CN203562642U - Esd protective device - Google Patents
Esd protective device Download PDFInfo
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- CN203562642U CN203562642U CN201290000236.XU CN201290000236U CN203562642U CN 203562642 U CN203562642 U CN 203562642U CN 201290000236 U CN201290000236 U CN 201290000236U CN 203562642 U CN203562642 U CN 203562642U
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- sparking electrode
- esd protection
- protection device
- electrode
- electric discharge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T4/00—Overvoltage arresters using spark gaps
- H01T4/10—Overvoltage arresters using spark gaps having a single gap or a plurality of gaps in parallel
- H01T4/12—Overvoltage arresters using spark gaps having a single gap or a plurality of gaps in parallel hermetically sealed
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Abstract
The utility model provides an ESD (electro-static discharge) protective device whose discharge protection characteristics are difficult to degrade even though discharging is repeated. In the protective device (1), in an insulating substrate (2), front ends of a first discharging electrode and a second discharging electrode (4,5) are disposed in a cavity (3) in an opposite manner. At least a front end of one of the first discharging electrode and the second discharging electrode (4,5) is formed by a plurality of bugle portions (4a-4c,5a-5c). An outer surface of the insulating substrate (2) is formed with a first external electrode (12) connected with the first discharging electrode (4) and a second external electrode (13) connected with the second discharging electrode (13).
Description
Technical field
The utility model relates to for seeking the esd protection device for the protection of static discharge (Electro-Static Discharge).In more detail, relate to the esd protection device that there is in insulating properties substrate the 1st and the 2nd sparking electrode and carry out across gap opposed such structure.
Background technology
In prior art, for from ESD(Electro-Static Discharge) be static discharge, to protect electronic equipment, various esd protection devices are proposed.
For example, in following patent documentation 1, disclose and in insulating properties substrate, configured the esd protection equipment that the 1st and the 2nd sparking electrode forms.In the esd protection equipment of recording, in insulating properties substrate, form cavity in patent documentation 1.According to exposing in this cavity and forming the 1st, the 2nd sparking electrode in empty Inner Front End mode opposite each other.In this esd protection equipment, in the opposed part of the 1st, the 2nd sparking electrode, across the 1st, the 2nd sparking electrode in the lower face side of the 1st, the 2nd sparking electrode, form mixing portion.Mixing portion comprises metallic and ceramic particle, and this metallic and ceramic particle are dispersed in the insulating material that forms insulating properties substrate.
In the esd protection equipment of patent documentation 1, the Shrinkage behavior in the time of relaxing the burning till of pottery and the 1st, the 2nd sparking electrode that forms insulating properties substrate by mixing portion and shrink after thermal expansion rate variance.Therefore, can set accurately discharge ionization voltage.
Look-ahead technique document
Patent documentation
Patent documentation 1:WO2008/146514A1
The summary of utility model
The problem that utility model will solve
As the esd protection equipment that patent documentation 1 is recorded, in esd protection device, if be applied in static, between opposed the 1st, the 2nd sparking electrode, can produce electric discharge.Impact during due to this electric discharge, produces and peels off at the front end of the 1st, the 2nd sparking electrode.In addition, due to the heat producing when impacting, the front end fusing of the 1st, the 2nd sparking electrode.Thus, because can causing the gap between the 1st, the 2nd sparking electrode, electric discharge repeatedly constantly becomes large., there is the problem of discharge prevention deterioration in characteristics in its result.
Utility model content
Even if the purpose of this utility model is to provide electric discharge to be repeatedly also difficult to produce the deteriorated esd protection device of discharge prevention characteristic.
For solving the means of problem
The related esd protection device of the utility model possesses: have empty insulating properties substrate; With according to front end mode opposite each other in the cavity of insulating properties substrate, be disposed at the 1st in insulating properties substrate, the 2nd sparking electrode.In the 1st, the 2nd sparking electrode, the front end of at least one party's sparking electrode is formed by multiple protuberances.The related esd protection device of the utility model also possesses: the 1st outer electrode, and it is electrically connected with the 1st sparking electrode, and is formed at the outer surface of described insulating properties substrate; With the 2nd outer electrode, it is electrically connected with the 2nd sparking electrode, and is formed at the outer surface of described insulating properties substrate.
Under certain specific situation of the related esd protection device of the utility model, a side of the described the 1st or the 2nd sparking electrode that front end is formed by multiple protuberances is connected with the current potential of accepting electric discharge one side.In this case, when esd protection device is applied to static, accept 1 protuberance of the sparking electrode of electronics one side and accept electric discharge, but other protuberance is not accepted electric discharge.For this reason, at the protuberance of accepting electric discharge, even the fusing of the electrode that the heat of peeling off and now producing of generating electrodes causes owing to accepting the impact in when electric discharge, and the gap of accepting between the front end of the opposed sparking electrode of protuberance of electric discharge becomes large, can not have influence on the gap between other protuberance and the front end of the sparking electrode of ejected electron one side yet.Therefore,, even if repeatedly discharge, also can suppress the rising of discharge ionization voltage with producing effect.
Under other specific situation of the related esd protection device of the utility model, the 1st and the front end of the 2nd sparking electrode by multiple protuberances, formed.In this case, the heat producing at the protuberance of the front end that becomes sparking electrode of accepting electronics one side in when electric discharge is situated between while propagating into the front end of sparking electrode of ejected electron one side by gap, only propagate into the sparking electrode of ejected electron one side front end become right protuberance.Therefore, be difficult to propagate heat to other protuberance.Thus, even if repeatedly discharge, also can more suppress the rising of discharge ionization voltage with producing effect.And then, at multiple protuberances of the front end of sparking electrode, producing electric fields and concentrate, the electric field strength of front end improves.Thus, owing to being easy to discharge between sparking electrode, therefore, can reduce discharge ionization voltage.Therefore, can further improve the discharge response of esd protection device.
