CN203598680U - Chemical tail gas absorption apparatus - Google Patents
Chemical tail gas absorption apparatus Download PDFInfo
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- CN203598680U CN203598680U CN201320807625.XU CN201320807625U CN203598680U CN 203598680 U CN203598680 U CN 203598680U CN 201320807625 U CN201320807625 U CN 201320807625U CN 203598680 U CN203598680 U CN 203598680U
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Abstract
The utility model discloses a chemical tail gas absorption apparatus. The chemical tail gas absorption apparatus comprises a shell, wherein a gas inlet is formed in one side of the upper part of the shell, a spraying chamber is arranged at the lower part of the gas inlet, tail gas passes through the spraying chamber via the gas inlet and then flows towards a first absorption chamber via the lower end of the spraying chamber, a second absorption chamber and a second absorption chamber are connected to the first absorption chamber in series, and the tail gas finally flows towards the third absorption chamber from the first absorption chamber through the second absorption chamber and is discharged via an exhaust port which is formed in one side of the bottom of the shell. The chemical tail gas absorption apparatus disclosed by the utility model has the advantages that the spraying chamber is arranged so as to cool the tail gas to room temperature, firstly the tail gas which reacts with water or can be absorbed by water is purified so as to complete primary purification; then the absorption chambers are arranged, oxidizing agents or halogens are arranged in the absorption chambers and serve as absorbents so as to absorb the residual tail gas, the multiple absorption chambers are used for multiple purification, and the chemical tail gas absorption apparatus is simple to operate and high in purification degree and meets the high-efficiency, green and environmental-protection subject requirements of modern society.
Description
Technical field
The utility model relates to a kind of vapour deposition process and absorbs tail gas unit.
Background technology
Chemical vapour deposition (CVD) (Chemicalvapordeposition is called for short CVD) is that reactive material issues biochemical reaction in gaseous state condition, generates solid matter and is deposited on the solid matrix surface of heating, and then make the technology of solid material.It belongs to the gaseous state mass transport process of former subcategory in essence.On the other side is physical vapor deposition (PVD).Chemical vapour deposition (CVD) is a kind of method of vapor-phase growing of preparing material, it is that compound, elementary gas that one or more are contained to formation film element pass into the reative cell that is placed with base material, deposits the technology of solid film by space gas-phase chemical reaction on matrix surface.
Modern science and Technology Need use the New Inorganic Materials of a large amount of Various Functions, and these functional materials must be high-purity, or the dopant material that some kinds impurity forms wittingly in high-purity material.But many preparation methods that we are familiar with in the past, as precipitation and crystallization etc. in high melt, the aqueous solution are often difficult to meet these requirements, are also difficult to guarantee to obtain highly purified product.Therefore, the synthetic major subjects just becoming in modern material science of New Inorganic Materials.Chemical vapor deposition is the new technology of the preparation inorganic material that grows up nearly decades.CVD method has been widely used in purifying substances, has developed new crystal, the various monocrystalline of deposit, polycrystalline or glassy state inorganic thin film material.These materials can be oxide, sulfide, nitride, carbide, can be also compound between binary in III-V, II-IV, IV-VI family or polynary element, and their physical function can accurately be controlled by the deposition process of gas phase doping.At present, chemical vapor deposition has become a frontier of inorganic synthetic chemistry.
In chemical vapor deposition method tail gas, contain multiple poisonous fume, such as polyfluoride, arsine, phosphine, borine, silane etc., if be directly discharged in atmosphere, can cause severe contamination to environment, therefore these toxic gases must just can enter in atmosphere after strict processing reaches discharge standard.Wherein some waste gas can react with water, some other composition can be absorbed by water, therefore, the U.S., Japan and other countries adopt water to absorb exhaust gas processing device mostly at present, but wherein also have some not react and can not can be directly discharged in air by absorbed gas with water, cause the destruction to environment.Therefore, working out a kind of device for absorbing tail gas is efficiently significant.
Because the defect that above-mentioned existing chemical tail gas absorption apparatus exists, the design people, actively research and innovation in addition, to founding a kind of chemical tail gas absorption apparatus of new structure, makes it have more practicality.
Utility model content
Main purpose of the present utility model is, overcomes the defect that existing chemical tail gas absorption apparatus exists, and a kind of chemical tail gas absorption apparatus of new structure is provided, and improves tail gas clean-up degree, thereby is more suitable for practicality, and have the value in industry.
The purpose of this utility model and solve its technical problem and realize by the following technical solutions.According to the one chemistry tail gas absorption apparatus the utility model proposes, described absorption apparatus includes a housing, described case top one side is provided with air inlet and is provided with exhaust outlet at bottom opposite side, in described housing, be provided with from right to left connected successively spray chamber, the first absorption chamber, the second absorption chamber and the 3rd absorption chamber, described spray chamber is connected with described air inlet, and described exhaust outlet is connected with described the 3rd absorption chamber.
As preferably, aforesaid chemical tail gas absorption apparatus, fills oxidant absorbent in described the first absorption chamber.
As preferably, aforesaid chemical tail gas absorption apparatus, described oxidant absorbent is potassium permanganate.
As preferably, aforesaid chemical tail gas absorption apparatus, fills halogen absorbent in described the second absorption chamber.
