
4. the atmosphere control device for atomic force microscope according to claim 3, it is characterized in that: the secondary vial (2b) that is serially connected with splendid attire alcohol or water in described gas bottle two (1b) and the connecting line of flowmeter two (3b), the air intake opening that is secondary vial (2b) bottle stopper is connected with gas bottle two (1b), and the gas outlet of secondary vial (2b) bottle stopper is connected with flowmeter two (3b).
5. according to the atmosphere control device for atomic force microscope described in claims 1, it is characterized in that: on described mixture pipe (4) or inlet chamber (6), safety valve (8) is installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420011858.3U CN203688581U (en) | 2014-01-09 | 2014-01-09 | Atmosphere controlling device used for atomic force microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420011858.3U CN203688581U (en) | 2014-01-09 | 2014-01-09 | Atmosphere controlling device used for atomic force microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203688581U true CN203688581U (en) | 2014-07-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420011858.3U Expired - Fee Related CN203688581U (en) | 2014-01-09 | 2014-01-09 | Atmosphere controlling device used for atomic force microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203688581U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103760383A (en) * | 2014-01-09 | 2014-04-30 | 西南交通大学 | Atmosphere control system for atomic force microscope |
-
2014
- 2014-01-09 CN CN201420011858.3U patent/CN203688581U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103760383A (en) * | 2014-01-09 | 2014-04-30 | 西南交通大学 | Atmosphere control system for atomic force microscope |
| CN103760383B (en) * | 2014-01-09 | 2016-07-06 | 西南交通大学 | A kind of atmosphere control system for atomic force microscope |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140702 Termination date: 20170109 |