CN203557554U - Ultramicroscopic drill bit - Google Patents

Abstract

The utility model provides an ultramicroscopic drill bit used for a semiconductor wafer, including a head part, a neck part, a handle part, a cutting edge and a chip removal trench. The head part, neck part and handle part are sequentially in connection; the cutting edge is shaped on the end edge of the head part; the chip removal trench is shaped on the side of the head part and extends to the neck part. The advantages are that the diameter of the head part and the length of the chip removal trench have calculated special dimensions and are mutually cooperating. Accordingly, in the manufacture, the ultramicroscopic drill bit can raise a production qualified rate and is not easy to break stitch; when used with a high rotating speed, the ultramicroscopic drill bit can increase use times and prolong the service life and obtain most wafers by once drilling so as to improve production efficiency.

Description

Superminiature drill bit

Technical field

The utility model relates to a kind of superminiature drill bit for semiconductor wafer.

Background technology

The semiconductor wafer of prior art, for example mobile phone wafer, biochip etc., along with scientific and technological evolution, its volume is more and more less, and while semiconductor wafer being offered to hole with prior art, be to utilize laser light to penetrate wafer to carry out mostly, but the number of wafers that laser luminous energy penetrates is limited, therefore cannot promote production efficiency; And if hole with the drill bit of prior art, drill bit volume is excessive and cannot get out miniature hole first, if moreover dwindle simply bit size, drill bit can produce very large disqualification rate when producing and use, and reduce service life.

Utility model content

In view of the drilling technique of aforementioned prior art exists, cannot adapt to the diminishing semiconductor wafer of volume, while producing microbit disqualification rate too highly cause the easy broken needle of drill bit, while holing under the high rotating speed of 200,000 rpm to 35 ten thousand rpm service life too short shortcoming, the utility model provides a kind of superminiature drill bit, and it can effectively solve above-mentioned shortcoming.

For achieving the above object, the technological means that the utility model adopts, for a kind of superminiature drill bit of design, wherein comprises a head, a neck, a shank, cutting edge and chip removal flute, wherein:

Head, neck and shank are sequentially connected, and the diameter of head is between between 0.024mm to 0.026mm;

Cutting edge forms in head ora terminalis;

Chip removal flute forms in head side and extends to neck, and the ditch length of chip removal flute is between between 0.44mm to 0.46mm.

Preferably, the ditch of chip removal flute is long is 0.45mm.

The utility model has the advantage of, head diameter and both sizes of chip removal flute ditch length are all the special size calculating, and this two size cooperatively interacts, when therefore the utility model is made, can improve production qualification rate and be difficult for broken needle, and high rotating speed ground is when used, can promote access times and service life, and once boring can reach maximum number of wafers to increase production efficiency.

Accompanying drawing explanation

Fig. 1 is schematic side view of the present utility model.

Fig. 2 is the schematic diagram of looking closely of the present utility model.

Fig. 3 is the schematic side view of thick embryo of the present utility model.

Drawing reference numeral explanation

The specific embodiment

Below coordinate accompanying drawing and preferred embodiment of the present utility model, further set forth the technological means that the utility model is taked for reaching predetermined utility model object.

Refer to shown in Fig. 1 and Fig. 2, superminiature drill bit of the present utility model includes a head 10, a neck 20, a shank 30, cutting edge 40 and chip removal flute 50.

Aforesaid head 10, neck 20 and shank 30 are sequentially connected, and the diameter L1 of head 10 is between between 0.024mm to 0.026mm.

Aforesaid cutting edge 40 forms in head 10 ora terminalis.

Aforesaid chip removal flute 50 forms in head 10 sides and extends to neck 20, and the long L2 of ditch of chip removal flute 50 is between between 0.44mm to 0.46mm, and in preferred embodiment, the long L2 of the ditch of chip removal flute 50 is 0.45mm.

Refer to shown in Fig. 3, when the utility model is made, first prepare a thick embryo 60, one end of this thick embryo 60 goes out a brill figure 61 with computer numerical control (Computer Numerical Control, CNC) lathe car; Then use width to be less than the diamond wheel of 0.5mm, with the speed of 0.2m/min, grind and bore figure 61; Use afterwards cutting tool, with the speed between 0.6mm/s to 0.8mm/s, on brill figure 61, cut respectively chip removal flute 50 and cutting edge 40.

Refer to shown in Fig. 1 and Fig. 2, after completing, head 10 diameter L1 of the present utility model are between between 0.024mm to 0.026mm, and the long L2 of chip removal flute 50 ditch is between between 0.44mm to 0.46mm.

The special size of the utility model by head 10 diameter L1 and the long L2 of chip removal flute 50 ditch and cooperatively interacting, so that the utility model is difficult for producing broken needle while making, and can reduce disqualification rate; And while using, in the time of between rotating speed is up to 200,000 rpm to 35 ten thousand rpm, its access times can reach 30,000 times, and frangibility and there is longer service life not; Finally, the utility model can run through multiple stacked wafers, therefore can once to the wafer of maximum quantity, carry out Drilling operation.

The above is only preferred embodiment of the present utility model, not the utility model is done to any pro forma restriction, although the utility model discloses as above with preferred embodiment, but not in order to limit the utility model, any those skilled in the art, not departing from the scope of technical solutions of the utility model, should utilize the technology contents of above-mentioned announcement to make a little change or be modified to the equivalent embodiment of equivalent variations, in every case be the content that does not depart from technical solutions of the utility model, any simple modification of above embodiment being done according to technical spirit of the present utility model, equivalent variations and modification, all still belong in the scope of technical solutions of the utility model.

Claims (2)

1. a superminiature drill bit, is characterized in that, comprises a head, a neck, a shank, cutting edge and chip removal flute, wherein:

Head, neck and shank are sequentially connected, and the diameter of head is between between 0.024mm to 0.026mm;

Cutting edge forms in head ora terminalis;

Chip removal flute forms in head side and extends to neck, and the ditch length of chip removal flute is between between 0.44mm to 0.46mm.

2. superminiature drill bit as claimed in claim 1, is characterized in that, wherein the ditch of chip removal flute is long is 0.45mm.

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