CN203668557U - Central shaft cover of single crystal furnace - Google Patents

Abstract

The utility model provides a central shaft cover of a single crystal furnace. The central shaft cover comprises a contact plate as well as an inner ring and a pull ring which are arranged on the lower surface and the upper surface of the contact plate respectively, wherein the diameter of the round contact plate is larger than the inner diameter of a pipe port of a central shaft of the single crystal furnace; the diameter of the round inner ring is smaller than the inner diameter of the pipe port of the central shaft of the single crystal furnace; and the contact plate and the inner ring are coaxially arranged. According to the central shaft cover of the single crystal furnace, a pipe of the central shaft is covered with the central shaft cover during a thermal field cleaning process of the single crystal furnace, so that the pipe is prevented from being blocked by oxide dust and particles.

Description

Shaft-cup in single crystal growing furnace

Technical field

The utility model relates to shaft-cup in a kind of single crystal growing furnace instrument, particularly a kind of single crystal growing furnace.

Background technology

Single crystal growing furnace is produced in monocrystalline crystal bar process and is produced dust, particle, in body of heater and thermal field component, adheres to, and needs cleaning, easily enters into the corrugated tube of lower portion of furnace body pipeline in scale removal process.Easily cause corrugated tube to damage, and affect monocrystalline and produce normally and carry out.

Utility model content

The purpose of this utility model is to provide shaft-cup in a kind of single crystal growing furnace that prevents oxide powder dust, particle plugging pipeline.

For solving the problems of the technologies described above, shaft-cup in the utility model single crystal growing furnace, comprises contact plate and is arranged on the inner ring on the upper and lower surface of described contact plate and lifts ring; Wherein said contact plate is circular, and the diameter of described contact plate is greater than the interior diameter at single crystal growing furnace central siphon road junction; Described inner ring is circular, and the diameter of described inner ring is less than the interior diameter at single crystal growing furnace central siphon road junction.Described contact plate and described inner ring coaxially arrange.

In the utility model single crystal growing furnace, shaft-cup in shaft-cup use covers on axis pipeline in thermal field of single crystal furnace cleaning process, prevents oxide powder dust, particle plugging pipeline.

Brief description of the drawings

Fig. 1 is the utility model single crystal growing furnace axis plan view;

Fig. 2 is shaft-cup front view in the utility model single crystal growing furnace

Fig. 3 is that in the utility model single crystal growing furnace, shaft-cup uses schematic diagram.

Description of reference numerals in shaft-cup accompanying drawing in the utility model single crystal growing furnace:

Shaft-cup 3-pipeline opening in 1-single crystal growing furnace 2-

4-axis 5-contact plate 6-inner ring

7-lifts ring

Embodiment

Below in conjunction with accompanying drawing, shaft-cup in the utility model single crystal growing furnace is described in further detail.

As shown in FIG. 1 to 3, shaft-cup in the utility model single crystal growing furnace, comprising: circular contact plate 5 and be arranged on the circular inner ring 6 of contact plate 5 lower surfaces, contact plate 5 coaxially arranges with inner ring 6.On contact plate 5 upper surfaces, install and lift ring 7.The diameter of contact plate 5 is greater than the interior diameter of single crystal growing furnace 1 axis 4 pipeline opening 3; The diameter of inner ring 6 is less than the interior diameter of single crystal growing furnace 1 axis 4 pipeline opening 3.

After 1 of single crystal growing furnace is produced monocrystalline and is finished, when cleaning table, or in the time that other situations need to be cleaned table, decline axis 4 is to pipeline opening 3 bottoms, after axis 4 drops to concordant pipeline opening 3, the hand-held ring 7 that lifts, covers axis 4 and covers 2, make contact plate 5 with after pipeline opening 3, contact good, normally clean, comprise thermal field component in single crystal growing furnace 1 stove, after cleaning finishes in thermal field component and stove, the hand-held ring 7 that lifts, takes out axis 4 and covers 2.

In the utility model single crystal growing furnace, shaft-cup in shaft-cup use covers on axis pipeline in thermal field of single crystal furnace cleaning process, prevents oxide powder dust, particle plugging pipeline.

Below the preferred embodiment of the utility model having been created illustrates, but the utility model is created and is not limited to embodiment, those of ordinary skill in the art also can make all modification being equal to or replacement under the prerequisite without prejudice to the utility model creative spirit, and the modification that these are equal to or replacement are all included in the application's claim limited range.

Claims (2)

1. shaft-cup in single crystal growing furnace, is characterized in that, comprises contact plate and is arranged on the inner ring on the upper and lower surface of described contact plate and lifts ring; Wherein

Described contact plate is circular, and the diameter of described contact plate is greater than the interior diameter at single crystal growing furnace central siphon road junction;

Described inner ring is circular, and the diameter of described inner ring is less than the interior diameter at single crystal growing furnace central siphon road junction.

2. shaft-cup in single crystal growing furnace according to claim 1, is characterized in that, described contact plate and described inner ring coaxially arrange.

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