Under the other specific situation of the related esd protection device of the utility model; by the 1st and at least one party of the 2nd sparking electrode there are multiple protuberances; the opposed part of the front end of the front end of the 1st sparking electrode and the 2nd sparking electrode exists multiple, and the distance between the front end of the 1st sparking electrode in multiple opposed parts and the front end of the 2nd sparking electrode equates.In this case, because the distance between the front end of the 1st and the 2nd sparking electrode of multiple opposed parts equates, therefore can make discharge ionization voltage stable.That is,, even due between front end, opposed distance becomes large due to electric discharge arbitrarily, also can discharge in remaining opposed part, therefore can suppress the rising of discharge ionization voltage.Thus, can improve the characteristic repeatedly of esd protection device.
Under other the specific situation again of the related esd protection device of the utility model; also possess: electric discharge assisted parts; the front end of its front end at the 1st sparking electrode and the 2nd sparking electrode carries out opposed part; across described the 1st sparking electrode and described the 2nd sparking electrode form, include metallic and semiconductor particle.In this case, owing to being easy to discharge between sparking electrode, therefore can further reduce discharge ionization voltage.Thus, can further improve the discharge response of esd protection device.
Under the other specific situation again of the related esd protection device of the utility model; also possess: sealant; it arranges according to the empty mode that faces insulating properties substrate, and arranges according to the mode of surrounding the front end of described the 1st sparking electrode and the front end of described the 2nd sparking electrode and carry out opposed part.In this case, can form more accurately above-mentioned cavity.
The effect of utility model
The esd protection device related according to the utility model, due to the 1st or at least one party's of the 2nd sparking electrode front end by multiple protuberances, formed, therefore at the front end of the 1st sparking electrode and the front end of the 2nd sparking electrode, carry out opposed part and have multiple gaps.If the esd protection device related to the utility model applies static, the narrowest part in gap the 1st, between the front end of the 2nd sparking electrode produces electric discharge.Even if repeatedly discharge, gap becomes large, also can than become large gap little the 1st, gap between the front end of the 2nd sparking electrode produces electric discharge.Thus, can suppress the rising of discharge ionization voltage.Therefore, can improve the resistance to repeatability of esd protection device.
In addition, in the related esd protection device of the utility model, because the front end of sparking electrode is formed by multiple protuberances, therefore at the tip of protuberance, produce electric field and concentrate.Thus, improved the electric field strength of the front end of sparking electrode.Thus, between sparking electrode, become and be easy to discharge, can make discharge ionization voltage reduce.Therefore, can more improve the discharge response of esd protection device.
Accompanying drawing explanation
Fig. 1 (a) and (b) be to represent the signal top cross-sectional view of the related esd protection device of execution mode of the present utility model and the sectional view along the B-B line in Fig. 1 (a).
Fig. 2 is the signal top cross-sectional view of the esd protection device after repeatedly discharging in the related esd protection device of execution mode of the present utility model.
Fig. 3 is the signal top cross-sectional view of the esd protection device of related other of the variation of execution mode of the present utility model.
Fig. 4 is other the signal top cross-sectional view of esd protection device after repeatedly discharging in the esd protection device of related other of the variation at execution mode of the present utility model.
Fig. 5 is the signal top cross-sectional view of the related other esd protection device of the variation of execution mode of the present utility model.
Fig. 6 is the signal top cross-sectional view of the other esd protection device after repeatedly discharging in the related other esd protection device of the variation of execution mode of the present utility model.
Fig. 7 is the related signal top cross-sectional view of other esd protection device again of the variation of execution mode of the present utility model.
Fig. 8 is the signal top cross-sectional view of other esd protection device again after repeatedly discharging in related other the esd protection device again of the variation at execution mode of the present utility model.
Embodiment
Concrete execution mode of the present utility model is described below with reference to the accompanying drawings, makes the utility model cheer and bright.
Fig. 1 (a) and (b) be top cross-sectional view and the main sectional view of looking of the related esd protection device of execution mode of the present utility model.
Esd protection device 1 has insulating properties substrate 2.Insulated substrate 2 consists of ceramic multi-layer baseplate in the present embodiment.About forming the ceramic material of this ceramic multi-layer baseplate, there is no particular limitation, but use in the present embodiment, comprises the low-temperature sintering ceramic (LTCC) that Ba, Al and Si are principal component.
In the present embodiment, because the composition of the 1st and the 2nd substrate layer 2a, 2b is identical, therefore the Shrinkage behavior when burning till equates.Original the 1st substrate layer 2a and the 2nd substrate layer 2b also can be formed by different ceramic materials.
In the interior formation of insulating properties substrate 2 cavity 3.Can be when being fired into insulating properties substrate 2, cavity 3 disappears it by the resin heating to being located at cavity 3 parts that are positioned at, and by adhesive resin gasification in ceramic green sheet etc. is formed.
On the 1st substrate layer 2a, form the sparking electrode pair being formed by the 1st sparking electrode 4 and the 2nd sparking electrode 5.In the present embodiment, by Cu, form the 1st and the 2nd sparking electrode 4,5.Nature the 1st and the 2nd sparking electrode 4,5 also can be formed by other metal or alloy.
As shown in Fig. 1 (b), the 1st sparking electrode 4 extends towards cavity 3 from the 1st end face 2c of insulating properties substrate 2.In addition, the 2nd sparking electrode 5 extends towards empty 3 sides from the 2nd end face of the opposition side of the 1st end face 2c.In the present embodiment, as represented that with a chain-dotted line empty position, cavity 3 is formed at the central authorities of the direction of link the 1st end face 2c, the 2nd end face 2d in Fig. 1 (a).In addition, insulating properties substrate 2 has a pair of side 2e, 2f.
In the present embodiment, as shown in Fig. 1 (a), the 1st sparking electrode 4 and the 2nd sparking electrode 5 have respectively the multiple protuberance 4a～4c, the 5a～5c that form front end.Form the 1st sparking electrode 4 front end protuberance 4a～4c and respectively the protuberance 5a～5c of the front end of paired formation the 2nd sparking electrode 5 across clearance G, carry out opposed respectively.In the present embodiment, by the size of clearance G, between multiple paired protuberances, become and manufacture consistently esd protection device 1.
