CN203612945U

CN203612945U - Wafer loader

Info

Publication number: CN203612945U
Application number: CN201320816922.0U
Authority: CN
Inventors: 何福林; 熊恒; 刘奇锋
Original assignee: XI'AN FLIGHT AUTOMATIC CONTROL RESEARCH INSTITUTE
Current assignee: Xi'an Hengxiang Control Technology Co ltd
Priority date: 2013-12-11
Filing date: 2013-12-11
Publication date: 2014-05-28
Anticipated expiration: 2023-12-11

Abstract

The utility model relates to a wafer loader. The wafer loader comprises a loader body and a loader lifting hook, wherein the loader body comprises support plates, and support rods with clamp grooves; the support rods comprise two side support rods and a bottom support rod; the three support rods are parallel to one another; the distances from the side support rods to the bottom support rod are the same; the angle between the clamp grooves in the side support rods and the horizontal line are the same, and the clamp grooves are tangent to the edge of a wafer; the support plates are two vertical plates parallel to each other, and are connected with each other through the three support rods; fixing holes corresponding to one another are formed in the support plates, and matched with the three support rods; the clamp grooves in the three support rods are in one-to-one correspondence; the loader lifting hook comprises a lifting rod, a horizontal rod and a hook which are in threaded connection; the loader lifting hook is matched with the loader body. The wafer loader has the advantages that in the operating processes of lifting and transferring of the wafer, high convenience is provided, and stability and reliability are improved.

Description

A kind of wafer carrier

Technical field

The utility model relates to a kind of wafer carrier.

Background technology

In MEMS technology scientific research production process, often need to carry out to wafer the operations such as various solution immersion corrosions, flushing, transfer, therefore need one to play firm support to wafer, antiacid aqueous slkali does not cause to wafer surface the carrier that collides with and scratch simultaneously.The carrier of the band " lifting ear " that common carrier is normally made up of quartz material at present, very easily causes scuffing to silicon chip surface, affects subsequent technique quality; Cannot stable support when simultaneously silicon chip is positioned in this quartz-like gaily decorated basket carrier, the phenomenon that may topple over and adsorb between adjacent wafer, such carrier is very easily due to collision with fall and cause crackedly in addition, and this quartz-like gaily decorated basket carrier exists obvious familiar lacunas as can be seen here.

Utility model content

Technical problem to be solved in the utility model is: proposing one can carry out stable support to wafer; play good protection effect simultaneously, and be convenient to operations, be easy to the wafer carrier of manufacturing and using; this carrier can flexible assembling, simultaneously applicable to the wafer of different size.

The technical scheme that the utility model is taked is: a kind of wafer carrier, is characterized in that: described carrier comprises carrier main body and carrier lancet; Carrier main body comprises gripper shoe 1, support bar with draw-in groove 2; Support bar comprises that two lateral support bars 3 and 4, three support bars of a root bottom part support bar are parallel to each other; Two lateral support bars 3 are equal to the distance of bottom support bar 4, and the draw-in groove on dual-side support bar equates with horizontal angle and be tangent with wafer 5 edges; Gripper shoe 1 is two vertical flat boards parallel to each other, and two flat boards are connected by three support bars; In gripper shoe 1, have fixing hole in correspondence with each other, fixing hole matches with three support bars; Draw-in groove on three support bars is corresponding one by one; Carrier lancet comprises shadoof 11, cross bar 12, hook 13; Shadoof 11 and cross bar 12, hook 13 are and are threaded; Carrier lancet matches with carrier main body.

Further, there are two pairs for the fixing hole of fixing side support bar.

The beneficial effects of the utility model: a kind of wafer carrier of the utility model, adopt tabular and rod-like structure to assemble, by conversion fixing hole, the carrying demand applicable to the multiple different size wafers such as three cun, four cun is installed; Three support bars and on draw-in groove wafer is formed to firm supported at three point, prevent on wafer set carrier double swerve or drop out; The utility model has improved wafer and has lifted convenience, stability and the reliability of the operating process such as transhipment.

