CN203558961U - Glass plate manufacturing device - Google Patents
Glass plate manufacturing device Download PDFInfo
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- CN203558961U CN203558961U CN201320519982.6U CN201320519982U CN203558961U CN 203558961 U CN203558961 U CN 203558961U CN 201320519982 U CN201320519982 U CN 201320519982U CN 203558961 U CN203558961 U CN 203558961U
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- insulating member
- heat insulating
- conduit
- melten glass
- glass
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
- C03B5/225—Refining
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Abstract
The utility model provides a glass plate manufacturing device which can enable molten glass flowing in a pipe made of platinum or platinum alloy achieves uniform temperature. The molten glass is conveyed in a delivery pipe (43), a settling tank (41) and the delivery pipe (43) comprise a guide pipe (61), an electrode (62) and a heat release inhibiting part (63), the guide pipe (61) is made of platinum or platinum alloy, the molten glass flows inside the guide pipe, the electrode (62) is arranged on the outer wall of the guide pipe (61) and is used for electrifying the guide pipe (61) to heat the molten glass flowing inside the guide pipe, the heat release inhibiting part (63) is arranged at the periphery of the guide pipe to inhibit heat release of the molten glass flowing inside the guide pipe, and the heat release inhibiting part (63) is used for regulating thermal resistance at least local part of the settling tank (41) and the delivery pipe (43), so that molten glass on the cross section of the guide pipe has uniform temperature.
Description
Technical field
The utility model relates to a kind of device for producing glass sheet.
Background technology
Conventionally, device for producing glass sheet comprises for heating frit, and generate the melting channel of melten glass, by melten glass be configured as the building mortion of sheet glass, from melting channel to the required transfer lime of building mortion transferring of molten glass.Device for producing glass sheet, also comprises removing being included in the clarifying tank of the micro-bubble in melten glass and the steel basin for stirring melten glass and it being homogenized according to demand.Melting channel, clarifying tank, steel basin and building mortion are connected with transfer lime respectively.The temperature of the melten glass by transfer lime inside, because of the composition of formed glass sheets and the structure of device for producing glass sheet etc. different.For example, by overflow downdraw, manufacture in the device for producing glass sheet of sheet glass, the temperature of melten glass is 1000 ℃～1700 ℃, and wherein, described sheet glass shows (FPD) sheet glass with the composition of glass substrate for having planes such as being applicable to liquid-crystal display (LCD).
For the sheet glass of the melten glass volume production of high quality from high temperature, best do not sneak in melten glass for the foreign matter etc. that likely forms the major cause of defects of glass sheet.Therefore, the inwall of the parts that contact with melten glass, is necessary according to the temperature of the melting parts that contact with its parts, and the quality of the sheet glass being required etc., by suitable material, formed.Manufacture in the required device for producing glass sheet of FPD glass substrate, the inwall contacting with melten glass, is used platinum metals conventionally.Below, " platinum metals " means the metal consisting of single platinum family element and the metal alloy being formed by platinum family element.Platinum family element is platinum (Pt), Palladium (Pd), rhodium (Rh), ruthenium (Ru), osmium (Os) and six elements of iridium (Ir).Although platinum metals price, fusing point is high, and very strong to the erosion resistance of melten glass.
And, in device for producing glass sheet, be necessary to make the temperature equalization by the melten glass of transfer lime inside on the section of transfer lime.For example, provide in the transfer lime of melten glass to building mortion, once the temperature difference of melten glass on the section of transfer lime, providing can not be impartial to the temperature of the melten glass of molding, can produce the problem that the Flatness of sheet glass degenerates.
And, owing to forming low temperature p-Si(polysilicon) strain point of the glass substrate of TFT and oxide semiconductor is high, therefore, has the tendency that liquidus temperature uprises, and the viscosity in liquidus temperature,, the tendency of liquidus viscosity step-down.Now, because the viscosity of melten glass and the difference of liquidus viscosity of the internal flow at transfer lime diminish, the risk of the sheet glass devitrification of shaping uprises.Particularly, once the temperature difference of melten glass on section, the local region reducing of temperature that can produce melten glass, the risk of devitrification uprises.
In order to make by the temperature equalization of the melten glass of transfer lime inside, the special table of patent documentation 1(2011-513173 communique) in, the flange that has proposed to consist of ring-type electrical conductor is arranged on the device for producing glass sheet on transfer lime.In this device for producing glass sheet, by switching on to flange, and heat transfer lime, can be controlled at the temperature of the melten glass of transfer lime internal flow.
Patent documentation
Patent documentation 1: special table 2011-513173 communique
Utility model content
But, even if use patent documentation 1 disclosed transfer lime, according to the installation method of the position of flange and flange etc., there is sometimes the current unevenness mobile to transfer lime etc.According to this formation, once the temperature distributing disproportionation of transfer lime outer wall etc., in the temperature of the melten glass of the internal flow of transfer lime, dissimilate on the section of transfer lime.Its result, providing cannot be impartial to the temperature of the melten glass of molding, likely occurs the problem that the Flatness of sheet glass degenerates.
