CN203653682U - Energy-saving ion penetration furnace - Google Patents
Energy-saving ion penetration furnace Download PDFInfo
- Publication number
- CN203653682U CN203653682U CN201320839417.8U CN201320839417U CN203653682U CN 203653682 U CN203653682 U CN 203653682U CN 201320839417 U CN201320839417 U CN 201320839417U CN 203653682 U CN203653682 U CN 203653682U
- Authority
- CN
- China
- Prior art keywords
- insulation layer
- stove
- thermal insulation
- furnace
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Abstract
The utility model relates to an energy-saving ion penetration furnace, comprising an upper furnace body barrel with a cooling water interlayer, a round base, a cathode plate, a vacuum suction pipe below the cathode plate and a temperature measuring device fixed on the cathode plate, wherein insulating layers are arranged on the inner side of the upper furnace body barrel and the round base; the thickness of the insulating layer of a 10-500kv furnace is 2-28cm; the insulating layer at the inner side of the upper furnace body barrel comprises a dead burner gas, a refractory matter and a steel barrel; the insulating layer on the round base comprises a dead burner gas, a refractory matter and a steel plate; the steel barrel and the steel plate separate the dead burner gas inside the insulating layer from the flowing gas inside the furnace. The gas inside the insulating layer enters the tube from the bottom of the furnace body and extends to the top, passes through the insulating layer on the top of the furnace body to enter the furnace through even air distribution pipes. By adopting the energy-saving ion penetration furnace, the problems of uneven temperature inside the furnace, high power consumption and inaccurate temperature measurement also are simultaneously solved, the nitriding layer is even and consistent, and the nitriding quality is greatly improved.
Description
Technical field
The utility model relates to a kind of equipment for Heating Processing, and particularly a kind of energy-conservation ion oozes stove, belongs to surface treatment technology of material field.
Background technology
The principle of work of ion-nitriding furnace is in vacuum oven, to pass into gas nitrogenous, hydrogen, and operating pressure, between 133Pa～1330Pa, belongs to ultralow vacuum oven.Processed workpiece is placed on cathode disc or is lifted on negative electrode, switches on power, and voltage is raise gradually, when voltage exceedes after gas ignition voltage, the rarefied gas ionization of two interpolars, and produce glow discharge at workpiece surface, when work, aura layer general control is at 3～5mm.The positive ion such as nitrogen, hydrogen being ionized impacts workpiece surface with very big kinetic energy, workpiece is heated to temperature required, and nitrogen ion produces the physical and chemical process of compound, chemical reaction and absorption, diffusion at workpiece surface simultaneously, forms nitrided case than faster.Ionitriding has obvious advantage than gas nitriding: with short production cycle, and penetrated layer property good (hardness is high, wear-resisting, anti-corrosion), environmental protection and energy saving, workpiece surface is silver-shiny, and workpiece deformation is little.
Mostly existing ion-nitriding furnace is the advanced equipment for Heating Processing being made up of vacuum discharge body of heater and electrical control system.Vacuum discharge body of heater is made up of cup dolly and bell-jar upper furnace body two parts.It is sealed that disk on base has double-layer plate to be welded into, middle logical water coolant.Disk border car is fluted, puts silicone rubber O-ring and show as Fig. 1 in groove.On disk, put 3 insulated columns, 3 insulated columns support the cathode disc that ring steel plate is processed into, and workpiece is positioned on cathode disc.The negative electrode of power supply is fixed on cathode disc with screw rod by the insulated column on base.Thermopair is fixed on cathode disc by the silica tube of insulation, and head overlaps a steel temperature measuring head again.Upper furnace body is anode, is welded on annulus logical water coolant between doubling plate by double-layer plate.Upper furnace body is provided with 3 of upper, middle and lower vision slit, and the body of heater that power is little is established two, in the middle of vision slit, has two-layer heat-resisting toughened glass, adds teflin ring sealing, and head is with tightening fixing with the ring-type bung flange of screw thread.Bottom of furnace body has vacuum pipe valve to be connected with two vacuum pumps.Intake ducting is arranged at body of heater top or bottom.In this furnace binding stove, without any Insulation, energy consumption is too large, has added again one deck or two layers of thermoscreen for addressing this problem electric furnace manufacturer in body of heater, also has similar number vision slit on thermoscreen, and gas can flow between thermoscreen and bell jar.