In esd protection device 1, when applying static, in protuberance 4a～4c, the 5a～5c of the 1st and the 2nd sparking electrode 4,5, between paired protuberance, discharge.This electric discharge utilizes electric discharge and the interior electric discharge of electric discharge assisted parts in creeping discharge, gas.
Across the 1st, the 2nd sparking electrode 4,5 ground, electric discharge assisted parts 6 is set.Electric discharge assisted parts 6 consists of particle dispersion, and this particle dispersion has disperseed surface to carry out by not having the inorganic material of conductivity metallic 6a and the semiconductive ceramic particle 6b that coating obtains.More specifically, by burning till, comprise that metallic that coating obtains is carried out by the inorganic material without conductivity in surface and the inventive thick film paste of semiconductive ceramic particle forms.
As the metal that forms above-mentioned metallic 6a, there is no particular limitation, uses the suitable metal or alloy of Cu, Ni etc.There is no particular limitation for the diameter of metallic, is 2～3 μ m degree.As the inorganic material of the surface coating to above-mentioned metallic 6a, there is no particular limitation, can enumerate Al
2o
3.Such inorganic material is attached to the surface of above-mentioned metallic, thereby metallic 6a is carried out to coating by inorganic material.As such inorganic material powder, can use the Al below diameter 1 μ m
2o
3particle etc.
Above-mentioned semiconductive ceramic particle 6b consists of carborundum in the present embodiment.By disperseing semiconductive ceramic particle 6b can improve ESD response.As the semiconductive ceramic for obtaining such semiconductive ceramic particle, can enumerate the boride of silicide, titanium boride, zirconium boride, chromium boride, lanthanum boride, molybdenum boride or tungsten boride etc. of nitride, titanium silicide, zirconium silicide, tungsten silicide, molybdenum silicide or the chromium silicide etc. of carbide, titanium nitride, zirconium nitride, chromium nitride, vanadium nitride or the tantalum nitride etc. of titanium carbide, zirconium carbide, molybdenum carbide or tungsten carbide etc. or oxide of zinc oxide or strontium titanates etc. etc.Particularly because less expensive and various particle diameters are all on sale in market, therefore carborundum particularly preferably.
In addition, above-mentioned semiconductive ceramic both can only be used a kind, and also two or more kinds may be used.And then, also the above-mentioned ceramic particle consisting of semiconductive ceramic suitably can be mixed to use with the insulating ceramics material of aluminium oxide etc.
Owing to having formed the electric discharge assisted parts 6 that is dispersed with above-mentioned metallic 6a and semiconductive ceramic particle 6b, therefore when having utilized the protuberance 4a～4c of the front end that forms the 1st sparking electrode 4 and form the electric discharge of the creeping discharge between the protuberance 5a～5c of front end of the 2nd sparking electrode 5, can reduce discharge ionization voltage.Thereby, can more seek electrostatic protection with producing effect.
In addition, in Fig. 1 (b), the metallic 6a and the semiconductive ceramic particle 6b that illustrate electric discharge assisted parts 6 also enter in the 1st, the 2nd sparking electrode 4,5.This be because, manufacture method is expressed like that as described later, the inventive thick film paste that printing comprises above-mentioned metallic 6a and semiconductive ceramic particle 6b, and then printing is used to form the conductive paste of the 1st, the 2nd sparking electrode 4,5, stacked by a ceramic body technique and multi-disc ceramic green sheet, in this case, a part of metallic 6a and semiconductive ceramic particle 6b can enter in the 1st, the 2nd sparking electrode 4,5.Thus, electric discharge assisted parts 6 forms across the 1st, the 2nd sparking electrode 4,5 ground.In addition, can be also: electric discharge assisted parts 6 does not enter in the 1st, the 2nd sparking electrode 4,5, is only located at the gap portion between the front end of the 1st, the 2nd sparking electrode 4,5 in addition, electric discharge assisted parts 6 not also to be set.
In addition, in the present embodiment, at the lower surface of above-mentioned electric discharge assisted parts 6, form lower encapsulant layer 10.Similarly, above cavity 3, form top seal layer 11.
In addition, lower encapsulant layer 10 and top seal layer 11 can consist of higher than the ceramic pottery that forms insulating properties substrate 2 sintering temperature.In the present embodiment, lower encapsulant layer 10 and top seal layer 11 are by Al
2o
3form.Sealant forms ceramic material and needs only sintering temperature higher than the ceramic material that forms insulating properties substrate 2, and just there is no particular limitation.
In the present embodiment, at the upper surface of the 1st substrate layer 2a, form lower encapsulant layer 10, in lower encapsulant layer 10, be laminated with aforesaid electric discharge assisted parts 6.Then, the upper surface of electric discharge assisted parts 6 faces cavity 3.That is, the lower surface in cavity 3 becomes the upper surface of electric discharge assisted parts 6.On the other hand, with top sealant 11, cover the upper surface in cavity 3.In addition, lower encapsulant layer 10 and top seal layer 11 also not must arrange.
As shown in Fig. 1 (a), the 1st end face 2c ground that covers insulating properties substrate 2 forms the 1st outer electrode 12.On the other hand, the 1st sparking electrode 4 is drawn out to end face 2c.Thus, the 1st sparking electrode 4 is electrically connected by the 1st outer electrode 12.Similarly, the 2nd outer electrode 13 that the 2nd sparking electrode 5 that is drawn out to end face 2d arranges with covering end face 2d is electrically connected.
In the present embodiment, the 1st and the 2nd sparking electrode 4,5 does not change width ground, directly draws and extends to the 1st and the 2nd outer electrode 12,13.Thus, the 1st and the 2nd sparking electrode 4,5 and outer electrode between contact resistance reduce.Originally, just there is no particular limitation for the means that were electrically connected with the 1st and the 2nd outer electrode 12,13 for the 1st and the 2nd sparking electrode 4,5.For example, at the 1st and the 2nd sparking electrode 4,5, draw extend to the 1st and the 2nd outer electrode 12,13 in the situation that, also can make the narrowed width of the part of drawing extension.
1st, the 2nd outer electrode 12,13 is not particularly limited.1st, the 2nd outer electrode 12,13 for example can consist of the suitable metal or alloy of Cu, Al, Ag etc.