By technique scheme, chemical tail gas absorption apparatus of the present utility model at least has following advantages:
Chemical tail gas absorption apparatus of the present utility model, is provided with spray chamber, and exhaust temperature is dropped to room temperature, first purges the tail gas that reacts or can be absorbed by water with water, completes preliminary purification; Absorption chamber is then set, oxidant or halogen is set in absorption chamber and sponges remaining tail gas as absorbent, multiple absorption chambers are set, multiple purifying, simple to operate, degree of purification is high, meets that modern society is efficient, green, the subject requirement of environmental protection.
Above-mentioned explanation is only the general introduction of technical solutions of the utility model, in order to better understand technological means of the present utility model, and can be implemented according to the content of description, below with preferred embodiment of the present utility model and coordinate accompanying drawing to be described in detail as follows.
Accompanying drawing explanation
The structural representation of Fig. 1 the utility model chemistry tail gas absorption apparatus,
Number in the figure implication: 101, housing, 102, air inlet, 103, spray chamber, 104, the first absorption chamber, 105, the second absorption chamber, 106, the 3rd absorption chamber, 107, exhaust outlet.
The specific embodiment
Technological means and effect of taking for reaching predetermined utility model object for further setting forth the utility model, below in conjunction with accompanying drawing and preferred embodiment, be described in detail as follows the specific embodiment of the present utility model.
Chemical tail gas absorption apparatus structural representation of the present utility model as shown in Figure 1, absorption apparatus includes a housing 101, housing 101 top one sides are provided with air inlet 102 and are provided with exhaust outlet 107 at bottom opposite side, in housing 101, be provided with from right to left connected successively spray chamber 103, the first absorption chamber 104, the second absorption chamber 105 and the 3rd absorption chamber 106, spray chamber 103 is connected with air inlet 102, and exhaust outlet 107 is connected with the 3rd absorption chamber 106; Tail gas flows to first absorption chamber 104 by spray chamber 103 lower ends by air inlet 102 after spray chamber 103, tail gas is discharged by exhaust outlet 107 after the second absorption chamber 105 finally flows to the 3rd absorption chamber 106 by the first absorption chamber 104, exhaust outlet 107 is arranged on housing 101 bottom one sides conventionally, is diagonal angle setting with air inlet 102.The danger of blasting for fear of high concentration exhaust combustion, directly spray and do not adopt Combustion chamber design of this absorption apparatus.It is the one innovation in traditional design theory.
Wherein, the inwall surrounding of spray chamber 103 is provided with shower nozzle uniformly, at the interior filling potassium permanganate oxidant of the first absorption chamber 104 as absorbent, absorb a large amount of reducing gas in tail gas, the interior filling halogen of the second absorption chamber 105 bromine is as absorbent, and last, the interior meeting of the 3rd absorption chamber 106 is according to the raw material using in actual production process, fill on the estimation potassium permanganate or halogen as absorbent, guarantee that tail gas clean-up is thorough.
The above, it is only preferred embodiment of the present utility model, not the utility model is done to any pro forma restriction, although the utility model discloses as above with preferred embodiment, but not in order to limit the utility model, any those skilled in the art, do not departing within the scope of technical solutions of the utility model, when can utilizing the technology contents of above-mentioned announcement to make a little change or being modified to the equivalent embodiment of equivalent variations, in every case be the content that does not depart from technical solutions of the utility model, any simple modification of above embodiment being done according to technical spirit of the present utility model, equivalent variations and modification, all still belong in the scope of technical solutions of the utility model.
Claims (4)
1. a chemical tail gas absorption apparatus, it is characterized in that: described absorption apparatus includes a housing, described case top one side is provided with air inlet and is provided with exhaust outlet at bottom opposite side, in described housing, be provided with from right to left connected successively spray chamber, the first absorption chamber, the second absorption chamber and the 3rd absorption chamber, described spray chamber is connected with described air inlet, and described exhaust outlet is connected with described the 3rd absorption chamber.
2. chemical tail gas absorption apparatus according to claim 1, is characterized in that: in described the first absorption chamber, fill oxidant absorbent.
3. chemical tail gas absorption apparatus according to claim 2, is characterized in that: described oxidant absorbent is potassium permanganate.
4. chemical tail gas absorption apparatus according to claim 1, is characterized in that: in described the second absorption chamber, fill halogen absorbent.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201320807625.XU CN203598680U (en) | 2013-12-09 | 2013-12-09 | Chemical tail gas absorption apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201320807625.XU CN203598680U (en) | 2013-12-09 | 2013-12-09 | Chemical tail gas absorption apparatus |
Publications (1)
Publication Number | Publication Date |
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CN203598680U true CN203598680U (en) | 2014-05-21 |
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Family Applications (1)
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CN201320807625.XU Expired - Fee Related CN203598680U (en) | 2013-12-09 | 2013-12-09 | Chemical tail gas absorption apparatus |
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CN (1) | CN203598680U (en) |
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2013
- 2013-12-09 CN CN201320807625.XU patent/CN203598680U/en not_active Expired - Fee Related
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140521 Termination date: 20141209 |
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EXPY | Termination of patent right or utility model |