The technical problem underlying that this structure exists is at present: one, the vacuum-pumping tube of top inlet pipe and bottom is in together in vacuum furnace body, gas flow is obvious, transmission of heat by convection is strengthened, therefore stove belongs to low temperature oven, is again ultralow vacuum oven, and stove planted agent is take transmission of heat by convection as main, therefore the effect of thermoscreen is little, and current consumption is large.Its two, thermometric mainly by people range estimation (because of workpiece temperature just red by black obfuscation in the time in the dark watching for 550～560 ℃), instrument temperature is only for referencial use, thermometric is forbidden.They are three years old, this stove belongs to ultralow vacuum oven and is the vacuum under transient equilibrium, in stove, 75% is the extremely strong hydrogen of the capacity of heat transmission, though add thermoscreen, but in stove, the temperature difference is still very large, and furnace temperature inequality, finds by metallurgical analysis, the processed each portion in long pole upper, middle and lower, very inhomogeneous compared with the upper and lower, left and right nitriding depth of small workpiece.
Contriver is engaged in equipment for Heating Processing and imparts knowledge to students for many years, innovation, transformation Duo Tai laboratory, large-lot producer is with ion-nitriding furnace and carry out lot of experiments.This stove is the comprehensive body of heater that integrates multidisciplinary, has two large features: one, workpiece surface has amassed electrical heating element effect, and when insulation needs power supply continuously, workpiece surface power>=0.2～0.3W/cm
2, surface current density>=0.3mA/cm
2.Its two, in stove, have the more than 75% extremely strong hydrogen of the capacity of heat transmission, furnace gas is ceaselessly inputted by under meter, is ceaselessly discharged again by vacuum pump, is the ultralow vacuum body belonging under transient equilibrium.Above 2 prove that this stove must add thermal insulation layer, and will accurately calculate the thickness of thermal insulation layer.Resistance furnace thermal insulation layer is thicker, and temperature field is more even, economize on electricity, general thick in 300mm～500mm.And ion-nitriding furnace not only will have thermal insulation layer, but also to meet the surperficial power in workpiece when insulation and the minimum requirements of surface current density.If thermal insulation layer is blocked up, the energy of ion bombardment is inadequate, affects nitriding quality.
Utility model content
The purpose of this utility model is to overcome above-mentioned deficiency, provides a kind of energy-conservation ion to ooze stove.
The technical scheme that the utility model is taked is:
A kind of energy-conservation ion oozes stove, comprise the upper furnace body cylindrical shell with cooling water sandwich, cup dolly, cathode disc, vacuum suction pipeline under cathode disc, be fixed on the temperature measuring equipment of cathode disc, in the inner side of upper furnace body cylindrical shell and be provided with thermal insulation layer above cup dolly, the thermal insulation layer of upper furnace body cylindrical shell inner side comprises immobilising furnace gas, refractory materials and steel cylinder, in thermal insulation layer, refractory materials is entangled in steel cylinder outside, steel cylinder inner side is anode, thermal insulation layer above cup dolly comprises immobilising furnace gas, refractory materials and steel plate, steel cylinder and steel plate are separated by immobilising furnace gas and furnace gas in thermal insulation layer, gas in thermal insulation layer enters pipe and reaches top from bottom of furnace body, enter in stove by even gas distribution pipe through thermal insulation layer at body of heater top, the stove insulation bed thickness 2-28cm of 10-500kw.
The temperature measuring equipment of stove comprises triumphant dress thermopair, thermopair outer cover silica tube, the outer cover of silica tube has temperature measuring head, blind hole (hole of not boring) is arranged at top, temperature measuring head center, combines together in silica tube and thermopair top, and closely sticks together with temperature measuring head top-portion apertures position, cut off without gas, temperature measuring head thickness is consistent with the net thickness of workpiece, and temperature measuring head height is consistent with workpiece or proportional, guarantees and workpiece equality of temperature.Evenly gas distribution pipe comprises with gas and enters the Y-tube that pipe top is connected, and Y-tube connects two straight tubes, each straight tube curved pipe of ining succession, and two curved pipes surround subcircular, the production well of the interior center position of the oriented stove of cloth on curved pipe.