The purpose of this utility model is to provide a kind of device for producing glass sheet that can make in the temperature equalization of the melten glass of the pipe internal flow consisting of platinum or platinum alloy.
Relate to device for producing glass sheet of the present utility model, it comprises heating frit and generates the melting channel of melten glass, clarification at the clarifying tank of the melten glass of melting channel generation, from be configured as the building mortion of sheet glass at the clarified melten glass of clarifying tank.The melten glass generating at melting channel, is sent to building mortion by the inside of transfer lime.Clarifying tank and transfer lime comprise respectively conduit, motor and inhibition heat release parts.Conduit is made by platinum or platinum alloy, and melten glass flows therein.Electrode is installed in the outer wall of conduit, and conductive pipe switches on to heat the melten glass mobile in catheter interior.Suppress the periphery that heat release parts are arranged on conduit, be suppressed at the mobile melten glass heat release of catheter interior., inhibition heat release parts are adjusted at the thermal discharge of the mobile melten glass of catheter interior.Suppress heat release parts and adjust hot resistance at least part of clarifying tank and transfer lime, so that the temperature equalization of melten glass on the section of conduit.
Relate in device for producing glass sheet of the present utility model heating frit and the melten glass that generates, by the inside of clarifying tank and transfer lime, is sent to from the device of melten glass continuous molding sheet glass.Clarifying tank is the tubular part identical with transfer lime.In clarifying tank, heat mobile melten glass therein, and remove the micro-bubble being included in melten glass.Clarifying tank and transfer lime comprise conduit that platinum or platinum alloy make, for the conductive pipe required electrode of switching on.Melten glass is in the internal flow of conduit.Via the energising of electrode conductive pipe, conduit is heated, heated at the melten glass that catheter interior is mobile.By control, lead to the electric current of conduit, can be controlled at the temperature of the mobile melten glass of catheter interior.The current density of mobile electric current in conduit, because of the position difference of conduit outer wall.For example, when electrode is the flange consisting of the electrical conductor of ring-type, near the position power supply terminal of the flange being connected with power supply, the current density mobile at conduit outer wall is large.Therefore, in catheter interior, near the melten glass of the spatial flow power supply terminal of flange is compared than at the melten glass of other spatial flows, easily heated.On the other hand, away from the melten glass of the spatial flow of the power supply terminal of flange with compared with the melten glass of other spatial flows, be difficult for heated.
Relate in device for producing glass sheet of the present utility model, be arranged on the inhibition heat release parts in conduit periphery, according to the mobile current density of conduit outer wall in its vicinity, adjust hot resistance.For example, the inhibition heat release parts with near the conduit outer wall power supply terminal of flange arranges in opposite directions, have low thermal resistance.Therefore, near the heat of the melten glass of the spatial flow power supply terminal of flange, easily discharges via conduit and inhibition heat release parts.On the other hand, the inhibition heat release parts with the conduit outer wall away from the power supply terminal of flange is established in opposite directions, have high resistance to heat.Therefore, in the heat away from the melten glass of the spatial flow of the power supply terminal of flange, via conduit and suppress heat release parts and be difficult to discharge.Conventionally, in the current density of the electric current of pipe flow, due to the position of electrode and towards etc. reason, according to the position of outer wall, become unequal, therefore, in the temperature of the melten glass of the internal flow of conduit, on the section of conduit, become unequal tendency.But, as mentioned above, utilize the inhibition heat release parts of adjusting hot resistance, according to the position of electrode and towards waiting thermal discharge that is adjusted at the melten glass of the internal flow of conduit, can make the temperature of melten glass on conduit section become equalization.Therefore,, in this device for producing glass sheet, can make the temperature equalization at the melten glass of the pipe internal flow being formed by platinum or platinum alloy.
And, best for there are multiple inhibition heat release parts of different thickness by the periphery setting at conduit, at least local hot resistance of adjusting of clarifying tank and transfer lime.
And, best for there are multiple inhibition heat release parts of different thermal conductivities by the periphery setting at conduit, at least local hot resistance of adjusting of clarifying tank and transfer lime.
Utility model effect
Relate to device for producing glass sheet of the present utility model, can make the temperature equalization at the melten glass of the pipe internal flow being formed by platinum or platinum alloy.
Accompanying drawing explanation
Fig. 1 is the one-piece construction figure that relates to the device for producing glass sheet of the present embodiment;
Fig. 2 is the outside drawing that relates to the transfer lime of the present embodiment;
Fig. 3 is the sectional view that relates to the transfer lime of the present embodiment;
Fig. 4 is the sectional view of transfer lime in IV-IV line of Fig. 3;
Fig. 5 relates to the sectional view becoming with the transfer lime of routine D.