As described above, the front end of the front end of the 1st sparking electrode 4 and the 2nd sparking electrode 5 consists of multiple protuberance 4a～4c, 5a～5c the feature of the esd protection device 1 of present embodiment.Thus, in esd protection device 1, the reduction of the electrostatic protection characteristic in the time of suppressing repeatedly to apply static.In addition, can further improve the discharge response of esd protection device 1.
With reference to Fig. 1 and Fig. 2, it is carried out to more specific description.In addition, in the following description, the formation that the 1st sparking electrode 4 is connected with the current potential of accepting electric discharge one side, the 2nd sparking electrode 5 is connected with the current potential that sends electric discharge one side is described.Fig. 2 is the top cross-sectional view of the esd protection device 1 after repeatedly discharging.
Esd protection device 1 shown in Fig. 1 is applied static in use repeatedly.When esd protection device 1 is applied to static, the clearance G between the front end of the 1st and the 2nd sparking electrode 4,5 produces electric discharge.Now, due to the electric discharge of the front end from the 2nd sparking electrode 5, produce the front end crash of electronics and opposed the 1st sparking electrode 4.Thus, if repeatedly apply static, generation electric discharge, at the front end of the 1st sparking electrode 4, produce and peel off, or the heat producing due to the collision of electronics will cause the front end of the 1st sparking electrode 4 to produce fusing.Therefore,, when esd protection device 1 is applied to static repeatedly, it is large that the size of the clearance G between the front end of the 1st and the 2nd sparking electrode 4,5 constantly becomes.
In the present embodiment, because the front end of the 1st and the 2nd sparking electrode 4,5 is formed by multiple protuberance 4a～4c, 5a～5c, therefore, the part of the size minimum of the clearance G between protuberance 4a～4c, the 5a～5c in the front end of the 1st and the 2nd sparking electrode 4,5 produces electric discharge.That is, during the electric discharge of 1 time electron collision be any protuberance of the protuberance 4a～4c of the front end of the 1st sparking electrode 4.The part of the fusing of the electrode that the heat that the electrode that the impact while for this reason, occurring to accept electric discharge causes peels off and now produces causes will only become the protuberance of accepting electric discharge.Therefore, even peel off or melt the gap that makes between certain protuberance of the 1st sparking electrode 4 and the front end of the 2nd sparking electrode 5 and become greatly owing to accepting the protuberance of electric discharge, can not have influence on the gap between other protuberance and the front end of the 2nd sparking electrode 5 of the 1st sparking electrode 4 yet.
If above-mentioned electric discharge repeatedly, produces the size that the size in gap between the protuberance of electric discharge can be greater than the clearance G between other the protuberance that does not produce electric discharge.In this case, when next esd protection device 1 being applied to static, not between the size in gap becomes large protuberance, but produce electric discharge between other protuberance of the size G of clearance G minimum.Therefore, can suppress the rising of discharge ionization voltage.
So, even esd protection device 1 is applied to static repeatedly, in the position of the electric discharge producing between the front end of the 1st and the 2nd sparking electrode 4,5, be dispersed between multiple protuberance 4a～4c, 5a～5c.Thus, the front end of the 1st sparking electrode 4 peels off and melts and be also dispersed in multiple protuberance 4a～4c.Thereby, even being applied to static repeatedly, esd protection device 1 carries out the protection of static, also can positively suppress the rising of discharge ionization voltage.Thus, can improve resistance to repeatability, the protective feature of the esd protection device 1 while repeatedly applying static.
In the present embodiment, according to the size of clearance G, between multiple paired protuberances, become constant mode and manufacture esd protection device 1.But, the actual deviation due to the condition in printing precision, the various manufacturing process of formation the 1st and the 2nd sparking electrode conductive paste of 4,5 o'clock, between multiple paired protuberances, likely there is deviation in the size of clearance G.Even in this case, in the esd protection device 1 that applies static, also the part of the size minimum of the clearance G between multiple paired protuberances starts electric discharge.Because the size by discharging gap becomes large, therefore by repeatedly discharging, between other protuberance, also produce electric discharge, in result, make the position that produces electric discharge disperse.Therefore can suppress the rising of discharge ionization voltage.And then, due to what start electric discharge, be the part of the size minimum of the clearance G between multiple protuberances, therefore, in the case of the esd protection device 1 of volume production present embodiment, can make the deviation of discharge ionization voltage less.
In addition, in the present embodiment, not only accept the front end of the 1st sparking electrode 4 of electric discharge, the front end of the 2nd sparking electrode 5 being connected with the current potential that sends electric discharge one side is also formed by multiple protuberance 5a～5c.The heat producing at the front end of the 1st sparking electrode 4 due to the collision of electronics not only can make the front end fusing of the 1st sparking electrode 4, also can be situated between by clearance G, and some front ends that propagate into opposed the 2nd sparking electrode 5.In the present embodiment, because the front end of the 2nd sparking electrode 5 is also to be formed by multiple protuberance 5a～5c, therefore, the heat producing at the protuberance of the 1st sparking electrode 4 only can propagate into the nearest protuberance of the 2nd sparking electrode 5.Thus, be difficult to the fusing of the front end that produces the 2nd sparking electrode 5.Thus, this also makes clearance G be difficult to expand.Therefore,, even if repeatedly discharge, also can more suppress the rising of discharge ionization voltage with producing effect.
And then, in the present embodiment, because the front end of the 1st and the 2nd sparking electrode 4,5 is formed by multiple protuberance 4a～4c, 5a～5c, therefore at the tip of multiple protuberance 4a～4c, 5a～5c, produce electric field and concentrate.Thus, improved the electric field strength of the front end of the 1st and the 2nd sparking electrode 4,5.Thus, be easy to occur the electric discharge between the front end of the 1st and the 2nd sparking electrode 4,5, can make discharge ionization voltage lower.Therefore, can further improve the discharge response of esd protection device.
In the present embodiment, the 1st, the 2nd sparking electrode 4,5 opposed parts are located in cavity 3.Thus, can produce effect and utilize electric discharge in gas positively to carry out the protection of static.