The thermal insulation layer of upper furnace body is provided with vision slit and vision slit tightness system, prevents that in stove, mobile gas enters in thermal insulation layer.
The vision slit of upper furnace body is corresponding with the vision slit of thermal insulation layer.Thermal insulation layer on cup dolly is by circular steel plate and lagging material, immobilising gas composition, also with stove in flowing gas cut off.
The utility model is according to thermal conduction study formula
can calculate the data of insulation layer thickness S.Temperature difference t in stove
1-t
2represent, only measure practical situation and the concrete data of thermograde in stove, could determine insulation layer thickness.We take following method test to add the 25kw ionitriding temperature field in furnace situation of thermoscreen, and we put three steel cylinders in stove, each heavy 60kg, height 800mm, diameter 184mm, thickness 15mm.The Φ 3mm armoured thermocouple of 18 anti-arc discharges of head has been installed in stove, use multiterminal temperature measuring equipment, measure the temperature curve from workpiece surface to furnace outer wall cross section in stove, as Fig. 5, this curve is the ion-nitriding furnace temperature field in furnace curve of measuring for the first time both at home and abroad, for the new body of heater of research ion-nitriding furnace provides precious temperature head data.From Fig. 5, can be clearly seen that the temperature field feature in ion-nitriding furnace, lower the temperature 60 ℃ to aura layer from workpiece surface, from aura layer, to 205 ℃ of thermoscreen temperature drops, total temperature difference reaches 265 ℃, and in stove, the temperature difference is too large.Should be controlled in 50 ℃ to thermal insulation layer steel cylinder from aura layer if add thermal insulation layer, the interior total temperature difference of new body of heater stove that adds thermal insulation layer can be controlled in 100 ℃.Calculate 10-500kw ion-nitriding furnace insulation layer thickness by formula and should be 2～28cm.
The body of heater that the design that the utility model gas enters pipe has overcome previous production enters the gas straight after the liquid ammonia gasifications of subzero tens degree in stove, and skewness, also affects temperature distributing disproportionation in stove.Newly-designed stove gas enters pipe and passes through thermal insulation layer, preheating first, then enter and in stove, carry out secondary preheating through thermal insulation layer top, two semicircle shape inlet pipe are bored some pores to body of heater center position, be full of whole body of heater, then discharged by umbrella gas exhaust duct, make it meet fluid mechanics principle, make nitrided case uniformity.
Temperature measuring equipment of the present utility model is with spirit lamp, the head heat of thermopair and silica tube to be combined together, and silica tube plays insulating effect.The head combining together closely sticks together with temperature measuring head apical pore portion with polishing wheel polishing, cuts off, thereby guarantee that temperature test is sensitive, accurate without gas.Temperature measuring head thickness is consistent with workpiece net thickness, and temperature measuring head height is identical with workpiece or proportional, guarantees and workpiece equality of temperature.
Accompanying drawing explanation
Fig. 1 is that ion of the prior art oozes furnace accretion composition;
Fig. 2 is that the utility model ion oozes furnace accretion composition;
Fig. 3 is the utility model temperature measuring equipment structure iron;
Fig. 4 is that the utility model ion oozes stove temperature field in furnace curve, wherein a upper furnace body, b thermal insulation layer, c workpiece;
Fig. 5 oozes stove temperature field in furnace test curve, wherein a upper furnace body, b thermoscreen, c workpiece for certain factory produces 25kw ion;
Fig. 6 is even gas distribution pipe structure iron.
Wherein, 1. upper furnace body, 2, thermal insulation layer, 3, sealing-ring, 4, cathode disc, 5, workpiece, 6, vision slit, 7, temperature measuring equipment, 8, vision slit tightness system in thermal insulation layer, 9, gas enters pipe, 10, cup dolly, 11, cathode insulation seat, 12, insulated leg, 13, vacuum suction pipeline, 14, temperature measuring head, 15, silica tube, 16, thermopair, 17, set screw nut, 18, Y-tube, 19, curved pipe, 20, production well, 21, thermoscreen.
