CN203650260U - 一种化学机械抛光用配料桶 - Google Patents
一种化学机械抛光用配料桶 Download PDFInfo
- Publication number
- CN203650260U CN203650260U CN201420021216.1U CN201420021216U CN203650260U CN 203650260 U CN203650260 U CN 203650260U CN 201420021216 U CN201420021216 U CN 201420021216U CN 203650260 U CN203650260 U CN 203650260U
- Authority
- CN
- China
- Prior art keywords
- polishing
- mixing barrel
- mixer
- charging basket
- mechanical polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 54
- 239000000126 substance Substances 0.000 title abstract description 20
- 238000002156 mixing Methods 0.000 title abstract description 14
- 239000002253 acid Substances 0.000 claims abstract description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 6
- 238000001816 cooling Methods 0.000 claims description 9
- 238000003756 stirring Methods 0.000 claims description 9
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract description 8
- 229910010271 silicon carbide Inorganic materials 0.000 abstract description 8
- 230000000694 effects Effects 0.000 abstract description 7
- 239000003513 alkali Substances 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000007517 polishing process Methods 0.000 abstract description 2
- 239000003795 chemical substances by application Substances 0.000 abstract 2
- 238000007599 discharging Methods 0.000 abstract 2
- 239000000498 cooling water Substances 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 abstract 1
- 239000012530 fluid Substances 0.000 description 27
- 239000002699 waste material Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000021050 feed intake Nutrition 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001149 thermolysis Methods 0.000 description 1
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Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201420021216.1U CN203650260U (zh) | 2014-01-14 | 2014-01-14 | 一种化学机械抛光用配料桶 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201420021216.1U CN203650260U (zh) | 2014-01-14 | 2014-01-14 | 一种化学机械抛光用配料桶 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN203650260U true CN203650260U (zh) | 2014-06-18 |
Family
ID=50916696
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201420021216.1U Expired - Lifetime CN203650260U (zh) | 2014-01-14 | 2014-01-14 | 一种化学机械抛光用配料桶 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN203650260U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106985062A (zh) * | 2017-03-14 | 2017-07-28 | 黄河科技学院 | 一种化学机械抛光设备 |
-
2014
- 2014-01-14 CN CN201420021216.1U patent/CN203650260U/zh not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106985062A (zh) * | 2017-03-14 | 2017-07-28 | 黄河科技学院 | 一种化学机械抛光设备 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Chemical mechanical polishing mixing barrel Effective date of registration: 20170912 Granted publication date: 20140618 Pledgee: Prudential Bank Ji'nan branch of Limited by Share Ltd. Pledgor: SICC Co.,Ltd. Registration number: 2017370000138 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20180208 Granted publication date: 20140618 Pledgee: Prudential Bank Ji'nan branch of Limited by Share Ltd. Pledgor: SICC Co.,Ltd. Registration number: 2017370000138 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
CP03 | Change of name, title or address |
Address after: No.99, Tianyue South Road, Huaiyin District, Jinan City, Shandong Province Patentee after: Shandong Tianyue advanced technology Co.,Ltd. Address before: 3-409, Yinhe building, 2008 Xinluo street, high tech Development Zone, Jinan City, Shandong Province Patentee before: SICC Co.,Ltd. |
|
CP03 | Change of name, title or address | ||
CX01 | Expiry of patent term |
Granted publication date: 20140618 |
|
CX01 | Expiry of patent term |