Next, one example of the manufacture method of esd protection device 1 is described.
When the manufacture of the esd protection device 1 of present embodiment, prepare to be used to form the multi-disc ceramic green sheet of the 1st, the 2nd substrate layer 2a, 2b.On the ceramic green sheet of the foot that is positioned at substrate layer 2b in this multi-disc ceramic green sheet, printing forms the ceramic paste of above-mentioned top seal layer 11, and is dried.Next, give the resin plaster that is used to form cavity 3.Then, after resin plaster is dried, coating, printing are used to form the conductive paste of the 1st, the 2nd sparking electrode 4,5, and are dried.Next, in a part for resin plaster and sparking electrode 4,5, printing forms the compound of electric discharge assisted parts 6, and is dried.Next, coating is used to form the ceramic paste of lower encapsulant layer 10.
Then, in order to form substrate layer 2a, stacked multi-disc ceramic green sheet, at topmost, the stacked ceramic green sheet that has printed the material that is used to form above-mentioned sparking electrode 4,5 and electric discharge assisted parts 6 etc., to make above-mentioned lower encapsulant layer 10 be positioned at substrate-side 2a side, further at the stacked patternless multi-disc ceramic green sheet that is used to form substrate layer 2b in the top of the duplexer obtaining.Thus, obtain the duplexer for obtaining insulating properties substrate 2.Obtaining after duplexer, at both ends of the surface coating outer electrode formation conductive paste.After being compressed on thickness direction, burns till this duplexer.So, can obtain esd protection device 1.
In above-mentioned manufacture method, when obtaining the burning till of insulating properties substrate 2, at ceramic firing temperature, above-mentioned resin plaster decomposes, aerifies.By this gas be used to form in the various cream of the 1st, the 2nd sparking electrode the 4,5, the 1st, the 2nd substrate layer 2a, 2b, lower encapsulant layer 10 and top seal layer 11 etc. the contained adhesive gas producing that gasifies, form cavity 3.
Fig. 3 is the top cross-sectional view that represents the related esd protection device of the variation of esd protection device 1 of execution mode of the present utility model.In the esd protection device 21 of this variation, replace the sparking electrode 4 in the 1st execution mode, the size that forms protuberance 22a～22c is distinguished different sparking electrodes 22 as the 1st sparking electrode.Therefore, the clearance G a～Gc between the protuberance 5a～5c of the protuberance 22a～22c of the 1st sparking electrode 22 and the 2nd sparking electrode 5 becomes respectively different sizes.
As the esd protection device 21 of this variation, in esd protection device of the present utility model, the size in the gap between the 1st and the 2nd sparking electrode also can be respectively different sizes between multiple paired protuberances.The reduction of the protective feature of the static in the time of in this case, also suppressing repeatedly to apply static.By Fig. 3 and Fig. 4, be described.The top cross-sectional view of the esd protection device 21 after repeatedly discharging in Fig. 4 situation that to be the 1st sparking electrode 4 be connected with the current potential of accepting electric discharge one side.
Thereby if the esd protection device 21 shown in Fig. 3 is applied to static, start electric discharge, first the narrowest gap in the clearance G a～Gc between the protuberance of the 1st and the 2nd sparking electrode 22,5 produces electric discharge.While making this gap enlargement repeatedly discharging, the 2nd narrow part in the clearance G a～Gc between the protuberance of the 1st and the 2nd sparking electrode 22,5 beyond this gap produces electric discharge.So, if esd protection device 21 is applied to static repeatedly, as shown in Figure 4, the position of the size equalization in gap and generation electric discharge disperses.Therefore, in the different esd protection device of clearance G a～Gc, the rising of discharge ionization voltage can be suppressed, aforesaid resistance to repeatability can be improved.
In addition, can by adjust the 1st and the protuberance of the 2nd sparking electrode between the order of the gap adjustment sparking electrode that starts to discharge.
For example, in the case of the 1st and the protuberance of the 2nd sparking electrode be 3 pairs, as recorded in Fig. 3, preferably on the side of the narrowest clearance G c, configure maximum clearance G b.The impact producing at the clearance G c that discharges at first sometimes on be disposed at side the 1st, the protuberance of the 2nd sparking electrode brings impact, thereby produce, peel off.Compared with protuberance 22a, the 5a of the 1st, the 2nd sparking electrode that has the clearance G a of intermediate width with formation, the protuberance 22b, the 5b that form the 1st, the 2nd sparking electrode of maximum clearance G b are difficult to be subject to this impact.Therefore,, by configuring as described above clearance G a～Gc, the impact that the protuberance of the sparking electrode of the impact producing in the time of making to discharge on other brings is less.
In this variation, the varying in size of multiple protuberances of the 1st sparking electrode 22, but in the utility model, can be also: the varying in size of multiple protuberances of the 2nd sparking electrode 5.In addition, in the utility model, also can be at the 1st and the 2nd sparking electrode, the size of both multiple protuberances is different respectively.
Fig. 5 is other the top cross-sectional view of variation that represents the esd protection device 1 of execution mode of the present utility model.In the esd protection device 31 of this variation, replace and at front end, possess the sparking electrode 5 of multiple protuberances in the 1st execution mode, form the sparking electrode 32 without multiple protuberances as the 2nd sparking electrode.The 2nd sparking electrode 32 and the 1st sparking electrode 4 form opposed to each other, the front end 32a of the 2nd sparking electrode 32 with the orthogonal direction of the opposed direction of the 1st sparking electrode 4 on linearity extend.Therefore, the front end 32a of the 2nd sparking electrode 32 is opposed across multiple protuberance 4a～4c of the front end of gap and the 1st sparking electrode 4.
As the esd protection device 31 of this variation, in esd protection device of the present utility model, also can make the front end 32a of the 2nd sparking electrode and multiple protuberances of the 1st sparking electrode opposed.In addition, in this variation, the 2nd sparking electrode consists of the sparking electrode 32 without multiple protuberances, but possesses in the 2nd sparking electrode of multiple protuberances at front end, also can make 1 protuberance of the 2nd sparking electrode and multiple protuberances of the 1st sparking electrode opposed.In addition, in this variation, make the 2nd sparking electrode 5 become the sparking electrode 32 without multiple protuberances, but in the utility model, can not be also to make the 2nd sparking electrode 5, but make the 1st sparking electrode 4 become the sparking electrode without multiple protuberances.