Nomenclature
40 melting channels
41 clarifying tanks
42 building mortions
43a, 43b, 43c transfer lime
61 conduits
62 electrodes
63 suppress heat release parts
Embodiment
(1) one-piece construction of device for producing glass sheet
By reference to the accompanying drawings the embodiment that relates to device for producing glass sheet of the present utility model is described.Fig. 1 is the mode chart that relates to device for producing glass sheet 200 topology examples of the present embodiment.Device for producing glass sheet 200, it comprises melting channel 40, clarifying tank 41, whipping appts 100, building mortion 42, transfer lime 43a, 43b, 43c.Transfer lime 43a is connected with clarifying tank 41 with melting channel 40.Transfer lime 43b is connected with whipping appts 100 with clarifying tank 41.Transfer lime 43c is connected with building mortion 42 with whipping appts 100.
The melten glass generating at melting channel 40, flows into clarifying tank 41 by transfer lime 43a.At the clarified melten glass of clarifying tank 41, by transfer lime 43b, flow into whipping appts 100.The melten glass being stirred in whipping appts 100, flows into building mortion 42 by transfer lime 43c.In building mortion 42, by overflow downdraw from melten glass molding glass band.Glass ribbon after operation in be cut off into prescribed level, manufacture sheet glass.The size of width of glass sheet direction is for example 500mm～3500mm.The size of sheet glass length direction is for example 500mm～3500mm.
The sheet glass of manufacturing by relating to device for producing glass sheet of the present utility model, is specially adapted to the flat-panel monitors (FPD) such as liquid-crystal display, plasma display, OLED display and uses glass substrate.As FPD glass substrate, use non-alkali glass or micro-alkali glass.Non-alkali glass or micro-alkali glass, high temperature viscosity is high.Particularly, have 10
2.5the temperature of the melten glass of pool viscosity, higher than 1500 ℃.
Although not shown, melting channel 40 comprises the heating units such as burner.In melting channel 40, frit is dissolved by heating unit, and generates melten glass.Frit is modulated into, and makes it can obtain in fact the glass of desired composition.As the example of glass ingredient, the non-alkali glass that is applicable to FPD glass substrate contains, SiO
2: 50 quality %～70 quality %, Al
2o
3: 0 quality %～25 quality %, B
2o
3: 1 quality %～15 quality %, MgO:0 quality %～10 quality %, CaO:0 quality %～20 quality %, SrO:0 quality %～20 quality %, BaO:0 quality %～10 quality %.Here, the total content of MgO, CaO, SrO and BaO is 5 quality %～30 quality %.
And, as FPD glass substrate, also can use and contain the alkali-metal micro-alkali glass of trace.As the composition of micro-alkali glass, the R ' that contains 0.1 quality %～0.5 quality %
2o, the best R ' for containing 0.2 quality %～0.5 quality %
2o.Here, at least one for selecting from Li, Na and K of R '.In addition, R '
2the content of O adds up to can less than 0.1 quality %.
And the glass of manufacturing by the utility model, except mentioned component, also can contain SnO
2: 0.01 quality %～1 quality %(the best is, 0.01 quality %～0.5 quality %), Fe
2o
3: 0 quality %～0.2 quality %(the best is, 0.01 quality %～0.08 quality %), consider carrying capacity of environment, can not contain in fact As
2o
3, Sb
2o
3and PbO.
Be modulated into frit as above, be put into melting channel 40.In melting channel 40, frit melts at the temperature corresponding with its composition.According to this formation, in melting channel 40, for example, can obtain the melten glass of 1500 ℃～1600 ℃ of high temperature.
The melten glass obtaining at melting channel 40, flows into clarifying tank 41 by transfer lime 43a from melting channel 40.Clarifying tank 41 is and transfer lime 43a, 43b, tubular part that 43c is identical.Although not shown, with melting channel 40 in the same manner, on clarifying tank 41, be provided with heating unit.In clarifying tank 41, by melten glass is further heated up, clarified.For example, in clarifying tank 41, the temperature of melten glass is risen to more than 1550 ℃, and then more than 1600 ℃.Melten glass, is clarified by heating up, and removes the micro-bubble being included in melten glass.
Clarified melten glass in clarifying tank 41, flows into whipping appts 100 by transfer lime 43b from clarifying tank 41.Melten glass is cooled during by transfer lime 43b.In whipping appts 100, melten glass is stirred at the temperature lower than clarifying tank 41.For example, in whipping appts 100, the temperature of melten glass is cooled to 1250 ℃～1450 ℃.In addition, in whipping appts 100, the viscosity of melten glass, for example, be 500 pool～1300 pools.Melten glass is stirred in whipping appts 100, and is homogenized.
The melten glass being homogenized in whipping appts 100, flows into building mortion 42 by transfer lime 43c from whipping appts 100.Melten glass is further cooled during by transfer lime 43c, is cooled to and is suitable for the viscosity that is shaped.Melten glass, for example, be cooled near 1200 ℃.In building mortion 42, by overflow downdraw shaping melten glass.Particularly, flow into the melten glass of building mortion 42, be provided to the molding 52 that is arranged on forming furnace (not shown) inside.Molding 52 is shaped by refractory brick, has wedge shape section shape.Being formed with along the groove of molding 52 length directions above of molding 52.Melten glass is provided to molding 52 groove above.The melten glass overflowing from groove, flows to below along a pair of side of molding 52.The a pair of melten glass flowing down along the side of molding 52, at the interflow, lower end of molding 52, continuous molding glass ribbon.Glass ribbon is cooled gradually along with flowing to below, afterwards, is cut off into the sheet glass of expectation size.
