CN203602754U - Automatic pressure release bottle for diffusion furnace - Google Patents
Automatic pressure release bottle for diffusion furnace Download PDFInfo
- Publication number
- CN203602754U CN203602754U CN201320747060.0U CN201320747060U CN203602754U CN 203602754 U CN203602754 U CN 203602754U CN 201320747060 U CN201320747060 U CN 201320747060U CN 203602754 U CN203602754 U CN 203602754U
- Authority
- CN
- China
- Prior art keywords
- valve
- bottle
- automatic
- air outlet
- diffusion furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009792 diffusion process Methods 0.000 title claims abstract description 28
- 230000006837 decompression Effects 0.000 claims description 15
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 5
- 238000004880 explosion Methods 0.000 abstract description 9
- 239000012535 impurity Substances 0.000 abstract description 3
- 231100000614 poison Toxicity 0.000 abstract 1
- 230000007096 poisonous effect Effects 0.000 abstract 1
- 239000010453 quartz Substances 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 206010020852 Hypertonia Diseases 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 125000004437 phosphorous atom Chemical group 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000001149 thermolysis Methods 0.000 description 1
- 231100000167 toxic agent Toxicity 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
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- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
The utility model provides an automatic pressure release bottle for a diffusion furnace, and particularly provides an automatic POC13 pressure release bottle for a diffusion furnace. The automatic pressure release bottle comprises a bottle body (1) with an air inlet (6) and an air outlet (7) at the top, wherein an intake valve (5) is arranged on the air inlet (6); an intake pipe (9) at the bottom of the intake valve (5) is led to the bottom of the bottle body (1); a gas outlet valve (3) is arranged on the air outlet (7); a pressure-relief hole (8) is also formed at the top of the bottle body; an automatic pressure release valve (4) is arranged on the pressure-relief hole (8); and an air outlet of the automatic pressure release valve (4) is communicated with the air outlet of the gas outlet valve (3). By adopting the device, the problem that the existing source bottle for the diffusion furnace triggers explosion because of over-high pressure, thus resulting in leakage of a poisonous impurity source is solved.
Description
Technical field
The utility model relates to crystal silicon solar energy battery production field, relates in particular to a kind of diffusion furnace automatic leakage pressure bottle.
Background technology
Diffusion technique in crystal silicon solar energy battery production process is exactly at P(N) spread N(P in type silicon chip substrate) type impurity forms PN junction.POCl
3it is a kind of impurity source that current phosphorous diffusion is used morely.It is colourless transparent liquid, has irritating smell; In damp atmosphere, be fuming; Be easy to be hydrolyzed; Highly volatile.POCl
3tool corrodibility, sucks and has fatal danger, and smog can seriously stimulate.
Diffusion furnace POCl in existing crystal silicon solar energy battery production process
3source bottle is executed without any protection mistake, during often because of air outlet line clogging or replacing source bottle, does not open air outlet manual valve, causes POCl
3quartz source bottle is because of the excessive explosion leakage of pressure.
Utility model content
In order to address the above problem, the utility model provides a kind of diffusion furnace automatic leakage pressure bottle, particularly a kind of diffusion furnace POCl
3automatic leakage pressure bottle, has solved the existing diffusion furnace source bottle problem of explosion, has reduced potential safety hazard.
The technical solution of the utility model is:
Diffusion furnace automatic leakage pressure bottle, comprises the bottle of top with air inlet port and production well, on air inlet port, is provided with intake valve, and the inlet pipe that is positioned at intake valve bottom passes into bottle body bottom; On production well, be provided with air outlet valve; It is characterized in that, be also provided with relief hole at bottle top, relief hole is provided with automatic decompression valve, and the air outlet of automatic decompression valve and the air outlet of air outlet valve are connected.
Described automatic leakage pressure bottle is preferably for filling the automatic leakage pressure bottle of POCl.
The valve that described intake valve, air outlet valve and automatic decompression valve are all preferably made by polytetrafluoroethylmaterial material.This material is corrosion-resistant.
Described automatic decompression valve is the pressure release valve that pressure release pressure is preferably 0.0MPa～0.0MPa.The effect of automatic decompression valve is that, in the time that quartz source bottle internal pressure exceedes setting pressure, pressure release valve is opened pressure release automatically, prevents quartz source bottle explosion leakage.
The aperture of described air inlet port is preferably less than the aperture of production well and relief hole.
Described intake valve and air outlet valve valve body size are preferably inconsistent, prevent setup error.
Described intake valve and air outlet valve are preferably manual valve.
This diffusion furnace automatic leakage pressure bottle, has solved existing diffusion furnace explosion caused because of hypertonia with source bottle, the problem that causes toxic substance to leak.In the time that pressure is excessive, the corrosion-resistant pressure release valve that is installed on source bottle pressure relief opening is opened pressure release automatically, prevents quartz source bottle explosion leakage.
Accompanying drawing explanation
Fig. 1 is diffusion furnace releasing pressure automatically bottle structure schematic diagram
Wherein: the 1st, bottle, the 2nd, POCl
3, the 3rd, air outlet valve, the 4th, automatic decompression valve, the 5th, intake valve, the 6th, air inlet port, the 7th, production well, the 8th, relief hole, the 9th, inlet pipe.