In this variation, preferably, the 2nd sparking electrode 32 is the sparking electrodes that are connected with the current potential that sends electric discharge one side.Fig. 6 is the top cross-sectional view of the esd protection device 31 after repeatedly discharging in this case.The in the situation that of starting electric discharge applying static, when there is the collision of the electronics causing by discharging in electrode front end, due to the impact being caused by the collision of electronics, at the front end of electrode, produce and peel off, or by the heat being produced by the collision of electronics, the front end of electrode is melted.Such phenomenon produces at the front end of the sparking electrode of electron collision one side.When repeatedly discharging, at the sparking electrode of electron collision one side, do not have multiple protuberances, in a part for the front end of sparking electrode, produce when peeling off or melting, peel off or melt likely in the diffusion of sparking electrode entirety.Thus, the gap between the front end of sparking electrode integrally expands.But, if form multiple protuberances at the front end of the sparking electrode of electron collision one side, even if a protuberance therein produces, peel off or melt, also because other sparking electrode is independent formation, thereby peel off or do not melt and can propagate.Thus, even if produce protuberance and the electric discharge of the sparking electrode peeling off or melt, start the gap enlargement between lateral electrode, the protuberance of other sparking electrode is not also affected with the gap that electric discharge starts lateral electrode.Thereby, can improve described resistance to repeatability.
As described above, in this variation, preferably the 2nd sparking electrode 32 is the sparking electrodes that are connected with the current potential that sends electric discharge one side.In this case, when the installation of esd protection device 31, need correct the 2nd sparking electrode 32 of installing, so that it is connected with the current potential that sends electric discharge one side.For this reason, preferably at 4 of the outsides of esd protection device 31 face formation setter, can clearly distinguish in advance the mark of the installation direction of esd protection device 31.
Fig. 7 is the top cross-sectional view of other variation again that represents the esd protection device 1 of execution mode of the present utility model.In the esd protection device 41 of present embodiment, the 1st sparking electrode is identical with the esd protection device 21 shown in Fig. 3, replaces the sparking electrode 4 of the 1st execution mode, is formed as the different sparking electrode 22 of size difference of protuberance 22a～22c.In addition, the 2nd sparking electrode is identical with the esd protection device 31 shown in Fig. 5, replaces at front end, to possess the sparking electrode 5 of multiple protuberances in the 1st execution mode, is formed as not having the sparking electrode 32 of multiple protuberances.
As the esd protection device 41 of this variation, esd protection device of the present utility model can possess the different gap size that combined between the 1st shown in Fig. 3 and the 2nd sparking electrode and the structure of the sparking electrode without multiple protuberances shown in Fig. 5.In this case, also can improve aforesaid resistance to repeatability.
In addition, in the esd protection device 41 of this variation, identical with the example of above-mentioned esd protection device 31, preferably the 2nd sparking electrode 32 is the sparking electrodes that are connected with the current potential that sends electric discharge one side.Fig. 8 is the top cross-sectional view of the esd protection device 41 after representing repeatedly to discharge.In this case, about the mark this point that is preferably formed for distinguishing in advance installation direction at 4 of the outsides of esd protection device 41 face, also identical with the example of above-mentioned esd protection device 31.
Next, concrete experimental example is described.
(embodiment 1)
As embodiment 1, the esd protection device 1 shown in construction drawing 1.
The BAS material of mixing take Ba, Al and Si as main body, to become the composition of regulation, pre-burning at the temperature of 800 ℃～1000 ℃.With zirconium ball mill, the preburning powder obtaining is pulverized 12 hours, obtained ceramic powders.In this ceramic powders, add by toluene and EKINEN(trade name: エ キ ネ Application) form organic solvent and mix.And then, add adhesive and plasticizer and starched.By scraping the skill in using a kitchen knife in cookery, the slurry so obtaining is shaped, obtains the ceramic green sheet of thickness 30 μ m.
As described below, the electrode cream of composition of preparation the 1st, the 2nd sparking electrode 4,5.In Cu particle 80 % by weight by average grain diameter 2 μ m and the adhesive resin that formed by ethyl cellulose, add solvent, stir, mix with three rollers, obtain electrode cream.
The modulation that electric discharge assisted parts 6 forms with cream: prepare the Al for count nm～tens of nm in the surface attachment average grain diameter of average grain diameter 2 μ m particles
2o
3the metallic of coating is carried out on powder forms, surface by not having the inorganic material of conductivity.In this electroconductive particle with the silicon carbide powder of ratio harmonic mean particle diameter 1 μ m of regulation.According to the ratio of the total of adhesive resin and solvent, become the mode of 20 % by weight of entirety, in this temper, add adhesive resin and solvent, and mix, obtain compound.
As the resin plaster that forms cavity 3, prepare using proper proportion, to comprise the resin plaster of organic solvent as solvent with respect to ethyl cellulose.
As the ceramic green sheet that is used to form lower encapsulant layer 10 and top seal layer 11, preparing becomes according to alumina powder with as the organic solvent of solvent the sealant formation ceramic paste that the mode of 15 % by weight of entirety mixes.
The stacked multi-disc of ceramic green sheet that the ceramic multi-layer baseplate of preparing is as described above used.On the duplexer obtaining, by silk screen printing, in the part that forms lower encapsulant layer 10, apply above-mentioned sealant formation ceramic green sheet.Next, at above-mentioned sealant, form with applying auxiliary electrode formation cream on cream.Then, the mode that becomes 30 μ m according to the size of clearance G between the 1st, the 2nd sparking electrode is printed above-mentioned electrode cream.Further, apply above-mentioned cavity formation resin plaster.Next, be endowed the mode of the part of above-mentioned resin plaster according to covering, coating is used to form the sealant formation cream of above-mentioned sealant.