(2) structure of transfer lime
To being elaborated to building mortion 42 transferring of molten glass required transfer lime 43a, 43b, the structure of 43c from melting channel 40.The structure of the transfer lime 43 the following describes, is applicable at least one of transfer lime 43a, 43b and transfer lime 43c, and is also applicable to the clarifying tank 41 of tubular part.
Fig. 2 is the outside drawing of transfer lime 43.Fig. 3 is the sectional view that cuts off transfer lime 43 with the face perpendicular to transfer lime 43 length directions.Fig. 4 is the sectional view of transfer lime 43 in IV-IV line of Fig. 3.Transfer lime 43 consists of conduit 61, electrode 62 and inhibition heat release parts 63.Inhibition heat release parts 63 in Fig. 2, have been omitted.In Fig. 3,4, omitted electrode 62.
Electrode 62 is arranged on the outer wall of conduit 61.The flange of electrode 62 for being formed by ring-type electrical conductor.In Fig. 2, the two ends of conduit 61 are attached with two electrodes 62.But, be arranged on the number of the electrode 62 on conduit 61 and position etc., can be according to the material of conduit 61, internal diameter and length, or the setting position of transfer lime 43 etc. suitably determines.Electrode 62 has a pair of power supply terminal 62a being connected with power supply (not shown).From power supply, via power supply terminal 62a, to electrode 62, provide electric power, current direction electrode 62.Flow to the current delivery of electrode 62 to conduit 61.By conductive pipe 61, switch on, conduit 61 is heated, heated at the melten glass of conduit 61 internal flows.By control, flow to the electric current of electrode 62, can be controlled at the temperature of the melten glass of conduit 61 internal flows.In addition, as shown in Figure 2, be arranged on the power supply terminal 62a of two electrodes 62 on conduit 61, be configured in the upside of conduit 61.
As shown in Figures 3 and 4, in order to be controlled at the heat release of melten glass of internal flow of conduit 61, in the periphery of conduit 61, to be provided with and to suppress heat release parts 63.Suppress heat release parts 63 and adjust hot resistance, so that the temperature of melten glass becomes impartial on the section of conduit 61.The temperature equalization of melten glass on the section of conduit 61, means the temperature equalization of the melten glass of the represented conduit of Fig. 3 61 inside.
Suppressing heat release parts 63 consists of heat insulating member 63b2 outside inner side heat insulating member 63a, a upper outside heat insulating member 63b1, two sidepieces and a lower outside heat insulating member 63b3.Inner side heat insulating member 63a, is shaped by luminite cement, contacts with the outer wall of conduit 61.The outer wall of conduit 61 is covered by inner side heat insulating member 63a.Outside upper outside heat insulating member 63b1, sidepiece, heat insulating member 63b2 and lower outside heat insulating member 63b3 are shaped by refractory brick, and as shown in Figure 3, contact with the outer wall of inner side heat insulating member 63a.The outer wall of inner side heat insulating member 63a is covered by heat insulating member 63b2 outside upper outside heat insulating member 63b1, sidepiece and lower outside heat insulating member 63b3.Upper outside heat insulating member 63b1 is configured in the top of conduit 61, approaches the power supply terminal 62a of electrode 62 most.Outside sidepiece, heat insulating member 63b2 is configured in the side of conduit 61.Lower outside heat insulating member 63b3 is configured in the below of conduit 61, farthest the power supply terminal 62a of ionization electrode 62.In other words, upper outside heat insulating member 63b1 and inner side heat insulating member 63a's contacts above.Outside one counter-lateral quadrents, heat insulating member 63b2 contacts with the two sides of inner side heat insulating member 63a.Lower outside heat insulating member 63b3 contacts with below the heat insulating member 63a of inner side.In addition, the thickness of heat insulating member 63b2 and lower outside heat insulating member 63b3, for example, be 300mm～800mm outside upper outside heat insulating member 63b1, sidepiece.
(3) feature
（3-1）
Relate in the device for producing glass sheet 200 of the present embodiment, heating frit and the melten glass that generates, be sent to building mortion 42 by the inside of clarifying tank 41 and transfer lime 43a, 43b, 43c.Clarifying tank 41 and transfer lime 43a, 43b, 43c, the flange shape electrode 62 that comprises conduit 61 that platinum or platinum alloy make, uses for conductive pipe 61 energisings.Melten glass is in the internal flow of conduit 61.By switching on via electrode 62 conductive pipe 61, conduit 61 is heated, heated at the melten glass of the internal flow of conduit 61.
But, in the interior mobile current density of conduit 61, because of the position difference of conduit 61 outer walls.Particularly, near the position power supply terminal 62a of electrode 62, the current density mobile at the outer wall of conduit 61 is large.Therefore, in the inside of conduit 61, near the melten glass of spatial flow power supply terminal 62a is compared than at the melten glass of other spatial flows, more heated.On the other hand, away from the melten glass of the spatial flow of power supply terminal 62a with compared with the melten glass of other spatial flows, be difficult for heated.