Accompanying drawing explanation

Fig. 1 is the structural representation of the utility model wafer carrier;

Fig. 2 is carrier agent structure schematic diagram in the utility model wafer carrier;

Fig. 3 is gripper shoe schematic diagram in the utility model wafer carrier;

Fig. 4 is lateral support bar schematic diagram in the utility model wafer carrier

Wherein, 1-gripper shoe, 2-draw-in groove, 3-lateral support bar, 4-bottom support bar, 5-wafer, tri-cun of wafer fixing holes of 6-, tetra-cun of wafer fixing holes of 7-, 8-bottom support bar fixing hole, 9-bracing piece fixing hole, 10-bracing piece, 11-shadoof, 12-cross bar, 13-hook.

The specific embodiment

Below in conjunction with Figure of description, the specific embodiment of the present utility model is described further.

Referring to Fig. 1, a kind of wafer carrier, comprises carrier main body, carrier lancet; Carrier main body comprises gripper shoe 1, support bar with draw-in groove 2, and support bar comprises that two lateral support bars 3 and 4, three support bars of a root bottom part support bar are parallel to each other; Two lateral support bars 3 are equal to the distance of bottom support bar 4, and the draw-in groove 2 on dual-side support bar equates with horizontal angle and be tangent with wafer 5 edges; Gripper shoe 1 is two vertical flat boards parallel to each other, and two flat boards are connected by three support bars; In gripper shoe 1, there is fixing hole in correspondence with each other: three cun of wafer fixing holes 6, four cun of wafer fixing holes 7, bottom support bar fixing hole 8, bracing piece fixing hole 9.Fixing hole matches with three support bars and bracing piece 10.Draw-in groove on three support bars is corresponding one by one.Carrier lancet comprises shadoof 11, cross bar 12, hook 13; Shadoof 11 and cross bar 12, hook 13 are and are threaded; Carrier lancet matches with carrier main body.

When use, first support bar and bracing piece 10 are installed to the fixing hole in gripper shoe by square fixed end and the threaded rod at two ends on it, and with fastening nuts, can select according to demand three cun of wafer fixing holes 6 or four cun of wafer fixing holes 7; Carrier lancet is by by fastening to shadoof 11, cross bar 12 and the hook 13 use state that is combined to form, supporting with carrier.

Two bracing pieces 10 play strengthens overall construction intensity effect; This utility model once can operate 10 wafer simultaneously, and carrier entirety can be put into diameter and be greater than 150mm beaker or port grinding bottle; The utility model entirety adopts polytetrafluoroethylmaterial material, can play good support and protective effect to wafer, avoids colliding with and scratching wafer surface in operating process;

Specific implementation process step is as follows:

1, carrier main body assembling: respectively the two ends of three support bars and two bracing pieces are fastened to it with nut with the fixing hole in two gripper shoes together with, formation carrier main body;

2, lancet assembling: the fixing hole by shadoof, cross bar and hook by two ends and fastening nuts to together with form lancet;

3, wafer lifts transhipment: carrier is positioned on horizontal plane, wafer to be operated is put into carrier respective card slot, the projection that lancet is hooked to carrier dual-side support bar end lifts the operations such as transhipment.

Claims

1. a wafer carrier, is characterized in that: described carrier comprises carrier main body and carrier lancet; Carrier main body comprises gripper shoe (1), support bar with draw-in groove (2); Support bar comprises two lateral support bars (3) and a root bottom part support bar (4), and three support bars are parallel to each other; Two lateral support bars (3) are equal to the distance of bottom support bar (4), and the draw-in groove on dual-side support bar equates with horizontal angle and be tangent with wafer (5) edge; Gripper shoe (1) is two vertical flat boards parallel to each other, and two flat boards are connected by three support bars; Gripper shoe has fixing hole in correspondence with each other on (1), and fixing hole matches with three support bars; Draw-in groove on three support bars is corresponding one by one; Carrier lancet comprises shadoof (11), cross bar (12), hook (13); Shadoof (11) and cross bar (12), hook (13) are and are threaded; Carrier lancet matches with carrier main body.

2. wafer carrier according to claim 1, is further characterized in that: the fixing hole for fixing side support bar has two pairs.

3. wafer carrier according to claim 1, is further characterized in that: described gripper shoe (1) is upper with bracing piece (10).

4. according to the wafer carrier described in any one in claim 1,2,3, be further characterized in that: the fixing hole for fixing side support bar is square.