And then, at the stacked multi-disc ceramic multi-layer baseplate of upper surface formation ceramic green sheet, on thickness direction, entirety is compressed.
Then, on thickness direction, cut off above-mentioned duplexer, obtaining after the duplexer chip that each esd protection equipment is unit, at the 1st, the 2nd end face coated electrode cream of this duplexer chip, form outer electrode.As outer electrode formation electrode cream, use Cu.
Next, in blanket of nitrogen, burn till above-mentioned duplexer chip, obtain the esd protection equipment of length 1.0mm × width 0.5mm × thickness 0.3mm.
In addition, the protuberance of the front end of sparking electrode is at the 1st, the 2nd sparking electrode 4,5 each 3 places that arrange respectively.In addition, the Width size of the 1st, the 2nd sparking electrode 4,5 is made as 150 μ m.
(embodiment 2)
As embodiment 2, the esd protection device 21 shown in construction drawing 3.Difference from Example 1 is that the mode that becomes respectively 40 μ m, 35 μ m, 30 μ m according to the size of clearance G a～Gc forms the 1st sparking electrode 22, and other point is all identical with embodiment.
(embodiment 3)
As embodiment 3, the esd protection device 31 shown in construction drawing 5.Difference from Example 1 is that multiple protuberances ground coated electrode cream of the front end by the 2nd sparking electrode is not set forms the 2nd sparking electrode 32, and other point is all identical with embodiment 1.
(embodiment 4)
As embodiment 4, the esd protection device 41 shown in construction drawing 7.Difference from Example 1 is, forms 1st sparking electrode 22 identical with embodiment 2 and 2nd sparking electrode 32 identical with embodiment 3, and other points are all identical with embodiment 1.
(comparative example)
As a comparative example, make the esd protection device without multiple protuberances.Difference from Example 1 is, by do not arrange the 1st and multiple protuberances ground coated electrode cream of the front end of the 2nd sparking electrode form the 1st sparking electrode and the 2nd sparking electrode, other points are all identical with embodiment 1.
About the esd protection device of above-described embodiment 1～4 and comparative example; the 1st sparking electrode is connected with the current potential of accepting electric discharge one side; the 2nd sparking electrode is connected with the current potential that sends electric discharge one side, will gets evaluation (1) esd discharge response and (2) resistance to ESD repeatability with following.
(1) with respect to the discharge response of ESD
By electrostatic discharge simulation definite in the standard IEC 61000-4-2 of IEC, test to evaluate the discharge response with respect to ESD.Under contact discharge, apply 8kV and investigate between the sparking electrode of sample, whether to produce electric discharge.The sample that the crest voltage detecting in protective circuit side is exceeded to 650V is judged to be the discharge response defective (× marking); the sample that is 550～650V by crest voltage is judged to be (the Δ marking); the sample that is 450～550V by crest voltage is judged to be discharge response good (zero marking), and the sample of the not enough 450V of crest voltage is judged to be to discharge response good (the ◎ marking) especially.
(2) resistance to ESD repeatability
Under contact discharge, carry out 20 2kV and apply, 20 times 3kV applies, and 20 times 4kV applies, and 20 times 6kV applies, and 20 times 8kV applies, and next, evaluates the described discharge response with respect to ESD.The sample that the crest voltage detecting in protective circuit side is exceeded to 650V is judged to be resistance to ESD the repeatability defective (× marking); the sample that is 550～650V by crest voltage is judged to be (the Δ marking); the sample that is 450～550V by crest voltage is judged to be resistance to ESD repeatability good (zero marking), and the resistance to ESD repeatability of the sample of the not enough 450V of crest voltage is judged to be to good (the ◎ marking) especially.
At following table 1, result is shown.
[table 1]
| ? | Esd discharge response | Resistance to ESD repeatability |
| Embodiment 1 | ◎ | ◎ |
| |
◎ | ○ |
| |
○ | ○ |
| |
○ | Δ |
| Comparative example 1 | ◎ | × |
As understood from table 1, in the esd protection device of comparative example, in the situation that repeatedly applying static, discharge prevention voltage, discharge ionization voltage significantly rises, and on the other hand, in embodiment 1～4, compares to comparative example, can significantly improve resistance to repeatability.This thinks, by the front end of the sparking electrode that is connected with the current potential of accepting electric discharge one side, by multiple protuberances, formed, the front end of the sparking electrode that electric discharge causes peel off and be melted in multiple protuberances dispersions, can suppress the expansion in the gap between sparking electrode.
In addition, known according to table 1, compared with the esd protection device of the esd protection device of embodiment 1 and embodiment 2 and embodiment 3 and embodiment 4, improved resistance to repeatability.This thinks; the esd protection device of embodiment 1 and 2 is by also forming front end by multiple protuberances at the sparking electrode being connected with electric discharge beginning side voltage; thus, by from accept electric discharge one side the discharge voltage that is connected of voltage protuberance, Jie is only suppressed at and the opposed protuberance of this protuberance by the hot propagation regions in gap.
In addition, known according to table 1, superior compared with the discharge response of the discharge response of the esd protection device of embodiment 1 and 2 and the esd protection device of embodiment 3 and 4.This be because, by multiple protuberances of the front end of sparking electrode, cause that electric field concentrates, be easy to discharge.Accordingly, the esd protection device of embodiment 1 and 2, due to the sparking electrode being not only connected with the current potential of accepting electric discharge one side, also by multiple protuberances forms front end in the sparking electrode being connected with discharge ionization voltage, therefore thinks that discharge response is superior.
In addition, according to table 1, superior compared with the resistance to repeatability of the resistance to repeatability of the esd protection device of embodiment 1 and the esd protection device of embodiment 2.This is because because the gap between the protuberance of the 1st and the 2nd sparking electrode in multiple opposed parts equates, therefore can make discharge ionization voltage stable.That is,, even due to increasing because electric discharge makes opposed distance between front end arbitrarily, also can cause electric discharge in remaining opposed part, therefore, can suppress the rising of discharge ionization voltage.Therefore, further improved the characteristic repeatedly of esd protection device.It is also for identical reason that the resistance to repeatability of the esd protection device of embodiment 3 is compared superior with the resistance to repeatability of the esd protection device of embodiment 4.