Relate in the device for producing glass sheet 200 of the present embodiment, be arranged on the multiple inhibition heat release parts 63 in conduit 61 peripheries, according to the mobile current density of conduit 61 outer walls in its vicinity, adjust hot resistance.Particularly, the thermal conductivity ratio that approaches heat insulating member 63b2 outside the thermal conductivity of upper outside heat insulating member 63b1 of the power supply terminal 62a of electrode 62 and the sidepiece adjacent with upper outside heat insulating member 63b1 is most large away from the thermal conductivity of the lower outside heat insulating member 63b3 of upper outside heat insulating member 63b1.According to this formation, near the heat of the easy heated melten glass of spatial flow power supply terminal 62a, via conduit 61 and suppress heat insulating member 63a and upper outside heat insulating member 63b1 inside heat release parts 63() easily discharge.On the other hand, in the heat that is difficult for heated melten glass away from the spatial flow of power supply terminal 62a, via conduit 61 and suppress heat insulating member 63a and lower outside heat insulating member 63b3 inside heat release parts 63() be difficult for discharging.
Conventionally, in the current density of the interior mobile electric current of conduit 61, due to the position of electrode 62 and towards, particularly the position of position of power supply terminal 62a etc. and conduit 61 outer walls becomes unequal accordingly, therefore, in the temperature of the melten glass of the internal flow of conduit 61, on the section of conduit 61, become unequal tendency.But, by utilization, there are the multiple inhibition heat release parts 63 of mutually different thermal conductivities, according to the position of electrode 62 and towards etc. be adjusted at the thermal discharge of the melten glass of conduit 61 internal flows, can make the temperature equalization of melten glass in the section of conduit 61.Therefore, relate to the device for producing glass sheet 200 of the present embodiment, can make the temperature equalization at the melten glass of the pipe internal flow being formed by platinum or platinum alloy.
（3-2）
, in clarifying tank 41, by SnO relate to the device for producing glass sheet 200 of the present embodiment, at the tubular part of being made by platinum or platinum alloy,
2while using as finings, effective especially.Thereby hot defecation groove 41 improves the temperature of melten glass, and clarify in the clarification operation of melten glass, because of according to the position of electrode 62 and towards etc. in the unequal reason of the interior mobile electric current of conduit 61, the temperature that sometimes appears at the melten glass of the internal flow of conduit 61 rises unequally.
Now, in conduit 61 inside of clarifying tank 41, in order making, in the temperature away from the melten glass of the difficult heating of the spatial flow of power supply terminal 62a, really to rise, can to consider to make the electric current that flows to clarifying tank 41 conduits 61 to increase.But, once the electric current that flows to clarifying tank 41 conduits 61 is increased, promote to form the platinum of conduit 61 or the volatilization of platinum alloy, likely make the lifetime of clarifying tank 41.And, in recent years, from the viewpoint of carrying capacity of environment, substitute As
2o
3use SnO
2as finings, use.Use SnO
2time, than using As
2o
3in time, is compared, and is necessary to make the temperature of melten glass to become higher in clarifying tank 41, and therefore, the problem of platinum or platinum alloy volatilization becomes more remarkable.Therefore, be difficult for excessive heat clarifying tank 41.In the present embodiment, owing to can making to become impartial in the temperature of the melten glass of the internal flow of clarifying tank 41 by suppressing heat release parts 63, and can effectively suppress the thermal discharge from clarifying tank 41, by SnO
2effective especially in the sheet glass manufacturing process of using as finings.
（3-3）
Relate to the device for producing glass sheet 200 of the present embodiment, the tubular part of making at platinum or platinum alloy,, in clarifying tank 41, when clarification is used the melten glass of frit generation of glass substrate from FPD such as suitable manufacture liquid-crystal display, plasma display and OLED display, effective especially.
In clarifying tank 41, by the viscosity of melten glass being adjusted into the easily viscosity of floating upper liquid level of micro-bubble being contained in melten glass, clarification melten glass.But, due to be applicable to FPD glass substrate without subtracting glass and micro-alkali glass, during high temperature, there is high viscosity, the temperature of this melten glass need be higher than the melten glass temperature of common alkali glass, the volatilization problem of above-mentioned platinum or platinum alloy becomes remarkable.Therefore, be difficult for excessive heat clarifying tank 41.In the present embodiment, owing to can making to become impartial in the temperature of the melten glass of the internal flow of clarifying tank 41 by suppressing heat release parts 63, and can effectively suppress the thermal discharge from clarifying tank 41, FPD is with effective especially in the manufacturing process of glass substrate.
（3-4）
Relate to the device for producing glass sheet 200 of the present embodiment, by transfer lime 43a, 43b, 43c, from melting channel 40, to building mortion 42, carry, and clarification is while generating melten glass from being suitable for manufacturing the frit of FPD glass substrate, effective especially.