Embodiment
A kind of energy-conservation ion oozes stove, comprise upper furnace body 1 cylindrical shell with cooling water sandwich, cup dolly 10, cathode disc 4, vacuum suction pipeline 13 under cathode disc 4, be fixed on the temperature measuring equipment 7 of cathode disc 4, in the inner side of upper furnace body cylindrical shell and be provided with thermal insulation layer 2 above cup dolly 10, the thermal insulation layer of upper furnace body cylindrical shell inner side comprises immobilising furnace gas, refractory materials and steel cylinder, in thermal insulation layer, refractory materials is entangled in steel cylinder outside, steel cylinder inner side is anode, thermal insulation layer above cup dolly comprises immobilising furnace gas, refractory materials and steel plate, steel cylinder and steel plate are separated by immobilising furnace gas and furnace gas in thermal insulation layer, gas in thermal insulation layer enters pipe 9 and reaches top from bottom of furnace body, enter in stove by even gas distribution pipe through thermal insulation layer at body of heater top, the stove insulation bed thickness 2-28cm of 10-500kw.
Temperature measuring equipment comprises thermopair 16, and thermopair outer cover silica tube 15, and the outer cover of silica tube has temperature measuring head 14, temperature measuring head top center blind hole; Combining together in silica tube and thermopair top, and closely sticks together with temperature measuring head top-portion apertures portion, cut off without gas.Temperature measuring head thickness is consistent with workpiece net thickness, and height is identical with workpiece or proportional, guarantees and workpiece equality of temperature.
Evenly gas distribution pipe comprises with gas and enters the Y-tube 18 that pipe 9 tops are connected, and Y-tube 18 connects two straight tubes, and each straight tube 19, two curved pipes of a curved pipe of ining succession surround subcircular, the production well 20 of the interior center position of the oriented stove of cloth on curved pipe.Production well from round tube the local aperture away from more larger.
Further illustrate below in conjunction with specific embodiment.
1, the Thickness Design of thermal insulation layer: the 25kw body of heater that utilizes certain factory to produce, in stove, design thermal insulation layer, its thickness S can try to achieve by heat conduction formula:
because of in glow ion bombardment equipment, the workpiece heating-up time is shorter, so insulation layer thickness should determine with each parameter of holding stage.While insulation because of workpiece again, power supply can not be interrupted, current density>=0.3mA/cm
2, surperficial power>=0.2～0.3w/cm
2could meet processing requirement, so should be more than or equal to the workpiece surface energy that must consume per hour by the thermal insulation layer heat spreading out of per hour.Q can the each calculation of parameter of root Ju ion-nitriding furnace go out.
T
1: thermal insulation layer inner wall temperature, get 470 ℃
T
2: outside thermal insulation layer, i.e. inboard wall of furnace body temperature, gets 100 ℃
λ: the thermal conductivity of material, kilocalorie of/meter of time ℃ (employing glass wool cloth)
F
all: the mean value of thermal insulation layer inside and outside wall, rice
2
Insulation layer thickness
2. thermal insulation layer concrete structure is: use thickness 2mm, 1Cr13 steel plate is made steel cylinder, steel cylinder bottom weldering one annulus, and wide is 3.4cm.Steel cylinder annulus is to be wound around thick 1.4cm glass wool cloth and felt outside upper part, another 2cm is furnace gas.Be down to below 200 ℃ through temperature after steel cylinder and 1.4cm refractory materials because of furnace temperature, at this moment furnace gas is in the time of vacuum tightness 500～600 handkerchief, and its thermal conductivity is less than the thermal conductivity of glass wool cloth.
After upper furnace body thermal insulation layer is carried out, steel cylinder top center is bored the hole of Φ 28mm, makes thermal insulation layer steel cylinder enter pipe through the Φ 26mm gas of upper furnace body welding, and fixes with coupling.Bottom annulus is made with 30 × 30 angle bar bending, and garden ring is fixed on upper furnace body disk with 6 screws.
3. the setting of vision slit: vision slit garden boxing is connected on steel cylinder and corresponding with upper furnace body vision slit in thermal insulation layer.Be fixed on cylindrical shell with thermal glass and heat-resistant seal gasket, gas mobile in stove and thermal insulation layer are completely cut off.