The explanation of symbol
1 esd protection device
2 insulating properties substrates
2a the 1st substrate layer
2b the 2nd substrate layer
2c the 1st end face
2d the 2nd end face
2e, 2f side
3 cavities
4 the 1st sparking electrodes
4a～4c protuberance
5 the 2nd sparking electrodes
5a～5c protuberance
6 electric discharge assisted parts
6a metallic
6b semiconductive ceramic particle
10 lower encapsulant layer
11 top seal layers
12 the 1st outer electrodes
13 the 2nd outer electrodes
21 esd protection devices
22 the 1st sparking electrodes
22a～22c protuberance
31 esd protection devices
32 the 2nd sparking electrodes
32a front end
41 esd protection devices
G gap
Ga～Gc gap
Claims (6)
1. an esd protection device, possesses:
There is empty insulating properties substrate; With
According to front end, in the described cavity of described insulating properties substrate, carry out each other opposed mode and be disposed at the 1st sparking electrode, the 2nd sparking electrode in described insulating properties substrate,
At least one party's of described the 1st sparking electrode and described the 2nd sparking electrode front end is formed by multiple protuberances,
Described esd protection device also possesses:
The 1st outer electrode, it is electrically connected with described the 1st sparking electrode, and is formed at the outer surface of described insulating properties substrate; With
The 2nd outer electrode, it is electrically connected with described the 2nd sparking electrode, and is formed at the outer surface of described insulating properties substrate.
2. esd protection device according to claim 1, wherein,
Described the 1st sparking electrode that front end is formed by multiple protuberances or a side of the 2nd sparking electrode are connected with the current potential of a side of accepting electric discharge.
3. esd protection device according to claim 1 and 2, wherein,
The front end of described the 1st sparking electrode and described the 2nd sparking electrode is formed by multiple protuberances.
4. esd protection device according to claim 1 and 2, wherein,
By at least one party who makes described the 1st sparking electrode and described the 2nd sparking electrode, there are multiple protuberances, thereby it is multiple that the opposed part of the front end of the front end of described the 1st sparking electrode and described the 2nd sparking electrode has, the distance between the front end of described the 1st sparking electrode and the front end of described the 2nd sparking electrode in described multiple opposed parts equates.
5. esd protection device according to claim 1 and 2, wherein,
Described esd protection device also possesses:
Electric discharge assisted parts, it is according to be formed on the opposed part of the front end of described the 1st sparking electrode and the front end of described the 2nd sparking electrode across the mode of described the 1st sparking electrode and described the 2nd sparking electrode, and comprises metallic and semiconductor particle.
6. esd protection device according to claim 1 and 2, wherein,
Described esd protection device also possesses:
Sealant, it faces described cavity and arranges, and arranges according to the mode of surrounding the front end of described the 1st sparking electrode and the opposed part of front end of described the 2nd sparking electrode.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011021040 | 2011-02-02 | ||
| JP2011-021040 | 2011-02-02 | ||
| PCT/JP2012/051992 WO2012105497A1 (en) | 2011-02-02 | 2012-01-30 | Esd protection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203562642U true CN203562642U (en) | 2014-04-23 |
Family
ID=46602711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201290000236.XU Expired - Lifetime CN203562642U (en) | 2011-02-02 | 2012-01-30 | Esd protective device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN203562642U (en) |
| WO (1) | WO2012105497A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107870293A (en) * | 2016-09-27 | 2018-04-03 | 亚德诺半导体集团 | Electrical overstress detection means |
| CN109149372A (en) * | 2017-06-27 | 2019-01-04 | 镇江恒业电子有限公司 | A kind of discharge tube with the anti-short circuit of operating point |
| CN110800177A (en) * | 2017-07-05 | 2020-02-14 | Tdk电子股份有限公司 | Discharger |
| US11112436B2 (en) | 2018-03-26 | 2021-09-07 | Analog Devices International Unlimited Company | Spark gap structures for detection and protection against electrical overstress events |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11204231A (en) * | 1997-11-12 | 1999-07-30 | Funai Electric Co Ltd | Discharge gap device and its mounting structure |
| EP2352211B1 (en) * | 2008-11-26 | 2017-12-20 | Murata Manufacturing Co. Ltd. | Esd protection device and manufacturing method thereof |
| KR101254212B1 (en) * | 2008-12-10 | 2013-04-18 | 가부시키가이샤 무라타 세이사쿠쇼 | Esd protection device |
-
2012
- 2012-01-30 CN CN201290000236.XU patent/CN203562642U/en not_active Expired - Lifetime
- 2012-01-30 WO PCT/JP2012/051992 patent/WO2012105497A1/en active Application Filing
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107870293A (en) * | 2016-09-27 | 2018-04-03 | 亚德诺半导体集团 | Electrical overstress detection means |
| US10677822B2 (en) | 2016-09-27 | 2020-06-09 | Analog Devices Global Unlimited Company | Electrical overstress detection device |
| US11372030B2 (en) | 2016-09-27 | 2022-06-28 | Analog Devices International Unlimited Company | Electrical overstress detection device |
| CN109149372A (en) * | 2017-06-27 | 2019-01-04 | 镇江恒业电子有限公司 | A kind of discharge tube with the anti-short circuit of operating point |
| CN109149372B (en) * | 2017-06-27 | 2020-11-03 | 镇江恒业电子有限公司 | Discharge tube with action point for preventing short circuit |
| CN110800177A (en) * | 2017-07-05 | 2020-02-14 | Tdk电子股份有限公司 | Discharger |
| CN110800177B (en) * | 2017-07-05 | 2022-09-09 | Tdk电子股份有限公司 | Discharger |
| US11112436B2 (en) | 2018-03-26 | 2021-09-07 | Analog Devices International Unlimited Company | Spark gap structures for detection and protection against electrical overstress events |
| US11668734B2 (en) | 2018-03-26 | 2023-06-06 | Analog Devices International Unlimited Company | Spark gap structures for detection and protection against electrical overstress events |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2012105497A1 (en) | 2012-08-09 |
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