CN203683382U - Acid leaching device - Google Patents
Acid leaching device Download PDFInfo
- Publication number
- CN203683382U CN203683382U CN201320795219.6U CN201320795219U CN203683382U CN 203683382 U CN203683382 U CN 203683382U CN 201320795219 U CN201320795219 U CN 201320795219U CN 203683382 U CN203683382 U CN 203683382U
- Authority
- CN
- China
- Prior art keywords
- acid
- sour
- acid tank
- tank
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 239000002253 acid Substances 0.000 title claims abstract description 95
- 238000002386 leaching Methods 0.000 title abstract description 8
- 238000010438 heat treatment Methods 0.000 claims abstract description 21
- 238000001914 filtration Methods 0.000 claims abstract description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 4
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 claims description 3
- 238000004891 communication Methods 0.000 claims description 2
- 230000008676 import Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 4
- 238000007667 floating Methods 0.000 abstract description 3
- 229910052751 metal Inorganic materials 0.000 abstract description 3
- 239000007788 liquid Substances 0.000 abstract 7
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 21
- 239000004065 semiconductor Substances 0.000 description 11
- 239000000377 silicon dioxide Substances 0.000 description 7
- 239000012535 impurity Substances 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000035508 accumulation Effects 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000006557 surface reaction Methods 0.000 description 1
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Abstract
The utility model discloses an acid leaching device. The acid leaching device comprises an acid tank, an acid filtering system and an acid heating system, wherein the acid filtering system comprises an acid pump and an acid filter, wherein one end of the acid pump is connected to the bottom of the acid tank, the other end of the acid pump is connected to an inlet of the acid filter, and an outlet of the acid filter is connected to the top of the acid tank; and the acid heating system comprises a heater, a heat exchanger and a temperature measuring instrument, the heater is connected with the heat exchanger, the heat exchanger is arranged in the acid tank, and the temperature measuring instrument is connected with a temperature control system of the heater. According to the acid leaching device, the acid liquid is forced to be filtered by the acid filtering system through an efficient filter, so that floating substances in the acid liquid are effectively reduced, the content of fluosilicic acid in the acid liquid is reduced, the growth speeds of metal elements in the acid liquid are retarded, and the utilization period of the acid liquid is prolonged; and the acid liquid is further continuously heated through the acid heating system, and is subjected to temperature control through the temperature control system, so that the process requirements of the constant temperature control of the acid liquid are met, and the production efficiency is increased.
Description
Technical field
The utility model relates to a kind of acidleach device.
Background technology
Determine that semi-conductor is exactly its surperficial cleanliness factor by an important factor of quartz glass tube quality, because semi-conductor is all to quantize with PPM level by the purity of material, so equally very high to its surface requirements.Again because semi-conductor uses silica glass tubing through the processing of acidleach operation, so require also very high to acidleach semi-conductor with the acid solution foreign matter content of silica glass tubing.Existing silica tube acidleach is all carried out in simple and easy acid tank, and this acid tank is without filtering function, acid solution and silica glass surface reaction produce some impurity as floating matter, metallic element and silicofluoric acid etc., when these impurities accumulations produce and pollute the surface of silica glass tubing when a certain amount of, in order to guarantee the quality of semi-conductor quartz glass tube, need to frequently change acid solution, and the frequent replacing of acid solution increases production cost.
Be a fixed value for semi-conductor with requiring in the etch amount technique of quartzy tube surfaces, the factor that affects silica glass tubing surface etch amount mainly comprises leaching time, acid strength and acid liquor temperature.Be controlled in process of production for leaching time and these two factors of acid strength, and use the simple and easy acid tank that does not have heating installation, its acid liquor temperature is uncontrollable, and acid liquor temperature can change because of variation of ambient temperature.In order to meet the requirement of quartzy tubing surface etch amount definite value, in the time that reducing, acid liquor temperature must extend quartzy tubing leaching time, just greatly reduce production efficiency and extend leaching time.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of acidleach device, is applicable to semi-conductor quartz glass tube.
The utility model provides a kind of acidleach device, comprises acid tank, sour filtering system and sour heating system, and described sour filtering system, sour heating system are all communicated with acid tank.
Further, described sour filtering system comprises sour pump and sour strainer, and one end of described sour pump connects the bottom of acid tank, and the other end connects the import of sour strainer, and the outlet of described sour strainer connects the top of acid tank.
Further, between described sour pump and acid tank, between sour pump and sour strainer, between sour strainer and acid tank all by sour pipeline communication.
Further, described sour heating system comprises well heater and interchanger; Described well heater connects interchanger, and described interchanger is placed in described acid tank.
Further, described well heater connects interchanger by circulating water pipeline.
Further, described sour heating system also comprises temperature measurer, and described temperature measurer is arranged in acid tank.
Further, in described well heater, have temperature control system, described temperature measurer connects described temperature control system.
Further, described interchanger adopts the heat exchanger fin that material is tetrafluoroethylene.
The advantage the utlity model has is:
The utility model provides a kind of acidleach device, as a kind of novel filtration constant temperature acidleach device that is applicable to semi-conductor silica tube, on the one hand, by sour filtering system to acid solution through high efficiency filter forced filtration, effectively remove floating matter in acid solution, reduced in acid solution silicofluoric acid content and made it remain on a stationary value, slowed down the speed that in acid solution, metallic element increases, thereby extend the cycle that acid solution is used, reduced production cost.On the other hand, by sour heating system to acid solution continuous heating, by temperature control system be temperature measurer to acid liquor temperature control, thereby realized acid solution thermostatic control processing requirement, improved production efficiency.