4. temperature measuring equipment: armoured thermocouple Φ 3mm, be enclosed within the silica tube of internal diameter 3.5mm, combined together by spirit lamp heat in thermopair silica tube upper end, silica tube has been insulating effect.Polishing wheel rounding light shape for the head combining together, put into is highly 300mm again, wall thickness 15mm, in the steel pipe of Φ 60mm, top cover is the disk steel plate that 15mm is thick, 14mm is dark for disc centre drilling blind hole, also rounding light shape is pushed up in hole, and the first sample of thermopair silica tube circle light shape, closely sticks together, middle without gas gap, temperature measurement accuracy is in ± 10 ℃.
5. newly-designed gas enters pipe, and the body of heater that has overcome previous production enters the gas straight after the ammonia liquor gasification of subzero tens degree in stove, and not uniform, also affects temperature inequality in stove.Newly-designed selection for pipeline Φ 26mm stainless steel tube passes through thermal insulation layer, preheating first, then enter and in stove, carry out secondary preheating through thermal insulation layer top, two semicircular pipes are to the some pores of body of heater center drill and be distributed on upper of furnace body, evenly flow into downwards, be full of whole body of heater, then discharged by umbrella gas exhaust duct, make it meet fluid mechanics principle, make nitrided case uniformity.
6. thickness 3cm steel plate for cathode disc, cuts into external diameter Φ 800mm, the disk of internal diameter Φ 300mm, and surfaceness reaches 6.3 μ m, chamfering 5 × 45 through machining.
7. base material is 1Cr13, and the stainless steel plate of thickness 2mm is made, and above adds lagging material, and insulation layer thickness is 3.4cm, and Φ 350mm umbrella draft hood is placed at central upper portion hole place, is highly 1cm, and gas uniform is discharged.
Above new design part is packed in certain the product 25Kw of factory ionitriding furnace shell meticulously, become the new body of heater of high-efficiency and energy-saving type.New furnace body temperature field test procedure is with the old body of heater that adds thermoscreen.Test data is as accompanying drawing 4 and table 1.Workpiece surface, to 50 ℃ of aura layer place coolings, falls 39 ℃ from aura layer appearance to thermal insulation layer wall, and in stove, the indicated temperature of first thermopair is 560 ℃, and the thermopair of temperature measuring equipment is 556 ℃, and the two differs 4 ℃.The design of proof thermal insulation layer, temperature measuring equipment design etc., reach requirement completely.
Two kinds of structure body of heater workpiece of table 1 heat up, insulation parameter value
Above digital proof, adds after thermal insulation layer significant:
1, temperature inequality in stove, power consumption is many, thermometric is an inaccurate difficult problem have been solved completely.
2, add when thermal insulation layer ratio adds thermoscreen intensification, insulation and economize on electricity 45～50%, if national existing ion-nitriding furnace all adds thermal insulation layer, its economic benefit and power savings are considerable.But add after thermal insulation layer, also exist workpiece cooling below 200 ℃ time in stove, time lengthening 1.5 hours, so utility model person thinks: the stove of same model can make two kinds of specifications: a kind of for not requiring the discontinuous running stove of rapid cooling, another kind be can be cooling fast uninterrupted operation stove, in uninterrupted operation stove, can add accelerate cooling system, can reference vacuum tempering stove, this stove can be described as energy-efficient ion and oozes stove.
Claims (5)
1. an energy-conservation ion oozes stove, comprise the upper furnace body cylindrical shell with cooling water sandwich, cup dolly, cathode disc, vacuum suction pipeline under cathode disc, be fixed on the temperature measuring equipment of cathode disc, it is characterized in that, in the inner side of upper furnace body cylindrical shell and be provided with thermal insulation layer above cup dolly, the thermal insulation layer of upper furnace body cylindrical shell inner side comprises immobilising furnace gas, refractory materials and steel cylinder, in thermal insulation layer, refractory materials is entangled in steel cylinder outside, steel cylinder inner side is anode, thermal insulation layer above cup dolly comprises immobilising furnace gas, refractory materials and steel plate, steel cylinder and steel plate are separated by immobilising furnace gas and furnace gas in thermal insulation layer, gas in thermal insulation layer enters pipe and reaches top from bottom of furnace body, enter in stove by even gas distribution pipe through thermal insulation layer at body of heater top, the stove insulation bed thickness 2-28cm of 10-500kw.
