CN203636199U - Three-position linkage type laser etching platform - Google Patents
Three-position linkage type laser etching platform Download PDFInfo
- Publication number
- CN203636199U CN203636199U CN201320893366.7U CN201320893366U CN203636199U CN 203636199 U CN203636199 U CN 203636199U CN 201320893366 U CN201320893366 U CN 201320893366U CN 203636199 U CN203636199 U CN 203636199U
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- Prior art keywords
- axis
- delivery unit
- transmission unit
- type laser
- axis transmission
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- Expired - Lifetime
Links
- 238000010329 laser etching Methods 0.000 title abstract description 6
- 238000000608 laser ablation Methods 0.000 claims description 19
- 230000001681 protective effect Effects 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000012423 maintenance Methods 0.000 abstract description 4
- 230000005540 biological transmission Effects 0.000 abstract 12
- 229920002799 BoPET Polymers 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000004579 marble Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- Laser Beam Processing (AREA)
Abstract
The utility model discloses a three-position linkage type laser etching platform which comprises an X-axis transmission unit and a Y-axis transmission unit. The X-axis transmission unit is arranged in the perpendicular direction and the Y-axis transmission unit is arranged in the horizontal direction. A Z-axis transmission unit is installed on the X-axis transmission unit. A first grating ruler and a first photoelectric limiting switch are arranged on the X-axis transmission unit, a second grating ruler and a second photoelectric limiting switch are arranged on the Y-axis transmission unit, a third photoelectric limiting switch is arranged on the Z-axis transmission unit, and the X-axis transmission unit, the Y-axis transmission unit and the Z-axis transmission unit are respectively connected with a servo motor. According to the three-position linkage type laser etching platform, the manufacturing cost can be greatly reduced, repair and maintenance are easy, and the responding speed and accuracy of the device are guaranteed.
Description
Technical field
The utility model relates to a kind of motion platform that is applicable to pulse laser etching, relates in particular to a kind of Three-bearing coordinated type laser ablation platform.
Background technology
The X-Y-Z motion platform of the PET film conductive film layer processing unit (plant) in existing pulse laser etching ITO equipment, XY diaxon all adopts linear electric motors, and motion platform corresponding speed is fast like this, and precision is also higher, but cost of manufacture is very expensive.In addition, linear electric motors maintenance and repair is also more loaded down with trivial details.Therefore, be necessary to provide more economically a kind of and be applicable to the X-Y-Z motion platform that pulse laser etching ITO PET film upper conductive film layer is equipped, thereby significantly reduced the production cost of equipment.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of Three-bearing coordinated type laser ablation platform, can greatly reduce cost of manufacture, is easy to maintenance and repair, and the response speed of equipment and precision all meet production and application requirement.
The utility model is to solve the problems of the technologies described above the technical scheme adopting to be to provide a kind of Three-bearing coordinated type laser ablation platform, comprise X-axis delivery unit and Y-axis delivery unit, described X-axis delivery unit vertically arranges, described Y-axis delivery unit along continuous straight runs arranges, wherein, on described X-axis delivery unit, Z axis delivery unit is installed, described X-axis delivery unit is provided with the first grating scale and the first photoelectric limit switch, described Y-axis delivery unit is provided with the second grating scale and the second photoelectric limit switch, described Z axis delivery unit is provided with the 3rd photoelectric limit switch, described X-axis delivery unit, Y-axis delivery unit is all connected with servomotor with Z axis delivery unit.
Above-mentioned Three-bearing coordinated type laser ablation platform, wherein, described X-axis delivery unit comprises the first servomotor, the first leading screw, the first line slideway, X-axis plate and the first protective cover; Described Y-axis delivery unit comprises the second servomotor, the second leading screw, the second line slideway, Y-axis plate and the second protective cover; Described Z axis delivery unit comprises the 3rd servomotor, the 3rd leading screw, the 3rd line slideway and Z axis plate; Described Z axis plate is arranged on X-axis plate, and described Y-axis plate is arranged on vacuum platform.
Above-mentioned Three-bearing coordinated type laser ablation platform, wherein, described the first grating scale and the first photoelectric limit switch are arranged on X-axis plate, and the resolution ratio of described the first grating scale is 1um.
Above-mentioned Three-bearing coordinated type laser ablation platform, wherein, described the second grating scale and the second photoelectric limit switch are arranged on Y-axis plate, and the resolution ratio of described the second grating scale is 1um.
Above-mentioned Three-bearing coordinated type laser ablation platform, wherein, described the 3rd photoelectric limit switch is arranged on Z axis plate.
The utility model contrast prior art has following beneficial effect: the Three-bearing coordinated type laser ablation platform that the utility model provides, can greatly reduce cost of manufacture, and be easy to maintenance and repair, and response speed and the precision of the equipment of assurance.
Accompanying drawing explanation
Fig. 1 is the utility model Three-bearing coordinated type laser ablation platform structure schematic diagram.
In figure:
1 first servomotor 2 first leading screw 3 first line slideways
4X axillare 5 first protective cover 6 second servomotors
7 second leading screw 8 second line slideway 9Y axillares
10 second protective cover 11 the 3rd servomotor 12 the 3rd leading screws
13 the 3rd line slideway 14Z axillare 15 first grating scales
16 first photoelectric limit switch 17 second grating scale 18 second photoelectric limit switch
19 the 3rd photoelectric limit switch
The specific embodiment
Below in conjunction with drawings and Examples, the utility model will be further described.
Fig. 1 is the utility model Three-bearing coordinated type laser ablation platform structure schematic diagram.