FPD glass substrate, the Flatness to sheet glass etc. requires high-quality.But once provide the temperature of melten glass of transfer lime 43c internal flow of melten glass unequal to building mortion 42, melten glass cannot evenly overflow from molding 52.Therefore,, because the thickness deviation of the sheet glass being shaped from molding 52 becomes large, the Flatness of sheet glass degenerates.Relate to the device for producing glass sheet 200 of the present embodiment, due to the temperature equalization of melten glass being provided from transfer lime 43c to building mortion 42, can manufacture and be suitable for FPD glass substrate, and there is the sheet glass of high flat degree.
（3-5）
FPD, with on the surface of glass substrate, is formed with the semiconductor elements such as TFT.In recent years, in order to realize the more high-precision refinement of display equipment, require to substitute original α-SiTFT, on the surface of glass substrate, form low temperature p-Si(polysilicon) technology of TFT and oxide semiconductor.
But the operation that forms low temperature p-SiTFT and oxide semiconductor on the surface of glass substrate is compared than the operation of the surface formation α-SiTFT at glass substrate, needs the more thermal treatment of high temperature.Therefore, on surface, form the sheet glass of low temperature p-SiTFT and oxide semiconductor, require the performance that percent thermal shrinkage is little.In order to reduce percent thermal shrinkage, best for improving the strain point of glass.But the glass that strain point is high has, liquidus temperature uprises, the viscosity in liquidus temperature,, the tendency of liquidus viscosity step-down.Now, because the viscosity of melten glass and the difference of liquidus viscosity of the internal flow at transfer lime diminish, the risk of the sheet glass devitrification of shaping uprises.Particularly, because the temperature of melten glass on section is when different, the local region reducing of temperature that can produce melten glass, the risk of devitrification uprises.
Relate to the device for producing glass sheet 200 of the present embodiment, owing to passing through to suppress heat release parts 63, can make in the temperature of the melten glass of the internal flow of clarifying tank 41 impartially on section, be specially adapted to manufacture the liquid crystal flat panel display glass substrate that has adopted the liquid crystal flat panel display of p-SiTFT and adopted oxide semiconductor.Particularly, be specially adapted to manufacture the liquid-crystal display or the OLED display glass substrate that have adopted liquid-crystal display or the OLED display of low temperature p-SiTFT and adopted oxide semiconductor.
On surface, form the sheet glass of low temperature p-SiTFT and oxide semiconductor, for example, there are 655 ℃ of above strain points, or there is liquidus viscosities more than 45000 pools.And composition the best of this sheet glass is SiO
2: 52 quality %～78 quality %, Al
2o
3: 3 quality %～25 quality %, B
2o
3: 1 quality %～15 quality %, RO:3 quality %～20 quality %.Here, R is contained in sheet glass, at least one composition of selecting from Mg, Ca, Sr and Ba.This sheet glass, best for using (SiO
2+ Al
2o
3)/B
2o
3the mass ratio representing is 7～20 without subtracting glass or the glass that shades.
On surface, form the sheet glass of low temperature p-SiTFT and oxide semiconductor, in order to there is high strain-point, (SiO
2+ Al
2o
3the mass ratio that)/RO represents exceedes 5, best for exceeding 6, is more preferred from and exceedes 7.5.And once β-OH value of this sheet glass is too small, the viscosity of high-temperature area uprises, and solvability reduction, once β-OH value is excessive, strain point step-down.Therefore, β-OH value of this sheet glass, the best is 0.05/mm～0.3/mm.
And when preventing that this sheet glass has high strain-point, liquidus viscosity reduces, the mass ratio representing with CaO/RO exceedes 0.3, best for exceeding 0.5, is more preferred from and exceedes 0.65.And, consider carrying capacity of environment, this sheet glass is best for not containing in fact As
2o
3, Sb
2o
3and PbO.
(4) flexible example
(4-1) flexible routine A
Relate in the device for producing glass sheet 200 of the present embodiment, as suppressing heat release parts 63, used heat insulating member 63b2 and lower outside heat insulating member 63b3 outside the upper outside heat insulating member 63b1, sidepiece with mutual different thermal conductivities.And heat insulating member 63b2 is shaped by identical material outside upper outside heat insulating member 63b1 and sidepiece.But heat insulating member 63b2 outside upper outside heat insulating member 63b1 and sidepiece, also can be shaped by the various material with mutual different thermal conductivities.
In this accommodation example, for example, as heat insulating member 63b2 outside sidepiece, also can use thermal conductivity to be less than the refractory brick of the conductivity of upper outside heat insulating member 63b1.According to this formation, owing to can making to be less than from the thermal discharge on conduit 61 tops that approaches most power supply terminal 62a from the thermal discharge of conduit 61 sidepieces, can more effectively make the temperature equalization of melten glass.
(4-2) flexible routine B
Relate in the device for producing glass sheet 200 of the present embodiment, as suppressing heat release parts 63, used heat insulating member 63b2 and lower outside heat insulating member 63b3 outside the upper outside heat insulating member 63b1, sidepiece with mutual different thermal conductivities.But also alternative these suppress heat release parts 63, use the multiple inhibition heat release parts with mutual different thickness.Now, the material of inhibition heat release parts can be a kind of.