Embodiment
For above-mentioned purpose of the present utility model, feature and advantage can be become apparent more, below in conjunction with accompanying drawing, embodiment of the present utility model is described, for dress POCl
3automatic leakage potential source bottle be example:
POCl
3it is higher that liquid source method of diffusion has production efficiency, obtains the surperficial advantage such as good of even, the smooth and diffusion layer of PN junction.In diffusion technique process, while having the existing of oxygen, POCl
3the reaction of thermolysis generates P
2o
5and Cl
2.The P generating
2o
5again further with silicon effect, generate SiO
2and phosphorus atom.
As shown in Figure 1, diffusion furnace automatic leakage pressure bottle, comprises the bottle 1 of top with air inlet port 6 and production well 7, is provided with intake valve 5 on air inlet port 6, and the inlet pipe 9 that is positioned at intake valve 5 bottoms passes into bottle 1 bottom; On production well 7, be provided with air outlet valve 3; It is characterized in that, be also provided with relief hole 8 at bottle top, relief hole 8 is provided with automatic decompression valve 4, and the air outlet of automatic decompression valve 4 is connected with the air outlet of air outlet valve 3.
Described automatic leakage pressure bottle is preferably for filling POCl
3automatic leakage pressure bottle.The valve that described intake valve 5, air outlet valve 3 and automatic decompression valve 4 are all preferably made by polytetrafluoroethylmaterial material.This material is corrosion-resistant.Described automatic decompression valve 4 is pressure release valves that pressure release pressure is preferably 0.05MPa～0.08MPa.The effect of automatic decompression valve is that, in the time that quartz source bottle internal pressure exceedes setting pressure, pressure release valve is opened pressure release automatically, prevents quartz source bottle explosion leakage.The aperture of described air inlet port 6 is preferably less than the aperture of production well 7 and relief hole 8.Described intake valve 5 is preferably inconsistent with air outlet valve 3 valve body sizes, prevents setup error.Described intake valve 5 is preferably manual valve with air outlet valve 3.
This device has solved existing diffusion furnace POCl
3source bottle is explosion caused because of hypertonia, causes POCl
3the problem of leaking.In diffusion technique process, because a variety of causes causes for splendid attire POCl
3quartz source bottle internal pressure when too high, the corrosion-resistant pressure release valve that is installed on source bottle pressure relief opening is opened pressure release automatically, prevents quartz source bottle explosion leakage.
More than show and described ultimate principle of the present utility model, principal character and advantage of the present utility model.The technician of the industry should understand; the utility model is not restricted to the described embodiments; what in above-described embodiment and specification sheets, describe is principle of the present utility model; under the prerequisite that does not depart from the utility model spirit and scope, the utility model also has various changes and modifications, and these changes and improvements all fall in claimed scope of the present utility model.The protection domain that the utility model requires is defined by appending claims and equivalent thereof.
Claims (6)
1. diffusion furnace automatic leakage pressure bottle, comprises the bottle (1) of top with air inlet port (6) and production well (7), is provided with intake valve (5) on air inlet port (6), and the inlet pipe (9) that is positioned at intake valve (5) bottom passes into bottle (1) bottom; On production well (7), be provided with air outlet valve (3); It is characterized in that, be also provided with relief hole (8) at bottle top, relief hole (8) is provided with automatic decompression valve (4), and the air outlet of automatic decompression valve (4) is connected with the air outlet of air outlet valve (3).
2. diffusion furnace automatic leakage pressure bottle according to claim 1, is characterized in that, described automatic leakage pressure bottle is for filling POCl
3automatic leakage pressure bottle.
3. according to the automatic leakage pressure bottle of diffusion furnace described in claim 1 or 2, it is characterized in that, described intake valve (5), air outlet valve (3) and automatic decompression valve (4) are all valves of being made by polytetrafluoroethylmaterial material.
4. according to the automatic leakage pressure bottle of diffusion furnace described in claim 1 or 2, it is characterized in that, described automatic decompression valve (4) is that pressure release pressure is the pressure release valve of 0.05MPa～0.08MPa.
5. according to the automatic leakage pressure bottle of diffusion furnace described in claim 1 or 2, it is characterized in that, the aperture of described air inlet port (6) is less than the aperture of production well (7) and relief hole (8).
6. according to the automatic leakage pressure bottle of diffusion furnace described in claim 1 or 2, it is characterized in that described intake valve (5) and not of uniform size the causing of air outlet valve (3) valve body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320747060.0U CN203602754U (en) | 2013-11-25 | 2013-11-25 | Automatic pressure release bottle for diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320747060.0U CN203602754U (en) | 2013-11-25 | 2013-11-25 | Automatic pressure release bottle for diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203602754U true CN203602754U (en) | 2014-05-21 |
Family
ID=50715441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320747060.0U Expired - Lifetime CN203602754U (en) | 2013-11-25 | 2013-11-25 | Automatic pressure release bottle for diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203602754U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104409391A (en) * | 2014-11-06 | 2015-03-11 | 北京七星华创电子股份有限公司 | Explosion-proof source bottle for diffusion furnace |
| CN114017672A (en) * | 2021-11-23 | 2022-02-08 | 镇江瑞昊工程塑料有限公司 | Tetrafluoro valve for source bottle |
-
2013
- 2013-11-25 CN CN201320747060.0U patent/CN203602754U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104409391A (en) * | 2014-11-06 | 2015-03-11 | 北京七星华创电子股份有限公司 | Explosion-proof source bottle for diffusion furnace |
| CN114017672A (en) * | 2021-11-23 | 2022-02-08 | 镇江瑞昊工程塑料有限公司 | Tetrafluoro valve for source bottle |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140521 |