Refer to Fig. 1, the Three-bearing coordinated type laser ablation platform that the utility model provides comprises X-axis delivery unit and Y-axis delivery unit, described X-axis delivery unit vertically arranges, described Y-axis delivery unit along continuous straight runs arranges, wherein, on described X-axis delivery unit, Z axis delivery unit is installed, described X-axis delivery unit is provided with the first grating scale and the first photoelectric limit switch, described Y-axis delivery unit is provided with the second grating scale and the second photoelectric limit switch, described Z axis delivery unit is provided with the 3rd photoelectric limit switch, described X-axis delivery unit, Y-axis delivery unit is all connected with servomotor with Z axis delivery unit.
The Three-bearing coordinated type laser ablation platform that the utility model provides, described X-axis delivery unit comprises the first servomotor 1, the first leading screw 2, the first line slideway 3, X-axis plate 4 and the first protective cover 5; Described Y-axis delivery unit comprises the second servomotor 6, the second leading screw 7, the second line slideway 8, Y-axis plate 9 and the second protective cover 10; Described Z axis delivery unit comprises the 3rd servomotor 11, the 3rd leading screw 12, the 3rd line slideway 13 and Z axis plate 14; Described Z axis plate 14 is arranged on X-axis plate 4, and described Y-axis plate 9 is arranged in vacuum platform (not shown).
The Three-bearing coordinated type laser ablation platform that the utility model provides, institute's X-axis delivery unit and Y-axis delivery unit can be arranged on marble, on 14 installations of Z axis plate and X-axis plate 4, Z axis can up and down reciprocatingly move, X-axis can drive Z axis to carry out back and forth operation of left and right, and Y-axis is carried out back and forth operation of front and back.Moving accurate location can be by grating scale and photoelectric limit switch realization.Specifically can arrange as follows: described X-axis plate is provided with the first smooth canopy chi 15 and the first photoelectric limit switch 16; Described Y-axis plate is provided with the second grating scale 17 and the second photoelectric limit switch 18; Described Z axis plate is provided with the 3rd photoelectric limit switch 19; The resolution ratio of described the first grating scale 15 and the second grating scale 17 is preferably 1um, and this has just guaranteed the accurate location of XY axle.
Although the utility model discloses as above with preferred embodiment; so it is not in order to limit the utility model; any those skilled in the art; not departing from spirit and scope of the present utility model; when doing a little modification and perfect, therefore protection domain of the present utility model is worked as with being as the criterion that claims were defined.
Claims (5)
1. a Three-bearing coordinated type laser ablation platform, comprise X-axis delivery unit and Y-axis delivery unit, described X-axis delivery unit vertically arranges, described Y-axis delivery unit along continuous straight runs arranges, it is characterized in that, on described X-axis delivery unit, Z axis delivery unit is installed, described X-axis delivery unit is provided with the first grating scale and the first photoelectric limit switch, described Y-axis delivery unit is provided with the second grating scale and the second photoelectric limit switch, described Z axis delivery unit is provided with the 3rd photoelectric limit switch, described X-axis delivery unit, Y-axis delivery unit is all connected with servomotor with Z axis delivery unit.
2. Three-bearing coordinated type laser ablation platform as claimed in claim 1, is characterized in that, described X-axis delivery unit comprises the first servomotor, the first leading screw, the first line slideway, X-axis plate and the first protective cover; Described Y-axis delivery unit comprises the second servomotor, the second leading screw, the second line slideway, Y-axis plate and the second protective cover; Described Z axis delivery unit comprises the 3rd servomotor, the 3rd leading screw, the 3rd line slideway and Z axis plate; Described Z axis plate is arranged on X-axis plate, and described Y-axis plate is arranged on vacuum platform.
3. Three-bearing coordinated type laser ablation platform as claimed in claim 2, is characterized in that, described the first grating scale and the first photoelectric limit switch are arranged on X-axis plate, and the resolution ratio of described the first grating scale is 1um.
4. Three-bearing coordinated type laser ablation platform as claimed in claim 2, is characterized in that, described the second grating scale and the second photoelectric limit switch are arranged on Y-axis plate, and the resolution ratio of described the second grating scale is 1um.
5. Three-bearing coordinated type laser ablation platform as claimed in claim 2, is characterized in that, described the 3rd photoelectric limit switch is arranged on Z axis plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320893366.7U CN203636199U (en) | 2013-12-25 | 2013-12-25 | Three-position linkage type laser etching platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320893366.7U CN203636199U (en) | 2013-12-25 | 2013-12-25 | Three-position linkage type laser etching platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203636199U true CN203636199U (en) | 2014-06-11 |
Family
ID=50867479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320893366.7U Expired - Lifetime CN203636199U (en) | 2013-12-25 | 2013-12-25 | Three-position linkage type laser etching platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203636199U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105537819A (en) * | 2014-10-28 | 2016-05-04 | 安徽明辉门业有限公司 | Automatic welding equipment for iron gates |
| CN108205213A (en) * | 2018-01-02 | 2018-06-26 | 京东方科技集团股份有限公司 | A kind of laser for color membrane substrates reparation exports shape control system and its method |
-
2013
- 2013-12-25 CN CN201320893366.7U patent/CN203636199U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105537819A (en) * | 2014-10-28 | 2016-05-04 | 安徽明辉门业有限公司 | Automatic welding equipment for iron gates |
| CN108205213A (en) * | 2018-01-02 | 2018-06-26 | 京东方科技集团股份有限公司 | A kind of laser for color membrane substrates reparation exports shape control system and its method |
| CN108205213B (en) * | 2018-01-02 | 2022-03-01 | 京东方科技集团股份有限公司 | Laser output shape control system and method for color film substrate repair |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140611 |
|
| DD01 | Delivery of document by public notice | ||
| DD01 | Delivery of document by public notice |
Addressee: SUZHOU LUMI LASER TECHNOLOGY CO.,LTD. Person in charge of patents Document name: Notice of Termination of Patent Rights |