2. the energy-conservation ion of one according to claim 1 oozes stove, it is characterized in that, temperature measuring equipment comprises thermopair, thermopair outer cover silica tube, the outer cover of silica tube has temperature measuring head, and temperature measuring head top center is provided with blind hole, combines together in silica tube and thermopair top, and closely stick together with temperature measuring head top center hole, cut off without gas.
3. the energy-conservation ion of one according to claim 2 oozes stove, it is characterized in that, temperature measuring head thickness is consistent with workpiece net thickness, consistent or proportional with workpiece height with workpiece height, guarantees and workpiece equality of temperature.
4. the energy-conservation ion of one according to claim 1 oozes stove, it is characterized in that, described even gas distribution pipe comprises with gas and enters the Y-tube that is connected of pipe top, Y-tube connects two straight tubes, each straight tube curved pipe of ining succession, two curved pipes surround subcircular, the production well of center position in the oriented stove of cloth on curved pipe.
5. the energy-conservation ion of one according to claim 1 oozes stove, it is characterized in that, thermal insulation layer is provided with vision slit, and this hole is corresponding with the vision slit of body of heater, be fixed on steel cylinder with thermal glass and heat-resistant seal gasket, guarantee flowing gas partition in upper furnace body thermal insulation layer and stove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320839417.8U CN203653682U (en) | 2013-12-18 | 2013-12-18 | Energy-saving ion penetration furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320839417.8U CN203653682U (en) | 2013-12-18 | 2013-12-18 | Energy-saving ion penetration furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203653682U true CN203653682U (en) | 2014-06-18 |
Family
ID=50920094
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320839417.8U Expired - Fee Related CN203653682U (en) | 2013-12-18 | 2013-12-18 | Energy-saving ion penetration furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203653682U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI649519B (en) * | 2018-03-16 | 2019-02-01 | 黃朝國 | Vacuum thermal cracker |
-
2013
- 2013-12-18 CN CN201320839417.8U patent/CN203653682U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI649519B (en) * | 2018-03-16 | 2019-02-01 | 黃朝國 | Vacuum thermal cracker |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP7144617B2 (en) | Vacuum degreasing sintering furnace and its usage | |
| CN103017524B (en) | Environment-friendly automatic-temperature-control quartz tube furnace device for pyrolysis of high polymer | |
| CN104078626A (en) | Heating device for OLED (Organic Light Emitting Diode) material evaporation | |
| CN203653682U (en) | Energy-saving ion penetration furnace | |
| CN103614689B (en) | A kind of energy-conservation ion-nitriding furnace | |
| CN205152313U (en) | Interactive bicathode ion surface heat treatment stove | |
| CN107144130A (en) | A kind of negative electrode visualization microwave sintering apparatus | |
| CN203964663U (en) | Novel temperature measuring heating furnace | |
| CN219347322U (en) | Graphite heating system for hard felt sintering furnace | |
| CN205137893U (en) | Pipe heater for brickmaking | |
| CN104566486A (en) | Novel energy-saving lignite furnace chimney water jacket heater device | |
| CN101776398B (en) | Gas preheater of sintering furnace of electronic components | |
| CN214792477U (en) | Heating furnace that work efficiency is high | |
| CN204085163U (en) | Outer hot oxygen-complementing type roller kilns | |
| CN201628481U (en) | Gas preheating device of electronic component firing furnace | |
| CN100460553C (en) | Energy-saving ion nitriding furnace | |
| CN201890953U (en) | Diffusion furnace device | |
| CN204022479U (en) | A kind of graphitizing device of producing for graphite guide hotting mask | |
| CN203631474U (en) | Ceramic metal halide lamp electric-arc tube sealing-in furnace end employing intermediate-frequency furnace heating mode | |
| CN103182284B (en) | Gas phase photo-thermal coupling catalytic reactor | |
| CN105220108A (en) | Interactive double cathode ion surface heat treatment furnace | |
| CN207891239U (en) | A kind of medical glass all-electric melting furnace pedestal | |
| CN207958428U (en) | A kind of Novel annealing furnace | |
| CN205412960U (en) | Airtight pyroreaction cauldron | |
| CN101591763A (en) | Insulating type multifunctional ion chemical heat treatment device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140618 Termination date: 20201218 |