In this accommodation example, for example, be equivalent to the thickness of the inhibition heat release parts of lower outside heat insulating member 63b3, thicker than the thickness that is equivalent to the inhibition heat release parts of heat insulating member 63b2 outside upper outside heat insulating member 63b1 and sidepiece.According to this formation, with the present embodiment in the same manner, in the heat of melten glass of the spatial flow that approaches power supply terminal 62a, be easily released, in the heat away from the melten glass of the spatial flow of power supply terminal 62a, be difficult for being released.Therefore, can make the temperature equalization at the melten glass of pipe internal flow, wherein, described pipe consists of platinum or platinum alloy.
And the thickness of inhibition heat release parts that the Thickness Ratio that also can make to be equivalent to the inhibition heat release parts of heat insulating member 63b2 outside sidepiece is equivalent to upper outside heat insulating member 63b1 is thick.According to this formation, can make to be less than the thermal discharge from conduit 61 tops from the thermal discharge of conduit 61 sidepieces, can more effectively make the temperature equalization of melten glass.
In addition, as suppressing heat release parts 63, also can use to have mutual different thermal conductivity and heat insulating member 63b2 and lower outside heat insulating member 63b3 outside the upper outside heat insulating member 63b1, sidepiece of different thickness mutually.
(4-3) flexible routine C
Relate in the device for producing glass sheet 200 of the present embodiment, as suppressing heat release parts 63, used the inner side heat insulating member 63a contacting with the outer wall of conduit 61.Inner side heat insulating member 63a is single molded component.But as illustrated in the present embodiment, flexible routine A and flexible routine B, inner side heat insulating member 63a also can consist of multiple heat insulating member.For example, inner side heat insulating member 63a also can consist of the multiple heat insulating member with mutual different thermal conductivity or mutual different thickness, and also can consist of the multiple heat insulating member with mutual different thermal conductivity and mutual different thickness.Now, form thermal conductivity and the thickness of each heat insulating member of inner side heat insulating member 63a, according to suitably determining from the thermal discharge at the conduit 61 each positions of outer wall.
(4-4) flexible routine D
In conjunction with Fig. 5, the concrete flexible example that suppresses heat release parts 63 is described, wherein, described inhibition heat release parts are for relating to the device for producing glass sheet 200 of the present embodiment.Fig. 5 suppresses transfer lime 143 sectional views that heat release parts 163 are arranged in conduit 161 outside wall surface.Suppressing heat release parts 163 consists of upper inner heat insulating member 163a1, lower inside heat insulating member 163a2, upper outside heat insulating member 163b1 and lower outside heat insulating member 163b2.Upper inner heat insulating member 163a1 and lower inside heat insulating member 163a2 are shaped by luminite cement, and upper outside heat insulating member 163b1 and lower outside heat insulating member 163b2 are shaped by refractory brick.In addition, the parts of combination upper inner heat insulating member 163a1 and lower inside heat insulating member 163a2, have drum in the same manner with conduit.Below, the packaging technology of transfer lime 143 is described.
At first, the lower outside heat insulating member 163b2 that is formed with recess is set.Next, lower inside heat insulating member 163a2 is configured in to the recess of lower outside heat insulating member 163b2.Next, conduit 161 is configured on lower inside heat insulating member 163a2.Next, at the uper side surface of conduit 161, wrap upper inner heat insulating member 163a1.Next, at the uper side surface of upper inner heat insulating member 163a1, wrap the upper outside heat insulating member 163b1 that is formed with recess.
In this accommodation example, upper outside heat insulating member 163b1 and lower outside heat insulating member 163b2, as the explanation of the present embodiment, consist of multiple heat insulating member.For example, upper outside heat insulating member 163b1 and lower outside heat insulating member 163b2 can consist of the multiple heat insulating member with mutual different thermal conductivity or mutual different thickness, and also can consist of the multiple heat insulating member with mutual different thermal conductivity and mutual different thickness.
(4-5) flexible routine E
Relate in the device for producing glass sheet 200 of this embodiment, although used the inner side heat insulating member contacting with the outer wall 61 of conduit 61, also can form tectum at the outer wall of conduit 61.
In the outside wall surface of conduit, form the tectum that thickness is 100～400 μ m, wherein, described tectum is formed by the refractory oxide forming by spraying.
As tectum, the best is the refractory oxide (stupalith) of the high temperature of resistance to clarifying tank, transfer lime operation condition, can enumerate and comprise Al
2o
3, ZrO
2, Cr
2o
3, TiO
2, MgO material.And, can be also Y
2o
3-ZrO
2deng stabilized zirconia.Tectal spraying method can be the spraying of gas formula, can be also electric spraying (EFI).As the example of gas formula spraying, can enumerate flame plating.As the example of electric spraying, can enumerate the plasma sprayings such as air plasma spraying, decompression plasma spraying.