Accompanying drawing explanation
Fig. 1 is the structural representation of the acidleach device that provides of the utility model.
In figure: 1-acid tank; 2-acid pump; 3-acid strainer; 4-well heater; 5-interchanger; 6-acid tube road; 7-temperature measurer; 8-silica tube support; 9-semi-conductor silica tube; 10-circulating water pipeline.
Embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail, so that those skilled in the art can better understand the utility model being implemented, but illustrated embodiment is not as to restriction of the present utility model.
The utility model provides a kind of acidleach device, as shown in Figure 1, comprises acid tank 1, sour filtering system and sour heating system.The semi-conductor silica tube 9 for the treatment of acidleach is arranged in acid tank 1, and by silica tube support 8 bearing semiconductor silica tubes 9.
Described sour filtering system comprises sour pump 2, sour strainer 3 and acid tube road.Utilize described acid liquor filtering to carry out the process of acid liquor filtering as follows: the acid solution in first described acid tank 1 enters in described sour pump 2 through acid tube road 6, and squeeze in sour strainer 2 by sour pump 2, acid solution is returned to acid tank 1 by acid tube road 6 again after described sour strainer 2 filters, and realizes like this acid cycle and filters.Described sour strainer 2 is generally made up of filter bag and filter core, filters different-grain diameter impurity in acid solution by selecting different pore size filter core to realize.
Described sour heating system comprises well heater 4, circulating water pipeline 10, interchanger 5 and temperature measurer 7 four parts.The process that described sour heat-processed is carried out acid solution heating is as follows: after recirculated water heater via 4 heating in circulating water pipeline 10 enters interchanger 5, interchanger 5 is placed in the bottom of acid tank 1, interchanger 5 with heat exchange pattern to the acid solution continuous heating in acid tank 1, interchanger 5 internal recycle water are because of the reduction of thermal losses temperature, and temperature reduces recirculated water and returned in well heater 4 and again heated by circulating water pipeline 10.Realize acid solution continuous heating by the heat exchange pattern of interchanger 5 like this., temperature measurer 7 is arranged at and in acid solution, carries out thermometric by the interior temperature measurer 7 detected temperatures signals of acid tank 1 for acid liquor temperature control, and temperature signal is fed back to temperature control system in well heater 4 regulates.In the time that acid liquor temperature reaches design temperature, control heater 4 quits work, and when temperature is during lower than design temperature, sour heating system is moved automatically.Realize the thermostatic control of acid tank acid solution like this.Described interchanger 5 is heat exchanger fin, adopts a kind of type material, i.e. tetrafluoroethylene, and it has high temperature resistant, hydrofluoric acid corrosion resistance and the multiple advantage such as heat-conductive characteristic is good.
The above embodiment is only the preferred embodiment for absolutely proving that the utility model is lifted, and protection domain of the present utility model is not limited to this.What those skilled in the art did on the utility model basis is equal to alternative or conversion, all within protection domain of the present utility model.Protection domain of the present utility model is as the criterion with claims.
Claims (8)
1. an acidleach device, is characterized in that, comprises acid tank, sour filtering system and sour heating system, and described sour filtering system, sour heating system are all communicated with acid tank.
2. acidleach device according to claim 1, it is characterized in that, described sour filtering system comprises sour pump and sour strainer, and one end of described sour pump connects the bottom of acid tank, the other end connects the import of sour strainer, and the outlet of described sour strainer connects the top of acid tank.
3. acidleach device according to claim 2, is characterized in that, between described sour pump and acid tank, between sour pump and sour strainer, between sour strainer and acid tank all by sour pipeline communication.
4. according to the acidleach device described in claim 1 or 2 or 3, it is characterized in that, described sour heating system comprises well heater and interchanger; Described well heater connects interchanger, and described interchanger is placed in described acid tank.
5. acidleach device according to claim 4, is characterized in that, described well heater connects interchanger by circulating water pipeline.
6. acidleach device according to claim 5, is characterized in that, described sour heating system also comprises temperature measurer, and described temperature measurer is arranged in acid tank.
7. acidleach device according to claim 6, is characterized in that, in described well heater, has temperature control system, and described temperature measurer connects described temperature control system.
8. acidleach device according to claim 7, is characterized in that, described interchanger adopts the heat exchanger fin that material is tetrafluoroethylene.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320795219.6U CN203683382U (en) | 2013-12-06 | 2013-12-06 | Acid leaching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320795219.6U CN203683382U (en) | 2013-12-06 | 2013-12-06 | Acid leaching device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203683382U true CN203683382U (en) | 2014-07-02 |
Family
ID=51005310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320795219.6U Expired - Lifetime CN203683382U (en) | 2013-12-06 | 2013-12-06 | Acid leaching device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203683382U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112870827A (en) * | 2020-12-30 | 2021-06-01 | 上海至纯洁净系统科技股份有限公司 | Acid supply system for reducing generation of bubbles |
| CN113955948A (en) * | 2021-11-08 | 2022-01-21 | 惠州市益博通讯技术有限公司 | Polishing device with cleaning function for capillary production and using method |
-
2013
- 2013-12-06 CN CN201320795219.6U patent/CN203683382U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112870827A (en) * | 2020-12-30 | 2021-06-01 | 上海至纯洁净系统科技股份有限公司 | Acid supply system for reducing generation of bubbles |
| CN113955948A (en) * | 2021-11-08 | 2022-01-21 | 惠州市益博通讯技术有限公司 | Polishing device with cleaning function for capillary production and using method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140702 |