Claims (10)
1. a device for producing glass sheet, is characterized in that: it comprises:
Melting channel, heating frit, and generate melten glass;
Clarifying tank, the described melten glass that clarification generates in described melting channel; And
Building mortion, from the described melten glass formed glass sheets of clarifying described clarifying tank;
The described melten glass generating in described melting channel, is sent to described building mortion by the inside of transfer lime;
Described clarifying tank and described transfer lime comprise:
Conduit, is made by platinum or platinum alloy, and described melten glass flows therein;
Electrode, is arranged on the outer wall of described conduit, for switch on to heat the described melten glass flowing in described catheter interior to described conduit; And
Suppress heat release parts, be arranged on the periphery of described conduit, for being suppressed at the described melten glass heat release of internal flow of described conduit;
Described inhibition heat release parts, at least local hot resistance of adjusting of described clarifying tank and described transfer lime, so that the temperature equalization of the above melten glass of section of described conduit.
2. device for producing glass sheet according to claim 1, is characterized in that:
Between described clarifying tank and described building mortion, be also provided with whipping appts, this whipping appts stirs melten glass and melten glass is homogenized;
In described clarifying tank, clarified melten glass flows into described whipping appts;
The melten glass being homogenized in described whipping appts flows into described building mortion.
3. device for producing glass sheet according to claim 1, is characterized in that:
By the periphery setting at described conduit, there are the multiple described inhibition heat release parts of different thickness, at least local hot resistance of adjusting of described clarifying tank and described transfer lime.
4. device for producing glass sheet according to claim 1, is characterized in that:
By the periphery setting at described conduit, there are the multiple described inhibition heat release parts of different thermal conductivities, at least local hot resistance of adjusting of described clarifying tank and described transfer lime.
5. device for producing glass sheet according to claim 1, is characterized in that:
Described inhibition heat release parts consist of heat insulating member outside inner side heat insulating member, a upper outside heat insulating member, two sidepieces and a lower outside heat insulating member.
6. device for producing glass sheet according to claim 5, is characterized in that:
Described inner side heat insulating member contacts with the outer wall of described conduit;
The outer wall of described conduit is covered by described inner side heat insulating member;
The outer wall of described inner side heat insulating member is covered by heat insulating member outside described upper outside heat insulating member, described sidepiece and described lower outside heat insulating member.
7. device for producing glass sheet according to claim 6, is characterized in that:
On the outer wall of described conduit, be formed with fire-resistant tectum, described inner side heat insulating member contacts with described fire-resistant tectum.
8. device for producing glass sheet according to claim 5, is characterized in that:
Form the thickness of the inhibition heat release parts of described lower outside heat insulating member, thick compared with the thickness of the inhibition heat release parts of heat insulating member outside forming described upper outside heat insulating member and described sidepiece.
9. device for producing glass sheet according to claim 5, is characterized in that:
Described electrode is the flange body consisting of the electrical conductor of ring-type;
Described upper outside heat insulating member is configured in the top of described conduit, and is arranged on the position of the power supply terminal that approaches described electrode most;
Described lower outside heat insulating member is configured in the below of described conduit, and is arranged on the described power supply terminal of described electrode position farthest.
10. device for producing glass sheet according to claim 7, is characterized in that:
The deposited metal that described fire-resistant tectum is refractory oxide, the deposited metal thickness of described refractory oxide is 100～400 μ m.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-189182 | 2012-08-29 | ||
| JP2012189182A JP5824433B2 (en) | 2012-08-29 | 2012-08-29 | Glass plate manufacturing method and glass plate manufacturing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203558961U true CN203558961U (en) | 2014-04-23 |
Family
ID=50508693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320519982.6U Expired - Lifetime CN203558961U (en) | 2012-08-29 | 2013-08-23 | Glass plate manufacturing device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5824433B2 (en) |
| CN (1) | CN203558961U (en) |
Families Citing this family (4)
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|---|---|---|---|---|
| JP6449607B2 (en) * | 2014-09-30 | 2019-01-09 | ＡｖａｎＳｔｒａｔｅ株式会社 | Glass substrate manufacturing method and glass substrate manufacturing apparatus |
| JP6806456B2 (en) * | 2016-03-31 | 2021-01-06 | ＡｖａｎＳｔｒａｔｅ株式会社 | Glass substrate manufacturing method and glass substrate manufacturing equipment |
| JP7465864B2 (en) * | 2018-09-27 | 2024-04-11 | コーニング インコーポレイテッド | Modular molten glass supply system |
| WO2024054406A1 (en) * | 2022-09-09 | 2024-03-14 | Corning Incorporated | Molten glass delivery apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090272150A1 (en) * | 2007-11-02 | 2009-11-05 | Lawrence Henry Kotacska | Corrosion-resistant cradle and castable materials for glass production |
| US8925353B2 (en) * | 2007-11-08 | 2015-01-06 | Corning Incorporated | Process and system for fining glass |
-
2012
- 2012-08-29 JP JP2012189182A patent/JP5824433B2/en active Active
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| Publication number | Publication date |
|---|---|
| JP5824433B2 (en) | 2015-11-25 |
| JP2014047084A (en) | 2014-03-17 |
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